Eight-inch annealing furnace quartz boat transfer rack

By designing a quartz boat transfer frame for an 8-inch annealing furnace, a cross-plate and gripping ring structure is used to stably clamp large-size silicon wafers, solving the problem of slippage and falling of the quartz boat fork during the transfer process, and improving the integrity of the silicon wafers and operational safety.

CN224538698UActive Publication Date: 2026-07-21MCL ELECTRONICS MATERIALS
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Utility models(China)
Current Assignee / Owner
MCL ELECTRONICS MATERIALS
Filing Date
2025-08-20
Publication Date
2026-07-21

AI Technical Summary

Technical Problem

Existing quartz boat forks have insufficient clamping force and uneven force distribution when transporting large-size silicon wafers, which makes the quartz boat easy to slip or fall, causing damage to the silicon wafers and safety hazards.

Method used

A quartz boat transfer frame for an 8-inch annealing furnace is designed, which adopts a structure of cross plate, gripping ring and boat fork column. The distance between the boat fork columns is adjusted by the control component to enhance the clamping stability, and an anti-slip layer is set on the gripping ring to improve the operation safety.

Benefits of technology

This effectively prevents the quartz boat from slipping during transport, improving the integrity of the silicon wafers and operational safety, while reducing production costs and safety risks.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a kind of quartz boat transfer frames for eight-inch annealing furnace, it has the horizontal load plate of corresponding quartz boat plug-in interface and the holding ring being held connected with horizontal load plate, horizontal load plate both ends are slidably equipped with boat fork column, two boat fork columns can be controlled by control member arranged on holding ring, to synchronously mutually away or close;The control member includes the pulling column that can be vertically displaced in holding ring, the end of pulling column towards horizontal load plate is equipped with two linkage plates, linkage plate other end is hinged with boat fork column. To solve the problem that quartz boat boat fork in the prior art cannot stably transport quartz boat and silicon wafer arranged in quartz boat.
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