An in-situ atomic force microscope detection system

An in-situ atomic force microscope inspection system combining a honeycomb sandwich structure and a piezoelectric ceramic damper has solved the problems of vibration coupling and spatial constraints in ultra-precision machining, achieving high-precision, real-time surface inspection.

CN224553302UActive Publication Date: 2026-07-24TIANJIN UNIV OF TECH & EDUCATION (TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE)
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
TIANJIN UNIV OF TECH & EDUCATION (TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE)
Filing Date
2025-08-19
Publication Date
2026-07-24

AI Technical Summary

Technical Problem

Existing technologies for ultra-precision machining tools suffer from problems such as machine tool vibration coupling, spatial constraints, and insufficient real-time performance, making it difficult to meet the requirements of ultra-precision machining in terms of detection accuracy and stability.

Method used

An in-situ atomic force microscope (AFM) system combining a honeycomb sandwich structure horizontal plate and a shear-type piezoelectric ceramic damper suppresses low-frequency vibrations through the honeycomb sandwich structure and blocks high-frequency vibrations through the damper. Combined with an elastic pad and a high-damping silicon carbide composite probe holder, it achieves all-round vibration attenuation.

Benefits of technology

It enables high-precision, real-time surface morphology inspection of machined parts during ultra-precision machining, ensuring inspection accuracy and stability while meeting the internal space constraints of the machine tool.

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Abstract

The utility model discloses a kind of in-situ atomic force microscope detection systems, specifically related to ultra-precision machining online detection technical field, including fixed bracket, damper and atomic force microscope, fixed bracket includes honeycomb sandwich structure horizontal plate and vertical backplate, workpiece is used to place on honeycomb sandwich structure horizontal plate and process, honeycomb sandwich structure horizontal plate is connected with processing machine tool base by damper, the top surface of honeycomb sandwich structure horizontal plate is fixedly connected with vertical backplate, atomic force microscope is installed on vertical backplate, for measuring the surface of workpiece. The utility model can inhibit mechanical vibration interference in real time during machine tool processing process, ensure detection accuracy and stability, while meeting the space constraint requirement inside ultra-precision machining machine tool.
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