A device platform placement apparatus
By designing the limiting guide rail components and sealing door assembly for the placement box and limiting guide rail components, the problem of particle contamination caused by the stacking of probe station platforms was solved, realizing the independent sealed placement of probe station platforms and improving dustproof performance and detection accuracy.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANGHAI V-TEST SEMICON TECH CO LTD
- Filing Date
- 2025-06-11
- Publication Date
- 2026-07-28
AI Technical Summary
In the fields of semiconductor manufacturing and precision testing, idle probe platforms are prone to dust accumulation and particulate contamination due to stacking, resulting in incomplete cleaning and affecting testing accuracy and equipment reliability.
A device for placing a probe platform is designed, comprising a placement box, a sealing door assembly, a limiting guide rail, and an intercepting limiting component. By limiting the probe platform with the limiting guide rail and sealing it with the sealing door assembly, the probe platform can be placed independently and in a sealed manner, preventing particles from adhering.
It effectively prevents particles from adhering to the probe platform surface, improves dustproof performance, and ensures the accuracy of subsequent testing and the reliability of the equipment.
Smart Images
Figure CN224563105U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the semiconductor field, and in particular to a device for placing an equipment platform. Background Technology
[0002] In semiconductor manufacturing, precision testing, and other fields, probe stations serve as the core carriers for wafers and precision components such as pin cards. They are frequently replaced due to equipment maintenance, process adjustments, or troubleshooting. The replaced, unused probe stations are often stacked in open areas such as corners or around equipment due to space constraints or management habits. However, this storage method has the following drawbacks:
[0003] First, when stacked, the probe platform surface is directly exposed to the environment, easily attracting fine particles such as dust, metal shavings, and fibers from the air. Second, friction or collision at the stacked contact points can generate new particulate contaminants. Finally, corners and other areas are often blind spots for cleaning and maintenance, making it difficult to effectively remove long-term accumulated particulate contaminants.
[0004] Therefore, when the probe station platform is placed in the above-mentioned scenario and needs to be removed for installation and use, particles that are adhered to or hidden on its surface may be missed during the cleaning process, which may cause them to fall off during equipment operation, resulting in contamination of the wafer and particles entering the probe card, leading to poor probe contact and seriously affecting the detection accuracy of the probe and the reliability of the equipment.
[0005] Therefore, a device platform placement mechanism is needed to solve the above problems. Utility Model Content
[0006] The purpose of this invention is to provide a device for placing a probe platform, thereby enabling independent and sealed placement and wrapping of the probe platform, improving dustproof performance, and preventing the adhesion of particles or impurities due to the exposed surface of the probe platform, thus providing assurance for subsequent probe testing.
[0007] To solve the above-mentioned technical problems, this utility model provides an equipment platform placement device, including a placement box with an opening on one side, a sealing door assembly, multiple sets of limiting guide rails, and intercepting limiting components;
[0008] The sealing door assembly is slidably installed at the opening of the placement box, and is used to partially open or close the opening of the placement box;
[0009] Multiple sets of the aforementioned limiting guide rails are arranged in rows at equal intervals inside the placement box to limit the position of the probe platform;
[0010] The limiting guide rail component includes an upper guide rail body and a lower guide rail body;
[0011] The upper guide rail body and the lower guide rail body are located in the same vertical plane and are respectively disposed on the top wall and bottom wall of the inner cavity of the placement box.
[0012] The intercepting and limiting component is disposed on the lower guide rail body, so that the probe platform can remain relatively fixed inside the placement box.
[0013] Furthermore, both the upper guide rail body and the lower guide rail body include two parallel guide rail plates and multiple rollers for reducing frictional resistance.
[0014] The plurality of rollers are rotatably mounted between the two guide rail plates.
[0015] Furthermore, the intercepting and limiting component includes a deflection plate and a notch;
[0016] The deflection plate is rotatably mounted on one of the guide rail plates of the lower guide rail body;
[0017] The notch is provided on another guide rail plate of the lower guide rail body and is used to engage or disengage with the deflection plate.
[0018] When the deflection plate engages with the notch, a U-shaped limiting structure is formed between the two guide rail plates of the lower guide rail body and the deflection plate.
[0019] Furthermore, the intercepting and limiting component includes a limiting plate and a notch;
[0020] The notch is provided on the two guide rail plates of the lower guide rail body;
[0021] The limiting plate is detachably connected to the two notches.
[0022] Furthermore, an elastic rubber gasket is provided on the side of the placement box that contacts the probe platform.
[0023] Furthermore, the sealing door assembly includes two sliding doors;
[0024] The two sliding doors are staggered and both are slidably installed at the opening of the placement box;
[0025] When the two sliding doors fully or partially overlap, the opening of the placement box is opened.
[0026] When the two sliding doors are completely misaligned, close the opening of the placement box.
[0027] Furthermore, the sliding door is made of transparent acrylic sheet material.
[0028] Furthermore, the bottom of the placement box is equipped with casters.
[0029] Compared with the prior art, the present invention has at least the following beneficial effects:
[0030] By incorporating a placement box with an opening on one side, multiple sets of limiting guide rails including an upper guide rail body and a lower guide rail body, and intercepting limiting components, the probe platform can be inserted into the placement box along the limiting gap formed between the upper and lower guide rail bodies when placement is required. The intercepting limiting components then stabilize the probe platform within the placement box. Furthermore, a sealing door assembly at the opening of the placement box allows for partial or complete opening and closing of the opening. This enables operators to insert the probe platform through the partially open opening and completely close the opening after insertion, achieving independent and sealed placement and packaging of the probe platform. This enhances dustproof performance and effectively prevents particles or impurities from adhering to the exposed surface of the probe platform, ensuring safe probe testing. Attached Figure Description
[0031] Figure 1 This is a schematic diagram of the equipment platform placement device in Embodiment 1 of this utility model;
[0032] Figure 2 This utility model Figure 1 Enlarged view of point A in the middle;
[0033] Figure 3 This is a front view of the equipment platform placement device in Embodiment 1 of this utility model;
[0034] Figure 4 This is a schematic diagram of the equipment platform placement device in Embodiment 2 of this utility model;
[0035] Figure 5 This utility model Figure 4 Enlarged view of section B in the middle.
[0036] Reference numerals: 1. Placement box; 11. Elastic rubber gasket; 12. Caster wheel; 2. Sealing door assembly; 3. Limiting guide rail; 31. Upper guide rail body; 32. Lower guide rail body; 4. Interception limiting component; 41. Deflection plate; 42. Notch; 43. Limiting plate. Detailed Implementation
[0037] The device platform placement apparatus of this utility model will now be described in more detail with reference to the schematic diagrams, which illustrate preferred embodiments of this utility model. It should be understood that those skilled in the art can modify the utility model described herein while still achieving its advantageous effects. Therefore, the following description should be understood as being of general knowledge to those skilled in the art and is not intended to limit the utility model.
[0038] Furthermore, based on the teachings of this specification, those skilled in the art can form new technical solutions through cross-combination of different implementation methods without creating technical contradictions. Such variations should all be considered to fall within the protection scope of this patent.
[0039] The present invention will be described in more detail below by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.
[0040] Example 1
[0041] like Figures 1 to 3 As shown in the figure, this utility model embodiment proposes an equipment platform placement device, including a placement box 1 with an opening on one side, a sealing door assembly 2, multiple sets of limiting guide rails 3, and intercepting limiting components 4.
[0042] The sealing door assembly 2 is slidably installed at the opening of the placement box 1 to partially open or close the opening of the placement box 1, so that the probe platform installed in the placement box 1 can be isolated from the external environment, thereby playing a role in dust protection and effectively preventing the adhesion of particles or impurities due to the exposed surface of the probe platform, thus providing a guarantee for subsequent probe testing.
[0043] In this embodiment, multiple sets of limiting guide rails 3 are arranged in a row at equal intervals inside the placement box 1 to limit the position of the probe platform. That is, by setting multiple sets of limiting guide rails 3, each probe platform can be placed independently, effectively avoiding particulate contaminants formed due to contact friction between two probe platforms.
[0044] The limiting guide rail 3 includes an upper guide rail body 31 and a lower guide rail body 32.
[0045] Specifically, the upper guide rail body 31 and the lower guide rail body 32 are located in the same vertical plane and are correspondingly disposed on the top and bottom walls of the inner cavity of the placement box 1. That is, by providing a limiting guide rail 3 including the upper guide rail body 31 and the lower guide rail body 32, a limiting channel is formed for vertically inserting the probe platform into the limiting gap formed between the upper guide rail body 31 and the lower guide rail body 32, thereby completing the function of placing the probe platform.
[0046] Furthermore, the intercepting and limiting member 4 is disposed on the lower guide rail body 32, so that the probe platform can be kept relatively fixed in the placement box 1. That is, by setting the intercepting and limiting member 4, when the probe platform is inserted into the limiting gap formed between the upper guide rail body 31 and the lower guide rail body 32, the intercepting and limiting member 4 can prevent the probe platform from sliding out along the limiting gap, thus completing the function of limiting and fixing the probe platform.
[0047] This device, by setting up a placement box 1 with an opening on one side, multiple sets of limiting guide rails 3 including an upper guide rail body 31 and a lower guide rail body 32, and intercepting limiting members 4, allows the probe platform to be input into the placement box 1 along the limiting gap formed between the upper guide rail body 31 and the lower guide rail body 32 when it needs to be placed. Then, with the limiting of the intercepting limiting members 4, the probe platform can be stably placed in the placement box 1. Furthermore, by setting a sealing door assembly 2 at the opening of the placement box 1, it is used to partially open or completely close the opening of the placement box 1. This allows the operator to input the probe platform through the partially open opening, and after inputting the probe platform, the sealing door assembly 2 can completely close the opening of the placement box 1, achieving independent and sealed placement and packaging of the probe platform, improving dustproof performance. This effectively prevents the adhesion of particles or impurities due to the exposed surface of the probe platform, providing a guarantee for subsequent probe testing.
[0048] In this embodiment, the structure of the upper guide rail body 31 and the lower guide rail body 32 is further defined to better limit and constrain the probe platform, making it easier for the operator to push and install the probe platform into the limiting gap formed by the two.
[0049] Specifically, both the upper guide rail body 31 and the lower guide rail body 32 include two parallel guide rail plates.
[0050] It should be noted that the spacing between the two guide rails is matched with the probe platform to ensure that the probe platform does not wobble when inserted and moved.
[0051] In addition, the upper guide rail body 31 and the lower guide rail body 32 also include a plurality of rollers for reducing frictional resistance. The plurality of rollers are rotatably mounted between the two guide rail plates to reduce the frictional resistance of the probe platform when picking up and placing it, thereby improving the convenience of picking up and placing it.
[0052] In this embodiment, a specific intercepting and limiting component 4 is also proposed to better cooperate with the two guide rail plates on the lower guide rail body 32 to complete the fixed limiting of the probe platform.
[0053] Specifically, the intercepting and limiting component 4 includes a deflection plate 41 and a notch 42.
[0054] The deflection plate 41 is rotatably mounted on one of the guide rail plates of the lower guide rail body 32.
[0055] The notch 42 is provided on another guide rail plate of the lower guide rail body 32 for engaging or disengaging with the deflection plate 41.
[0056] like Figure 1 As shown, when the deflection plate 41 engages with the notch 42, a U-shaped limiting structure is formed between the two guide rail plates of the lower guide rail body 32 and the deflection plate 41 to constrain and limit the probe platform, so that the probe platform cannot be pulled out from the limiting gap, thus ensuring the stability of the placement.
[0057] like Figure 2 As shown, when the deflection plate 41 separates from the notch 42, the movable end of the deflection plate 41 separates from the space formed between the two guide rails. That is, the setting of the deflection plate 41 will not interfere with the installation and removal of the probe platform, so that the operator can normally place and remove the probe platform.
[0058] To prevent the probe platform from contacting and rubbing against the inner wall of the placement box 1 during movement, thus forming impurity particles, an elastic rubber gasket 11 is added to improve the cushioning performance.
[0059] Specifically, an elastic rubber gasket 11 is provided on the side of the placement box 1 that contacts the probe platform, so as to buffer and protect the probe platform and improve the limiting effect of the intercepting limiting member 4 on the probe platform.
[0060] In a specific example, when the probe platform is pressed and adhered to the elastic rubber gasket 11, and the elastic rubber gasket 11 is deformed, the deflection plate 41 in the intercepting and limiting member 4 can just deflect into the notch 42. At this time, the elastic rubber gasket 11 will apply a restoring elastic force to the probe platform that is in close contact with the deflection plate 41, so that the probe platform and the side wall of the deflection plate 41 are more tightly attached, thereby preventing the probe platform from shaking due to the loose contact between the deflection plate 41 and the probe platform.
[0061] It should be noted that the number of elastic rubber gaskets 11 matches the number of limiting guide rail parts 3, and they are set one-to-one.
[0062] In this embodiment, the sealing door assembly 2 includes two sliding doors, which are staggered and slidably installed at the opening of the placement box 1.
[0063] When the two sliding doors completely or partially overlap, the opening of the placement box 1 is opened to allow for the placement of the probe platform.
[0064] When the two sliding doors are completely misaligned, the opening of the placement box 1 is closed to achieve a sealed protection for the probe platform.
[0065] The sliding door is made of transparent acrylic sheet.
[0066] To facilitate the movement of the probe platform to the required location for replacement, casters 12 are provided at the bottom of the placement box 1.
[0067] Example 2
[0068] like Figure 4 and Figure 5 As shown, the difference between this embodiment and Embodiment 1 is that another type of intercepting limiter 4 is proposed to further facilitate the operator in controlling the limit of the probe platform.
[0069] Specifically, the intercepting and limiting component 4 includes a limiting plate 43 and a notch 42.
[0070] The notches 42 are provided on the two guide rail plates of the lower guide rail body 32, and the limiting plate 43 is detachably connected to the two notches 42. That is, the limiting plate 43 is inserted vertically into the two notches 42 to limit the probe platform. When the probe platform needs to be placed or removed, the limiting plate 43 can simply be pulled out from between the two notches 42 to further improve the convenience of operation.
[0071] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.
Claims
1. A device for placing an equipment platform, characterized in that, It includes a placement box with an opening on one side, a sealed door assembly, multiple sets of limit guide rails, and interception limit components; The sealing door assembly is slidably installed at the opening of the placement box, and is used to partially open or close the opening of the placement box; Multiple sets of the aforementioned limiting guide rails are arranged in rows at equal intervals inside the placement box to limit the position of the probe platform; The limiting guide rail component includes an upper guide rail body and a lower guide rail body; The upper guide rail body and the lower guide rail body are located in the same vertical plane and are respectively disposed on the top wall and bottom wall of the inner cavity of the placement box. The intercepting and limiting component is disposed on the lower guide rail body, so that the probe platform can remain relatively fixed inside the placement box.
2. The equipment platform placement device as described in claim 1, characterized in that, Both the upper guide rail body and the lower guide rail body include two parallel guide rail plates and multiple rollers for reducing frictional resistance. The plurality of rollers are rotatably mounted between the two guide rail plates.
3. The equipment platform placement device as described in claim 2, characterized in that, The intercepting and limiting component includes a deflection plate and a notch; The deflection plate is rotatably mounted on one of the guide rail plates of the lower guide rail body; The notch is provided on another guide rail plate of the lower guide rail body and is used to engage or disengage with the deflection plate. When the deflection plate engages with the notch, a U-shaped limiting structure is formed between the two guide rail plates of the lower guide rail body and the deflection plate.
4. The equipment platform placement device as described in claim 2, characterized in that, The intercepting and limiting component includes a limiting plate and a notch; The notch is provided on the two guide rail plates of the lower guide rail body; The limiting plate is detachably connected to the two notches.
5. The equipment platform placement device as described in claim 1, characterized in that, An elastic rubber gasket is provided on the side of the placement box that contacts the probe platform.
6. The equipment platform placement device as described in claim 1, characterized in that, The sealing door assembly includes two sliding doors; The two sliding doors are staggered and both are slidably installed at the opening of the placement box; When the two sliding doors fully or partially overlap, the opening of the placement box is opened. When the two sliding doors are completely misaligned, close the opening of the placement box.
7. The equipment platform placement device as described in claim 6, characterized in that, The sliding door is made of transparent acrylic sheet.
8. The equipment platform placement device as described in claim 1, characterized in that, The bottom of the placement box is equipped with casters.