A bellows pump with reduced aging
By setting a telescopic limit rod and support structure in the airbag pump, the telescopic movement of the bellows is controlled, which solves the aging problem of the bellows caused by excessive movement and particulate impact, extends its service life and improves safety.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- QINGDAO BESLAN SEMICONDUCTOR TECHNOLOGY CO LTD
- Filing Date
- 2025-08-08
- Publication Date
- 2026-07-28
AI Technical Summary
The bellows of existing airbag pumps are prone to fatigue damage and aging due to continuous reciprocating motion and particulate fluid transport, resulting in a shortened service life and potentially causing safety accidents and economic losses.
A telescopic limit rod is installed in the airbag pump and fixedly connected to the bellows to limit its telescopic length. The bellows is supported by a support structure to avoid excessive telescopic movement and particle agglomeration. The bellows is driven to move in different directions by a hinged connection. Fluid transportation is achieved by combining PLC system control and L-type three-way ball valve.
It extends the service life of the bellows, avoids damage caused by excessive expansion and contraction and particle agglomeration, reduces the risk of bellows aging, and improves the safety and reliability of the airbag pump.
Smart Images
Figure CN224566275U_ABST
Abstract
Description
Technical Field
[0001] This application relates to a wind-bag pump that reduces the aging of bellows, belonging to the field of pump body equipment technology. Background Technology
[0002] As a key component in semiconductor wet processing for conveying process media, the airbag pump is widely used in semiconductor wafer cleaning, pharmaceutical liquid conveying and stirring, and chemical liquid conveying. Due to its structural characteristics, it ensures that the medium inside the valve body is not contaminated, meeting the ultra-cleanliness requirements of the semiconductor industry. An airbag pump typically consists of two fluid chambers, each containing an expandable or contractible airbag; the reciprocating motion of the airbag allows the target fluid to be drawn in or expelled from the target fluid chamber.
[0003] The reciprocating components of existing airbag pumps are typically made of bellows. Because the bellows are in constant reciprocating motion, stress concentration occurs during their elongation and shortening, leading to localized fatigue damage over time. Furthermore, the transport of fluids containing particles, which may be involved in semiconductor manufacturing processes, constantly impacts the bellows, causing its lifespan to fall short of its design life, resulting in breakage and aging. A ruptured bellows can lead to chemical leaks, causing safety accidents and halting semiconductor equipment operation, resulting in substantial economic losses. Utility Model Content
[0004] According to one aspect of this application, a windshield pump for mitigating bellows aging is provided, comprising:
[0005] The pump body includes two liquid phase working chambers;
[0006] A bellows is disposed in a liquid phase working chamber. The first end of the bellows is connected to the inner wall of the liquid phase working chamber, and the second end of the bellows is closed and hollow inside to form a gas phase working chamber.
[0007] An air inlet and an air outlet are provided at the first end of the bellows; a liquid outlet is provided above the liquid phase working chamber, and a liquid inlet is provided below the liquid phase working chamber.
[0008] The air valve is located on the outside of the pump body and is connected to the air inlet through the air inlet pipe and to the air outlet through the air outlet pipe.
[0009] A telescopic limiting rod is provided in the gas phase working chamber, and one end of the telescopic limiting rod is fixedly connected to the second end of the bellows.
[0010] Optionally, the relationship between the maximum length L of the telescopic limiting rod and the minimum length l1 of the bellows in the contracted state and the maximum length l2 in the extended state is 1.2*l1≦L≦0.8*l2.
[0011] Specifically, the connection between the other end of the telescopic limiting rod and the first end of the bellows can be a fixed connection, which can be a conventional method in the prior art or a hinged connection.
[0012] Optionally, the other end of the telescopic limiting rod is hinged to the first end of the bellows.
[0013] Specifically, the hinge can be a hinge joint or a ball joint, preferably a ball joint.
[0014] When hinged, the movable connection method allows the bellows to move vertically or horizontally by controlling the telescopic limit rod, reducing shear cavitation formed in the bellows in the pump and preventing the agglomeration of liquid containing particles during the transportation process, which would cause collision and wear to the bellows.
[0015] Optionally, it also includes a support structure disposed between the bellows and the telescopic limiting rod.
[0016] Optionally, the support structure can be a multi-legged support frame or a hat-shaped support surface.
[0017] Optionally, the telescopic limiting rod includes a first sleeve, a second sleeve, and a third sleeve that are sequentially sleeved from the outside to the inside. A locking structure is provided between the first sleeve and the second sleeve, and a locking structure is also provided between the second sleeve and the third sleeve.
[0018] Optionally, the locking structure is a friction locking structure.
[0019] Optionally, the friction locking structure is a friction strip, which is disposed at the connection end between the second sleeve and the first sleeve, and between the third sleeve and the second sleeve; there are at least two friction strips, which are symmetrically distributed on the outer surface of the sleeve.
[0020] Optionally, the inclination angle of the bellows includes at least two inclination angles, and the inclination angle α2 at the second end of the bellows is greater than the inclination angle α1 at the first end.
[0021] Optionally, the outlets and inlets of the two liquid phase working chambers are respectively located on the same side, the outlets of the two liquid phase working chambers are connected by an outlet liquid flow pipe, and the inlets of the two liquid phase working chambers are connected by an inlet liquid flow pipe.
[0022] The liquid flow pipe is connected to the liquid outlet pipe and the liquid inlet pipe respectively, forming a T-shaped passage on both sides. The T-shaped passage controls the liquid inflow and outflow of the two liquid phase working chambers through an L-shaped three-way ball valve.
[0023] The beneficial effects that this application may produce include, but are not limited to:
[0024] 1. The wind pump for reducing the aging of bellows in this application is provided by setting one end of the telescopic limit rod to be fixedly connected to the second section of the bellows and limiting the relationship between the telescopic limit rod and the telescopic length of the bellows. This allows the telescopic limit rod to limit the stretching and compression of the bellows, thus preventing the bellows from being overstretched or overcompressed and thus damaging its service life.
[0025] 2. The wind pump for reducing bellows aging in this application, by setting a telescopic limit rod that is movably connected to the first end of the bellows, can enable the telescopic limit rod to drive the bellows to move in a direction different from the conventional telescopic direction, thereby avoiding damage to the bellows caused by the agglomeration of particulate matter due to shear cavitation and reducing its service life.
[0026] 3. The wind pump for mitigating bellows aging in this application provides a support frame to support the second end of the bellows, which is most susceptible to deformation due to liquid flow impact, thereby preventing further impact aging caused by the bellows' impact deformation. Attached Figure Description
[0027] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:
[0028] Figure 1 This is a schematic diagram of the overall structure of the airbag pump for mitigating bellows aging, as described in an embodiment of this application.
[0029] Figure 2 This is a schematic cross-sectional view of a wind pump for mitigating bellows aging, as described in an embodiment of this application.
[0030] Figure 3 This is a magnified view of point A in the cross-section of the airbag pump;
[0031] Figure 4 This is a schematic diagram of the locking structure between adjacent sleeves of the telescopic limit rod of the wind pump.
[0032] List of components and reference numerals:
[0033] 1. Pump body; 2. Liquid phase working chamber; 3. Bellows; 4. Gas phase working chamber; 5. Liquid outlet; 6. Liquid inlet; 7. Gas valve; 8. Air inlet; 9. Air outlet; 10. Telescopic limit rod; 11. Support structure; 12. Sleeve; 13. Friction strip. Detailed Implementation
[0034] To better understand the above-mentioned objectives, features, and advantages of this application, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.
[0035] Many specific details are set forth in the following description in order to provide a full understanding of this application. However, this application may also be implemented in other ways different from those described herein. Therefore, the scope of protection of this application is not limited to the specific embodiments disclosed below.
[0036] Furthermore, it should be understood in the description of this application that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.
[0037] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "a plurality of" means two or more, unless otherwise explicitly specified.
[0038] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0039] In this application, unless otherwise expressly specified and limited, the "above" or "below" of the second feature can mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. In the description of this specification, references to terms such as "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described can be combined in any suitable manner in one or more embodiments or examples.
[0040] refer to Figures 1-4This application discloses an embodiment of a windshield pump that reduces bellows aging, comprising:
[0041] The pump body includes two liquid phase working chambers;
[0042] A bellows is installed inside the liquid phase working chamber. The first end of the bellows is connected to the inner wall of the liquid phase working chamber, and the second end of the bellows is closed, with the interior being hollow to form a gas phase working chamber.
[0043] An air inlet and an air outlet are provided at the first end of the bellows. The air inlet and the air outlet are opened and closed alternately to realize the expansion and contraction of the bellows. An outlet is provided above the liquid phase working chamber, and an inlet is provided below the liquid phase working chamber.
[0044] The air valve is located on the outside of the pump body and is connected to the air inlet through the air inlet pipe and to the air outlet through the air outlet pipe.
[0045] A telescopic limiting rod is installed in the gas phase working chamber, with one end of the telescopic limiting rod fixedly connected to the second end of the bellows.
[0046] The telescopic limit rod can limit the length of the bellows when it expands or contracts in the horizontal direction, so as to avoid the bellows from overstretching due to unstable air pressure or liquid flow, which would aggravate the fatigue of the bellows.
[0047] In one implementation, the relationship between the maximum length L of the telescopic limit rod and the minimum length l1 of the bellows in the contracted state and the maximum length l2 in the extended state is 1.2*l1≦L≦0.8*l2.
[0048] This setting can prevent the bellows from being over-compressed or over-stretched by the telescopic limit rod itself, which could cause bellows fatigue.
[0049] In one implementation, the other end of the telescopic limiting rod is hinged to the first end of the bellows.
[0050] Specifically, the hinge can be a hinge joint or a ball joint, preferably a ball joint.
[0051] The movable connection method can control the telescopic limit rod to drive the bellows to move in the up-down or back-and-forth direction, reducing the shear cavitation formed in the bellows in the pump, and avoiding the agglomeration of liquid containing particles during the transportation process, which would cause collision and wear to the bellows.
[0052] The telescopic limit rod in this solution is driven by electricity and can be started at a time or remotely in real time by a PLC control system according to the fluid delivery status.
[0053] As one implementation method, a support structure is also included, which is disposed between the bellows and the telescopic limiting rod.
[0054] Under normal operating conditions, when liquid flows into or out of the liquid phase working chamber, it exerts an impact force on the bellows, causing impact deformation at the second end of the bellows. This affects the bellows' ability to propel the liquid flow and accelerates the aging rate of the irregular bellows ends. The support structure is used to support the second end of the bellows, thereby reducing or even preventing the above-mentioned situations from occurring.
[0055] As one implementation method, the support structure can be a multi-legged support frame or a hat-shaped support surface, so that the support force of the support structure on the second end of the bellows is more balanced, and the bellows is less prone to deformation.
[0056] As one implementation method, the telescopic limit rod has at least three sleeves. More sleeves make it easier to adjust the telescopic length of the telescopic limit rod. At the same time, driven by the corrugated pipe, the telescopic limit rod is more sensitive to changes in the length of the corrugated pipe.
[0057] A locking structure is provided between the bushings to limit the maximum length of the bushing.
[0058] The sleeves are made of low-friction coefficient materials, such as polytetrafluoroethylene, stainless steel or alloys with smooth surfaces, to reduce friction between the sleeves and thus reduce the power loss to the bellows caused by the telescopic limit rod.
[0059] As one implementation method, the locking structure is a friction locking structure, including friction strip locking, ball locking, or friction ring locking, etc. The friction limiting structure is a one-way locking structure, which can achieve automatic locking and unlocking when the bellows is compressed.
[0060] In one embodiment, the friction locking structure is a friction strip, which is disposed at the connection end between the second sleeve and the first sleeve, and between the third sleeve and the second sleeve; there are at least two friction strips, which are symmetrically distributed on the outer surface of the sleeve.
[0061] This design makes the friction distribution of the locking structure more uniform, avoiding jamming of the locking structure and reducing unnecessary maintenance.
[0062] In one implementation, the bellows has at least two tilt angles, and the tilt angle α2 at the second end of the bellows is greater than the tilt angle α1 at the first end.
[0063] A smaller bellows inclination angle provides higher rigidity, mitigating fatigue caused by impacting water flow; a larger inclination angle offers higher sensitivity, facilitating better control of the pumped liquid volume. By arranging the bellows with two or more of these inclination angles, with a smaller angle at the first end and a larger angle at the second end, the bellows achieves both high impact resistance, extending its service life, and precise flow control.
[0064] In one implementation, the outlets and inlets of the two liquid phase working chambers are located on the same side, the outlets of the two liquid phase working chambers are connected by an outlet liquid flow pipe, and the inlets of the two liquid phase working chambers are connected by an inlet liquid flow pipe.
[0065] The liquid flow pipe is connected to the liquid outlet pipe and the liquid inlet pipe respectively, forming a T-shaped passage on both sides. The T-shaped passage controls the liquid inflow and outflow of the two liquid phase working chambers through an L-type three-way ball valve. The L-type three-way ball valve can provide higher sealing performance and avoid pressure loss of the bellows pump. The L-type three-way ball valve can be automatically controlled by a PLC system.
[0066] Ball valves have a simple structure, are resistant to erosion, are easy to maintain, and help save on maintenance costs.
[0067] In this design, under pneumatic action, the bellows at one end of the pump expands as air enters, causing the gas phase working chamber to expand while the liquid phase working chamber contracts, increasing the chamber pressure. The system controls the rotation of the ball valve at the inlet pipe to disconnect the inlet pipe from the liquid flow pipe on that side and connect it to the liquid flow pipe on the other side. Simultaneously, the ball valve at the outlet pipe rotates, connecting the outlet pipe on that side to the liquid flow pipe on the other side and disconnecting it from the outlet pipe, allowing fluid to be pumped out. The bellows at the other end contracts, corresponding to the compression of the gas phase working chamber and the expansion of the liquid phase working chamber, decreasing the chamber pressure and allowing fluid to be pumped in. Under dynamic control, the two bellows alternately expand and contract, and the L-shaped ball valve reciprocates, connecting the liquid phase working chambers on both sides with the liquid flow pipe. The pipe can be connected to or disconnected from the outlet and inlet pipes, allowing fluid to flow alternately through the two liquid phase working chambers to achieve fluid transport. During this process, the telescopic limit rod shortens or lengthens with the contraction or expansion of the bellows, preventing excessive expansion or contraction of the bellows. Simultaneously, for transporting fluids containing particles, the telescopic limit rod can be set to periodically drive the bellows to oscillate within the working chamber via electronic control, agitating and dispersing agglomerates formed by shearing and cavitation in the liquid flow, thus preventing further impact on the bellows. The support frame supports the second end of the bellows during expansion and contraction, especially during expansion, preventing impact deformation.
[0068] The various embodiments in this specification are described in a progressive manner. Similar or identical parts between embodiments can be referred to interchangeably. Each embodiment focuses on describing the differences from other embodiments. In particular, the system embodiments are basically similar to the method embodiments, so the description is relatively simple; relevant parts can be referred to the descriptions in the method embodiments.
[0069] The above description is merely an embodiment of this application and is not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of the claims of this application.
Claims
1. A wind-bag pump that reduces bellows aging, characterized in that, include: The pump body includes two liquid phase working chambers; A bellows is disposed within a liquid phase working chamber. The first end of the bellows is connected to the inner wall of the liquid phase working chamber, and the second end of the bellows is closed, with a hollow interior forming a gas phase working chamber. An air inlet and an air outlet are provided at the first end of the bellows; a liquid outlet is provided above the liquid phase working chamber, and a liquid inlet is provided below the liquid phase working chamber. The air valve is located on the outside of the pump body and is connected to the air inlet through the air inlet pipe and to the air outlet through the air outlet pipe. A telescopic limiting rod is provided in the gas phase working chamber, and one end of the telescopic limiting rod is fixedly connected to the second end of the bellows.
2. The airbag pump for reducing bellows aging according to claim 1, characterized in that, The relationship between the maximum length L of the telescopic limiting rod and the minimum length l1 of the bellows in the contracted state and the maximum length l2 in the extended state is 1.2*l1≦L≦0.8*l2.
3. The airbag pump for reducing bellows aging according to claim 1, characterized in that, The other end of the telescopic limiting rod is hinged to the first end of the bellows.
4. The airbag pump for mitigating bellows aging according to claim 1, characterized in that, It also includes a support structure, which is disposed between the bellows and the telescopic limit rod.
5. The airbag pump for mitigating bellows aging according to claim 4, characterized in that, The support structure is a multi-legged support frame or a hat-shaped support surface.
6. The airbag pump for mitigating bellows aging according to claim 1, characterized in that, The telescopic limiting rod includes a first sleeve, a second sleeve, and a third sleeve that are sequentially sleeved from the outside to the inside. A locking structure is provided between the first sleeve and the second sleeve, and a locking structure is also provided between the second sleeve and the third sleeve.
7. The airbag pump for mitigating bellows aging according to claim 6, characterized in that, The locking structure is a friction locking structure.
8. The airbag pump for mitigating bellows aging according to claim 7, characterized in that, The friction locking structure is a friction bar, which is disposed at the connection end between the second sleeve and the first sleeve, and between the third sleeve and the second sleeve; there are at least two friction bars, which are symmetrically distributed on the outer surface of the sleeve.
9. The airbag pump for mitigating bellows aging according to claim 1, characterized in that, The inclination angle of the bellows includes at least two inclination angles, and the inclination angle α2 at the second end of the bellows is greater than the inclination angle α1 at the first end of the bellows.
10. The airbag pump for mitigating bellows aging according to any one of claims 1-9, characterized in that, The outlets of the two liquid phase working chambers are connected by an outlet liquid flow pipe, and the inlets of the two liquid phase working chambers are connected by an inlet liquid flow pipe. The liquid outlet pipe is connected to the liquid outlet pipe, and the liquid inlet pipe is connected to the liquid inlet pipe, forming a T-shaped passage on both sides. The T-shaped passage controls the liquid inlet and outlet of the two liquid phase working chambers through an L-shaped three-way ball valve.