Plasma cleaning machine magazine positioning mechanism

Abstract

The utility model belongs to the technical field of semiconductor equipment relates to a kind of electric plasma cleaning machine material box positioning mechanism, including platform ontology, at least two groups of positioning components are arranged on the platform ontology, to realize the positioning of material box;Each group of positioning components includes a fixedly arranged positioning column and a positioning block capable of position adjustment relative to positioning column;The upper end of the positioning block is configured as outwardly bent shape, to form guide portion;The vertical portion of positioning block is threadedly connected with ball head plunger, and ball head plunger can be rotated relative to positioning block to fix the material box.The material box positioning mechanism can ensure that the operator places material box accurately, reduce the number of maintenance adjustment and time, effectively reduce spare parts maintenance cost.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor equipment technology and relates to a plasma cleaning machine material box positioning mechanism. Background Technology

[0002] The original plasma cleaning machine's material box positioning mechanism was fixed (conical positioning post), which could not adjust the material box positioning gap and tightness. With the passage of time, it was prone to wear, and there was a gap between the material box and the positioning post when it was placed. The material box was not placed in the same center as the track, which could easily cause the lead frame to get stuck when it was in and out.

[0003] The previous system used 4 fixed conical positioning posts to limit the position of the material box, which could not be adjusted and was difficult and time-consuming to adjust during maintenance. The existing positioning posts also suffered from easy wear, leading to frequent replacements, typically every six months, resulting in high spare parts maintenance costs. This typically occurred 7-8 times per day, with a monthly occurrence rate of around 30%. Summary of the Invention

[0004] To address the aforementioned problems, this utility model provides a plasma cleaning machine material box positioning mechanism. This material box positioning mechanism ensures accurate positioning when the operator places the material box, reducing the number of maintenance adjustments and time, and effectively reducing spare parts maintenance costs.

[0005] According to the technical solution of this utility model: a plasma cleaning machine material box positioning mechanism, characterized in that: it includes a platform body, on which at least two sets of positioning components are provided to achieve positioning of the material box; Each of the positioning components includes a fixed positioning post and a positioning block that can be adjusted relative to the positioning post. The upper end of the positioning block is bent outward to form a guide portion; The vertical part of the positioning block is threadedly connected to a ball plunger, which can be rotated and adjusted relative to the positioning block to fix the material box.

[0006] As a further improvement of this utility model, the platform body is provided with a countersunk hole adjustment groove, and the connecting part of the positioning block is fitted into the countersunk hole adjustment groove. The connecting part of the positioning block can be adjusted in position within the countersunk hole adjustment groove and can be locked in the corresponding adjusted position.

[0007] As a further improvement of this utility model, a hexagonal nut is threaded onto the outer plug body of the ball-head plunger to fix the ball-head plunger.

[0008] As a further improvement of this utility model, the upper end of the positioning post is set in a conical shape.

[0009] As a further improvement of this utility model, the connecting part and the vertical part are perpendicular to each other.

[0010] As a further improvement of this utility model, the ball head of the ball plunger is used to press against the surface of the material box.

[0011] As a further improvement of this utility model, the positioning posts and positioning blocks of the same set of positioning components are staggered in the length direction.

[0012] The technical advantages of this invention are as follows: Addressing the problems of existing structures, this invention features an adjustable positioning mechanism. After adopting this invention, the alarm rate for material feeding / discharging is significantly reduced from 30% to 0. It also effectively reduces manual adjustment and maintenance time, specifically from 20 minutes per instance to 3 minutes per instance. This invention has a simple, reasonable, and ingenious structure with low maintenance costs. Furthermore, this invention is applicable to material boxes of different widths. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of this utility model. Detailed Implementation

[0014] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings.

[0015] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. The described embodiments are merely some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0016] Figure 1 The components include the platform body 10, hexagonal nut 11, ball plunger 12, positioning block 13, guide part 13-1, vertical part 13-2, connecting part 13-3, countersunk hole adjustment groove 14, positioning post 15, etc.

[0017] like Figure 1 As shown, this utility model is a plasma cleaning machine material box positioning mechanism that can adapt to material boxes of different sizes and achieve fast, stable and non-destructive clamping. Its structure includes a platform body 10, on which at least two sets of positioning components are provided to achieve stable positioning of the material box.

[0018] Each positioning assembly includes a fixed positioning post 15 and a positioning block 13 that can be adjusted in position relative to the positioning post 15. The upper end of the positioning post 15 is tapered, serving as an initial guide reference to facilitate quick and rough alignment when the material box is placed in.

[0019] The positioning block 13 and the positioning post 15 are used together to clamp the material box. The upper end of the positioning block 13 is bent outward to form a guide part 13-1 to guide the material box to be put in smoothly and prevent it from accidentally coming out in the vertical direction.

[0020] The vertical portion 13-2 of the positioning block 13 is threadedly connected to the ball plunger 12. The ball plunger 12 can be rotated and adjusted relative to the positioning block 13 to fix the material box. The ball head of the ball plunger 12 forms point contact with the surface of the material box. The ball head is used to finally press against the side of the material box, providing a flexible clamping force to avoid scratching the surface of the material box. By rotating the ball plunger 12, the extension of its ball head relative to the material box can be finely adjusted, thereby controlling the clamping force on the material box.

[0021] The platform body 10 is provided with a countersunk hole adjustment groove 14. The connecting part 13-3 of the positioning block 13 is fitted into the countersunk hole adjustment groove 14, and the connecting part of the positioning block 13 can be adjusted in position within the countersunk hole adjustment groove 14 and locked in the corresponding adjusted position. The connecting part 13-3 is provided with a through hole and is locked and fixed to the countersunk hole adjustment groove 14 by a fastener. The countersunk hole adjustment groove 14 is provided with multiple through holes to pass through the fastener or a groove is provided in the countersunk hole adjustment groove 14. The groove can pass through the body of the fastener, and the head of the fastener is supported on the groove.

[0022] A hexagonal nut 11 is threaded onto the outer plug body of the ball plunger 12 to secure it. After the ball plunger 12 is adjusted to the appropriate position, the hexagonal nut 11 is tightened. The friction between the nut and the wall of the vertical part 13-2 of the positioning block 13 is used to firmly lock the ball plunger 12, preventing it from rotating or loosening on its own due to vibration or other reasons.

[0023] The connecting part 13-3 is perpendicular to the vertical part 13-2.

[0024] The positioning pins 15 and positioning blocks 13 of the same group of positioning components are staggered in the length direction to facilitate reliable clamping of the material box.

[0025] like Figure 1As shown, during operation, the approximate positions of each group of positioning blocks 13 in the countersunk adjustment groove 14 are pre-adjusted according to the size of the material box; then, the tapered part of the positioning post 15 is used for rough guidance and alignment, and the material box is placed; the material box continues to be lowered, and its side will contact the guide part 13-1 of the positioning block 13, and be guided to the final correct position; after the material box is placed in place, one side of it is pressed against the positioning post 15, and the other side is in contact with the ball head of the ball plunger 12. The pre-tightening force provided by the ball plunger 12 presses the material box steadily against the positioning post, completing the clamping and fixing; after the operation is completed, the ball plunger 12 is released and the material box is taken out upwards.

[0026] Finally, it should be noted that the above specific embodiments are only used to illustrate the technical solution of this utility model and not to limit it. Although this utility model has been described in detail with reference to examples, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications and substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A plasma cleaner magazine positioning mechanism, characterized by: Includes a platform body (10), on which at least two sets of positioning components are provided to achieve positioning of the material box; Each of the positioning components includes a fixed positioning post (15) and a positioning block (13) that can be adjusted in position relative to the positioning post (15). The upper end of the positioning block (13) is bent outward to form a guide part (13-1). The vertical part (13-2) of the positioning block (13) is threadedly connected to the ball plunger (12), which can rotate relative to the positioning block (13) to fix the material box.

2. The plasma cleaner cartridge positioning mechanism of claim 1, wherein: The platform body (10) is provided with a countersunk hole adjustment groove (14), and the connecting part (13-3) of the positioning block (13) is provided in the countersunk hole adjustment groove (14). The connecting part of the positioning block (13) can be adjusted in position within the countersunk hole adjustment groove (14) and can be locked in the corresponding adjusted position.

3. The plasma cleaner cartridge positioning mechanism of claim 1, wherein: A hexagonal nut (11) is threaded onto the outer plug body of the ball-head plunger (12) to fix the ball-head plunger (12).

4. The plasma cleaner cartridge positioning mechanism of claim 1, wherein: The upper end of the positioning post (15) is set in a cone shape.

5. The plasma cleaner cartridge positioning mechanism of claim 2, wherein: The connecting part (13-3) is perpendicular to the vertical part (13-2).

6. The plasma cleaner cartridge positioning mechanism of claim 1, wherein: The ball head of the ball plunger (12) is used to press against the surface of the material box.

7. The plasma cleaner cartridge positioning mechanism of claim 1, wherein: The positioning pin (15) and positioning block (13) of the same group of positioning components are staggered in the length direction.

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