A semiconductor electronic component inspection system

Abstract

The utility model relates to the technical field of semiconductor preparation, and the technical problem that the utility model solves is high cost. In order to solve the above technical problem, the utility model provides a detection system for semiconductor electronic component. The utility model includes: at least one clamping mechanism. The clamping mechanism includes clamping part, the clamping part can be up and down and in X direction translation, the clamping part includes clamping jaw cylinder, upper clamping jaw and lower clamping jaw, the clamping jaw cylinder is located the outside of conveying track, and the two output shafts of clamping jaw cylinder are located the top of conveying track, and the upper clamping jaw and lower clamping jaw are connected with the two output shafts of clamping jaw cylinder respectively, and the upper clamping jaw and lower clamping jaw are located the inside of conveying track, and the two output shafts of clamping jaw cylinder reverse motion drives the upper clamping jaw and lower clamping jaw to translate and open and close, and the upper clamping jaw and lower clamping jaw of clamping mechanism close and pinch the carrier and drive the carrier to move in the track groove. The utility model reduces the quantity of clamping part, and reduces the cost.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor fabrication technology, and in particular to a detection system for semiconductor electronic components. Background Technology

[0002] Semiconductor electronic components require testing during fabrication. Testing involves placing multiple electronic components on a carrier, which then performs testing on all components simultaneously.

[0003] Existing detection devices require multiple clamping mechanisms because the clamping mechanism cannot avoid the columns at the bottom of the conveyor track. These multiple clamping mechanisms are then used to switch between loading, 2D detection station, 3D detection station, and unloading, resulting in high costs. Utility Model Content

[0004] Therefore, the technical problem to be solved by this utility model is to overcome the above-mentioned problems existing in the prior art.

[0005] To solve the above-mentioned technical problems, this utility model provides a testing system for semiconductor electronic components, comprising:

[0006] The conveying mechanism includes two parallel conveying tracks; the inner sides of the two conveying tracks are respectively provided with track grooves; the two ends of the carrier are respectively located in the track grooves of the two conveying tracks; along the transmission direction of the conveying mechanism, the conveying mechanism is provided with 2D inspection station and 3D inspection station;

[0007] The inspection mechanism includes 2D cameras and 3D cameras; the 2D camera is located above the 2D inspection station; the 3D inspection station is located above the 3D inspection station.

[0008] At least one clamping mechanism, the clamping mechanism including a clamping component; the clamping component is capable of vertical lifting and horizontal translation in the X direction; the clamping component includes a gripper cylinder, an upper gripper, and a lower gripper; the gripper cylinder is located outside the conveying track, and the two output shafts of the gripper cylinder are located above the conveying track; the upper gripper and the lower gripper are respectively connected to the two output shafts of the gripper cylinder, and the upper gripper and the lower gripper are located inside the conveying track; the two output shafts of the gripper cylinder move in opposite directions to drive the upper gripper and the lower gripper to translate and open / close;

[0009] Feeding mechanism and unloading mechanism;

[0010] The feeding mechanism and the unloading mechanism are respectively located at the front and rear ends of the conveying mechanism; the upper and lower jaws of the clamping mechanism close to clamp the carrier and drive the carrier to move in the track groove.

[0011] In one embodiment of this utility model, this application also includes multiple pressing mechanisms; both the 2D detection station and the 3D detection station are provided with pressing mechanisms; the pressing mechanism includes a pressing drive unit connected to the conveying track and a pressure plate provided in the track groove; the output end of the pressing drive unit is connected to the pressure plate to drive the pressure plate to move up and down in the track groove.

[0012] In one embodiment of the present invention, the pressure plate includes a horizontal plate and a vertical plate vertically connected to the bottom of the horizontal plate; the horizontal plate is slidably connected to the top of the conveying track; the vertical plate moves up and down in the track groove; the output end of the pressing drive unit passes through the conveying track and is connected to the horizontal plate.

[0013] In one embodiment of this utility model, there are two clamping mechanisms, which are located at both ends of the conveying track.

[0014] In one embodiment of this utility model, the distance between the two conveying tracks is adjustable.

[0015] In one embodiment of this utility model, one of the two conveying tracks is fixed and the other moves in the Y direction.

[0016] In one embodiment of this utility model, the clamping mechanism is located on one side of the fixed conveying track among the two conveying tracks.

[0017] In one embodiment of the present invention, the clamping mechanism further includes a translation component for driving the clamping component to translate in the Y direction.

[0018] In one embodiment of the present invention, the clamping mechanism further includes a first translation module for driving the clamping component to translate in the X direction, and the clamping component is connected to the movable end of the first translation module.

[0019] In one embodiment of the present invention, the clamping mechanism further includes a clamping lifting cylinder for driving the clamping component to move up and down. The clamping lifting cylinder is connected between the first translation module and the clamping component. The clamping lifting cylinder is connected to the movable end of the first translation module. The clamping component is connected to the output end of the clamping lifting cylinder.

[0020] The above-mentioned technical solution of this utility model has the following advantages compared with the prior art:

[0021] The semiconductor electronic component inspection system of this utility model has a gripper cylinder located on the outside of the conveyor track, while the upper and lower grippers are located on the inside of the conveyor track. The upper and lower grippers can be lifted to avoid obstructing other components. In this way, the upper and lower grippers can move to any position on the conveyor track in the X direction. Therefore, a single gripping component in this application can realize the movement of the carrier on the conveyor track and push the carrier into the material box on the unloading mechanism. Thus, this embodiment reduces the number of gripping components and lowers costs. Attached Figure Description

[0022] To make the content of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings, wherein:

[0023] Figure 1 This is a schematic diagram of the structure of a detection system for semiconductor electronic components according to a preferred embodiment of the present invention;

[0024] Figure 2 yes Figure 1 A schematic diagram of the feeding mechanism in a semiconductor electronic component testing system;

[0025] Figure 3 yes Figure 2 Enlarged view of point A;

[0026] Figure 4 yes Figure 2 Enlarged view of point B;

[0027] Figure 5 yes Figure 1 A schematic diagram of the pusher module in a semiconductor electronic component testing system;

[0028] Figure 6 yes Figure 1 A schematic diagram of the feeding mechanism in a semiconductor electronic component testing system;

[0029] Figure 7 yes Figure 1 A schematic diagram of the structure of a testing system for semiconductor electronic components (excluding the loading and unloading mechanisms).

[0030] Figure 8 yes Figure 7 Enlarged view of point C;

[0031] Figure 9 yes Figure 7 A diagram from another perspective;

[0032] Figure 10 yes Figure 9 Enlarged view of point D;

[0033] Figure 11 yes Figure 7 Another perspective illustration;

[0034] Figure 12 yes Figure 11 Enlarged view of point E;

[0035] Figure 13 This is a schematic diagram of the material box.

[0036] Explanation of reference numerals in the instruction manual:

[0037] 100. Conveying mechanism; 110. Conveying track; 111. Track trough; 120. 2D inspection station; 130. 3D inspection station;

[0038] 200. Testing agency; 210. 2D camera; 220. 3D camera;

[0039] 300. Clamping mechanism; 310. Clamping base; 320. Clamping cylinder; 330. Upper clamping jaw; 340. Lower clamping jaw; 350. Translation component; 351. Second slide rail; 352. Intermediate connecting piece; 353. Locking screw; 360. First translation module; 370. Clamping lifting cylinder;

[0040] 400. Feeding mechanism; 410. Feeding conveyor module; 411. Feeding position; 4111. Feeding base; 4112. Mounting plate; 4113. Stop block; 4114. Slider; 4115. First chute; 4116. Tightening screw; 412. Recycling position; 413. Conveying component; 420. Feeding station; 430. Feeding and transplanting module; 431. Transplanting frame; 432. Lower gripper; 4321. Vertical part; 4322. Horizontal part; 4323. Groove; 433. Upper gripper; 4331. Upper gripper body; 4332. Rotating component; 4333. Elastic component; 4334. Straight section; 4335. Arc-shaped transition section; 434. Proximity sensor; 440. Pushing module; 441. Large stroke translation module; 442. Pushing translation module; 443. Pushing component; 444. Pushing connector; 445. Position sensor;

[0041] 500. Feeding mechanism; 510. Feeding and transferring module; 520. Feeding and conveying module;

[0042] 600. Material box; 610. Carrier; 620. Step;

[0043] 700. Clamping mechanism; 710. Clamping drive unit; 720. Pressure plate; 721. Horizontal plate; 722. Vertical plate;

[0044] 800. Spacing adjustment mechanism. Detailed Implementation

[0045] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention.

[0046] Reference Figures 1-13 As shown, this embodiment of the present invention provides a detection system for semiconductor electronic components, comprising:

[0047] The conveying mechanism 100 includes two parallel conveying tracks 110; the inner sides of the two conveying tracks 110 are respectively provided with track grooves 111; the two ends of the carrier 610 are respectively located in the track grooves 111 of the two conveying tracks 110; along the transmission direction (X direction) of the conveying mechanism 100, the conveying mechanism 100 is provided with a 2D inspection station 120 and a 3D inspection station 130;

[0048] The inspection unit 200 includes a 2D camera 210 and a 3D camera 220; the 2D camera 210 is located above the 2D inspection station 120; the 3D inspection station 130 is located above the 3D inspection station 130.

[0049] At least one gripping mechanism 300, the gripping mechanism 300 includes an upper gripper 330 and a lower gripper 340 that can be opened and closed vertically;

[0050] The feeding mechanism is 400 and the unloading mechanism is 500;

[0051] The feeding mechanism 400 and the unloading mechanism 500 are respectively located at the front and rear ends of the conveying mechanism 100; the upper jaw 330 and the lower jaw 340 of the clamping mechanism 300 close and clamp the carrier 610 and drive the carrier 610 to move in the track groove 111.

[0052] The feeding mechanism 400 includes a feeding conveying module 410, a feeding station 420, and a feeding transfer module 430. The feeding conveying module 410 includes a feeding position 411, a recycling position 412, and a conveyor 413. The feeding position 411 and the recycling position 412 are spaced vertically apart; the conveyor 413 is located at the feeding position 411; the feeding transfer module 430 and the feeding conveying module 410 are located at both ends of the feeding station 420 along the Y-direction. The feeding transfer module 430 includes a transfer frame 431 and a clamping component; the clamping component is slidably connected to the transfer frame 431, and can move up and down and translate in the Y-direction. The clamping components include a lower gripper 432 and an upper gripper 433 located above the lower gripper 432. The upper gripper 433 can move up and down. The upper gripper 433 includes an upper gripping body 4331, a rotating component 4332, and an elastic component 4333. The rotating component 4332 is movably connected to the side of the upper gripping body 4331 facing the feeding and conveying module 410. An elastic component 4333 connects the upper gripping body 4331 and the rotating component 4332. When pressed, the angle between the rotating component 4332 and the upper gripping body 4331 decreases. When unpressurized, the angle between the rotating component 4332 and the upper gripping body 4331 returns to its initial angle under the action of the elastic component 4333.

[0053] The unloading mechanism 500 includes an unloading and transferring module 510 and an unloading and conveying module 520; the unloading and transferring module 510 has the same structure as the loading and transferring module 430; the unloading and conveying module 520 is disposed on one side of the unloading and transferring module 510. In some embodiments, the unloading and conveying module 520 has the same structure as the loading and conveying module 410.

[0054] Specifically, in this embodiment, the rotating component 4332 of the upper gripper 433 is rotatably connected to the upper gripper body 4331. This prevents the material box 600 from tilting when gripping a large-sized material box 600, thus ensuring a stable and reliable clamping of the material box 600. This, in turn, ensures that the carrier 610 in the material box 600 is smoothly pushed into the track groove 111. Therefore, this embodiment can grip and load material boxes 600 of different sizes, thus having a wider range of applications.

[0055] Furthermore, the lower surface of the rotating component 4332 includes a straight section 4334 and arc-shaped transition sections 4335 disposed on both sides of the straight section 4334, with the arc-shaped transition sections 4335 smoothly transitioning to the straight section 4334. Specifically, this ensures that when the rotating component 4332 rotates, the arc-shaped transition sections 4335 come into contact with the material box 600, thereby preventing damage to the material box 600.

[0056] Since the widths of different sized material boxes 600 vary, but the clamping component can only clamp the material box 600 from one side, it cannot stably clamp larger material boxes 600. To solve this problem, the lower gripper 432 further includes a vertical portion 4321 and a horizontal portion 4322 vertically connected to the bottom of the vertical portion 4321; a groove 4323 is provided at the top of the horizontal portion 4322 near the vertical portion 4321. A step 620 is provided at the bottom of the material box 600.

[0057] Specifically, the groove 4323 cooperates with the step 620 to stably clamp the material boxes 600 of different sizes.

[0058] If the material box 600 is not tightly attached to the vertical part 4321, it will cause the material box 600 to tilt when clamped, thus affecting the loading of the carrier 610. To solve this problem, a proximity sensor 434 is further provided on the top of the vertical part 4321 to identify whether the side of the material box 600 is tightly attached to the side of the vertical part 4321.

[0059] Specifically, this embodiment can determine whether the side of the material box 600 is in close contact with the side of the vertical part 4321 by using the proximity sensor 434, thereby ensuring that the material box 600 is reliably clamped while ensuring that the material box 600 does not tilt.

[0060] Furthermore, the feeding mechanism 400 also includes a pushing module 440, which is located at one end of the feeding station 420 along the X direction. The X and Y directions are located in the horizontal plane and are perpendicular to each other. The pushing module 440 includes a long-stroke translation module 441, a pushing translation module 442, and a pushing component 443. The pushing translation module 442 is connected to the long-stroke translation module 441, and the pushing component 443 is connected to the pushing translation module 442. The long-stroke translation module 441 drives the pushing translation module 442 and the pushing component 443 to move a long distance in the X direction; the pushing translation module 442 drives the pushing component 443 to move a short distance in the X direction, so as to accurately push the carrier 610 out of the material box 600.

[0061] In some embodiments, the pushing module 440 further includes a pushing connector 444; the pushing connector 444 connects the large-stroke translation module 441 and the pushing translation module 442. In some embodiments, the large-stroke translation module 441 includes two pulleys, a belt, a motor, a lead screw, and a lead screw nut; the belt is wound around the two pulleys; the motor is connected to one pulley, and the other pulley is connected to the lead screw; the lead screw nut cooperates with the lead screw, and the pushing translation module 442 is connected to the lead screw nut through the pushing connector 444. In some embodiments, the pushing translation module 442 includes a motor, two pulleys, a belt, and a belt clamp. The motor is connected to one of the pulleys, the belt is wound around the two pulleys, the belt clamp is clamped on the belt, and the belt clamp is connected to the pushing member 443. The motor drives the belt to move, thereby driving the pushing member 443 to reciprocate in the Y direction.

[0062] Furthermore, the pusher module 440 also includes at least two position sensors 445 for limiting the translational stroke of the pusher 443.

[0063] Specifically, in this embodiment, the position sensor 445 identifies the position of the pusher module 440, thereby causing the pusher 443 to reciprocate within a specified stroke, avoiding damage caused by collision with other components due to excessive stroke.

[0064] In some embodiments, a position sensor 445 is connected to a push-translation module 442, and a pusher 443 is connected to the output end of the push-translation module 442. An actuating element is connected to the pusher 443, which actuates the position sensor 445. Whether the pusher 443 has reached its limit position is determined by whether the actuating element actuates the position sensor 445, thereby limiting the pushing stroke of the pusher 443. To accommodate the ejection of carriers 610 from different sized hoppers 600 (the pusher 443 ejects different sized carriers 610 with different strokes), the position of the position sensor 445 in the X direction is adjustable.

[0065] Furthermore, this application also includes a control component; the control component is connected to the push translation module 442 and the position sensor 445 to realize the linkage between the push translation module 442 and the position sensor 445.

[0066] Specifically, when the position sensor 445 receives a signal that the pusher 443 has moved to its limit position, it feeds the signal back to the control component. After receiving the signal, the control component controls the push translation module 442 to drive the pusher 443 to move in the opposite direction (for example, controlling the motor of the push translation module 442 to switch between forward and reverse movement), thereby achieving linkage and greater automation.

[0067] Furthermore, the loading position 411 includes a loading base 4111, a mounting plate 4112, and a stop block 4113; the two ends of the loading base 4111 are a loading port and a conveying port, respectively; the conveying component 413 is located between the loading port and the conveying port and is used to transport the material box 600 placed on the loading position 411; the mounting plate 4112 and the stop block 4113 are located on both sides of the loading base 4111.

[0068] Specifically, this embodiment can confine the material box 600 between the mounting plate 4112 and the baffle, preventing the material box 600 from shifting due to excessive width during transmission at the feeding position 411 because the space of the feeding base 4111 is too large. The baffle 4113 slides to adjust the width of the feeding base 4111, thereby restricting the material boxes 600 of different specifications.

[0069] One end of the stop block 4113 is provided with a slider 4114; the feeding base 4111 is provided with a first sliding groove 4115; the slider 4114 slides in the first sliding groove 4115; the slider 4114 is threadedly connected with a tightening screw 4116, which passes through the slider 4114 and abuts against the first sliding groove 4115. Specifically, in this embodiment, the stop block 4113 can be slid by manually sliding the slider 4114. After sliding to the target position, the stop block 4113 is fixed to the feeding base 4111 by the tightening screw 4116. The structure is simple and the cost is low.

[0070] The clamping mechanism 300 includes a clamping base 310 and a clamping component connected to the clamping base 310. The clamping base 310 is located on the outside of the conveying track 110. The clamping component can move up and down and translate in the X direction on the clamping base 310. The clamping component includes a gripper cylinder 320, an upper gripper 330, and a lower gripper 340. The gripper cylinder 320 is located on the outside of the conveying track 110, and the two output shafts of the gripper cylinder 320 are located above the conveying track 110. The upper gripper 330 and the lower gripper 340 are respectively connected to the two output shafts of the gripper cylinder 320, and the upper gripper 330 and the lower gripper 340 are located on the inside of the conveying track 110. The two output shafts of the gripper cylinder 320 move in opposite directions to drive the upper gripper 330 and the lower gripper 340 to translate and open and close.

[0071] Specifically, in this embodiment, the gripper cylinder 320 is located on the outer side of the conveying track 110, while the upper gripper 330 and lower gripper 340 are located on the inner side of the conveying track 110. The upper gripper 330 and lower gripper 340 can be lifted to avoid obstructing other components. Thus, the upper gripper 330 and lower gripper 340 can move to any position on the conveying track 110 in the X direction. Therefore, one gripping component in this application can realize the movement of the carrier 610 on the conveying track 110 and push the carrier 610 into the material box 600 on the unloading mechanism 500. It can be seen that this embodiment reduces the number of gripping components and lowers costs.

[0072] Furthermore, this application also includes multiple clamping mechanisms 700. Both the 2D inspection station 120 and the 3D inspection station 130 are equipped with clamping mechanisms 700. Each clamping mechanism 700 includes a clamping drive unit 710 connected to the conveying track 110 and a pressure plate 720 disposed in the track groove 111. The output end of the clamping drive unit 710 is connected to the pressure plate 720 to drive the pressure plate 720 to move up and down in the track groove 111.

[0073] Specifically, this embodiment incorporates a vertically movable pressure plate 720 within the track groove 111. When the carrier 610 is transferred to the 2D inspection station 120 or the 3D inspection station 130 for inspection, the pressure plate 720 presses down on both sides of the carrier 610, ensuring the carrier 610 remains horizontal and guaranteeing the consistency of the inspection data. This application presses down on both sides of the carrier 610, thus avoiding the location of electronic components in the center of the carrier 610 and preventing damage to these components.

[0074] Furthermore, the pressure plate 720 includes a horizontal plate 721 and a vertical plate 722 vertically connected to the bottom of the horizontal plate 721; the horizontal plate 721 is slidably connected to the top of the conveying track 110; the vertical plate 722 moves up and down in the track groove 111; the output end of the pressing drive unit 710 passes through the conveying track 110 and is connected to the horizontal plate 721.

[0075] Specifically, in this embodiment, the pressing drive unit 710 can be positioned below the conveying track 110, resulting in a more compact structure.

[0076] There are two gripping mechanisms 300, located at both ends of the conveyor track 110. Specifically, this embodiment improves efficiency by using two gripping mechanisms 300. For example, one gripping mechanism 300 is used to grip the carrier 610 from the loading mechanism 400 and transfer it to the 2D inspection station 120, and to transfer the carrier 610 from the 2D inspection station 120 to the 3D inspection station 130. The other gripping mechanism 300 is used to transfer the carrier 610 from the 3D inspection station 130 to the unloading mechanism 500 and push the carrier 610 into the material box 600.

[0077] The spacing between the two conveyor tracks 110 is adjustable.

[0078] Specifically, this embodiment can be used for transmission of vehicles 610 of different specifications, and has a wider range of applications.

[0079] In some embodiments, this application further includes a spacing adjustment mechanism 800 for adjusting the distance between the two conveying tracks 110. The spacing adjustment mechanism 800 is a lead screw and lead screw nut structure. The rotation of the lead screw drives the lead screw nut to move, and the conveying track 110 is connected to the lead screw nut, thereby driving the conveying track 110 to move in the Y direction to adjust the distance between the two conveying tracks 110.

[0080] One of the two conveying tracks 110 is fixed, while the other moves in the Y direction.

[0081] Specifically, in this embodiment, the distance between the two conveying tracks 110 is adjusted by moving one conveying track 110, which makes the structure simpler.

[0082] The clamping mechanism 300 is located on one side of the fixed conveying track 110 among the two conveying tracks 110.

[0083] Specifically, this embodiment makes the structure simpler and more compact, without affecting the operation of other components.

[0084] The clamping mechanism 300 also includes a translation component 350 for driving the clamping component to translate in the Y direction. Specifically, the clamping component in this embodiment can translate in the Y direction, so that when different sized carriers 610 are pushed into the unloading mechanism 500 by the clamping component, the carriers 610 can be pushed at different positions in the Y direction, ensuring that the carriers 610 are subjected to balanced forces and avoiding the carriers 610 from tilting and getting stuck in the track groove 111, thereby enabling the carriers 610 to be pushed quickly and smoothly from the track groove 111 into the material box 600.

[0085] The clamping mechanism 300 also includes a first translation module 360 ​​for driving the clamping component to translate in the X direction, and the clamping component is connected to the movable end of the first translation module 360. Specifically, in this embodiment, the clamping component is driven to translate in the X direction by the translation module (first translation module 360), and the operation is stable and reliable.

[0086] The clamping mechanism 300 also includes a clamping lifting cylinder 370 for driving the clamping component to move up and down. The clamping lifting cylinder 370 is connected between the first translation module 360 ​​and the clamping component; the clamping lifting cylinder 370 is connected to the movable end of the first translation module 360; and the clamping component is connected to the output end of the clamping lifting cylinder 370. Specifically, in this embodiment, the clamping lifting cylinder 370 is located at the bottom of the first translation module 360, thereby reducing the footprint of the clamping mechanism 300 while ensuring the overall stability of its operation.

[0087] In some embodiments, the translation component 350 is connected between the first translation module 360 ​​and the gripping lifting cylinder 370. In some possible embodiments, the translation component 350 includes a second slide groove 351, an intermediate connector 352, and a locking screw 353; the second slide groove 351 is located at the movable end of the first translation module 360, the intermediate connector 352 is located in the second slide groove 351, and the locking screw 353 is threaded to one side of the second slide groove 351, passing through the side wall of the second slide groove 351 and abutting against one side of the intermediate connector 352. Loosening the locking screw 353 pushes the intermediate connector 352 to slide in the second slide groove 351, thereby adjusting the position of the gripping component in the Y direction; after reaching the target, tightening the locking screw 353 locks the gripping component in place.

[0088] In some other possible implementations, the translation component 350 can be a telescopic cylinder.

[0089] The material box 600 is conveyed from the loading position 411. When the material box 600 reaches the edge of the loading position 411, the clamping component moves to grip the material box 600, and then proceeds to the loading position 420. The pusher 443 pushes the carrier 610 into the track groove 111 (the material box 600 contains multiple carriers 610 from bottom to top. After the previous carrier 610 is pushed, the clamping component drives the material box 600 to rise, and then the pusher 443 pushes the next carrier 610 into the track groove 111). After all the carriers 610 in the material box 600 have been pushed, the clamping component places the empty material box 600 into the recycling position 412.

[0090] When the carrier 610 enters the track groove 111, the gripping component of the gripping mechanism 300 descends, and the upper gripper 330 and lower gripper 340 close to clamp one end of the carrier 610, transferring the carrier 610 to the 2D inspection station 120. After the inspection is completed at the 2D inspection station 120, the gripping component clamps one end of the carrier 610 again, transferring the carrier 610 to the 3D inspection station 130.

[0091] After the 3D inspection station 130 completes the inspection, the gripping component clamps one end of the carrier 610 and transfers the carrier 610 to the end of the conveyor track 110. Then the gripping component changes direction, that is, the gripping component rises to avoid the conveyor track 110 and then moves in the opposite direction to the other end of the carrier 610 (the gripping component can also change direction during the 2D inspection station 120 inspection). The gripping component clamps the other end of the carrier 610 and pushes the carrier 610 into the material box 600 on the unloading mechanism 500.

[0092] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A detection system for semiconductor electronic components, characterized in that: include: The conveying mechanism includes two parallel conveying tracks; the inner sides of the two conveying tracks are respectively provided with track grooves; along the conveying direction of the conveying mechanism, the conveying mechanism is provided with a 2D inspection station and a 3D inspection station; The inspection mechanism includes a 2D camera and a 3D camera; the 2D camera is located above the 2D inspection station; the 3D inspection station is located above the 3D inspection station. At least one clamping mechanism, the clamping mechanism including a clamping component; the clamping component is capable of vertical lifting and horizontal translation in the X direction; the clamping component includes a gripper cylinder, an upper gripper, and a lower gripper; the gripper cylinder is located outside the conveying track, and the two output shafts of the gripper cylinder are located above the conveying track; the upper gripper and the lower gripper are respectively connected to the two output shafts of the gripper cylinder, and the upper gripper and the lower gripper are located inside the conveying track; the two output shafts of the gripper cylinder move in opposite directions to drive the upper gripper and the lower gripper to translate and open / close; Feeding mechanism and unloading mechanism; The feeding mechanism and the unloading mechanism are respectively located at the front and rear ends of the conveying mechanism; the upper and lower jaws of the clamping mechanism close to clamp the carrier and drive the carrier to move in the track groove.

2. The detection system for semiconductor electronic components according to claim 1, characterized in that: It also includes multiple clamping mechanisms; both the 2D detection station and the 3D detection station are equipped with the clamping mechanism; the clamping mechanism includes a clamping drive unit connected to the conveying track and a pressure plate disposed in the track groove; the output end of the clamping drive unit is connected to the pressure plate to drive the pressure plate to move up and down in the track groove.

3. The detection system for semiconductor electronic components according to claim 2, characterized in that: The pressure plate includes a horizontal plate and a vertical plate vertically connected to the bottom of the horizontal plate; the horizontal plate is slidably connected to the top of the conveying track; the vertical plate moves up and down in the track groove; the output end of the pressing drive unit passes through the conveying track and is connected to the horizontal plate.

4. The detection system for semiconductor electronic components according to claim 1, characterized in that: There are two clamping mechanisms, located at both ends of the conveying track.

5. The detection system for semiconductor electronic components according to claim 1, characterized in that: The distance between the two conveyor tracks is adjustable.

6. The detection system for semiconductor electronic components according to claim 5, characterized in that: One of the two transport tracks is fixed, while the other moves in the Y direction.

7. The detection system for semiconductor electronic components according to claim 6, characterized in that: The clamping mechanism is located on one side of the fixed conveying track among the two conveying tracks.

8. The detection system for semiconductor electronic components according to claim 1, characterized in that: The clamping mechanism further includes a translation component for driving the clamping component to translate in the Y direction.

9. The detection system for semiconductor electronic components according to claim 1, characterized in that: The clamping mechanism further includes a first translation module for driving the clamping component to translate in the X direction, and the clamping component is connected to the movable end of the first translation module.

10. The detection system for semiconductor electronic components according to claim 9, characterized in that: The clamping mechanism further includes a clamping lifting cylinder for driving the clamping component to move up and down. The clamping lifting cylinder is connected between the first translation module and the clamping component. The clamping lifting cylinder is connected to the movable end of the first translation module. The clamping component is connected to the output end of the clamping lifting cylinder.

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