Three-stage purification system for exhaust gas from silicon carbide production industry

Abstract

This utility model relates to the technical field of silicon carbide tail gas treatment, and discloses a three-stage purification system for industrial tail gas from silicon carbide production. The system includes a sealed gas collection hood, a gas settling chamber, a bag filter, and a cooling scrubbing tower. A primary filter is installed in the gas settling chamber, and a drain trough is provided at the bottom of the chamber, with a sealing component at the lower end. A cooling and cleaning component is installed inside the cooling scrubbing tower. In this three-stage purification system for industrial tail gas from silicon carbide production, gas is introduced into the gas settling chamber through the sealed gas collection hood and high-pressure sealed pipeline for the removal of large particles. The filtered solid impurities can be discharged through the drain port at the lower end of the gas settling chamber for easy cleaning. Further dust removal is achieved through the bag filter, and the cooling and cleaning component in the cooling scrubbing tower allows for the cooling of circulating water before discharge.

Description

Technical Field

[0001] This utility model relates to the technical field of silicon carbide tail gas treatment, specifically a three-stage purification system for industrial tail gas from silicon carbide production. Background Technology

[0002] Green silicon carbide is a core material for third-generation semiconductors, but traditional smelting processes suffer from high energy consumption and pollution. The high-calorific-value exhaust gases generated during smelting are often directly burned, leading to resource waste and environmental pollution. For example, announcement number CN222384521U discloses a silicon carbide production flue gas treatment device, including a reaction cylinder for treating silicon carbide production flue gas, a first pipe connected to the reaction cylinder for receiving the flue gas, and a second pipe connected to the reaction cylinder for exhausting the flue gas. The free end of the second pipe is equipped with a flue gas combustion treatment component. The top of the reaction cylinder is connected to a spray component for achieving spray cooling. A cooling water collection component is provided at the bottom, which is connected to the spray component. This solves the problem that the water circulation system in traditional silicon carbide production flue gas treatment devices cannot cool the water, resulting in flue gas emissions failing to meet standards and thus reducing emission efficiency. However, existing technologies suffer from poor efficiency in treating exhaust gas, difficulty in filtering and cleaning solid particulate impurities in the exhaust gas, and difficulty in cooling and cleaning the gas. For example, the comparative patents listed above have this problem. Therefore, we propose a three-stage purification system for industrial exhaust gas from silicon carbide production to solve the above problems. Utility Model Content

[0003] The purpose of this invention is to provide a three-stage purification system for industrial exhaust gas from silicon carbide production, in order to solve the problems mentioned in the background art, such as poor efficiency in exhaust gas treatment, inconvenience in filtering and cleaning solid particulate impurities in the exhaust gas, and inconvenience in cooling and cleaning the gas.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a three-stage purification system for industrial tail gas from silicon carbide production, comprising a sealed gas capture and collection hood, a gas settling chamber, a bag filter, and a cooling gas scrubbing tower. Also includes: A primary filter screen is inserted into the gas settling chamber, and a drain trough is provided at the bottom of the gas settling chamber. A sealing assembly is provided at the lower end of the drain trough. The sealing assembly includes a sealing plate provided at the lower end of the gas settling chamber and movable connecting plates fixed on the front and rear sides of the sealing plate. The sealing assembly forms a detachable structure at the lower end of the gas settling chamber. The cooling and scrubbing tower is equipped with a cooling and cleaning assembly, which consists of a cleaning pipe fixed inside the cooling and scrubbing tower, a water pump and a cooler located outside the cooling and scrubbing tower and connected to the cleaning pipe, and a cleaning nozzle installed at the lower end of the cleaning pipe.

[0005] Preferably, the sealed gas collection hood is connected to the silicon carbide calcination equipment, and the right end of the sealed gas collection hood is connected to the gas settling chamber through a high-pressure sealed pipe.

[0006] Preferably, a first sealing gasket is fitted between the upper end of the gas settling chamber and the primary filter screen, and the primary filter screen and the gas settling chamber are limited by a fastening bolt that passes through the upper end of the primary filter screen.

[0007] Preferably, a second sealing gasket is fitted between the sealing plate and the bottom of the gas settling chamber, and the sealing plate drives the movable connecting plate to be inserted into the fixed support plate fixed on the front and rear sides of the lower end of the gas settling chamber. The fixed support plate has a fixing groove in the middle.

[0008] Preferably, a fixed support rod is fixedly connected to the upper end of the movable connecting plate, and the fixed support rod slot is set in the middle of the fixed support plate. The outer surface of the fixed support rod is threaded with a fixed cap for locking and limiting, and the fixed cap is engaged in the fixed slot.

[0009] Preferably, the right end of the gas settling chamber is connected to the cooling gas scrubbing tower via a bag filter, and a drain valve is installed on the front side of the lower end of the cooling gas scrubbing tower, and an exhaust port is provided on the top of the cooling gas scrubbing tower.

[0010] Preferably, the water inlet of the cooler is connected to the bottom of the cooling and scrubbing tower via a pipe, and the water outlet of the cooler is connected to the cleaning pipe via a water pump.

[0011] Compared with the prior art, the beneficial effects of this utility model are: the three-stage purification system for industrial exhaust gas of silicon carbide production allows the gas to pass through a sealed capture and collection hood and a high-pressure sealed pipeline into a gas settling chamber for the removal of large particles. The filtered solid impurities can be discharged through the drain port at the bottom of the gas settling chamber for easy cleaning. Furthermore, the gas is further treated by a bag filter. Combined with the cooling and cleaning components in the cooling and scrubbing tower, the circulating water can be cooled before being discharged. 1. It is equipped with a sealed gas collection hood, a high-pressure sealed pipeline, a gas settling chamber and a primary filter. The sealed gas collection hood and the high-pressure sealed pipeline allow the gas to be passed into the gas settling chamber for settling. Combined with the primary filter, it is convenient to filter out large particles in the gas and facilitate dust removal. 2. A sealing component is provided. The sealing component is located at the lower end of the gas settling chamber to seal the sewage outlet. The sealing component includes a sealing plate and a movable connecting plate. By disassembling the sealing component, the settled and filtered solid particulate impurities can be discharged and cleaned from the gas settling chamber. 3. Equipped with a bag filter and a cooling and cleaning component, the gas undergoes secondary dust removal by the bag filter before entering the cooling and cleaning tower. The cooling and cleaning component allows the gas to be circulated and cooled before being discharged, reducing environmental pollution. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of the present invention from the right side. Figure 2 This is a schematic diagram of the overall structure of the present invention from the left side. Figure 3 This utility model Figure 1 Enlarged structural diagram at point A in the middle; Figure 4 This is a schematic diagram showing the exploded structure of the gas settling chamber and primary filter screen of this utility model; Figure 5 This is a bottom-view exploded view of the gas settling chamber and sealing plate of this utility model; Figure 6 This is a front view sectional view of the cooling gas scrubbing tower and cooling cleaning component of this utility model; Figure 7 This is a schematic diagram of the overall structure of the cooling and cleaning component of this utility model.

[0013] In the diagram: 1. Sealed gas collection hood; 2. High-pressure sealed pipeline; 3. Gas settling chamber; 4. Primary filter screen; 5. First sealing gasket; 6. Sealing plug plate; 7. Second sealing gasket; 8. Movable connecting plate; 9. Fixed support rod; 10. Fixed support plate; 11. Fixed groove; 12. Fixed cap; 13. Bag filter; 14. Cooling gas scrubbing tower; 15. Cleaning pipeline; 16. Water pump; 17. Cooler; 18. Exhaust port; 19. Cleaning nozzle. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0015] Please see Figures 1-7 The present invention provides the following technical solution: To address the shortcomings of existing technologies, such as inefficient exhaust gas treatment, difficulty in filtering and cleaning solid particulate impurities, and inconvenience in cooling and cleaning the gas, this solution proposes a three-stage purification system for industrial exhaust gas from silicon carbide production. This system includes a sealed gas collection hood 1, a gas settling chamber 3, a bag filter 13, and a cooling and scrubbing tower 14. A primary filter 4 is installed in the gas settling chamber 3, and a drain trough is provided at the bottom of the chamber. The lower end of the drain trough is equipped with... The sealing assembly includes a sealing plate 6 disposed at the lower end of the gas settling chamber 3 and a movable connecting plate 8 fixed on the front and rear sides of the sealing plate 6. The sealing assembly forms a disassembly structure at the lower end of the gas settling chamber 3. A cooling and cleaning assembly is provided inside the cooling and scrubbing tower 14. The cooling and cleaning assembly consists of a cleaning pipe 15 fixed inside the cooling and scrubbing tower 14, a water pump 16 disposed outside the cooling and scrubbing tower 14 and connected to the cleaning pipe 15, a cooler 17, and a cleaning nozzle 19 installed at the lower end of the cleaning pipe 15. like Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, the sealed gas collection hood 1 is connected to the silicon carbide calcination equipment, and the right end of the sealed gas collection hood 1 is connected to the gas settling chamber 3 through a high-pressure sealed pipe 2. The gas generated during the silicon carbide processing passes through the sealed gas collection hood 1 and the gas settling chamber 3 for settling treatment. Combined with the setting of the primary filter screen 4, it can filter the solid particles in the gas. At the same time, the primary filter screen 4 is attached to the upper end of the sealed gas collection hood 1 with a first sealing gasket 5, and the sealing plate 6 is attached to the lower end of the gas settling chamber 3 with a second sealing gasket 7 to ensure the sealing effect of the connection and prevent leakage. The solid particles in the flue gas settle at the bottom of the gas settling chamber 3. When cleaning is required, the gas can be drained through the gas settling chamber 3. By rotating the fixing cap 12, which is threaded onto the outer surface of the fixed support rod 9, the fixing cap 12 is moved out of the fixing groove 11, thereby loosening the limit between the fixed support rod 9 and the fixed support plate 10. Then, the fixed support rod 9 is pulled down, and the fixed support rod 9 drives the movable connecting plate 8 to disengage from the fixed support plate 10, thereby loosening the limit between the sealing plate 6 and the gas settling chamber 3. At this time, solid particles can be discharged and cleaned through the drain port at the lower end of the gas settling chamber 3. In addition, the fastening bolts connecting the upper end of the primary filter screen 4 to the gas settling chamber 3 can be removed, and the primary filter screen 4 can be removed from the gas settling chamber 3, which facilitates the disassembly and cleaning of the gas settling chamber 3 and the primary filter screen 4, and avoids blockage. After settling in the gas settling chamber 3 and filtering through the primary filter 4, the gas enters the bag filter 13 for secondary filtration, where fine impurities are filtered out before entering the cooling and scrubbing tower 14. Figure 1 , Figure 6 and Figure 7 As shown, after the gas enters the cooling scrubbing tower 14, it is cooled and sprayed out through the cooling and cleaning components. The bottom of the cooling scrubbing tower 14 is equipped with an appropriate amount of water. The cooler 17 draws out the water from the bottom of the cooling scrubbing tower 14, cools it through the water pump 16, and then sprays it out through the cleaning pipe 15 and the cleaning nozzle 19, thereby cooling and cleaning the gas. After cooling and cleaning, the gas is discharged to the outside through the exhaust port 18, thereby reducing the pollution to the environment.

[0016] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A three-stage purification system for tail gas from silicon carbide production, comprising a sealed gas capture hood (1), a gas settling chamber (3), a bag filter (13), and a cooling gas scrubbing tower (14). Its features are, Also includes: A primary filter screen (4) is inserted into the gas settling chamber (3), and a drain trough is provided at the bottom of the gas settling chamber (3). A sealing assembly is provided at the lower end of the drain trough. The sealing assembly includes a sealing plate (6) provided at the lower end of the gas settling chamber (3) and a movable connecting plate (8) fixed on the front and rear sides of the sealing plate (6). The sealing assembly forms a disassembly structure at the lower end of the gas settling chamber (3). The cooling and cleaning assembly is provided inside the cooling and cleaning tower (14). The cooling and cleaning assembly consists of a cleaning pipe (15) fixed inside the cooling and cleaning tower (14), a water pump (16) and a cooler (17) located outside the cooling and cleaning tower (14) and connected to the cleaning pipe (15), and a cleaning nozzle (19) installed at the lower end of the cleaning pipe (15).

2. The three-stage purification system for industrial tail gas from silicon carbide production according to claim 1, characterized in that: The sealed gas collection hood (1) is connected to the silicon carbide calcination equipment, and the right end of the sealed gas collection hood (1) is connected to the gas settling chamber (3) through a high-pressure sealed pipe (2).

3. The three-stage purification system for industrial tail gas from silicon carbide production according to claim 2, characterized in that: A first sealing gasket (5) is provided between the upper end of the gas settling chamber (3) and the primary filter screen (4), and the primary filter screen (4) and the gas settling chamber (3) are limited by a fastening bolt that passes through the upper end of the primary filter screen (4).

4. The three-stage purification system for industrial tail gas from silicon carbide production according to claim 1, characterized in that: A second sealing gasket (7) is fitted between the sealing plate (6) and the bottom of the gas settling chamber (3), and the sealing plate (6) drives the movable connecting plate (8) to be inserted into the fixed support plate (10) fixed on the front and rear sides of the lower end of the gas settling chamber (3). The fixed support plate (10) has a fixed groove (11) in the middle.

5. The three-stage purification system for industrial tail gas from silicon carbide production according to claim 4, characterized in that: The upper end of the movable connecting plate (8) is fixedly connected to a fixed support rod (9), and the slot of the fixed support rod (9) is set in the middle of the fixed support plate (10). The outer surface of the fixed support rod (9) is threaded with a fixed cap (12) for locking and limiting, and the fixed cap (12) is engaged in the fixed groove (11).

6. The three-stage purification system for industrial tail gas from silicon carbide production according to claim 1, characterized in that: The right end of the gas settling chamber (3) is connected to the cooling gas scrubbing tower (14) via a bag filter (13), and a drain valve is installed on the front side of the lower end of the cooling gas scrubbing tower (14), and an exhaust port (18) is provided on the top of the cooling gas scrubbing tower (14).

7. The three-stage purification system for industrial tail gas from silicon carbide production according to claim 1, characterized in that: The inlet of the cooler (17) is connected to the bottom of the cooling and scrubbing tower (14) via a pipe, and the outlet of the cooler (17) is connected to the cleaning pipe (15) via a water pump (16).

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