Transmission device

Abstract

This utility model discloses a transmission device for transporting graphite boats. The transmission device includes: a first transport mechanism configured to interface with an external temporary storage location; a cooling mechanism configured to interface with the first transport mechanism, used to cool the graphite boats, and having at least two cooling positions; a temporary storage mechanism configured to interface with the first transport mechanism, having at least two temporary storage locations; a second transport mechanism configured to interface with both the temporary storage mechanism and the cooling mechanism; and a loading / unloading mechanism configured to interface with the second transport mechanism, used for loading and unloading graphite boats, having a first loading / unloading station and a second loading / unloading station. The transmission device provided in this application can store multiple graphite boats and perform cyclic transmission, improving the efficiency of graphite boat transmission.

Description

Technical Field

[0001] This application relates to the field of battery production equipment technology, and more particularly to a transmission device. Background Technology

[0002] Plasma-enhanced chemical vapor deposition (PECVD) is one of the core processes in solar cell and semiconductor manufacturing. It involves placing silicon wafers on graphite boats into a furnace tube, depositing silicon nitride films in an electrolytic gas environment, and then using automated equipment to load and unload the silicon wafers and circulate the graphite boats.

[0003] However, in traditional technical solutions, the automated system can only hold two graphite boats: one "processed boat" with completed coating and one "processing boat" awaiting coating. After completing one batch of processes, the main station must wait for the automated equipment to complete the loading, unloading, and cooling processes before it can receive the next batch of graphite boats. Because the automated system's capacity only supports the alternating use of two graphite boats, the main station experiences a long idle waiting time, resulting in low overall capacity utilization. Utility Model Content

[0004] This utility model discloses a transmission device that, by setting up multiple cooling positions, temporary storage positions, and loading / unloading positions within the transmission device, enables the cyclic transmission of multiple graphite boats, thereby improving the efficiency of graphite boat cyclic transmission.

[0005] To achieve the above objectives, the first aspect of this utility model discloses a transmission device for transmitting a graphite boat, the transmission device comprising:

[0006] A first transport mechanism is configured to dock with an external temporary storage location so that the graphite boat on the external temporary storage location can be moved to the first transport mechanism.

[0007] A cooling mechanism is configured to dock with the first transport mechanism to allow the graphite boat to move between the first transport mechanism and the cooling mechanism. The cooling mechanism is used to cool the graphite boat and has at least two cooling positions, including a first cooling position and a second cooling position, each of which is capable of cooling one of the graphite boats.

[0008] A temporary storage mechanism is configured to dock with the first transport mechanism to allow the graphite boat to move between the first transport mechanism and the temporary storage mechanism. The temporary storage mechanism has at least two storage positions, including a first storage position and a second storage position, each of which can hold one of the graphite boats.

[0009] A second transport mechanism is configured to dock with the temporary storage mechanism and the cooling mechanism respectively, so that the graphite boat can move between the temporary storage mechanism and the second transport mechanism, or between the cooling mechanism and the second transport mechanism;

[0010] A loading and unloading mechanism is configured to dock with the second transport mechanism to allow the graphite boat to move between the second transport mechanism and the loading and unloading mechanism. The loading and unloading mechanism is used to load and unload graphite boats. The loading and unloading mechanism has a first loading and unloading station and a second loading and unloading station, each capable of loading and unloading graphite boats.

[0011] As an optional implementation, the transmission device further includes: a plurality of transmission components, each transmission component being used to move the graphite boat along a first direction. The plurality of transmission components are respectively disposed at the first transport mechanism, the first cooling position, the second cooling position, the first temporary storage position, the second temporary storage position, the second transport mechanism, the first loading and unloading station, and the second loading and unloading station, so that the transmission components move the graphite boat between the various positions. The cooling positions and the temporary storage positions are arranged sequentially along a second direction, and the first direction and the second direction intersect each other.

[0012] As an optional implementation, the conveying assembly includes: a conveyor belt, a conveying drive, and at least two spaced-apart conveyor wheels. The conveyor belt is arranged sequentially around the at least two conveyor wheels. The conveyor belt is used to transport the graphite boat. The conveying drive is connected to at least one of the conveyor wheels and is used to drive the at least one conveyor wheel to rotate.

[0013] As an optional implementation, the first transport mechanism includes a first guide, a first moving component, and a first driving component. The first guide is disposed on the ground and extends along the second direction. The first moving component is movably connected to the first guide. The first driving component is connected to the first moving component and configured to drive the first moving component to move. The first moving component is configured to drive the conveying component located in the first transport mechanism to move along the extension direction of the first guide, so that the conveying component moves to different cooling positions or different temporary storage positions.

[0014] As an optional implementation, the first moving component includes: a first lead screw rotatably disposed on the ground, the first lead screw extending along the second direction, the first lead screw being connected to the first driving member so that the first lead screw rotates under the drive of the first driving member; and a first nut movably disposed on the first lead screw, the first nut being threadedly engaged with the first lead screw, the first nut being connected to the conveying component and the first guide member located in the first transport mechanism, wherein when the first lead screw rotates, the first nut can move along the second direction to drive the conveying component located in the first transport mechanism to move along the second direction.

[0015] As an optional implementation, when the first transport mechanism moves along the second direction, the first transport mechanism can sequentially dock with the first cooling position, the second cooling position, the first temporary storage position, and the second temporary storage position.

[0016] As an optional implementation, the first temporary storage position is set to correspond to the external temporary storage position. When the first transport mechanism moves to a position where one end is connected to the external temporary storage position, the first temporary storage position can be connected to the other end of the first transport mechanism.

[0017] As an optional implementation, the transmission device further includes two inspection mechanisms, which are respectively connected to the first transport mechanism and the second transport mechanism to enable the graphite boat to be transported to the inspection mechanism, and the inspection mechanism is used to inspect the graphite boat.

[0018] As an optional implementation, the transmission device further includes a control unit, which is electrically connected to the first transport mechanism, the second transport mechanism, and the transmission component, and is used to control the movement of the first transport mechanism, the second transport mechanism, and the transmission component.

[0019] As an optional implementation, the cooling mechanism includes: a plurality of cooling fans, which are respectively disposed at the first cooling position and the second cooling position, and the cooling fans are used to deliver cooling airflow to the graphite boat to cool the graphite boat.

[0020] Compared with the prior art, the beneficial effects of this application are:

[0021] The transmission device provided in this application solves the problems of low cooling efficiency and insufficient temporary storage capacity in the transmission and processing of graphite boats in traditional technologies by setting up multiple cooling stations, temporary storage stations, transportation mechanisms, and loading and unloading stations. By optimizing the functions and interrelationships of each mechanism, the turnover efficiency of graphite boats in the entire production process is improved, the waiting time and non-productive downtime of graphite boats are reduced, thereby improving the capacity utilization rate in the solar cell and semiconductor manufacturing process and bringing higher economic benefits to manufacturing enterprises. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the structure of the transmission device provided in the embodiments of this application;

[0024] Figure 2 This is a schematic diagram of the structure of the transmission component provided in an embodiment of this application;

[0025] Figure 3 This is a schematic diagram of the structure of the first moving component provided in an embodiment of this application;

[0026] Figure 4 This is a schematic diagram of the process of the control unit controlling the first transport component provided in an embodiment of this application;

[0027] Figure 5 This is a schematic diagram of the process of the control unit controlling the second transport component provided in the embodiment of this application.

[0028] Explanation of reference numerals in the attached figures:

[0029] 100-Transmission equipment; 200-External temporary storage position; 300-Graphite boat; 1-First transport mechanism; 11-First driving component; 12-First moving component; 121-First lead screw; 122-First nut; 2-Cooling mechanism; 21-First cooling position; 22-Second cooling position; 3-Temporary storage mechanism; 31-First temporary storage position; 32-Second temporary storage position; 4-Second transport mechanism; 5-Loading and unloading mechanism; 51-First loading and unloading station; 52-Second loading and unloading station; 6-Transmission component; 61-Conveyor belt; 62-Transmission driving component; 63-Transmission wheel; 7-Inspection mechanism; X-First direction; Y-Second direction. Detailed Implementation

[0030] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0031] In this application, the terms "upper," "lower," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated devices, elements, or components to having a specific orientation, or to be constructed and operated in a specific orientation.

[0032] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0033] Furthermore, the terms "setup" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0034] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0035] Plasma-enhanced chemical vapor deposition (PVD) is one of the important processes in the manufacturing of solar cells and semiconductors. The basic principle of PVD is to use a graphite boat to carry silicon wafers into a furnace tube, where silicon nitride films are deposited in an electrolytic gas environment. Subsequently, automated transfer equipment is used to complete the loading and unloading of silicon wafers and the cyclic transfer of the graphite boat.

[0036] In coating technology applications, the automation system of the transmission equipment has certain limitations. Specifically, the transmission equipment can only hold two sets of graphite boats: one "processed boat" carrying silicon wafers that have already undergone coating and one "processing boat" carrying silicon wafers to be coated. In actual operation, after the main unit completes the process for one batch, it needs to wait for the transmission equipment and wafer loading / unloading device to complete a series of auxiliary operations such as loading / unloading silicon wafers and cooling of the graphite boats before it can receive the next batch of graphite boats to continue the coating process.

[0037] Because the transmission equipment only supports the alternating use of two graphite boats, the main unit experiences a relatively long idle waiting time during production. From a capacity utilization perspective, the main unit cannot maintain continuous and efficient operation, thus limiting the overall capacity utilization rate.

[0038] In view of this, embodiments of this application disclose a transmission device that, by setting multiple cooling positions, temporary storage positions and loading / unloading positions within the transmission device, realizes the cyclic transmission of multiple graphite boats and improves the efficiency of the cyclic transmission of graphite boats.

[0039] The technical solution of this application will be further described below with reference to the embodiments and accompanying drawings.

[0040] Please see Figure 1 , Figure 1 This is a schematic diagram of the structure of the transmission device 100 provided in the embodiments of this application. This utility model discloses a transmission device 100 for transmitting a graphite boat 300. The transmission device 100 includes:

[0041] First transport mechanism 1, configured to dock with external temporary storage 200 so that graphite boat 300 on external temporary storage 200 can move to first transport mechanism 1;

[0042] Cooling mechanism 2 is configured to dock with first transport mechanism 1 to allow graphite boat 300 to move between first transport mechanism 1 and cooling mechanism 2. Cooling mechanism 2 is used to cool graphite boat 300. Cooling mechanism 2 has at least two cooling positions, including first cooling position 21 and second cooling position 22. First cooling position 21 and second cooling position 22 are each capable of cooling one graphite boat 300.

[0043] The temporary storage mechanism 3 is configured to dock with the first transport mechanism 1 so that the graphite boat 300 can move between the first transport mechanism 1 and the temporary storage mechanism 3. The temporary storage mechanism 3 has at least two temporary storage positions, including a first temporary storage position 31 and a second temporary storage position 32. The first temporary storage position 31 and the second temporary storage position 32 are each capable of storing one graphite boat 300.

[0044] The second transport mechanism 4 is configured to dock with the temporary storage mechanism 3 and the cooling mechanism 2 respectively, so that the graphite boat 300 can move between the temporary storage mechanism 3 and the second transport mechanism 4, or between the cooling mechanism 2 and the second transport mechanism 4.

[0045] The loading and unloading mechanism 5 is configured to dock with the second transport mechanism 4 to allow the graphite boat 300 to move between the second transport mechanism 4 and the loading and unloading mechanism 5. The loading and unloading mechanism 5 is used to load and unload graphite boats 300. The loading and unloading mechanism 5 has a first loading and unloading station 51 and a second loading and unloading station 52. The first loading and unloading station 51 and the second loading and unloading station 52 are each capable of loading and unloading graphite boats 300.

[0046] Specifically, the first transport mechanism 1 of the transmission device 100 is configured to interface with the external temporary storage position 200, enabling the graphite boat 300 on the external temporary storage position 200 to move smoothly to the first transport mechanism 1. This realizes the connection of the graphite boat 300 from the external temporary storage position 200 to the subsequent processing flow, laying the foundation for the automation of the entire transmission process. It ensures that the graphite boat 300 can enter the cyclic transmission link stably and orderly, avoiding errors and delays that may be caused by manual handling, and improving the continuity and stability of production.

[0047] The cooling mechanism 2 is connected to the first transport mechanism 1 and has at least two cooling positions. The first cooling position 21 and the second cooling position 22 can each cool one graphite boat 300, thereby enabling the cooling mechanism 2 to cool multiple graphite boats 300 at the same time, thus improving the cooling efficiency.

[0048] Understandably, in traditional processes, cooling the graphite boat 300 often takes a long time. By setting up multiple cooling positions, multiple graphite boats 300 can enter the cooling stage after completing processes such as coating, reducing the overall waiting time of multiple graphite boats 300 and thus accelerating the turnover speed of the graphite boats 300 in the entire cyclical transport process, which helps to improve overall production capacity. At the same time, the temporary storage mechanism 3 is connected to the first transport mechanism 1 and has at least two temporary storage positions. The first temporary storage position 31 and the second temporary storage position 32 can each hold one graphite boat 300, providing flexible temporary storage space for the graphite boats 300 and playing a buffering role in the production process. For example, if the previous process is completed early and the next process is not yet ready to receive the graphite boat 300, the temporary storage mechanism 3 can temporarily store the graphite boat 300 to avoid production interruption.

[0049] Therefore, in the transmission device 100 of this application, the cooling mechanism 2 is connected to the first transport mechanism 1 and has at least two cooling positions, namely the first cooling position 21 and the second cooling position 22, which can simultaneously cool two graphite boats 300, thereby improving cooling efficiency. The temporary storage mechanism 3 is also connected to the first transport mechanism 1 and has at least two temporary storage positions, namely the first temporary storage position 31 and the second temporary storage position 32, which can each store one graphite boat 300. The first transport mechanism 1 can move the graphite boat to the first cooling position 21, the second cooling position 22, the first temporary storage position 31, and the second temporary storage position 32. The arrangement of multiple cooling positions and multiple temporary storage positions provides multiple transmission spaces for the graphite boats 300, reduces the overall waiting time of multiple graphite boats 300, and improves the overall circulation efficiency.

[0050] Optionally, multiple temporary storage locations can meet the storage needs of graphite boats 300 in different states. For example, graphite boats 300 that have completed the coating process and graphite boats 300 that are to be further coated can be temporarily stored separately, which facilitates subsequent management and allocation and enhances the flexibility and controllability of the production process.

[0051] The second transport mechanism 4 is connected to the temporary storage mechanism 3 and the cooling mechanism 2 respectively, enabling the graphite boat 300 to move between the temporary storage mechanism 3 and the second transport mechanism 4, or between the cooling mechanism 2 and the second transport mechanism 4, thereby realizing the connection between different functional modules and constructing a complete transmission network.

[0052] It is understandable that the second transport mechanism 4 allows the graphite boat 300 to be flexibly scheduled between different stages such as temporary storage and cooling stages according to actual process requirements, avoiding transport obstacles between various mechanisms, ensuring the smoothness and continuity of the entire production process, improving the comprehensive utilization rate of the transmission equipment 100, reducing the downtime of the graphite boat 300 in non-production stages, and playing a key role in improving production efficiency.

[0053] Optionally, the first transport mechanism 1 and the second transport mechanism 4 can be a conveyor belt 61 that drives the graphite boat 300 to move, or a transmission mechanism that drives the graphite boat 300 carried by the carrier platform to move, or a robotic arm that moves the graphite boat 300. This application embodiment does not limit this.

[0054] The loading and unloading mechanism 5 connects with the second transport mechanism 4 and includes a first loading and unloading station 51 and a second loading and unloading station 52. Each of the first and second loading and unloading stations 51 and 52 can process loading and unloading of one graphite boat 300. Firstly, the first and second loading and unloading stations 51 and 52 improve the efficiency of loading and unloading, processing more graphite boats 300 in the same amount of time compared to a single loading and unloading station, thus meeting the needs of large-scale production.

[0055] Secondly, the docking of the loading and unloading mechanism 5 with the second transport mechanism 4 ensures a seamless connection between the transportation and loading / unloading of the graphite boat 300, reduces manual intervention, lowers the risk of silicon wafer damage caused by manual operation, improves the stability of product quality, and the efficient loading and unloading process also helps to shorten the entire production cycle and further increase production capacity.

[0056] Optionally, the two cooling stations can be located on the same cooling machine or on two separate cooling machine platforms. Similarly, the setup of the temporary storage station and the loading / unloading station can refer to the setup of the cooling stations.

[0057] Thus, the transmission device 100 provided in this application, by setting up multiple cooling positions, temporary storage positions, transportation mechanisms, and loading / unloading stations, solves the problems of low cooling efficiency and insufficient temporary storage capacity in the transmission and processing of graphite boats 300 in traditional technologies. By optimizing the functions and docking relationships of each mechanism, the turnover efficiency of graphite boats 300 in the entire transmission device 100 is improved, the waiting time and non-productive downtime of graphite boats 300 are reduced, thereby improving the capacity utilization rate in the solar cell and semiconductor manufacturing process and bringing higher economic benefits to manufacturing enterprises.

[0058] Please see Figure 2 , Figure 2 This is a schematic diagram of the structure of the transmission component provided in an embodiment of this application. In some embodiments, the transmission device 100 further includes: a plurality of transmission components 6, which are used to drive the graphite boat 300 to move along the first direction X. The plurality of transmission components 6 are respectively disposed at the first transport mechanism 1, the first cooling position 21, the second cooling position 22, the first temporary storage position 31, the second temporary storage position 32, the second transport mechanism 4, the first loading and unloading station 51, and the second loading and unloading station 52, so that the transmission components 6 drive the graphite boat 300 to move between the positions. The cooling positions and the temporary storage positions are arranged sequentially along the second direction Y, and the first direction X and the second direction Y intersect each other.

[0059] Multiple conveying components 6 enable the graphite boat 300 to move along the first direction X between various stations of the conveying equipment 100. These multiple conveying components 6 are respectively located at the first transport mechanism 1, the first cooling station 21, the second cooling station 22, the first temporary storage station 31, the second temporary storage station 32, the second transport mechanism 4, the first wafer loading / unloading station 51, and the second wafer loading / unloading station 52, ensuring seamless docking and smooth flow of the graphite boat 300 in different functional areas. This comprehensive conveying coverage allows the graphite boat 300 to accurately reach the next process stage without manual intervention, enhancing the automation and reliability of the entire conveying process and avoiding production delays and potential silicon wafer damage risks caused by manual handling or poor mechanical conveying.

[0060] Secondly, the arrangement of the cooling and temporary storage positions along the second direction Y optimizes the spatial layout and process flow of the equipment. Within a limited space, the cooling and temporary storage positions can be arranged in a compact and orderly manner through the cross-directional movement between the conveying component 6, the first transport mechanism 1, and the second transport mechanism 4, ensuring sufficient cooling and temporary storage capacity without occupying excessive space.

[0061] Meanwhile, the sequential arrangement of the cooling and temporary storage positions along the second direction Y makes the transition between different processing stages of the graphite boat 300 more efficient. For example, after the graphite boat 300 has completed cooling, it can continue to move along the first direction X to enter the temporary storage or subsequent transportation stage without complex path changes, reducing the waiting time and non-productive movement distance of the graphite boat 300 during the transportation process, and further improving production efficiency.

[0062] Furthermore, the coordinated operation of multiple conveying components 6 enhances the flexibility and adaptability of the entire conveying system. When faced with different production tasks and process requirements, the conveying components 6 can adjust the conveying sequence and path of the graphite boat 300 according to actual needs, achieving dynamic optimization of the production process. For example, if cooling demand is high during a certain period, the conveying components 6 can prioritize moving the graphite boat 300 from the cooling position to the temporary storage position to free up cooling space; while during busy loading and unloading operations, the conveying speed of the graphite boat 300 from the temporary storage position to the loading and unloading station can be accelerated. This helps to better balance the production rhythm between various processes, reduce the stagnation of the entire production line caused by congestion in one link, and enhance the equipment's compatibility with various production scenarios.

[0063] Please see Figure 2 In some embodiments, the conveying assembly 6 includes: a conveyor belt 61, a conveying drive 62, and at least two spaced conveyor wheels 63. The conveyor belt 61 is arranged around the at least two conveyor wheels 63 in sequence. The conveyor belt 61 is used to transport the graphite boat 300. The conveying drive 62 is connected to at least one conveyor wheel 63 and is used to drive the at least one conveyor wheel 63 to rotate.

[0064] It is understandable that the combination of conveyor belt 61 and multiple conveyor wheels 63 can provide stable load-bearing and transmission capabilities. Conveyor belt 61 can effectively distribute the weight of graphite boat 300, reduce single-point stress, and lower the risk of graphite boat 300 tilting or sliding during transmission, thereby improving the stability and safety of transmission.

[0065] Furthermore, the conveyor drive 62 is connected to at least one conveyor wheel 63, driving the conveyor belt 61 to run by rotating the conveyor wheel 63. The conveyor drive 62 can precisely control the rotational speed and torque of the conveyor wheel 63, thereby achieving stable adjustment of the speed of the conveyor belt 61. This allows the graphite boat 300 to move at a suitable speed between various process stages, meeting the speed requirements of different production stages.

[0066] Furthermore, the at least two spaced conveyor rollers 63 ensure the tension and stability of the conveyor belt 61's trajectory. Appropriate tension prevents the conveyor belt 61 from slipping or loosening, extending its service life and ensuring the continuity and reliability of the transmission process. The spaced arrangement of multiple conveyor rollers 63 also guides and corrects the trajectory of the conveyor belt 61, keeping the graphite boat 300 carried by the conveyor belt 61 on the predetermined track and preventing obstruction or accidents caused by conveyor belt 61 deviation.

[0067] Please see Figure 1 In some embodiments, the first transport mechanism 1 includes a first guide, a first moving component 12, and a first driving component 11. The first guide is disposed on the ground and extends along a second direction Y. The first moving component 12 is movably connected to the first guide. The first driving component 11 is connected to the first moving component 12 and is configured to drive the first moving component 12 to move. The first moving component 12 is configured to drive the conveying component 6 located in the first transport mechanism 1 to move along the extension direction of the first guide, so that the conveying component 6 moves to different cooling positions or different temporary storage positions.

[0068] The first transport mechanism 1 consists of a first guide member, a first moving component 12 and a first driving component 11, wherein the first guide member extends along the second direction Y and is located on the ground, ensuring the accuracy and stability of the moving direction.

[0069] Furthermore, the first moving component 12 is movably connected to the first guide member, and in conjunction with the driving action of the first driving component 11, it can drive the conveying component 6 located in the first transport mechanism 1 to move along the extension direction of the guide member. This enables the flexible movement of the conveying component 6 located in the first transport mechanism 1 between different cooling positions or temporary storage positions, enhancing the flexibility and continuity of the production process.

[0070] Optionally, the first moving component 12 can be a screw and nut assembly, a slide rail and slider assembly, or a belt and pulley assembly; this application embodiment does not limit this.

[0071] It is understandable that the second transportation mechanism 4 has a similar structure and beneficial effects to the first transportation mechanism 1, which will not be elaborated here.

[0072] Please see Figure 3 , Figure 3 This is a schematic diagram of the structure of the first moving component 12 provided in the embodiments of this application. In some embodiments, the first moving component 12 includes: a first lead screw 121, which is rotatably disposed on the ground and extends along the second direction Y. The first lead screw 121 is connected to a first driving member 11 so that the first lead screw 121 rotates under the drive of the first driving member 11; and a first nut 122, which is movably disposed on the first lead screw 121 and threadedly engaged with the first lead screw 121. The first nut 122 is connected to the transmission component 6 and the first guide member located in the first transport mechanism 1. When the first lead screw 121 rotates, the first nut 122 can move along the second direction Y to drive the transmission component 6 located in the first transport mechanism 1 to move along the second direction Y.

[0073] Specifically, the first moving component 12 includes a first lead screw 121 extending along the second direction Y and rotatably disposed on the ground, and a first nut 122 cooperating with the first lead screw 121. This structure enables high-precision displacement control. The first lead screw 121 is connected to the first driving member 11 and rotates stably under the drive of the first driving member 11, ensuring reliable power transmission.

[0074] The first nut 122 is threadedly engaged with the first lead screw 121 and connected to the transmission component 6 and the first guide member located in the first transport mechanism 1. When the first lead screw 121 rotates, the first nut 122 moves linearly along the extension direction of the first guide member, that is, the second direction Y, thereby driving the transmission component 6 located in the first transport mechanism 1 to move in the same direction. This transmission method has high positioning accuracy and stability, and can ensure that the graphite boat 300 can be accurately transported to the designated position.

[0075] Furthermore, the screw and nut drive structure is relatively simple, easy to maintain and service, and can reduce the long-term operating costs of the transmission equipment 100. At the same time, due to the stability and reliability of the screw and nut drive structure, this transmission method can adapt to long-term, high-frequency industrial production environments, reducing downtime of the transmission equipment 100 and improving the overall availability of the transmission equipment 100.

[0076] Please see Figure 1 In some embodiments, when the first transport mechanism 1 moves along the second direction Y, the first transport mechanism 1 can sequentially dock with the first cooling position 21, the second cooling position 22, the first temporary storage position 31, and the second temporary storage position 32.

[0077] When the first transport mechanism 1 moves along the second direction Y, it can precisely dock sequentially with the first cooling position 21, the second cooling position 22, the first temporary storage position 31, and the second temporary storage position 32, thereby improving the continuity and efficiency of the production process. By docking with different functional positions in sequence, the graphite boat 300 can perform cooling and temporary storage operations according to the preset process sequence, achieving automated flow without manual intervention, thus reducing errors and delays that may be caused by manual operation.

[0078] Secondly, this sequential docking capability enhances the flexibility of the production process. During peak production periods, graphite boats 300 can be prioritized for cooling or temporary storage based on actual needs to ensure efficient production line operation. Simultaneously, this design also allows for the flexible relocation of graphite boats 300 to other available locations during maintenance or adjustments to the transmission equipment 100, reducing the risk of production interruptions.

[0079] Furthermore, this docking method also helps optimize production scheduling. By controlling the movement of the first transport mechanism 1, the flow sequence of the graphite boats 300 can be rationally arranged according to real-time production needs and process requirements, maximizing the utilization of production resources. For example, when a cooling station or temporary storage station completes its cooling function, the first transport mechanism 1 can quickly transfer the graphite boats 300 above it to the next process stage, thereby maintaining the smoothness and efficiency of the entire production line.

[0080] Please see Figure 1 In some embodiments, the first temporary storage position 31 is set to correspond to the external temporary storage position 200. When the first transport mechanism 1 moves to a position where one end is connected to the external temporary storage position 200, the first temporary storage position 31 can be connected to the other end of the first transport mechanism 1.

[0081] Furthermore, the external temporary storage position 200 is located on the external host unit, i.e., the position where it docks with the coating equipment. The graphite boat 300 can be moved from the external temporary storage position 200 of the host unit to the coating equipment, or from the coating equipment to the external temporary storage position 200 of the host unit.

[0082] When the first transport mechanism 1 moves to a position where one end docks with the external temporary storage position 200, the first temporary storage position 31 can dock with the other end of the first transport mechanism 1. The reason for this docking setting is that the coating process can process two graphite boats 300 at a time, thereby allowing the two graphite boats 300 to move directly to the first temporary storage position 31 and the first transport mechanism 1 for placement at once.

[0083] Understandably, this docking setup improves production efficiency because the two graphite boats 300 can be processed and moved simultaneously, reducing the need for multiple moves and adjustments between different locations and avoiding repetitive loading and unloading steps, thereby shortening the overall production cycle. This batch processing capability allows the transmission device 100 to complete more tasks in the same amount of time, which is particularly important for large-scale production environments and can effectively improve the transmission efficiency of the transmission device 100.

[0084] This docking setup also reduces the complexity of mechanical movements, lowers the risk of transmission equipment 100 malfunctions, and reduces maintenance and debugging workload. Once coating is complete, the graphite boat 300 can be quickly transferred to the temporary storage and transportation stage, allowing the main unit to prepare for the next batch of coating work more quickly and reducing waiting time.

[0085] In addition, this docking mechanism optimizes production scheduling, making production plans more compact and orderly, because two graphite boats 300 can be processed simultaneously, and subsequent processes such as cooling, temporary storage and loading / unloading can be arranged more precisely, reducing waiting and downtime in the production process.

[0086] It is understandable that the coating equipment can process two graphite boats 300 at a time, and according to the position of the graphite boats 300 in the coating equipment, they can be divided into front boats and rear boats.

[0087] The cyclic transport process of the rear boat within the transport equipment 100 is as follows: The rear boat moves from the external temporary storage position 200 to the first transport mechanism 1. The first transport mechanism 1 moves the rear boat to the second cooling position 22. After the rear boat has completed cooling, the second transport mechanism 4 transports the rear boat to the second loading and unloading station 52. After the rear boat completes the loading and unloading process at the second loading and unloading station 52, the second transport mechanism 4 transports the rear boat to the second temporary storage position 32. Subsequently, the first transport mechanism 1 moves the rear boat to a position that docks with the external temporary storage position 200 and the first temporary storage position 31. When the front boat, which has completed the loading and unloading process, is located at the first temporary storage position 31, the front boat and the rear boat move synchronously to the external temporary storage position 200 to prepare for the next coating.

[0088] The cyclical transport process of the front boat within the transport equipment 100 is as follows: the front boat moves from the external temporary storage position 200 to the first temporary storage position 31 via the first transport mechanism 1. After the first transport mechanism 1 transfers the rear boat to other workstations, it moves the front boat from the first temporary storage position 31 to the first cooling position 21. After the front boat completes cooling at the first cooling position 21, the second transport mechanism 4 transports it to the first loading and unloading workstation 51. After the front boat completes the loading and unloading process at the first loading and unloading workstation 51, the second transport mechanism 4 transports it from the first loading and unloading workstation 51 to the first temporary storage position 31. When the rear boat, having completed the loading and unloading process, moves to the first transport mechanism 1, the front boat and the rear boat move synchronously to the external temporary storage position 200 to prepare for the next coating operation.

[0089] Furthermore, when there are two cooling stations, two temporary storage stations, and two loading and unloading stations, the coating equipment can process three sets of graphite boats 300 simultaneously. Each set of graphite boats 300 includes a front boat and a rear boat. The three sets of graphite boats 300 form a "convenience line" for transmission. After the first set of graphite boats 300 enters the transmission equipment 100, the second set of graphite boats 300 can enter the transmission equipment 100 after the first front boat and the first rear boat have moved to the first cooling station 21 and the second cooling station 22. Similarly, the time for the third set of graphite boats 300 to enter the transmission equipment 100 can be obtained.

[0090] In this way, the transportation efficiency of the transmission equipment 100 is improved, and the idle time of the coating equipment is reduced, thereby improving the utilization efficiency of the coating equipment and increasing the production capacity of silicon wafers.

[0091] Please see Figure 1 In some embodiments, the transmission device 100 further includes two inspection mechanisms 7, which are respectively connected to the first transport mechanism 1 and the second transport mechanism 4, so that the graphite boat 300 can be transported to the inspection mechanism 7, and the inspection mechanism 7 is used to inspect the graphite boat 300.

[0092] The inspection mechanism 7 allows for real-time quality checks at critical points during the transport of the graphite boat 300, ensuring that each graphite boat 300 meets process requirements before entering subsequent processes. The inspection mechanism 7 is connected to the first transport mechanism 1 and the second transport mechanism 4 respectively, allowing for timely inspection after the graphite boat 300 completes different stages of processing.

[0093] The establishment of inspection unit 7 helps prevent defective graphite boats 300 from entering subsequent production stages, avoiding resource waste and production delays caused by quality issues. By identifying and addressing potential problems at an early stage, the overall quality of the product can be improved.

[0094] Optionally, the inspection mechanism 7 can be set to manually inspect the quality of the graphite boat 300, or a detection unit can be provided to take pictures and perform image detection on the graphite boat 300.

[0095] Please refer to Figure 4 and Figure 5 , Figure 4 FIG. is a schematic flow chart of the control unit provided by the embodiment of the present application for controlling the first transportation component, Figure 5 FIG. is a schematic flow chart of the control unit provided by the embodiment of the present application for controlling the second transportation component. In some embodiments, the transmission device 100 further includes: a control unit, which is electrically connected to the first transportation mechanism 1, the second transportation mechanism 4, and the transfer component 6. The control unit is used to control the movement of the first transportation mechanism 1, the second transportation mechanism 4, and the transfer component 6.

[0096] Specifically, the electrical connection of the control unit to the first transportation mechanism 1, the second transportation mechanism 4, and the transfer component 6 realizes highly automated control of the entire transmission process. Through centralized control, the transmission device 100 can execute various transportation and processing tasks according to preset programs and logical sequences, reducing the need for manual intervention, reducing the risk of human operation errors, and improving the stability and reliability of production.

[0097] The control unit enhances the coordination and coherence of the production process. The control unit can flexibly adjust the running speed and sequence of each mechanism according to real-time production requirements and process parameters. When a delay occurs or priority processing is required in a certain link, the control unit can quickly respond, optimize the transportation path and operation process, and ensure the efficient operation of the production line.

[0098] It can be understood that the presence of the control unit improves the intelligent level of the transmission device 100. The control unit can collect and analyze the operation data of the transmission device 100 in real time through integrated sensors, monitoring devices, and feedback systems, such as information on the position, temperature, speed, etc. of the graphite boat 300. Based on these data, the control unit can make intelligent decisions, such as automatically adjusting the transfer speed, optimizing the cooling time, predicting equipment failures, etc., thereby further improving production efficiency and the lifespan of the transmission device 100.

[0099] In addition, through a unified control interface, the operator can monitor the running state of the entire transmission device 100, perform parameter settings, and troubleshoot faults. This reduces the professional requirements for the operator, reduces training costs and maintenance time, and improves the overall availability of the transmission device 100. ​​

[0101] The cooling mechanism 2 employs multiple cooling fans located at the first cooling position 21 and the second cooling position 22, primarily to improve the cooling efficiency of the graphite boat 300. The cooling fans effectively deliver cooling airflow to the graphite boat 300, thereby accelerating its heat dissipation process. Compared to natural cooling, this active cooling method significantly shortens the cooling time of the graphite boat 300 and improves production efficiency.

[0102] Specifically, the cooling fan design allows the cooling airflow to act directly on the surface of the graphite boat 300, carrying away the heat generated during the coating process. This cooling method not only improves the cooling speed but also ensures that the graphite boat 300 reaches the required temperature conditions before entering subsequent processes, preventing excessively high temperatures from affecting the quality of subsequent processes.

[0103] In addition, the distribution design of the cooling fans, with multiple fans set in each cooling position, can ensure the uniform distribution of cooling airflow, thereby achieving uniform cooling of the Graphite Boat 300.

[0104] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A transfer apparatus for transferring a graphite boat, characterized by comprising: The transmission device includes: A first transport mechanism is configured to dock with an external temporary storage location so that the graphite boat on the external temporary storage location can be moved to the first transport mechanism. A cooling mechanism is configured to dock with the first transport mechanism to allow the graphite boat to move between the first transport mechanism and the cooling mechanism. The cooling mechanism is used to cool the graphite boat and has at least two cooling positions, including a first cooling position and a second cooling position, each of which is capable of cooling one of the graphite boats. A temporary storage mechanism is configured to dock with the first transport mechanism to allow the graphite boat to move between the first transport mechanism and the temporary storage mechanism. The temporary storage mechanism has at least two storage positions, including a first storage position and a second storage position, each of which can hold one of the graphite boats. A second transport mechanism is configured to dock with the temporary storage mechanism and the cooling mechanism respectively, so that the graphite boat can move between the temporary storage mechanism and the second transport mechanism, or between the cooling mechanism and the second transport mechanism; A loading and unloading mechanism is configured to dock with the second transport mechanism to allow the graphite boat to move between the second transport mechanism and the loading and unloading mechanism. The loading and unloading mechanism is used to load and unload graphite boats. The loading and unloading mechanism has a first loading and unloading station and a second loading and unloading station, each capable of loading and unloading graphite boats.

2. The transmission device according to claim 1, characterized in that, The transmission device further includes: Multiple conveying components are provided to move the graphite boat along a first direction. The multiple conveying components are respectively disposed at the first transport mechanism, the first cooling position, the second cooling position, the first temporary storage position, the second temporary storage position, the second transport mechanism, the first loading and unloading station, and the second loading and unloading station, so that the conveying components move the graphite boat between the various positions. The cooling positions and the temporary storage positions are arranged sequentially along a second direction, and the first direction and the second direction intersect each other.

3. The transmission device according to claim 2, characterized in that, The transmission component includes: The system includes a conveyor belt, a conveyor drive, and at least two spaced-apart conveyor wheels. The conveyor belt is arranged sequentially around the at least two conveyor wheels. The conveyor belt is used to transport the graphite boat. The conveyor drive is connected to at least one of the conveyor wheels and is used to drive the at least one of the conveyor wheels to rotate.

4. The transmission device according to claim 2, characterized in that, The first transport mechanism includes a first guide, a first moving component, and a first drive component. The first guide is disposed on the ground and extends along the second direction. The first moving component is movably connected to the first guide. The first drive component is connected to the first moving component and is configured to drive the first moving component to move. The first moving component is configured to move the conveying component located in the first transport mechanism along the extension direction of the first guide, so that the conveying component moves to a different cooling position or a different temporary storage position.

5. The transmission device according to claim 4, characterized in that, The first moving component includes: A first lead screw is rotatably mounted on the ground and extends along the second direction. The first lead screw is connected to the first driving member so that the first lead screw rotates under the drive of the first driving member. A first nut is movably disposed on the first lead screw. The first nut is threadedly engaged with the first lead screw. The first nut is connected to the conveying assembly and the first guide located in the first transport mechanism. When the first lead screw rotates, the first nut can move along the second direction to drive the conveying assembly located in the first transport mechanism to move along the second direction.

6. The transmission device according to claim 4, characterized in that, When the first transport mechanism moves along the second direction, the first transport mechanism can sequentially dock with the first cooling position, the second cooling position, the first temporary storage position, and the second temporary storage position.

7. The transmission device according to claim 6, characterized in that, The first temporary storage position is set in relation to the external temporary storage position. When the first transport mechanism moves to a position where one end is connected to the external temporary storage position, the first temporary storage position can be connected to the other end of the first transport mechanism.

8. The transmission device according to any one of claims 1-7, characterized in that, The transmission device further includes: Two inspection mechanisms are respectively docked with the first transport mechanism and the second transport mechanism to enable the graphite boat to be transported to the inspection mechanism, which is used to inspect the graphite boat.

9. The transmission device according to claim 2, characterized in that, The transmission device further includes: A control unit is electrically connected to the first transport mechanism, the second transport mechanism, and the conveying component, and the control unit is used to control the movement of the first transport mechanism, the second transport mechanism, and the conveying component.

10. The transmission device according to any one of claims 1-7, characterized in that, The cooling mechanism includes: Multiple cooling fans are respectively disposed at the first cooling position and the second cooling position. The cooling fans are used to deliver cooling airflow to the graphite boat to cool the graphite boat.

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