A stable temperature measuring structure of a DCE bottle

Abstract

The utility model relates to chemical vapor deposition equipment technical field especially a kind of stable temperature measuring structure of DCE bottle, including: the bottle body of installation mouth configuration;Detachable connection has fixed component in the inside of the installation mouth, the inside fixed mounting of fixed component has thermocouple, the detection end of the thermocouple extends to the inside of the bottle body;Wherein, still fixed mounting has gas delivery pipe on the bottle body, the upper end of the gas delivery pipe is placed above the bottle body, in the utility model, inert gas is passed into bubble by being inhaled into the liquid in bottle body, and the physical movement of bubble is used to cause forced convection inside liquid, and this forced convection greatly accelerates the transmission process of heat from bottle wall to liquid center, so that the time of entire chemical source system to reach real thermodynamic equilibrium is effectively shortened, significantly reduces the invalid idle time of equipment due to waiting, directly improves the effective utilization rate of equipment and the overall productivity of production line.

Description

Technical Field

[0001] This utility model relates to the field of chemical vapor deposition equipment technology, and in particular to a stable temperature measurement structure for a DCE bottle. Background Technology

[0002] In semiconductor manufacturing processes, chemical vapor deposition is a key technology for growing various thin films on wafer surfaces. Currently, mainstream CVD equipment typically uses liquid chemicals such as dichloroethylene (DCE) as precursors. To achieve a stable process, the cylinder containing the liquid chemical needs to be heated to a specific process temperature so that the liquid continuously evaporates into a stable flow rate of vapor, which is then transported to the reaction chamber.

[0003] According to the equipment maintenance procedures, DCE bottles are consumables that need to be replaced regularly. After replacing with a new DCE bottle, it must be heated until its temperature reaches and stabilizes at the target value set by the process. In the existing technology, the temperature stability is usually determined by monitoring the reading of the temperature sensor installed on the outer wall of the DCE bottle.

[0004] However, due to the low thermal conductivity of liquid chemicals and the high thermal conductivity of metal bottles, when the heating system is working, the temperature of the outer wall of the bottle rises rapidly and reaches the set value, causing the temperature sensor to give a signal that the temperature has stabilized. But at this time, most of the liquid inside the bottle is still far below the set temperature, meaning that there is a significant temperature gradient at the macroscopic level of the system, and a true thermodynamic equilibrium has not been reached. If wafer processing begins at this point, the first few wafers produced will have unqualified film quality due to the actual instability of the chemical source vapor flow and temperature, resulting in product scrap.

[0005] To overcome the above-mentioned defects, the commonly used solution is to not start production immediately after the temperature sensor shows that it has stabilized, but instead adopt a fixed baking waiting period of up to 2 hours, so that the temperature of the internal liquid can be slowly conducted to an equilibrium state. Although this solution avoids the scrapping of the initial product to a certain extent, it itself constitutes a new technical problem, that is, it causes the equipment to have an ineffective idle time of up to 2 hours after each change of chemical source, which greatly reduces the utilization rate of expensive equipment and the production efficiency of the factory.

[0006] Therefore, in order to improve the stability and accuracy of DCE bottle detection, we propose a stable temperature measurement structure for DCE bottles. Utility Model Content

[0007] The purpose of this invention is to address the aforementioned shortcomings in the existing technology by proposing a stable temperature measurement structure for a DCE bottle.

[0008] To achieve the above objectives, the present invention adopts the following technical solution: Design a stable temperature measurement structure for a DCE bottle, including: Bottle body equipped with an installation port; A fixing component is detachably connected inside the mounting port, and a thermocouple is fixedly installed inside the fixing component, with the probe end of the thermocouple extending into the interior of the bottle body; A gas delivery pipe is also fixedly installed on the bottle body, with its upper end positioned above the bottle body and its lower end extending to the inner bottom of the bottle body.

[0009] Furthermore, the fixing component includes a connecting sleeve, and the upper end of the thermocouple is threadedly connected to the connecting sleeve; A force-bearing part is also formed at the bottom of the connecting sleeve, and the force-bearing part is sleeved on the outside of the thermocouple.

[0010] Furthermore, a retaining sleeve is formed on the outer side of the connecting sleeve, and a snap-fit ​​is formed between the retaining sleeve and the connecting sleeve, and the snap-fit ​​is fitted onto the outer side of the mounting opening.

[0011] Furthermore, there are several deformation openings on the circumferential portion of the end face of the sleeve, and a clamping arm is constructed on the sleeve between every two deformation openings. The tail end of the clamping arm is formed with an abutting cone. A locking sleeve is threaded onto the outer side of the ferrule, and the locking sleeve abuts against the abutting cone.

[0012] Furthermore, the sleeve has an L-shaped structure; A locking protrusion is formed inside the upper folded surface of the sleeve, and multiple positioning holes are formed above the mounting opening. The locking protrusion and the positioning holes engage with each other.

[0013] Furthermore, the mounting port has a tubular structure, and the outer wall of the connecting sleeve fits into the inner wall of the mounting port.

[0014] Furthermore, a hollow ring is installed and connected to the bottom end of the gas transmission pipe. The hollow ring is sleeved on the outside of the thermocouple, and several air holes are distributed around the upper circumference of the hollow ring.

[0015] Furthermore, it also includes an exhaust pipe fixed to the bottle body, and a material outlet is connected to the top of the bottle body.

[0016] Furthermore, the bottom end of the thermocouple does not contact the inner wall of the bottle.

[0017] The present invention proposes a stable temperature measurement structure for a DCE bottle, which has the following advantages: In this invention, inert gas is introduced into the liquid in the bottle to generate bubbles. The physical movement of the bubbles induces forced convection inside the liquid. This forced convection greatly accelerates the heat transfer process from the bottle wall to the center of the liquid, thereby effectively shortening the time for the entire chemical source system to reach true thermodynamic equilibrium. It significantly reduces the ineffective idle time caused by waiting, and directly improves the effective utilization rate of the equipment and the overall production capacity of the production line. In addition, the fixed components can improve the support stability of the thermocouple, so as to avoid the problem of the thermocouple becoming unstable during the bubble bubbling process. Attached Figure Description

[0018] Figure 1 This is a perspective view of the present utility model; Figure 2 This is a cross-sectional structural diagram of the present invention; Figure 3 for Figure 2 A magnified structural diagram of area A; Figure 4 This is a schematic diagram of the mounting port structure of this utility model; Figure 5 This is a schematic diagram of the gas pipeline structure of this utility model; Figure 6 This is a schematic diagram of the card sleeve structure of this utility model.

[0019] In the diagram: 1. Bottle body; 10. Mounting port; 11. Positioning port; 12. Exhaust pipe; 13. Material port; 2. Fixing component; 21. Connecting sleeve; 22. Force-bearing part; 23. Sleeve; 24. Bayonet; 25. Deformation port; 26. Clamping arm; 27. Abutting cone; 28. Locking sleeve; 29. ​​Locking protrusion; 3. Thermocouple; 4. Gas pipe; 41. Hollow ring; 42. Air hole. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0021] Reference Figure 1-6 As one embodiment of this utility model, a stable temperature measuring structure for a DCE bottle is disclosed. Specifically, the temperature measuring structure includes a bottle body 1 with an installation port 10. Of course, in this embodiment, the interior of the bottle body 1 is used to store DCE liquid. A fixing component 2 is detachably connected inside the mounting port 10. A thermocouple 3 is fixedly installed inside the fixing component 2, and the detection end of the thermocouple 3 extends into the interior of the bottle body 1. Among them, a gas supply pipe 4 is also fixedly installed on the bottle body 1, with the upper end of the gas supply pipe 4 positioned above the bottle body 1 and its lower end extending to the inner bottom of the bottle body 1.

[0022] In this embodiment, the gas supply pipe 4 is used to connect inert gas. In this embodiment, high-purity nitrogen is used as an example. Nitrogen overflows from the bottom of the bottle 1 and rises in the viscous DCE liquid in the form of bubbles. This continuous bubbling process plays a role in bubble stirring. It forces the hot liquid at the bottom and the wall of the bottle to mix violently with the cold liquid in the center of the bottle, which achieves forced convection heat transfer, thereby achieving sufficient mixing of the internal DCE liquid.

[0023] In some embodiments, the fixing component 2 of the present invention includes a connecting sleeve 21, and the upper end of the thermocouple 3 is threadedly connected to the connecting sleeve 21. A force-bearing part 22 is also formed at the bottom of the connecting sleeve 21. The force-bearing part 22 is sleeved on the outer side of the thermocouple 3. Specifically, the force-bearing part 22 is an inwardly narrowed opening, which is inserted into the rod end of the thermocouple. Through the design of the force-bearing part 22, the support stability of the thermocouple 3 can be improved, so as to avoid the problem of unstable position of the thermocouple 3 during the bubble agitation process.

[0024] Based on the above embodiments, in this embodiment, a retaining sleeve 23 is also formed on the outer side of the connecting sleeve 21, and a bayonet 24 is formed between the retaining sleeve 23 and the connecting sleeve 21, and the bayonet 24 is fitted on the outer side of the mounting port 10.

[0025] Of course, in order to fix the sleeve 23, in this embodiment, there are a number of deformation holes 25 on the circumferential part of the end face of the sleeve 23, and a clamping arm 26 is formed on the sleeve 23 between every two deformation holes 25. The tail end of the clamping arm 26 is formed with an abutting cone 27. A locking sleeve 28 is threadedly connected to the outside of the sleeve 23, and the locking sleeve 28 abuts against the abutting cone 27.

[0026] In other words, in actual use, the locking 24 between the ferrule 23 and the connecting sleeve 21 is first fitted onto the outside of the mounting opening 10. At this time, the locking sleeve 28 can be rotated. Since the locking sleeve 28 and the ferrule 23 are threadedly connected, when the locking sleeve 28 moves in, its end will abut against the aforementioned abutting cone 27 and retract inward. In this way, when multiple abutting cones 27 retract inward simultaneously, the elastic force of the clamping arm 26 can be used to tightly clamp and fix the entire ferrule 23 on the outside of the mounting opening 10, thereby achieving the installation stability of the thermocouple 3.

[0027] Of course, those skilled in the art will know that the card sleeve 23 can be made of plastic to meet its elastic deformation requirements.

[0028] The purpose of using the above-mentioned fixing method is: When installing thermocouple 3, the threaded connection force between connecting sleeve 21 and thermocouple 3, as well as the direct force of force-bearing part 22 on thermocouple 3, can significantly improve the stress stability of thermocouple 3, thereby accurately detecting the internal temperature of bottle 1. Furthermore, since the ferrule 23 is connected to the mounting port 10 by clamping and fixing, there is no need to rotate the thermocouple 3 when installing it, which can reduce the problem of wire tangling. At the same time, the circumferential angle of the installation is adjustable, and the circumferential circumference of the thermocouple 3 can be easily adjusted according to the actual installation needs, thereby improving the ease of installation.

[0029] It should be noted that the card sleeve 23 described in this embodiment has an L-shaped structure; A locking protrusion 29 is formed in the upper folded surface of the sleeve 23, and a plurality of positioning holes 11 are formed above the mounting port 10. The locking protrusion 29 and the positioning holes 11 are engaged with each other.

[0030] Specifically, the design of the positioning port 11 and the locking protrusion 29 in this embodiment is to prevent the circumferential rotation of the sleeve 23 during installation. That is, when the sleeve 23 is fitted onto the outside of the installation port 10, the locking protrusion 29 engages with the positioning port 11, which fixes the circumferential position of the sleeve 23 and avoids the problem of circumferential rotation of the sleeve 23 when the locking sleeve 28 is installed later.

[0031] Preferably, in this embodiment, the mounting port 10 has a tubular structure, and the outer wall of the connecting sleeve 21 fits against the inner wall of the mounting port 10.

[0032] In some embodiments, the bottom end of the gas pipe 4 in this invention is equipped with and connected to a hollow ring 41. The hollow ring 41 is sleeved on the outside of the thermocouple 3, and a plurality of air holes 42 are distributed around the upper circumference of the hollow ring 41.

[0033] Of course, in this embodiment, the hollow ring 41 is located on the inner side of the bottle body 1 to avoid the upward movement of bubbles to achieve stirring of the liquid. In addition, the vent 42 is connected to the hollow ring 41. When nitrogen is pumped into the inside of the gas supply pipe 4, the nitrogen enters the hollow ring 41 along the gas supply pipe 4 and is then pumped out upward through the vent 42. The gas forms bubbles in the liquid, thus achieving sufficient mixing of the internal DCE liquid.

[0034] Based on the above embodiments, the present invention also includes an exhaust pipe 12 fixed on the bottle body 1. The exhaust pipe 12 is used to connect to the output gas path. When nitrogen is continuously and synchronously supplied inside the bottle body 1, the discharged nitrogen can be discharged to the outside through the exhaust pipe 12. Of course, in order to supply raw materials to the reaction chamber, a material port 13 is also connected above the bottle body 1 in this embodiment.

[0035] It is worth noting that in this embodiment, the bottom end of the thermocouple 3 and the inner wall of the bottle 1 do not contact each other. By setting the thermocouple 3 and the bottle 1 at intervals, the possibility of contact between them is reduced, thereby further ensuring the accuracy and stability of liquid temperature detection.

[0036] In summary, this invention generates bubbles by introducing inert gas into the liquid in bottle 1. The physical movement of the bubbles induces forced convection within the liquid. This forced convection greatly accelerates the heat transfer process from the bottle wall to the center of the liquid, thereby significantly reducing the time for the entire chemical source system to reach true thermodynamic equilibrium from the existing technology of 2 hours to about 30 minutes. This significantly reduces the ineffective idle time caused by waiting, and directly improves the effective utilization rate of the equipment and the overall production capacity of the production line.

[0037] Furthermore, by actively accelerating the thermal equilibrium process, it is ensured that the temperature of the liquid chemical source is already in a true, uniform, and stable state when the first wafer is processed. This fundamentally eliminates the problem of initial wafer process result deviation caused by "false" temperature stability, improves the consistency of product quality within and between batches, and enhances the stability and predictability of the entire CVD process.

[0038] Furthermore, the overall structure is simple, requiring no addition of complex hardware or large-scale modification of the equipment. It can be achieved simply by adding a gas introduction step. Therefore, this solution has the advantages of extremely low modification cost, no risk of pollution, and easy to deploy and implement quickly on existing equipment.

[0039] Furthermore, the fixed component 2 can improve the support stability of the thermocouple 3, so as to avoid the problem of unstable position of the thermocouple 3 during the bubble bubbling process.

[0040] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A stable temperature measurement structure for a DCE bottle, characterized in that, include: Bottle body (1) with an installation port (10); A fixing component (2) is detachably connected inside the mounting port (10), and a thermocouple (3) is fixedly installed inside the fixing component (2), with the probe end of the thermocouple (3) extending into the interior of the bottle body (1). Among them, a gas supply pipe (4) is fixedly installed on the bottle body (1), with the upper end of the gas supply pipe (4) positioned above the bottle body (1) and its lower end extending to the inner bottom of the bottle body (1).

2. The stable temperature measurement structure for a DCE bottle according to claim 1, characterized in that: The fixing component (2) includes a connecting sleeve (21), and the upper end of the thermocouple (3) is threadedly connected to the connecting sleeve (21); A force-bearing part (22) is also formed at the bottom of the connecting sleeve (21), and the force-bearing part (22) and the outer side of the thermocouple (3) are fitted together.

3. The stable temperature measurement structure for a DCE bottle according to claim 2, characterized in that: The outer side of the connecting sleeve (21) is also formed with a retainer (23), and a snap (24) is formed between the retainer (23) and the connecting sleeve (21), and the snap (24) is fitted onto the outer side of the mounting port (10).

4. The stable temperature measurement structure for a DCE bottle according to claim 3, characterized in that: The circumferential portion of the end face of the sleeve (23) has several deformation openings (25), and a clamping arm (26) is constructed on the sleeve (23) between every two deformation openings (25). The tail end of the clamping arm (26) is formed with an abutting cone (27). A locking sleeve (28) is threadedly connected to the outer side of the sleeve (23), and the locking sleeve (28) abuts against the abutting cone (27).

5. The stable temperature measurement structure for a DCE bottle according to claim 3, characterized in that: The sleeve (23) has an L-shaped structure; A locking protrusion (29) is formed in the upper folded surface of the sleeve (23), and a plurality of positioning holes (11) are formed above the mounting port (10). The locking protrusion (29) and the positioning holes (11) are engaged with each other.

6. A stable temperature measuring structure for a DCE bottle according to any one of claims 2-5, characterized in that: The mounting port (10) has a tubular structure, and the outer wall of the connecting sleeve (21) fits against the inner wall of the mounting port (10).

7. The stable temperature measurement structure for a DCE bottle according to claim 1, characterized in that: The bottom end of the gas pipe (4) is equipped with and connected to a hollow ring (41). The hollow ring (41) is sleeved on the outside of the thermocouple (3). Several air holes (42) are distributed around the upper circumference of the hollow ring (41).

8. The stable temperature measurement structure for a DCE bottle according to claim 1, characterized in that: It also includes an exhaust pipe (12) fixed on the bottle body (1), and a material outlet (13) is connected to the top of the bottle body (1).

9. The stable temperature measurement structure for a DCE bottle according to claim 1, characterized in that: The bottom end of the thermocouple (3) and the inner wall of the bottle (1) do not contact each other.

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