A semiconductor defect inspection apparatus air path control system

Abstract

The utility model relates to a kind of semiconductor defect detection equipment gas circuit control system, including gas circuit control assembly, controller is provided on gas circuit control assembly, positive pressure main control valve, negative pressure main control valve, multiple positive pressure sub-control valve and multiple negative pressure sub-control valve;The air inlet end of positive pressure main control valve is communicated with gas supply equipment, the air outlet end of positive pressure main control valve is communicated with the air inlet end of each positive pressure sub-control valve respectively, and the air outlet end of each positive pressure sub-control valve is connected with different positive pressure requirement detection equipment respectively;The air outlet end of negative pressure main control valve is communicated with vacuum equipment, the air inlet end of negative pressure main control valve is communicated with the air outlet end of each negative pressure sub-control valve respectively, and the air inlet end of each negative pressure sub-control valve is connected with different negative pressure requirement detection equipment respectively;Controller is electrically connected with positive pressure main control valve, negative pressure main control valve, positive pressure sub-control valve and negative pressure sub-control valve respectively.The system can be according to use demand gas circuit extension, simple structure, strong universality, improve the convenience of maintenance and management.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor testing technology, and specifically to a pneumatic control system for a semiconductor defect detection device. Background Technology

[0002] Semiconductor manufacturing lines employ numerous testing devices, typically consisting of three main parts: the EFEM (Equipment Front End Module) responsible for loading and unloading wafers; the testing motion platform; and the equipment's enclosure and electrical control system. These testing devices all require pneumatic support. For instance, the EFEM needs pneumatic suction to grip the products during wafer transfer, the testing motion platform uses pneumatic suction to hold the products for movement and testing, and there are also special areas requiring dust extraction and air blowing.

[0003] Currently, the testing equipment in semiconductor manufacturing lines that requires pneumatic support is connected to the plant administration interface separately, resulting in dense and complicated pneumatic pipelines that are inconvenient for maintenance and management. Utility Model Content

[0004] This invention provides a pneumatic control system for a semiconductor defect detection device to solve at least one of the aforementioned technical problems in the prior art.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows: A pneumatic control system for a semiconductor defect detection device includes a pneumatic control assembly, which is equipped with a controller, a positive pressure main control valve, a negative pressure main control valve, multiple positive pressure sub-control valves, and multiple negative pressure sub-control valves. The air inlet of the positive pressure main control valve is connected to the air supply equipment, the air outlet of the positive pressure main control valve is connected to the air inlet of each of the positive pressure sub-control valves, and the air outlet of each of the positive pressure sub-control valves is connected to different positive pressure demand detection devices. The outlet of the negative pressure main control valve is connected to a vacuum device, and the inlet of the negative pressure main control valve is connected to the outlet of each negative pressure sub-control valve. The inlet of each negative pressure sub-control valve is connected to a different negative pressure demand detection device. The controller is electrically connected to the positive pressure main control valve, the negative pressure main control valve, the positive pressure sub-control valve, and the negative pressure sub-control valve, respectively.

[0006] Compared with the prior art, the present invention has at least the following beneficial effects: The pneumatic control system for semiconductor defect detection equipment provided by this utility model can expand the pneumatic path according to the usage requirements. It has a simple structure and strong versatility. It connects all the devices in the semiconductor defect detection equipment that require pneumatic path support to the pneumatic control assembly, which improves the convenience of maintenance and management.

[0007] Based on the above technical solution, the present invention can be further improved as follows.

[0008] In one possible implementation, an air purification device is provided between the air inlet of the positive pressure main control valve and the air supply device.

[0009] The beneficial effects of the above solution are: by setting up an air purification device to purify the air source provided by the air supply equipment, it is possible to effectively prevent the positive pressure demand detection equipment from being contaminated by impurities in the air source, thus ensuring that it can perform detection normally.

[0010] In one possible implementation, the air purification device includes an air filter, the air inlet of which is connected to the air supply device, and the air outlet of which is connected to the air inlet of the positive pressure main control valve.

[0011] The beneficial effects of the above solution are: by setting up an air filter, impurities in the air source can be filtered out, preventing them from entering the positive pressure demand testing equipment and affecting the positive pressure demand testing equipment and the semiconductor components to be tested, thus ensuring the smooth progress of the test.

[0012] In one possible implementation, the air purification device includes an oil mist separator, the inlet of which is connected to the air supply device, and the outlet of which is connected to the inlet of the positive pressure main control valve.

[0013] The beneficial effects of the above solution are: by setting up an oil mist separator, oil impurities in the air source can be filtered out, preventing them from entering the positive pressure demand testing equipment and contaminating the semiconductor components to be tested, thus ensuring the accuracy of the test.

[0014] In one possible implementation, an air drying device is provided between the air inlet of the positive pressure main control valve and the air supply device, and the air drying device is electrically connected to the controller.

[0015] The beneficial effects of the above solution are: by setting up an air drying device to dry the air source, it is possible to prevent moisture in the air source from entering the positive pressure demand detection equipment and corroding the positive pressure demand detection equipment and the semiconductor components to be tested, thereby extending the service life of the positive pressure demand detection equipment and ensuring the accuracy of the test.

[0016] In one possible implementation, the pneumatic control assembly is further provided with a pressure detection device for detecting the pressure of each pneumatic path, and the pressure detection device is electrically connected to the controller.

[0017] The beneficial effects of the above scheme are: by setting up a pressure detection device to monitor the air pressure of each air path in real time, the smooth progress of the test can be further guaranteed. When the air pressure of a certain air path fluctuates, it can also be detected in time through the pressure detection device, so as to correct or maintain it in time and improve the testing efficiency.

[0018] In one possible implementation, the pressure detection device is a pressure sensor.

[0019] The advantages of the above solution are: the pressure sensor has a simple structure, is easy to install, and has low cost. Using it as a pressure detection device for the gas circuit can reduce manufacturing and maintenance costs.

[0020] In one possible implementation, the pressure sensor includes a positive pressure sensor for detecting a positive pressure path and a vacuum pressure sensor for detecting a negative pressure path.

[0021] The beneficial effect of the above scheme is that by using different pressure sensors to monitor different gas paths, the accuracy of the detection can be effectively guaranteed.

[0022] In one possible implementation, the pneumatic control assembly is further provided with an alarm device, which is electrically connected to the controller.

[0023] The beneficial effects of the above solution are: by setting up an alarm device, when a fault occurs in the gas circuit, an alarm message can be sent in a timely manner to remind staff to maintain the gas circuit, which can effectively save time for fault diagnosis and maintenance and improve detection efficiency.

[0024] In one possible implementation, the alarm device is an audible and visual alarm.

[0025] The advantages of the above solution are: the sound and light alarm is simple in structure, easy to install, and inexpensive, which can effectively save on operating costs. Moreover, the sound and light alarm can emit sound and flash simultaneously, which can better serve as a reminder, enabling staff to discover and maintain the alarm in a timely manner. Attached Figure Description

[0026] Figure 1 A front structural schematic diagram of a gas path control system for a semiconductor defect detection device provided in an embodiment of this utility model; Figure 2 A schematic diagram of the back structure of a gas path control system for a semiconductor defect detection device provided in this embodiment of the present invention; Figure 3 This is a schematic diagram of the pressure detection device in an embodiment of the present invention.

[0027] The attached diagram lists the components represented by each number as follows: 100. Pneumatic control assembly; 101. Controller; 102. Positive pressure main control valve; 103. Negative pressure main control valve; 104. Positive pressure sub-control valve; 105. Negative pressure sub-control valve; 106. Air filter; 107. Oil mist separator; 108. Air drying equipment; 109. Positive pressure sensor; 110. Vacuum pressure sensor. Detailed Implementation

[0028] The principles and features of this utility model are described below. The examples given are only for explaining this utility model and are not intended to limit the scope of this utility model.

[0029] Example like Figure 1 and Figure 2 As shown, this utility model embodiment provides a gas path control system for a semiconductor defect detection device, including a gas path control assembly 100, on which a controller 101, a positive pressure main control valve 102, a negative pressure main control valve 103, a plurality of positive pressure sub-control valves 104 and a plurality of negative pressure sub-control valves 105 are provided; The air inlet of the positive pressure main control valve 102 is connected to the air supply equipment, and the air outlet of the positive pressure main control valve 102 is connected to the air inlet of each positive pressure sub-control valve 104. The air outlet of each positive pressure sub-control valve 104 is connected to different positive pressure demand detection devices. The outlet of the negative pressure main control valve 103 is connected to the vacuum equipment, and the inlet of the negative pressure main control valve 103 is connected to the outlet of each negative pressure sub-control valve 105. The inlet of each negative pressure sub-control valve 105 is connected to different negative pressure demand detection equipment. The controller 101 is electrically connected to the positive pressure main control valve 102, the negative pressure main control valve 103, the positive pressure sub-control valve 104, and the negative pressure sub-control valve 105, respectively.

[0030] Compared with the prior art, the embodiments of this utility model have at least the following beneficial effects: The pneumatic control system for semiconductor defect detection equipment provided in this embodiment can expand the pneumatic path according to usage requirements. It has a simple structure and strong versatility, and can connect all devices in the semiconductor defect detection equipment that require pneumatic path support to the pneumatic control assembly, thereby improving the convenience of maintenance and management.

[0031] It should be noted that the controller 101 in this embodiment of the present invention may be, but is not limited to, a microcontroller, microcomputer, PLC controller or other device with data processing capabilities.

[0032] In this embodiment of the present invention, the positive pressure main control valve 102, the negative pressure main control valve 103, the positive pressure sub-control valve 104, and the negative pressure sub-control valve 105 may be, but are not limited to, solenoid valves, such as IRV solenoid valves, ITV solenoid valves, MPPE solenoid valves, VPWP solenoid valves, etc.

[0033] The gas supply equipment described in this embodiment of the present invention may be a plant, an air compressor, or other equipment capable of providing a positive pressure gas source, and is not limited thereto.

[0034] The positive pressure demand detection device and negative pressure demand detection device in this embodiment of the utility model may include, but are not limited to, EFEM, detection motion platform, ion bar blowing and air flotation motion table, etc., and are not limited here.

[0035] In one feasible implementation, an air purification device is provided between the air inlet of the positive pressure main control valve 102 and the air supply device in this embodiment of the present invention.

[0036] This embodiment of the invention purifies the air source provided by the air supply equipment by setting an air purification device, which can effectively prevent the positive pressure testing equipment and the semiconductor components to be tested from being contaminated by impurities in the air source, ensuring that the testing can be carried out normally while ensuring the accuracy of the testing.

[0037] In one feasible implementation, the air purification device in this utility model embodiment includes an air filter 106, the air inlet of the air filter 106 is connected to the air supply device, and the air outlet of the air filter 106 is connected to the air inlet of the positive pressure main control valve 102.

[0038] This embodiment of the invention, by setting an air filter 106, can filter impurities in the air source, preventing them from entering the positive pressure demand testing equipment and affecting the positive pressure demand testing equipment and the semiconductor components to be tested, thus ensuring the smooth progress of the test.

[0039] It should be noted that the air filter 106 in this embodiment of the present invention can be a mechanical filter, such as a non-woven / synthetic fiber filter, a HEPA filter, etc., or an electrostatic filter or other types of filter, which are not limited here.

[0040] In one feasible implementation, the air purification device in this utility model embodiment includes an oil mist separator 107, the air inlet of the oil mist separator 107 is connected to the air supply device, and the air outlet of the oil mist separator is connected to the air inlet of the positive pressure main control valve 102.

[0041] This embodiment of the invention, by setting up an oil mist separator 107, can filter out oily impurities in the gas source, preventing them from entering the positive pressure demand testing equipment and contaminating the semiconductor components to be tested, thus ensuring the accuracy of the test.

[0042] It should be noted that the oil mist separator 107 in this embodiment of the present invention can be a mechanical condensation oil mist separator, such as the AFM30-03D-A type bag-type mechanical condensation oil mist separator, or an electrostatic oil mist separator, a condensation oil mist separator, etc., and is not limited here.

[0043] Furthermore, it should be noted that the air purification device in this embodiment may include only the air filter 106, only the oil mist separator 107, or both the air filter 106 and the oil mist separator 107; no limitation is made here. When both the air filter 106 and the oil mist separator 107 are included, the air filter 106 and the oil mist separator 107 are connected in series and then respectively connected to the air supply device and the positive pressure main control valve 102.

[0044] In one feasible implementation, an air drying device 108 is provided between the air inlet of the positive pressure main control valve and the air supply device in this embodiment of the present invention, and the air drying device 108 is electrically connected to the controller 101.

[0045] This embodiment of the invention dries the air source by setting up an air drying device 108, which can prevent moisture in the air source from entering the positive pressure demand detection device and corroding the positive pressure demand detection device and the semiconductor components to be tested, thereby extending the service life of the positive pressure demand detection device and ensuring the accuracy of the test.

[0046] It should be noted that the air drying device 108 in this embodiment of the present invention may, but is not limited to, using a heating resistor, and is not limited here.

[0047] In one feasible implementation, the pneumatic control assembly 100 in this embodiment of the present invention is further provided with a pressure detection device for detecting the pressure of each pneumatic path, and the pressure detection device is electrically connected to the controller 101.

[0048] This utility model embodiment, by setting up a pressure detection device, monitors the air pressure of each air path in real time, which can further ensure the smooth progress of the test. When the air pressure of a certain air path fluctuates, it can also be detected in time by the pressure detection device, so as to correct or maintain it in time and improve the test efficiency.

[0049] In one feasible implementation, the pressure detection device in this embodiment of the invention may, but is not limited to, employ a pressure sensor. Pressure sensors are simple in structure, easy to install, and low in cost; using them as pressure detection devices for air circuits can reduce manufacturing and maintenance costs.

[0050] In one feasible implementation, the pressure sensor in this embodiment of the invention includes a positive pressure sensor 109 for detecting positive pressure gas paths and a vacuum pressure sensor 110 for detecting negative pressure gas paths. Using different pressure sensors to monitor different gas paths effectively ensures the accuracy of the detection.

[0051] In one feasible implementation, the pneumatic control assembly 100 in this embodiment of the present invention is further provided with an alarm device, which is electrically connected to the controller 101.

[0052] This utility model embodiment, by setting up an alarm device, can promptly send alarm information when a fault occurs in the gas circuit (such as the pressure of a certain positive pressure gas circuit being consistently low and failing to meet usage requirements), reminding staff to maintain the gas circuit. This can effectively save time for fault diagnosis and maintenance and improve detection efficiency.

[0053] In one feasible implementation, the alarm device in this embodiment of the present invention is preferably an audible and visual alarm. Audible and visual alarms are simple in structure, easy to install, and inexpensive, effectively saving on operating costs. Furthermore, they can emit both sound and flashing lights simultaneously, providing a better alert and enabling staff to promptly detect and maintain the alarm.

[0054] It should be noted that, in addition to audible and visual alarm devices, the alarm device described in this embodiment of the invention can also be an alarm device capable of remotely sending messages. When a gas circuit malfunctions, alarm information (such as the faulty gas circuit, the degree of the malfunction, and possible causes of the malfunction) can be sent to relevant personnel remotely to remind them to check and maintain the system in a timely manner. Of course, other alarm devices can be used besides these two types, and no limitation is made here.

[0055] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0056] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0057] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0058] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0059] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A pneumatic control system for a semiconductor defect detection device, characterized in that, It includes a pneumatic control assembly (100), which is equipped with a controller (101), a positive pressure main control valve (102), a negative pressure main control valve (103), a plurality of positive pressure sub-control valves (104) and a plurality of negative pressure sub-control valves (105). The air inlet of the positive pressure main control valve (102) is connected to the air supply equipment, and the air outlet of the positive pressure main control valve (102) is connected to the air inlet of each of the positive pressure sub-control valves (104). The air outlet of each of the positive pressure sub-control valves (104) is connected to different positive pressure demand detection devices. The outlet of the negative pressure main control valve (103) is connected to a vacuum device, and the inlet of the negative pressure main control valve (103) is connected to the outlet of each negative pressure sub-control valve (105). The inlet of each negative pressure sub-control valve (105) is connected to a different negative pressure demand detection device. The controller (101) is electrically connected to the positive pressure main control valve (102), the negative pressure main control valve (103), the positive pressure sub-control valve (104), and the negative pressure sub-control valve (105), respectively.

2. The pneumatic control system for a semiconductor defect detection device according to claim 1, characterized in that, An air purification device is installed between the air inlet of the positive pressure main control valve (102) and the air supply device.

3. The pneumatic control system for a semiconductor defect detection device according to claim 2, characterized in that, The air purification device includes an air filter (106), the air inlet of which is connected to the air supply device, and the air outlet of which is connected to the air inlet of the positive pressure main control valve (102).

4. The pneumatic control system for a semiconductor defect detection device according to claim 2, characterized in that, The air purification device includes an oil mist separator (107), the air inlet of which is connected to the air supply device, and the air outlet of which is connected to the air inlet of the positive pressure main control valve (102).

5. The pneumatic control system for a semiconductor defect detection device according to claim 1, characterized in that, An air drying device (108) is provided between the air inlet of the positive pressure main control valve (102) and the air supply device, and the air drying device (108) is electrically connected to the controller (101).

6. A pneumatic control system for a semiconductor defect detection device according to any one of claims 1-5, characterized in that, The gas path control assembly (100) is also provided with a pressure detection device for detecting the pressure of each gas path, and the pressure detection device is electrically connected to the controller (101).

7. The pneumatic control system for a semiconductor defect detection device according to claim 6, characterized in that, The pressure detection device is a pressure sensor.

8. The pneumatic control system for a semiconductor defect detection device according to claim 7, characterized in that, The pressure sensors include a positive pressure sensor (109) for detecting positive pressure air path and a vacuum pressure sensor (110) for detecting negative pressure air path.

9. The pneumatic control system for a semiconductor defect detection device according to claim 6, characterized in that, The gas circuit control assembly is also equipped with an alarm device, which is electrically connected to the controller.

10. The pneumatic control system for a semiconductor defect detection device according to claim 9, characterized in that, The alarm device is an audible and visual alarm.

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