A limit pin for a robot arm and a robot arm

Abstract

The application provides a limiting pin for a mechanical arm and the mechanical arm, and the limiting pin comprises: a base assembly, which is installed on the mechanical arm; and a limiting piece, which is connected to the base assembly. The side of the limiting piece used for contacting the wafer is an inclined surface, and the inclined surface is inclined towards the side away from the wafer, so as to contact the edge of the wafer and limit the wafer. The limiting pin of the application comprises the base assembly and the limiting piece. The side of the limiting piece used for contacting the wafer is designed as the inclined surface, and the inclined surface is inclined towards the side away from the wafer. When contacting the edge of the wafer, the wafer can be prevented from being stuck on the limiting pin and the abrasion of the limiting pin is reduced, so that the wafer is prevented from appearing the situations of wafer dragging and wafer breaking, the wafer breaking rate is reduced, and in addition, the maintenance cost of the equipment caused by wafer breaking is reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor equipment technology, and more specifically to a limit pin for a robotic arm and a robotic arm. Background Technology

[0002] In semiconductor integrated circuit manufacturing, automated wafer transfer is a crucial step in ensuring production efficiency, process consistency, and product yield. The wafer transfer robot, as the core actuator for moving wafers between different process chambers, buffer chambers, and front-end modules, directly affects the stable operation of the entire production line. As semiconductor process nodes continue to shrink and wafer sizes continue to increase, while wafers themselves become increasingly thinner, the requirements for mechanical stability, damage resistance, and positioning accuracy during wafer transfer become increasingly stringent. Traditional mechanical clamping transfer methods, due to direct contact, are highly susceptible to introducing particulate contamination or edge damage to the wafer surface, making them unsuitable for these requirements.

[0003] The Bernoulli arm utilizes a low-pressure zone created by high-speed airflow between the back of the wafer and the arm surface to generate upward suction, keeping the wafer "suspended" during transport. This enables contactless handling and reduces the risk of contamination and damage. To achieve precise wafer positioning on the Bernoulli arm, multiple pins are typically placed at the arm's tip. These pins contact the wafer edge, physically limiting its horizontal position and ensuring stable positioning. However, in related technologies, the pins use a vertically downward cylindrical structure, lacking guiding functionality. Even a slight misalignment can cause the wafer edge to become stuck on the pin. As components in direct contact with the wafer edge, the pins inevitably wear down under constant friction, preventing smooth wafer release and leading to issues like wafer dragging or even breakage. This also increases equipment maintenance costs.

[0004] Therefore, improvements are needed to at least partially address the aforementioned problems. Utility Model Content

[0005] The utility model description section introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. This utility model description section is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0006] To at least partially solve the above problems, this utility model provides a limiting pin for a robotic arm, comprising: a base assembly mounted on the robotic arm; and a limiting member connected to the base assembly, wherein the side of the limiting member that contacts the wafer is an inclined surface, the inclined surface being inclined toward the side away from the wafer, for contacting the edge of the wafer to limit the wafer.

[0007] For example, the limiting member is a conical structure, the first end of the limiting member is connected to the base assembly, the second end of the limiting member is a free end, and the dimension of the limiting member in the direction perpendicular to its axial direction gradually decreases from the first end to the second end.

[0008] For example, the base assembly includes a first support member and a second support member, one end of the second support member is connected to the end of the first support member away from the robotic arm, and the other end of the second support member is connected to the limiting member, wherein the first support member is a platform structure and the second support member is a column structure.

[0009] For example, the minimum dimension of the first support member in the direction perpendicular to the axis of the second support member is greater than or equal to the dimension of the second support member in the direction perpendicular to its axis.

[0010] For example, the first support member and the second support member are integrally formed structures.

[0011] For example, the base assembly and the limiting member are detachably connected.

[0012] For example, the base assembly and the limiting member are detachably connected by a plug-in structure, one of the second support member and the limiting member is provided with at least one plug, and the other is provided with a slot adapted to the plug, and the second support member and the limiting member are detachably connected by the plug-in structure formed by the plug and the slot.

[0013] For example, the slot includes a first slot and a second slot arranged sequentially along the insertion direction of the plug. The opening of the first slot at the end away from the second slot is the opening of the slot. The second slot communicates with the first slot. Along the insertion direction of the plug, the distance between the opposing inner walls of the second slot gradually decreases. The distance between the opposing inner walls of the end of the second slot connected to the first slot is greater than the distance between the opposing inner walls of the first slot.

[0014] For example, the plug includes an extension structure and a wedge-shaped protrusion structure located at its end away from the first support member, the wedge-shaped protrusion structure protruding radially outward along the extension structure, wherein the outer wall of the wedge-shaped protrusion structure forms an inclined guide surface that slides with the inner wall of the second slot.

[0015] According to another aspect of the present invention, a robotic arm is provided, comprising a robotic arm body; a suction cup disposed at the lower end of the robotic arm body, wherein the suction cup is provided with at least one air hole for ejecting airflow to adsorb a wafer by means of the Bernoulli effect; at least one first limiting pin and at least one second limiting pin, wherein the first limiting pin and the second limiting pin are the aforementioned limiting pins, the first limiting pin and the second limiting pin are disposed on the robotic arm body and are disposed opposite to each other on both sides of the suction cup along the length direction of the robotic arm body.

[0016] The limiting pin for a robotic arm according to this utility model includes a base assembly and a limiting member. The side of the limiting member that contacts the wafer is designed as an inclined surface, with the inclined surface tilted towards the side away from the wafer. When in contact with the edge of the wafer, it can prevent the wafer from getting stuck on the limiting pin and reduce the wear of the limiting pin, thereby preventing wafer dragging and breakage, reducing the wafer breakage rate, and also reducing the maintenance costs of the equipment caused by wafer breakage. Attached Figure Description

[0017] The following drawings, which are incorporated herein by reference as part of this invention, are provided for understanding the invention. The drawings illustrate embodiments of the invention and their descriptions, serving to explain the principles of the invention.

[0018] In the attached image:

[0019] Figure 1 A schematic diagram of the structure of a limit pin in the prior art is shown;

[0020] Figure 2 This diagram illustrates a prior art structure where a limit pin is mounted on a robotic arm.

[0021] Figure 3 This diagram shows a structural schematic of a limiting pin according to a specific embodiment of the present invention;

[0022] Figure 4 An assembly diagram of a limiting pin according to a specific embodiment of the present invention is shown;

[0023] Figure 5 A schematic diagram of the structure of a robotic arm according to a specific embodiment of the present invention is shown. Detailed Implementation

[0024] In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present invention. However, it will be apparent to those skilled in the art that the present invention can be practiced without one or more of these details. In other instances, certain technical features well-known in the art have not been described in order to avoid confusion with the present invention.

[0025] It should be understood that this invention can be embodied in various forms and should not be construed as being limited to the embodiments set forth herein. Rather, providing these embodiments will make the disclosure thorough and complete, and will fully convey the scope of this invention to those skilled in the art. In the drawings, for clarity, the dimensions of layers and regions, as well as their relative dimensions, may be exaggerated. The same reference numerals denote the same elements throughout.

[0026] It should be understood that when an element or layer is referred to as "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it may be directly on, adjacent to, connected to, or coupled to other elements or layers, or there may be intervening elements or layers. Conversely, when an element is referred to as "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" other elements or layers, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc., may be used to describe various elements, components, areas, layers, and / or portions, these elements, components, areas, layers, and / or portions should not be limited by these terms. These terms are only used to distinguish one element, component, area, layer, or portion from another element, component, area, layer, or portion. Therefore, without departing from the teachings of this utility model, the first element, component, area, layer, or portion discussed below may be referred to as a second element, component, area, layer, or portion.

[0027] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein for convenience of description to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms are intended to also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, then the element or feature described as “below” or “under” the other element or feature will be oriented “above” the other element or feature. Therefore, the exemplary terms “below” and “under” can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or otherwise) and the spatial descriptive terms used herein will be interpreted accordingly.

[0028] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. When used herein, the singular forms “a,” “an,” and “the” are also intended to include the plural forms, unless the context clearly indicates otherwise.

[0029] In related technologies, such as Figure 1 and Figure 2 As shown, a limit pin 10 is installed on the robotic arm 11. The limit pin 10 adopts a vertically downward cylindrical structure. Since the cylindrical structure of the limit pin 10 lacks a guiding function, once the wafer is slightly misaligned, the edge of the wafer will get stuck on the limit pin 10 and cannot smoothly enter or leave the positioning area. In addition, as a component that directly contacts the edge of the wafer, the limit pin will inevitably wear down due to long-term friction. The side of the limit pin will become rough due to wear. When the robot needs to place the wafer in the target position, the worn limit pin will increase the friction with the edge of the wafer, causing the wafer to be unable to be released smoothly. If the robot continues to move, the wafer "dragging" phenomenon will occur. The dragging not only seriously scratches the back of the wafer, but for ultra-thin wafers, the huge mechanical stress can easily cause the wafer to crack from the edge, resulting in wafer fragmentation, which ultimately increases the maintenance cost of the equipment.

[0030] Therefore, in order to solve at least one of the above-mentioned technical problems, this application provides a limiting pin for a robotic arm, comprising:

[0031] Base assembly, which is mounted on the robotic arm;

[0032] A limiting member is connected to the base assembly. The side of the limiting member that contacts the wafer is an inclined surface, which is inclined toward the side away from the wafer, and is used to contact the edge of the wafer to limit the wafer.

[0033] According to the present application, the limiting pin for a robotic arm includes a base assembly and a limiting member. The side of the limiting member that contacts the wafer is designed as an inclined surface, with the inclined surface tilted towards the side away from the wafer. When in contact with the edge of the wafer, the wafer can be prevented from getting stuck on the limiting pin and the wear of the limiting pin can be reduced, thereby preventing wafer dragging and breakage, reducing the wafer breakage rate, and also reducing the maintenance costs of the equipment caused by wafer breakage.

[0034] To fully understand this application, a detailed structure will be presented in the following description to illustrate the technical solutions proposed in this application. Preferred embodiments of this application are described in detail below; however, in addition to these detailed descriptions, this application may have other implementation methods.

[0035] The following is for reference. Figure 2 and Figure 3 A limiting pin for a robotic arm according to one embodiment of this application is described, such as... Figure 2 and Figure 3 As shown, the limiting pin includes: a base assembly 21, which is mounted on the robotic arm; and a limiting member 22, which is connected to the base assembly 21. The side of the limiting member 22 that contacts the wafer is an inclined surface, which is inclined toward the side away from the wafer, and is used to contact the edge of the wafer to limit the wafer.

[0036] In this embodiment, the limiting pin includes a base assembly 21 and a limiting member 22. The base assembly 21 is mounted on the robotic arm and serves as a connecting carrier. By being stably mounted on the robotic arm, the base assembly 21 provides a rigid support foundation for the entire limiting pin. Its connection interface with the robotic arm is designed to ensure that the limiting pin remains stable during the movement of the robotic arm, thus avoiding the impact of vibration or displacement on the positioning accuracy of the wafer. The limiting member 22 is connected to the base assembly 21. The side of the limiting member that contacts the wafer is an inclined surface, and this inclined surface is tilted towards the side away from the wafer (i.e., tilted outward). This can achieve the function of guiding and positioning. When the wafer contacts the limiting member 22 during the handling process, the inclined surface of the limiting member 22 will form a natural guide trajectory. Compared with the conventional vertical structure, this inclined characteristic can change the contact mode between the wafer and the limiting member from rigid collision to progressive contact. This can prevent the wafer from getting stuck on the limiting pin and reduce the wear on the limiting pin, thereby avoiding wafer dragging and breakage, reducing the wafer breakage rate, and reducing the maintenance costs of the equipment caused by wafer breakage. This achieves the requirements of high-precision and non-destructive handling of wafers in semiconductor manufacturing.

[0037] In some embodiments, such as Figure 2 As shown, the base assembly 21 includes a first support member 211 and a second support member 212. One end of the second support member 212 is connected to the end of the first support member 211 away from the robotic arm, and the other end of the second support member 212 is connected to the limiting member 22. Exemplarily, the first support member 211 can be a frustum structure, such as a truncated cone structure, without specific limitation. By designing the first support member 211 as a frustum structure, its larger cross-sectional end serves as the connection base with the robotic arm. It can be tightly connected to the surface of the robotic arm through bolts, clips, or adhesives. The large contact area reduces the stress per unit area, effectively dispersing the vibration and impact forces generated by the limiting pin during operation, ensuring the stability of the entire limiting pin. Exemplarily, the second support member 212 can be a columnar structure, such as a cylindrical structure, without specific limitation. The first support member 211 and the second support member 212 can be an integrally formed structure or a detachably fixed connection structure, without specific limitation.

[0038] In some embodiments, the minimum dimension of the first support member 211 in the direction perpendicular to the axis of the second support member 212 is greater than or equal to the dimension of the second support member 212 in the direction perpendicular to its axis. Exemplarily, the dimension of the first support member 211 in the direction perpendicular to its axis gradually decreases from the end connected to the robotic arm to the end away from the robotic arm. The minimum dimension of the first support member 211 in the direction perpendicular to the axis of the second support member 212 (i.e., the radial dimension of the end of the first support member 211 away from the robotic arm) is greater than or equal to the dimension of the second support member 212 in the direction perpendicular to its axis (i.e., the radial dimension of the second support member 212). In other words, the base assembly 21 is a stepped support structure that is wider at the top and narrower at the bottom, which can enhance the overall structural strength of the base assembly.

[0039] In some embodiments, the base assembly 21 is made of polyetheretherketone (PEEK), that is, the first support 211 and the second support 212 are made of PEEK. Specifically, PEEK can withstand the high-temperature environments common in semiconductor processes, and it has strong chemical corrosion resistance, resisting the erosion of cleaning solutions, photoresists, and other chemical reagents. It also possesses mechanical strength close to that of metals, and is not prone to plastic deformation under frequent force transmission. It can be directly used for installation without additional surface treatment, ensuring the precision machining of the base assembly and enabling its integration into the robotic arm, significantly improving equipment assembly efficiency and long-term reliability. The base assembly 21 can also be made of other wear-resistant, corrosion-resistant, and metal-free materials; no specific limitations are imposed.

[0040] In some embodiments, the limiting pin includes a limiting member 22 connected to the base assembly 21. The side of the limiting member 22 that contacts the wafer is an inclined surface, which is inclined toward the side away from the wafer, for contacting the wafer edge to limit the wafer. Exemplarily, the limiting member 22 can be a conical structure, etc., with the inclined surface of the conical structure used to contact the wafer edge to limit the wafer. Exemplarily, a first end of the limiting member 22 is connected to a second support member 212 of the base assembly, and a second segment of the limiting member 22 is a free end. The dimension of the limiting member 22 in the direction perpendicular to its axial direction gradually decreases from the end connected to the base assembly 12 toward the end away from the base assembly 21, forming a smoothly transitioned inclined surface. When the wafer contacts the inclined surface of the limiting member 22 during transport, when the wafer is released, this inclined surface can prevent the wafer from getting stuck on the limiting pin due to wafer tilting or other conditions, thereby reducing wafer dragging and breakage.

[0041] In some embodiments, the limiting member 22 is made of ceramic. Ceramic possesses high hardness, wear resistance, and chemical stability, ensuring good surface precision and guiding performance during long-term use without contaminating the wafer. Therefore, the limiting member 22 is a ceramic cone structure, achieving wear resistance for the limiting pin while preventing the wafer from getting stuck on it. Using this limiting pin on a Bernoulli arm allows for the removal of Taiko wafers without jamming, improving the wear resistance of the limiting pin, reducing wafer breakage caused by pin jamming, thereby reducing the frequency of equipment downtime for maintenance due to wafer breakage, lowering costs, reducing the need and complexity of periodic inspections, alleviating the workload of staff, and improving the equipment's processing capacity. In other examples, the limiting member 22 can also be made of other wear-resistant, corrosion-resistant, and non-metallic contamination materials; no specific limitations are imposed.

[0042] In some embodiments, such as Figure 3 As shown, the base assembly 21 and the limiting member 22 are detachably connected. Exemplarily, the base assembly 21 and the limiting member 22 are detachably connected via a plug-in structure. One of the second support member 212 and the limiting member 22 is provided with at least one plug 23, and the other has a slot 24 adapted to the plug 23. The second support member 212 and the limiting member 22 are detachably connected via the plug-in structure formed by the plug 23 and the slot 24. Specifically, as... Figure 4 As shown, a plug 23 is mounted on the second support member 212, and a slot 24 is disposed within the limiting member 22. At least one plug 23 is provided at one end of the second support member 212 facing the limiting member 22. A slot 24 adapted to the plug 23 is provided within the limiting member 22. The slot 24 extends inward from the end of the limiting member 22 connected to the base assembly, and the inner diameter of the slot 24 is larger than the outer diameter of the plug 23, allowing the plug 23 to be detachably inserted into the slot 24 along the axial direction of the limiting member 22. In other examples, the base assembly 21 and the limiting member 22 may also be connected by adhesive bonding or other suitable methods, without specific limitations. In other examples, the plug may also be disposed on the limiting member, and the slot may also be disposed within the second support member, without further detail here.

[0043] In some embodiments, the slot 24 includes a first slot 241 and a second slot 242 arranged sequentially along the insertion direction of the plug 23. The opening of the first slot 241 away from the second slot 242 is the opening of the slot 24. The second slot 242 is connected to the first slot 241. Along the insertion direction of the plug 23, the distance between the opposing inner walls of the second slot 242 gradually decreases, and the distance between the opposing inner walls of the second slot 242 and the first slot 241 is greater than the distance between the opposing inner walls of the first slot 241. Specifically, the first slot 241 is the slot at the opening position of the slot 24. The first slot 241 can be a cylindrical slot or a slot of other suitable shape, and its function is to provide initial guidance and positioning to facilitate the smooth entry of the plug 23. The second slot 242 is connected to the end of the first slot 241 away from the slot opening. Along the insertion direction of the plug 23, the distance between the opposing inner walls of the second slot 242 gradually decreases, that is, the cross-sectional dimension of the second slot 242 decreases continuously from its entrance to its bottom. For example, the second slot 242 can be an inverted trapezoidal slot, a conical slot, or other suitable shaped slot, without specific limitation. The plug 23 and the slot 24 form a pluggable connection structure, which enables quick plug-and-play replacement. When the base assembly 21 or the limiting member 22 is damaged, only the damaged component needs to be replaced, saving costs.

[0044] In some embodiments, such as Figure 4 As shown, the plug 23 can be a triangular plug, etc. The plug 23 includes an extension structure 231 and a wedge-shaped protrusion structure 232 located at its end away from the first support member 211. The wedge-shaped protrusion structure 232 protrudes outward along the radial direction of the extension structure 231. The outer wall of the wedge-shaped protrusion structure 232 forms an inclined guide surface, which slides with the inner wall of the second slot 242. Specifically, the extension structure 231 can be a columnar structure or other suitable structure, which is not specifically limited. The wedge-shaped protrusion structure 232 protrudes outward along the radial direction of the extension structure 231 in a direction away from the axial direction of the limiting member 22 to lock with the second slot 242 and ensure the stability of the connection. The extension structure 231 and the wedge-shaped protrusion structure 232 can be integrally formed or other suitable structures, which is not specifically limited. Specifically, when the plug 23 is inserted into the slot 24, when the wedge-shaped protrusion 232 of the plug 23 approaches the slot opening of the limiting member 22, the first slot 241 first acts as a guide, allowing the plug 23 to slide into the first slot 241; as the plug 23 continues to be inserted, the wedge-shaped protrusion 232 enters the second groove 242, the extension structure 231 fits tightly against the inner wall of the first slot 241, and the inclined guide surface of the wedge-shaped protrusion 232 forms a mechanical interlock with the second slot 242, thereby ensuring the stability of the connection.

[0045] In one specific embodiment, the specific structural dimensions of the limiting pin can be:

[0046] The limiting pin includes a base assembly 21, which includes a first support member 211 and a second support member 212. The top of the first support member 211 (i.e., the end connected to the robotic arm) has a radial dimension of 3-9 mm, for example, 4 mm, 5 mm, 6 mm, 7 mm, 8 mm, or 9 mm. The bottom of the first support member 211 (i.e., the end connected to the second support member) has a radial dimension of 2-6 mm, for example, 2 mm, 4 mm, or 6 mm. The height of the first support member 211 is 0.5-1.5 mm, for example, 0.5 mm, 1 mm, or 1.5 mm. The radial dimension of the second support member 212 is 2-6 mm, for example, 2 mm, 4 mm, or 6 mm; the height of the second support member 212 is 1-3 mm, for example, 1 mm, 1.5 mm, 2 mm, or 3 mm; two plugs 23 are provided at the end of the second support member 212 facing the limiting member 22. Each plug 23 includes an extension structure 231 and a wedge-shaped protrusion structure 232. The distance between the two extension structures 231 is 0.4-1.2 mm, for example, 0.4 mm, 0.8 mm, or 1.2 mm; and the distance between the outermost edges of the two extension structures 231 is 1.7-2.7 mm. The distance between the outermost edges of the two wedge-shaped protrusions 232 is 2-3.6 mm, for example, 2 mm, 2.2 mm, or 2.7 mm; the radial dimension of the top of the limiting member 22 (i.e., the end connected to the base assembly) is 3-5 mm, for example, 3 mm, 4 mm, or 5 mm; the radial dimension of the free end of the limiting member 22 is 1.1-2.1 mm, for example, 1.1 mm, 1.6 mm, or 2.1 mm; a slot 24 is provided inside the limiting member 22, and the depth of the slot 24 is 1.5-3 mm, for example, 1.5 mm. The depth of the first slot 241 is 0.8-1.5mm, for example, 0.8mm, 1.2mm, or 1.5mm. The radial dimension of the top of the second slot 242 (i.e., the end of the second slot closer to the base assembly) is 2-4mm, for example, 2mm, 3.0mm, or 4mm. The radial dimension of the bottom of the second slot 242 (i.e., the end of the second slot away from the base assembly) is 1-3mm, for example, 1mm, 1.5mm, 2mm, or 3mm. In other examples, the specific structural dimensions of the limiting pin can also be other suitable dimensions, which are not specifically limited.

[0047] In summary, the limiting pin for a robotic arm according to the embodiments of this application includes a base assembly and a limiting member. The side of the limiting member that contacts the wafer is designed as an inclined surface, and the inclined surface is inclined toward the side away from the wafer. When in contact with the edge of the wafer, the wafer can be prevented from getting stuck on the limiting pin and the wear of the limiting pin can be reduced, thereby preventing wafer dragging and breakage, reducing the wafer breakage rate, and also reducing the maintenance costs of the equipment caused by wafer breakage.

[0048] Example 2

[0049] This application also provides a robotic arm, such as Figure 5 As shown, it includes a robotic arm body 31; a suction cup 32 disposed at the lower end of the robotic arm body 31, wherein the suction cup 32 is provided with at least one air hole 33 for jetting airflow to adsorb the wafer 30 by the Bernoulli effect; at least one first limiting pin 34 and at least one second limiting pin 35, wherein the first limiting pin 34 and the second limiting pin 35 are the aforementioned limiting pins, the first limiting pin 34 and the second limiting pin 35 are disposed on the robotic arm body 31 and are disposed opposite to each other on both sides of the suction cup 32 along the length direction of the robotic arm body 31.

[0050] The robotic arm according to the embodiments of this application includes a base assembly and a limiting member. The side of the limiting member that contacts the wafer is designed as an inclined surface, and the inclined surface is inclined toward the side away from the wafer. When in contact with the edge of the wafer, it can prevent the wafer from getting stuck on the limiting pin and reduce the wear of the limiting pin, thereby preventing the wafer from being dragged or broken, reducing the wafer breakage rate. In addition, it also reduces the maintenance costs of the equipment caused by wafer breakage.

[0051] Although exemplary embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above exemplary embodiments are merely illustrative and are not intended to limit the scope of this application. Various changes and modifications can be made therein by those skilled in the art without departing from the scope and spirit of this application. All such changes and modifications are intended to be included within the scope of this application as claimed in the appended claims.

[0052] Similarly, it should be understood that, in order to simplify this application and aid in understanding one or more aspects of the application, various features of this application may sometimes be grouped together in a single embodiment, figure, or description thereof in the description of exemplary embodiments of this application. However, this approach should not be construed as reflecting an intention that the claimed application requires more features than are expressly recited in each claim. Rather, as reflected in the corresponding claims, the point of application is that the corresponding technical problem can be solved with fewer features than all of a single disclosed embodiment. Therefore, the claims following the detailed description are hereby expressly incorporated into that detailed description, wherein each claim itself is a separate embodiment of this application.

[0053] Furthermore, those skilled in the art will understand that although some embodiments described herein include certain features but not others included in other embodiments, combinations of features from different embodiments are intended to be within the scope of this application and form different embodiments. For example, in the claims, any one of the claimed embodiments can be used in any combination.

[0054] It should be noted that the above embodiments are illustrative of this application and not limiting of it, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses should not be construed as limiting the claims. The use of the words first, second, and third, etc., does not indicate any order. These words can be interpreted as names.

Claims

1. A limiting pin for a robotic arm, characterized in that, include: A base assembly, which is mounted on a robotic arm; A limiting member is connected to the base assembly, wherein the side of the limiting member that contacts the wafer is an inclined surface, the inclined surface being inclined toward the side away from the wafer, for contacting the edge of the wafer to limit the wafer.

2. The limiting pin as described in claim 1, characterized in that, The limiting member has a conical structure. The first end of the limiting member is connected to the base assembly, and the second end of the limiting member is a free end. The dimension of the limiting member in the direction perpendicular to its axial direction gradually decreases from the first end to the second end.

3. The limiting pin as described in claim 1, characterized in that, The base assembly includes a first support member and a second support member. One end of the second support member is connected to the end of the first support member away from the robotic arm, and the other end of the second support member is connected to the limiting member. The first support member is a platform structure, and the second support member is a column structure.

4. The limiting pin as described in claim 3, characterized in that, The minimum dimension of the first support member in the direction perpendicular to the axis of the second support member is greater than or equal to the dimension of the second support member in the direction perpendicular to its axis.

5. The limiting pin as described in claim 4, characterized in that, The first support member and the second support member are integrally formed structures.

6. The limiting pin as described in claim 5, characterized in that, The base assembly and the limiting member are detachably connected.

7. The limiting pin as described in claim 6, characterized in that, The base assembly and the limiting member are detachably connected by a plug-in structure. One of the second support member and the limiting member is provided with at least one plug, and the other is provided with a slot adapted to the plug. The second support member and the limiting member are detachably connected by the plug-in structure formed by the plug and the slot.

8. The limiting pin as described in claim 7, characterized in that, The slot includes a first slot and a second slot arranged sequentially along the insertion direction of the plug. The opening of the first slot at the end away from the second slot is the opening of the slot. The second slot is connected to the first slot. Along the insertion direction of the plug, the distance between the opposing inner walls of the second slot gradually decreases. The distance between the opposing inner walls at the end of the second slot connected to the first slot is greater than the distance between the opposing inner walls of the first slot.

9. The limiting pin as described in claim 8, characterized in that, The plug includes an extension structure and a wedge-shaped protrusion structure located at its end away from the first support member. The wedge-shaped protrusion structure protrudes radially outward from the extension structure, wherein the outer wall of the wedge-shaped protrusion structure forms an inclined guide surface that slides with the inner wall of the second slot.

10. A robotic arm, characterized in that, include: Robotic arm body; A suction cup is disposed at the lower end of the main body of the robotic arm. The suction cup is provided with at least one air hole for jetting air to allow the suction cup to adsorb the wafer through the Bernoulli effect. At least one first limiting pin and at least one second limiting pin, wherein the first limiting pin and the second limiting pin are limiting pins as described in any one of claims 1-9, the first limiting pin and the second limiting pin are disposed on the main body of the robotic arm and are disposed opposite to each other on both sides of the suction cup along the length direction of the main body of the robotic arm.

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