A drum-type sputter coating device

Abstract

The utility model discloses a kind of roller sputtering coating devices, including cavity, rotatable setting in the bottom side of cavity drum sample stage and being set in the cavity top cavity cover, cavity cover and cavity seal connection;Drum sample stage is the bottom closed cylinder shape, its inner wall surface is equipped with annular energy storage track, the radial surface of energy storage track is equipped with at least one energy storage block;The inner side of cavity cover is fixed in the center position close to with sputtering module one end, and the other end of sputtering module extends to drum sample stage;The inner side of cavity cover is fixed in the edge position close to with energy storage component through fixing part, and energy storage component is fixed with the one end of vibrating rod, and the other end of vibrating rod is fixed with vibrating reed after passing through energy storage track;Transmission block matched with energy storage block is equipped on vibrating rod. Utilize the utility model, can realize the position change of powder sample in coating process, reduce the agglomeration and stacking between powder, improve coating uniformity.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating, and in particular to a drum-type sputtering coating device. Background Technology

[0002] Magnetron sputtering, a physical vapor deposition technique, enhances sputtering efficiency by confining plasma with a magnetic field, enabling the efficient deposition of various thin films on target substrates. It has wide applications in scientific research and industrial production.

[0003] Surface coating of powder materials is a common surface modification method. Depending on the coating requirements, various coating methods can be selected, such as physical vapor deposition, chemical vapor deposition, electroplating, and electroless plating. Among them, magnetron sputtering, due to its principle characteristics, has no special restrictions on the substrate material, produces high coating purity, and has a simple process, making it suitable for coating various powders.

[0004] However, due to their large specific surface area and the tendency of powder particles to adhere to each other, conventional magnetron sputtering equipment can only coat the exposed surfaces of powder materials, resulting in poor coating quality. Therefore, it is essential to improve magnetron sputtering equipment to enable effective coating of powder substrates, in addition to coating bulk, sheet, and thin film substrates.

[0005] Chinese patent document CN202401126U discloses a target magnetron sputtering device for coating the surface of powder particles. The device includes a vacuum chamber, a drum with openings at both ends, two support rollers with limiting inclined surfaces, a motor and speed control device, two magnetron sputtering target holders, and a sputtering power supply. The support rollers are connected to the speed control device, and the drum is placed directly on the support rollers, which drive the drum to rotate. Target materials are placed at the openings at both ends of the drum. During magnetron sputtering coating, grinding balls and powder are simultaneously placed in the drum. The motor speed is adjusted so that the grinding balls and powder particles fall in a parabolic trajectory. The sputtering stream incident at the drum openings deposits onto the falling powder, and after a certain time, a thin film with good uniformity is obtained.

[0006] Although the device can disperse powdered substrates to a certain extent during the drum rotation process, it still cannot disperse some powders that are severely agglomerated and adhered. Utility Model Content

[0007] This invention provides a drum-type sputtering coating device that can realize the position change of powder samples during the coating process, reduce the agglomeration and stacking of powders, and improve the coating uniformity.

[0008] A drum-type sputtering coating apparatus includes a cavity, a drum-type sample stage rotatably disposed on the bottom side of the cavity, and a cavity cover disposed on the top of the cavity, wherein the cavity cover and the cavity are sealed together. The drum-type sample stage is a cylindrical shape with a closed bottom, and its inner wall is provided with an annular energy storage track. At least one energy storage block is provided on the radial surface of the energy storage track. The inner side of the cavity cover is fixed to one end of the sputtering module near the center, and the other end of the sputtering module extends to the drum-type sample stage. The sputtering module contains a target material. The inner side of the cavity cover is fixed to the energy storage component near the edge by a fastener. The energy storage component is fixed to one end of the vibrating rod, and the other end of the vibrating rod passes through the energy storage track and is fixed to the vibrating plate. The vibrating rod is equipped with a transmission block that cooperates with the energy storage block, which is used to drive the vibrating rod to move axially during the rotation of the energy storage track driven by the drum-type sample stage.

[0009] Preferably, the bottom of the roller sample stage is connected to a rotating component, which is located inside the cavity bottom plate, and the rotation of the roller sample stage is achieved through the rotating component.

[0010] Preferably, a support frame is provided on the inner side wall of the cavity, and ball bearings are provided inside the support frame. The outer side wall of the roller sample stage is provided with a rolling guide rail that cooperates with the support frame. The support frame is used for structural support of the roller sample stage in both static and rolling states.

[0011] Preferably, a fine-tuning track for adjusting the vertical position is provided between the inner side of the cavity cover and the fixing member.

[0012] Preferably, the energy storage function of the energy storage component is achieved by means of elastic structural components and elastic materials.

[0013] Preferably, the energy storage track is provided with at least two energy storage blocks.

[0014] Preferably, the bottom surface of the energy storage block is provided with a track side baffle to limit the axial vibration amplitude of the vibrating rod.

[0015] Alternatively, the energy storage block may be hemispherical, semi-cylindrical, spherical, cylindrical, quasi-spherical, quasi-cylindrical, fan-shaped column, pyramidal, or prism-shaped.

[0016] Preferably, both the energy storage block and the transmission block are made of a quadrangular prism with a right trapezoidal cross-section, and the four sides of the quadrangular prism are the upper base, the lower base, the inclined surface, and the vertical surface, respectively. The bottom surface of the energy storage block and the bottom surface of the transmission block are arranged in opposite directions. This arrangement is used to ensure that during the rotation of the energy storage track driven by the roller sample stage, the energy storage block and the transmission block form a positional relationship of two inclined surfaces in contact, two upper surfaces in contact, and two vertical surfaces facing each other.

[0017] The process of the two inclined surfaces contacting each other is the energy storage process. After the two upper bottom surfaces contact each other, the vertical surface of the energy storage block has no supporting effect on the vertical surface of the transmission block. Under the action of the energy storage component, the transmission block rebounds rapidly until it contacts the side baffle of the energy storage track, completing the vibration process.

[0018] Alternatively, the inclined surface may be a curved surface or a plane.

[0019] Preferably, the transmission block is fixed to the lower end face of the vibrating rod, thereby avoiding interference of the vibrating rod with the rotation of the energy storage block.

[0020] Preferably, the number of the vibrating plate is at least one, and the bottom of the vibrating plate is arc-shaped, the curvature of which is consistent with the curvature of the cylindrical wall of the roller-type sample stage.

[0021] Compared with the prior art, the present invention has the following beneficial effects: This invention utilizes an energy-storing track with an energy storage block on the inner wall of a drum-type sample stage, which works in conjunction with a vibrating rod with a transmission block. During the rotation of the drum-type sample stage, the energy storage block compresses the transmission block, causing the vibrating rod to vibrate axially. Furthermore, a vibrating plate facilitates the repositioning of the powder sample during the sputtering coating process. The entire device has a simple and stable structure, is easy to arrange, and effectively prevents powder samples from sticking together during coating. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of a drum-type sputtering coating device according to the present invention.

[0023] Figure 2 This is a top view of the lowest point of the energy storage track in this utility model.

[0024] Figure 3 This is a top view of the vibrating rod in this utility model.

[0025] Figure 4 This illustrates the typical positional relationship between the energy storage block on the energy storage track and the transmission block on the vibrating rod in this invention.

[0026] In the diagram: A, Energy storage track; A1, Energy storage block; B1, Transmission block; B2, Vibrating plate; B3, Energy storage component; B4, Vibrating rod; 1, Roller-type sample stage; 2, Inclined surface; 3, Top surface; 4, Vertical surface; 5, Energy storage track base plate; 6, Energy storage track side baffle; 7, Fixing component; 8, Target material; 9, Sputtering module; 10, Cavity cover; 11, Inclined surface; 12, Top surface; 13, Vertical surface; 14, Rotating component; 15, Cavity base plate; 16, Cavity; 17, Fine-tuning track; 18, Support frame; 19, Rolling guide rail. Detailed Implementation

[0027] The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be noted that the embodiments described below are intended to facilitate the understanding of the present invention and do not limit it in any way.

[0028] like Figure 1 As shown, a drum sputtering coating apparatus includes a cavity 16, a drum sample stage 1 disposed on the bottom side of the cavity, and a cavity cover 10 disposed on the top of the cavity, wherein the cavity cover 10 and the cavity 16 are sealed together. The roller-type sample stage 1 is connected to the rotating component 14, and the rotating component 14 is disposed inside the cavity bottom plate 15; A support frame 18 is provided on the side wall of the cavity, and a ball bearing is provided inside the support frame 18. A rolling guide rail 19 is provided on the outer side wall of the support roller sample stage. The support frame is used for structural support of the roller sample stage in both static and rolling states. The roller-type sample stage 1 is a cylindrical shape with a closed bottom. The inner wall of the sample stage is provided with an annular energy storage track A, and the radial surface of the energy storage track A is provided with at least a plurality of energy storage blocks A1. The energy storage blocks A1 can be arranged at equal intervals or at non-equal intervals.

[0029] The inner side of the cavity cover 10 is fixed to one end of the sputtering module 9 near the center, and the other end of the sputtering module 9 extends into the inside of the drum sample stage 1. The target material 8 is installed in the sputtering module.

[0030] The inner side of the cavity cover 10 is provided with a fine-tuning track 17 near the edge. The energy storage component B3 is fixedly connected by a fixing member 7. The fine-tuning track 17 allows the fixing member 7 and the energy storage component B3 to be finely adjusted in the vertical direction. The energy storage component B3 is fixed to one end of the vibration rod B4, and the other end of the vibration rod B4 passes through the energy storage track A and is fixed to the vibration plate B2.

[0031] The vibrating rod B4 is equipped with a transmission block B1 that cooperates with the energy storage block A1. It is used to drive the vibrating rod B4 to vibrate axially during the rotation of the energy storage track A driven by the roller sample stage 1.

[0032] In practical applications, the atmosphere management module is first connected to the drum-type sample stage 1. Air is evacuated from the cavity 16 before and after coating, and atmosphere control is performed during the coating process. The atmosphere management module includes a pump set, gas source, flow controller, and associated piping and valves. The pump set is used to evacuate the gas from the cavity 16 to a high vacuum state. Combined with the gas source, flow controller, and valves, it enables the arrangement of specific gas sources and pressures within the sample cavity. The sputtering device also includes a liquid cooling system, which is connected to the sputtering module 9 for efficient heat dissipation during the operation of the sputtering module 9.

[0033] In this embodiment, the energy storage component B3 uses a spring to store energy. During the rotation of the drum-type sample stage 1, the axial vibration of the vibrating rod B4 is achieved by the pushing of the transmission block B1 by the energy storage block A1, and the position change of the powder sample during the sputtering coating process is further achieved by the vibrating plate B2.

[0034] Alternatively, the structure of the energy storage block A1 can be hemispherical, semi-cylindrical, spherical, cylindrical, near-spherical, near-cylindrical, fan-shaped column, pyramidal, or prism.

[0035] To improve the vibration effect, in this embodiment, both the energy storage block A1 and the transmission block B1 are quadrangular prisms with a right trapezoidal cross section.

[0036] like Figure 2 As shown, the energy storage track A includes an energy storage track base plate 5 and energy storage track side baffles 6. The energy storage block A1 is fixed to the energy storage track base plate 5, with four sides: an upper bottom surface 3, a lower bottom surface, an inclined surface 2, and a vertical surface 4. The lower bottom surface faces the energy storage track side baffle 6 and is fixed to it. The inclined surface 2, the upper bottom surface 3, and the vertical surface 4 are defined as the energy storage surface, the translation surface, and the vibration surface, respectively.

[0037] like Figure 3 As shown, the transmission block B1 is fixed to the lower end face of the vibrating rod B4. The four sides of the transmission block B1 are the upper bottom surface 12, the lower bottom surface, the inclined surface 11, and the vertical surface 13, respectively. Correspondingly, the inclined surface 11, the upper bottom surface 12, and the vertical surface 13 are also defined as the energy storage surface, the translation surface, and the vibration surface, respectively.

[0038] The inclined surfaces 2 and 11 can be either straight or curved, while the vertical surface 4 is preferably straight. The slope of inclined surface 2 relative to the energy storage track base plate 5 is greater than that of vertical surface 4 relative to the energy storage track base plate 5, thus achieving the functions of slow energy storage and pulse vibration. The energy storage block A1 and the energy storage track base plate 5 of the energy storage track A can be formed by separate processing and then fixed connection, or they can be obtained through integrated processing. To achieve efficient energy storage, the material of the energy storage block A1 is selected from rigid materials, including both metallic and non-metallic materials. The energy storage track A is fixed to the inner wall of the roller-type sample stage 1 via connectors. The height of the energy storage track A is adapted to the vibration rod B4. The distance between the upper bottom surface 3 and the energy storage track base plate 5 is the vibration distance of the vibration rod B4, and the ratio of the distance between adjacent energy storage blocks A1 to the rotational speed corresponds to the vibration frequency of the vibration rod B4.

[0039] In this embodiment, as Figure 4 As shown, the lower bottom surface of the energy storage block A1 and the lower bottom surface of the transmission block B1 are arranged in opposite directions. This results in the energy storage track A rotating as the roller sample stage 1 drives the energy storage block A1 and the transmission block B1, forming a positional relationship of two inclined surfaces in contact, two upper bottom surfaces in contact, and two vertical surfaces facing each other. When the two vertical surfaces face each other, the transmission block B1 loses the support of the energy storage block A1 in the vibration direction, and the two vertical surfaces may or may not be in contact.

[0040] The specific cooperation method is as follows: In the first stage (e.g.) Figure 4 As shown in Figure a), the upper bottom surface 12 of the transmission block B1 is attached to the side baffle 6 of the energy storage track, and there is no vibration displacement during the translation of the energy storage track A.

[0041] In the second stage (e.g.) Figure 4 As shown in Figure b), as the energy storage track A moves with the roller sample stage, the inclined surface 11 of the transmission block B1 contacts the inclined surface 2 of the energy storage block A1; the inclined surface 11 slides on the inclined surface 2, and the transmission block B1 has displacement in the opposite direction of vibration, and is stretched by the spring in the energy storage component B3 to store energy.

[0042] In the third stage (such as) Figure 4 As shown in c), the upper bottom surface 12 of the transmission block B1 slides on the upper bottom surface 3 of the energy storage block A1 to complete the vibration preparation. There is no vibration direction displacement during the sliding process.

[0043] In the fourth stage (such as Figure 4 As shown in d), when the transmission block B1 loses the support of the energy storage block A1, the energy storage component B3 releases energy instantaneously, and the vibration rod B4 vibrates until the upper bottom surface 12 of the transmission block B1 adheres to the energy storage track side baffle 6, completing one vibration cycle.

[0044] In the fourth stage, whether the vertical surface 13 of the transmission block B1 contacts the vertical surface 4 of the energy storage block A1 depends on the vibration speed of the vibration rod B4, the speed at which the energy storage track A rotates with the roller sample stage 1, and the angle design between the vertical surface 4 of the energy storage block A1 and the base plate 5 of the energy storage track.

[0045] It should be understood that the vertical surface 13 of the transmission block B1 and the vertical surface 4 of the energy storage block A1 are designed to be vertical in order to achieve one of the angle designs when the transmission block B1 loses the support of the energy storage block A1 in the fourth stage, and are not actually limited to this angle.

[0046] The embodiments described above provide a detailed explanation of the technical solution and beneficial effects of this utility model. It should be understood that the above descriptions are only specific embodiments of this utility model and are not intended to limit this utility model. Any modifications, additions, and equivalent substitutions made within the scope of the principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A drum-type sputtering coating apparatus, characterized in that, It includes a cavity (16), a roller sample stage (1) rotatably disposed on the bottom side of the cavity (16), and a cavity cover (10) disposed on the top of the cavity (16), wherein the cavity cover (10) and the cavity (16) are sealed together. The roller sample stage (1) is a cylindrical shape with a closed bottom, and its inner wall is provided with an annular energy storage track (A). The radial surface of the energy storage track (A) is provided with at least one energy storage block (A1). The inner side of the cavity cover (10) is fixed to one end of the sputtering module (9) near the center, and the other end of the sputtering module (9) extends to the drum sample stage (1). The sputtering module (9) is equipped with a target material (8). The inner side of the cavity cover (10) is fixed to the energy storage component (B3) by a fastener (7) near the edge. The energy storage component (B3) is fixed to one end of the vibrating rod (B4), and the other end of the vibrating rod (B4) passes through the energy storage track (A) and is fixed to the vibrating plate (B2). The vibrating rod (B4) is provided with a transmission block (B1) that cooperates with the energy storage block (A1), which is used to drive the vibrating rod (B4) to move axially during the rotation of the energy storage track (A) driven by the roller sample stage (1).

2. The drum-type sputtering coating apparatus according to claim 1, characterized in that, A support frame (18) is provided on the inner wall of the cavity (16), and a ball bearing is provided inside the support frame (18). The outer wall of the roller sample stage (1) is provided with a rolling guide rail (19) that cooperates with the support frame (18).

3. The drum-type sputtering coating apparatus according to claim 1, characterized in that, The inner side of the cavity cover (10) is provided with a fine-tuning track (17) for adjusting the vertical position between the fixing member and the inner side of the cavity cover (10).

4. The drum-type sputtering coating apparatus according to claim 1, characterized in that, The energy storage track (A) is provided with at least two energy storage blocks (A1).

5. The drum-type sputtering coating apparatus according to claim 1, characterized in that, The structure of the energy storage block (A1) is selected from hemispherical, semi-cylindrical, spherical, cylindrical, quasi-spherical, quasi-cylindrical, fan-shaped column, pyramidal, or prism.

6. The drum-type sputtering coating apparatus according to claim 1, characterized in that, Both the energy storage block (A1) and the transmission block (B1) are quadrangular prisms with a cross-section of a right trapezoid. The four sides of the quadrangular prism are the upper base, the lower base, the inclined surface, and the vertical surface, respectively. Among them, the bottom surface of the energy storage block (A1) and the bottom surface of the transmission block (B1) are arranged in opposite directions, so that when the roller sample stage (1) drives the energy storage track (A) to rotate, the energy storage block (A1) and the transmission block (B1) form a positional relationship of two inclined surfaces in contact, two upper bottom surfaces in contact, and two vertical surfaces facing each other.

7. The drum-type sputtering coating apparatus according to claim 6, characterized in that, The inclined surface is either curved or flat.

8. The drum-type sputtering coating apparatus according to claim 6, characterized in that, The energy storage block (A1) is provided with a track side baffle (6) on its lower bottom surface.

9. The drum-type sputtering coating apparatus according to claim 1, characterized in that, The transmission block (B1) is fixed to the lower end face of the vibrating rod (B4).

10. The drum-type sputtering coating apparatus according to claim 1, characterized in that, The number of the vibrating plate (B2) is at least one, and the bottom of the vibrating plate (B2) is arc-shaped, the curvature of which is consistent with the curvature of the cylindrical wall surface of the roller sample stage (1).

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