A clamping tool

Abstract

The application discloses a clamping tool for clamping a heat preservation cylinder of a hot field of a single crystal furnace, comprising a lifting guide rod, a first lifting piece and a second lifting piece, the first lifting piece and the second lifting piece are arranged on the lifting guide rod, and at least one of the first lifting piece and the second lifting piece can be displaced along the lifting guide rod, a support connecting rod and a support arm, one end of the support arm is hinged to the second lifting piece through a first shaft, one end of the support connecting rod is hinged to the first lifting piece through a second shaft, the other end of the support connecting rod is hinged to the support arm through a third shaft, the other end of the support arm is used for cooperating with the inner wall of the heat preservation cylinder, and the axes of the first shaft, the second shaft and the third shaft are parallel. The clamping tool disclosed by the application clamps the inner wall of the heat preservation cylinder through an expandable mechanical structure, and clamps the heat preservation cylinder. The heat preservation cylinder can be clamped quickly from the inside, the inconvenient operation problem caused by the narrow operation space outside the heat preservation cylinder is solved, and the dismounting efficiency of the heat preservation cylinder of the hot field of the single crystal furnace is improved.

Description

Technical Field

[0001] This application relates to the field of Czochralski single crystal furnace technology, and more specifically, to a clamping fixture. Background Technology

[0002] The Czochralski single crystal furnace hot zone system is the entire system used to melt silicon material and maintain single crystal growth at a specific temperature. It typically consists of heaters, insulation cylinders, support mechanisms, support rods, and support bowls. The insulation cylinder is usually a cylindrical structure made of carbon-carbon composite material with a wall thickness of about ten millimeters. In practical applications, the insulation function is achieved by wrapping graphite carbon felt around the outer wall of the insulation cylinder. Typically, a single crystal hot zone system is equipped with 3 to 4 insulation cylinders, which can be further subdivided into upper, middle, and lower insulation cylinders based on their longitudinal position within the hot zone.

[0003] At present, the most common way to disassemble and assemble the thermal insulation cylinder is still to use manual ties to tighten them. However, in order to reduce the power consumption of the furnace, the insulation felt on the outer wall of the insulation cylinder is getting thicker and thicker, making the gap between the insulation cylinder and the furnace wall smaller and smaller. The space for manual operation is compressed to a very narrow range, especially for the lower insulation cylinder, which is installed below the working plane, making it very inconvenient to operate.

[0004] Therefore, how to improve the disassembly and assembly efficiency of the heat insulation cylinder of the single crystal furnace has become a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] The purpose of this application is to disclose a clamping fixture for quickly clamping the hot zone insulation barrel of a single crystal furnace, so as to improve the assembly and disassembly efficiency of the hot zone insulation barrel of the single crystal furnace.

[0006] A clamping fixture for clamping an insulating cylinder in the hot zone of a single crystal furnace, comprising:

[0007] Raise the guide rod;

[0008] The first lifting member and the second lifting member are both disposed on the lifting guide rod, and at least one of the first lifting member and the second lifting member can be displaced along the lifting guide rod so that the first lifting member and the second lifting member can move closer to each other and further away from each other.

[0009] The support includes a connecting rod and a support arm, with the same number of connecting rods and support arms, and at least two of each. One end of the support arm is hinged to the second lifting member via a first axis, and one end of the supporting rod is hinged to the first lifting member via a second axis. The other end of the supporting rod is hinged to the support arm via a third axis. The other end of the support arm is used to mate with the inner wall of the insulation cylinder. The axes of the first axis, the second axis, and the third axis are parallel.

[0010] In one possible implementation, the support arm includes a support rod and a claw, the support rod and the claw being hinged together by a fourth axis, the claw engaging with the inner wall of the insulation cylinder.

[0011] In one possible implementation, the gripper includes:

[0012] The main body of the chuck is hinged to the support rod via the fourth axis;

[0013] The first movable part and the second movable part are hinged together by a fifth axis and the second movable part is hinged together by a sixth axis, wherein the axes of the fifth axis and the sixth axis are parallel.

[0014] In one possible implementation, the jaw further includes a jaw connector, which is hinged to the jaw body via a seventh axis, and the support rod is hinged to the jaw body via a fourth axis, the axes of which are parallel.

[0015] In one possible implementation, the first lifting member is located below the second lifting member.

[0016] In one possible implementation, the clamping fixture includes a nut, and the lifting guide rod is a screw; the first lifting member is fixed on the lifting guide rod, and the second lifting member is slidably sleeved on the lifting guide rod; the nut is threadedly engaged with the lifting guide rod and is located on the side of the second lifting member away from the first lifting member.

[0017] In one possible implementation, the nut is provided with a handle.

[0018] In one possible implementation, the nut has a slot at one end near the second lifting member.

[0019] In one possible implementation, the lifting guide rod is a screw, and the lifting guide rod includes a first screw segment and a second screw segment with opposite directions of rotation. The first lifting member is threadedly engaged with the first screw segment, and the second lifting member is threadedly engaged with the second screw segment.

[0020] In one possible implementation, the third axis is positioned between the midpoint of the support arm and the second lifting member.

[0021] In operation, the clamping fixture provided in this application, when needing to clamp the insulation cylinder, first suspends itself inside the insulation cylinder. By bringing the first and second lifting members closer together, one end of the support connecting rod and one end of the support arm move closer together. Since the support arm and the second lifting member, the support connecting rod and the first lifting member, and the support arm and the support connecting rod are all hinged, the support arm and the support connecting rod will rotate, causing the angle between the support arm and the support connecting rod to decrease, and the angle between the support connecting rod and the lifting guide rod to increase. The support arm opens, increasing its coverage area until one end of the support arm is pressed against the inner wall of the insulation cylinder without relative sliding. At this point, the movement of the first and second lifting members stops, and the clamping fixture completes the clamping of the insulation cylinder. Subsequently, moving the clamping fixture will move the insulation cylinder. Conversely, when it is necessary to release the insulation cylinder, the first and second lifting members are moved away from each other, the support arm retracts, and the clamping fixture disengages from the inner wall of the insulation cylinder.

[0022] Compared to related technologies, the clamping fixture disclosed in this application uses an expandable mechanical structure to clamp the inner wall of the insulation cylinder, thereby achieving the clamping of the insulation cylinder. It allows for quick removal of the insulation cylinder from the inside, solving the problem of inconvenient operation caused by the narrow external operating space of the insulation cylinder and improving the assembly and disassembly efficiency of the insulation cylinder in the hot zone of the single crystal furnace. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments or related technologies of this application, the accompanying drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the clamping fixture disclosed in the embodiments of this application. Figure 1 ;

[0025] Figure 2 This is a schematic diagram of the clamping fixture disclosed in the embodiments of this application. Figure 2 ;

[0026] Figure 3 This is a schematic diagram of the clamping fixture disclosed in the embodiments of this application. Figure 3 .

[0027] The attached figures are labeled as follows:

[0028] 100. Lift the guide rod;

[0029] 200. First lifting component;

[0030] 300. Second lifting component;

[0031] 400. Supporting link;

[0032] 500, support rod;

[0033] 600. Claw; 610. Claw body; 620. First movable part; 630. Second movable part; 640. Claw connector;

[0034] 700, Nuts;

[0035] 800, Rings;

[0036] 900, handle. Detailed Implementation

[0037] The core of this application is to disclose a clamping fixture for quickly clamping the hot zone insulation barrel of a single crystal furnace, so as to improve the disassembly and assembly efficiency of the hot zone insulation barrel of the single crystal furnace.

[0038] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0039] See Figure 1 , Figure 2 and Figure 3 The clamping fixture disclosed in this application includes a lifting guide rod 100, a first lifting member 200, a second lifting member 300, a support connecting rod 400, and a support arm.

[0040] The lifting guide rod 100 can be a rod-shaped component that clamps the center of the tooling. The first lifting member 200 and the second lifting member 300 are both mounted on the lifting guide rod 100. At least one of the first lifting member 200 and the second lifting member 300 can be displaced along the lifting guide rod 100, allowing them to move closer to each other and further apart. It should be noted that the relative movement of the first lifting member 200 and the second lifting member 300 can be manually controlled by an operator, or a corresponding driving device can be provided. This driving device can be a cylinder, hydraulic cylinder, linear motor, or anything else capable of outputting linear displacement.

[0041] The number of support rods 400 and support arms is the same, and there are at least two of each. It should be noted that, to ensure a symmetrical and balanced radial force is applied to the insulation cylinder during clamping, when there are two support arms, the angle between the central axes of the two support arms is 180° or close to 180°. When there are more than two support arms, the support arms can be arranged in a uniformly distributed circular pattern. These support rods 400 and support arms extend radially outward from the lifting guide rod 100 as the center.

[0042] One end of the support arm is hinged to the second lifting member 300 via a first shaft, one end of the support connecting rod 400 is hinged to the first lifting member 200 via a second shaft, and the other end of the support connecting rod 400 is hinged to the support arm via a third shaft. The axes of the first, second, and third shafts are parallel. Thus, the first lifting member 200, the second lifting member 300, the support connecting rod 400, and the support arm together constitute a linkage mechanism. When the first lifting member 200 and the second lifting member 300 approach or move away from each other, the support arm can open or close due to the pushing and pulling action between the support connecting rod 400 and the support arm. When the support arm is open, the other end of the support arm can extend outward to engage with the inner wall of the insulation cylinder. The friction between the support arm and the inner wall of the insulation cylinder prevents relative movement between the clamping fixture and the insulation cylinder.

[0043] In the operation of the clamping fixture disclosed in this application, when it is necessary to clamp the insulation cylinder, the clamping fixture is first suspended inside the insulation cylinder. By bringing the first lifting member 200 and the second lifting member 300 closer together, one end of the support connecting rod 400 and one end of the support arm are brought closer together. Since the support arm and the second lifting member 300, the support connecting rod 400 and the first lifting member 200, and the support arm and the support connecting rod 400 are all hinged, the support arm and the support connecting rod 400 will rotate, causing the angle between the support arm and the support connecting rod 400 to decrease, and the angle between the support connecting rod 400 and the lifting guide rod 100 to increase. The angle between the support arm and the lifting guide rod 100 also increases. The support arm opens, increasing the coverage area until one end of the support arm is pressed against the inner wall of the insulation cylinder without relative sliding, at which point the movement of the first lifting member 200 and the second lifting member 300 can be stopped, and the clamping fixture completes the clamping of the insulation cylinder. Subsequently, by moving the clamping fixture, the insulation cylinder can be moved. Conversely, when it is necessary to loosen the insulation cylinder, the first lifting member 200 and the second lifting member 300 are moved away from each other, the support arm is retracted, and the clamping fixture can be detached from the inner wall of the insulation cylinder.

[0044] Compared to related technologies, the clamping fixture disclosed in this application uses an expandable mechanical structure to clamp the inner wall of the insulation cylinder, thereby achieving the clamping of the insulation cylinder. It allows for quick removal of the insulation cylinder from the inside, solving the problem of inconvenient operation caused by the narrow external operating space of the insulation cylinder and improving the assembly and disassembly efficiency of the insulation cylinder in the hot zone of the single crystal furnace.

[0045] In one specific embodiment, the support arm may include a support rod 500 and a jaw 600. The support rod 500 may be made of a square-section profile with an open side facing downwards towards the clamping fixture, forming an open structure. The support link 400 may also adopt a similar structure. This design significantly reduces the overall weight of the clamping fixture while ensuring sufficient bending and torsional strength for both the support rod 500 and the support link 400.

[0046] The support rod 500 and the jaw 600 are hinged via a fourth axis, with the jaw 600 engaging with the inner wall of the insulation cylinder. This design allows the jaw 600 to rotate around the fourth axis when in contact with the inner wall of the insulation cylinder, thereby adjusting its tilt angle. This ensures that the mating surface remains parallel to the inner wall of the insulation cylinder during hoisting, and the clamping force applied is always perpendicular to the inner wall of the insulation cylinder. This maximizes the utilization of the clamping force and avoids harmful lateral forces caused by angular deviations, thus reducing the risk of tilting or slippage during clamping. Furthermore, it avoids stress concentration on the jaw 600, thereby reducing the risk of structural wear and fatigue failure and extending the service life of the clamping fixture.

[0047] In one specific embodiment, to adapt the jaws to the arc surface of the inner wall of the insulation cylinder and increase the contact area between the jaws 600 and the inner wall of the insulation cylinder, the jaws 600 may include a jaw body 610, a first movable part 620, and a second movable part 630. The jaw body 610 is hinged to the support rod 500 via a fourth axis. The first movable part 620 and the jaw body 610 are hinged via a fifth axis, and the second movable part 630 and the jaw body 610 are hinged via a sixth axis, with the axes of the fifth and sixth axes being parallel. When the jaws 600 contact the inner wall of the insulation cylinder, both the first movable part 620 and the second movable part 630 can rotate relative to the jaw body 610, causing the first movable part 620 and the second movable part 630 to automatically conform to the inner wall surface of the insulation cylinder, thereby increasing the contact area between the jaws 600 and the inner wall of the insulation cylinder, increasing the friction between the jaws 600 and the inner wall of the insulation cylinder, and making the clamping of the fixture more reliable. Furthermore, since insulation cylinders come in various models and sizes with different diameters, the designed jaws 600 can automatically adjust the angle between the first movable part 620 and the second movable part 630 according to different insulation cylinder diameters, allowing the jaws 600 to adapt to insulation cylinders of more sizes and enhancing the adaptability of the clamping fixture.

[0048] In one specific embodiment, to increase the degrees of freedom of the jaws 600, the jaws 600 may further include a jaw connector 640, and the support rod 500 and the jaw body 610 of the jaws 600 are hinged via a fourth axis. The jaw connector 640 and the jaw body 610 are hinged via a seventh axis, and the axes of the fourth and seventh axes are parallel. When the jaws 600 contact the workpiece, their range of free swing is increased. In addition to adjusting the tilt angle, the jaws 600 can also fine-tune their position. Even if there are slight unevenness, tilting, or dimensional or shape errors (such as insufficient roundness) on the inner wall of the insulation cylinder, the jaws 600 can automatically adjust and compensate, ensuring that each jaw 600 effectively applies clamping force, thereby improving the stability and reliability of clamping.

[0049] In one specific embodiment, the first lifting member 200 may be located below the second lifting member 300. This design allows the support link 400 to be located below the support arm. The support link 400 can apply an upward supporting force to the support arm. A triangular support structure is formed between the support link 400 and the support arm, which helps to enhance the stability of the clamping fixture.

[0050] In one specific embodiment, the clamping fixture may include a nut 700 and a lifting guide rod 100, which may be a screw. A first lifting member 200 is fixed to the lifting guide rod 100, and a second lifting member 300 is slidably sleeved on the lifting guide rod 100. The nut 700 is threadedly engaged with the lifting guide rod 100 and is located on the side of the second lifting member 300 away from the first lifting member 200. During operation, by rotating the nut 700, it can move up and down along the lifting guide rod 100, thereby driving the first lifting member 200 and the second lifting member 300 to move closer or further apart. This design has a self-locking function; the nut 700 can maintain its position without additional braking or locking devices, greatly simplifying system design and improving reliability. Furthermore, the screw has a force-amplifying effect, amplifying a small input torque (rotational force) into a large axial output force, allowing the clamping fixture to generate a large clamping force manually.

[0051] To make manual operation of the clamping fixture less strenuous, the nut 700 may be equipped with a handle 900. The handle 900 may be two straight handles symmetrically arranged on the outer periphery of the nut 700, which helps to extend the lever arm of rotating the nut 700, increase the torque, and reduce the manual operation intensity.

[0052] To facilitate smoother movement of the nut 700 on the lifting guide rod 100, a slot is provided at the end of the nut 700 near the second lifting member 300. This design allows one end of the nut 700 to no longer be rigidly connected, but rather to have a certain degree of floating capability. When there are different axiality or parallelism errors between the nut 700 and the lifting guide rod 100, the slotted portion allows the nut 700 to adaptively compensate for these errors, significantly reducing motion resistance, preventing jamming, and making operation smoother. Furthermore, the slot reduces the contact area between the nut 700 and the second lifting member 300, thereby reducing wear.

[0053] It should be noted that the movable one of the first lifting member 200 and the second lifting member 300 can also be locked by a locking screw. A screw hole for engaging the locking screw can be provided on the movable one of the first lifting member 200 and the second lifting member 300. When it is necessary to clamp the insulation cylinder, the first lifting member 200 and the second lifting member 300 can be manually driven to move closer to each other, so that each jaw 600 presses against the inner wall of the insulation cylinder. Then, the locking screw is rotated so that the end of the locking screw abuts against the lifting guide rod 100, thereby restricting the relative movement of the first lifting member 200 and the second lifting member 300.

[0054] In another specific embodiment, the lifting guide rod 100 is a screw, and includes a first screw section and a second screw section with opposite rotation directions. The first lifting member 200 is threadedly engaged with the first screw section, and the second lifting member 300 is threadedly engaged with the second screw section. During the operation of the clamping fixture, rotating the lifting guide rod 100 prevents relative rotation between the first lifting member 200 and the second lifting member 300, as they are connected by a support link 400 and a support arm. This allows the first lifting member 200 and the second lifting member 300 to move along the lifting guide rod 100. Furthermore, because the first and second screw sections rotate in opposite directions, the first lifting member 200 and the second lifting member 300 move in opposite directions. Therefore, rotating the lifting guide rod 100 causes the first lifting member 200 and the second lifting member 300 to move closer to or further away from each other. This design eliminates the need for a nut 700, simplifying the structure of the clamping fixture.

[0055] In one specific embodiment, the third axis (the hinge axis between the support link 400 and the support arm) is located between the midpoint of the support arm and the second lifting member 300. This design can shorten the length of the support link 400, making the clamping fixture structure more compact and lighter.

[0056] To facilitate the lifting of the clamping fixture, a lifting ring 800 can be provided at the end of the lifting guide rod 100 away from the first lifting member 200. After the clamping fixture grips the insulation cylinder, a rope or iron bar can be passed through the lifting ring 800 to lift the insulation cylinder.

[0057] To reduce the overall weight of the clamping fixture, the support link 400 and the support arm can be made of materials with a density of 1.6 g / cm³. 3 The carbon-carbon composite material makes it easy for operators to use.

[0058] The terms "first" and "second," etc., used in the specification and claims of this application are used to distinguish different objects, not to describe a specific order, and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units may include steps or units not listed, but rather steps or units not listed. Additionally, in the description of embodiments in this application, "a plurality of" means two or more.

[0059] In the description of this application, it should be understood that the terms "height," "thickness," "upper," "lower," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. In the description of this application, "a plurality of" means two or more, and "at least one" can mean one, two, or more, unless otherwise expressly specified.

[0060] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Specific technical means in some embodiments may be incorporated, in whole or in part, into another embodiment unless explicitly excluded by another embodiment. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A clamping fixture for clamping a heat-insulating cylinder in the hot zone of a single crystal furnace, characterized in that, include: Lift guide rod (100); The first lifting member (200) and the second lifting member (300) are both disposed on the lifting guide rod (100), and at least one of the first lifting member (200) and the second lifting member (300) can be displaced along the lifting guide rod (100) so that the first lifting member (200) and the second lifting member (300) can move closer to each other and further away from each other; The support link (400) and the support arm are of the same number and there are at least two of each. One end of the support arm is hinged to the second lifting member (300) through a first axis, one end of the support link (400) is hinged to the first lifting member (200) through a second axis, and the other end of the support link (400) is hinged to the support arm through a third axis. The other end of the support arm is used to cooperate with the inner wall of the heat preservation cylinder. The axes of the first axis, the second axis and the third axis are parallel.

2. The clamping fixture as described in claim 1, characterized in that, The support arm includes a support rod (500) and a claw (600), the support rod (500) and the claw (600) are hinged by a fourth axis, and the claw (600) engages with the inner wall of the insulation cylinder.

3. The clamping fixture as described in claim 2, characterized in that, The jaw (600) includes: The claw body (610) is hinged to the support rod (500) via the fourth axis; The first movable part (620) and the second movable part (630) are hinged together by a fifth axis and the second movable part (630) and the claw body (610) are hinged together by a sixth axis. The axes of the fifth axis and the sixth axis are parallel.

4. The clamping fixture as described in claim 3, characterized in that, The jaw (600) further includes a jaw connector (640), which is hinged to the jaw body (610) via a seventh axis. The support rod (500) and the jaw body (610) are hinged to the fourth axis, and the axes of the fourth axis and the seventh axis are parallel.

5. The clamping fixture as described in claim 1, characterized in that, The first lifting member (200) is located below the second lifting member (300).

6. The clamping fixture as described in claim 5, characterized in that, The clamping fixture includes a nut (700), and the lifting guide rod (100) is a screw; the first lifting member (200) is fixed on the lifting guide rod (100), and the second lifting member (300) is slidably sleeved on the lifting guide rod (100); the nut (700) is threadedly engaged with the lifting guide rod (100) and is located on the side of the second lifting member (300) away from the first lifting member (200).

7. The clamping fixture as described in claim 6, characterized in that, The nut (700) is provided with a handle (900).

8. The clamping fixture as described in claim 6, characterized in that, The nut (700) has a slot at one end near the second lifting member (300).

9. The clamping fixture as described in claim 5, characterized in that, The lifting guide rod (100) is a screw rod, and the lifting guide rod (100) includes a first screw section and a second screw section with opposite rotation directions. The first lifting member (200) is threadedly engaged with the first screw section, and the second lifting member (300) is threadedly engaged with the second screw section.

10. The clamping fixture as described in claim 1, characterized in that, The third shaft is located between the midpoint of the support arm and the second lifting member (300).

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