A weighing device for polishing pads

Abstract

The utility model discloses a kind of weighing devices for grinding pad, including base, two vertical extension clamping plates are equipped on the base, two The clamping plate is oppositely spaced, the bottom of each The clamping plate is provided with connecting arc block, grinding pad is vertically placed in the interval space of two The clamping plate, The shape of connecting arc block is matched with the circumference of grinding pad, the outer ring of grinding pad is embedded into The arc-shaped recess of connecting arc block, The height of The clamping plate exceeds the center height of grinding pad;Grinding pad is placed on The connecting arc block, and is weighed with The clamping plate and The base, determine the weight of grinding pad, the utility model can be vertically clamped and weighed to grinding pad, and can be centered to grinding pad Correct, ensure the accuracy of weighing result, while also can avoid grinding pad directly with measuring equipment direct contact, prevent pollution to grinding pad.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of weighing device, especially a kind of weighing device for polishing pad. BACKGROUND

[0002] CMP equipment, namely chemical mechanical polishing equipment, is the key equipment for realizing wafer global planarization in semiconductor manufacturing, which removes redundant materials on wafer surface through chemical corrosion and mechanical grinding cooperation to ensure that wafer reaches a certain flatness and provides high-quality surface for subsequent manufacturing process, and the polishing pad is a consumable frequently used in CMP equipment, and the weight of the polishing pad needs to be measured during testing and use, but the polishing pad is soft in material and large in diameter, and when it is laid on the electronic platform scale, the polishing pad will exceed the platform of the electronic platform scale and collapse downward at the outer boundary, which makes it difficult for ordinary electronic platform scale to directly measure it, and if the polishing pad directly contacts the electronic platform scale and other measuring equipment, it is easy to contaminate the polishing pad and cause inaccurate measurement, based on which the utility model is proposed. SUMMARY

[0003] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and provide a weighing device for polishing pad that can overcome the above problems or at least partially solve the above problems.

[0004] To achieve the above purpose, the utility model adopts the following technical scheme:

[0005] A weighing device for polishing pad, characterized in that it comprises a base,

[0006] Two vertically extending clamping plates are provided on the base, and the two clamping plates are oppositely and spaced apart, the bottom of each clamping plate is provided with a connecting arc block, the polishing pad is vertically placed in the space between the two clamping plates, the shape of the connecting arc block matches the circumference of the polishing pad, the outer ring of the polishing pad is fitted into the arc-shaped recess of the connecting arc block, and the height of the clamping plate exceeds the height of the center position of the polishing pad.

[0007] The polishing pad is placed on the connecting arc block and weighed together with the clamping plate and the base to determine the weight of the polishing pad.

[0008] Further technical features are that the clamping plate comprises an annular portion, a connecting portion and an arc-shaped plate connected in sequence from top to bottom, the arc-shaped plate is fixedly installed with the connecting arc block, the arc-shaped plate is provided with a through hole, and the top of the connecting arc block is located in the through hole.

[0009] Further, the annular part comprises a support rod and an outer ring, the support rod is arranged inside the outer ring, and two ends of the support rod are connected with the outer ring.

[0010] Further, the connecting part comprises a plurality of spaced connecting rods, and two ends of each connecting rod are vertically connected with the annular part and the arc-shaped plate respectively.

[0011] Further, the weighing device further comprises a plurality of right-angle tripods, and two right-angle edges of each right-angle tripod are abuttingly mounted with the base and the clamping plate respectively.

[0012] Further, the base comprises an arc-shaped frame, and the bottom of the clamping plate is connected with the base through the arc-shaped frame.

[0013] Further, the abutting rod of one rotating abutting piece is connected with the abutting rod of another rotating abutting piece through an extension connecting rod.

[0014] Further, the clamping plate further comprises an upper and lower limiting groove and an elastic piece arranged in a vertical mode, the extension connecting rod is located between the limiting groove and the elastic piece, the extension connecting rod moves in the upper and lower space limited by the limiting groove, and the bottom of the extension connecting rod abuts against the elastic piece.

[0015] Compared with the prior art, the weighing device for the grinding pad has the following beneficial effects:

[0016] 1. The weighing device for the grinding pad can vertically clamp the grinding pad through the two clamping plates, can avoid that the measuring equipment table is too small when being laid flat, can avoid that the center of gravity is deviated when being laid, and can avoid that the final weighing structure is not accurate, and can also avoid that the grinding pad directly contacts the measuring equipment, thereby preventing the grinding pad from being polluted.

[0017] 2. The weighing device for the grinding pad can assist in clamping the grinding pad in the center through the rotating abutting piece and the extension connecting rod, can ensure that the grinding pad does not deviate when being placed, and can adapt to grinding pads of different sizes.

[0018] The parts not involved in the device are the same as or can be realized by the prior art, the weighing device for the grinding pad can vertically clamp and weigh the grinding pad, can correct the grinding pad in the center, and can ensure the accuracy of the weighing result. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 The structure diagram of the weighing device for the grinding pad is provided.

[0020] Figure 2 The utility model provides a kind of weighing device for grinding pad Figure 1 The enlarged structural schematic diagram of part A in the figure;

[0021] Figure 3 The utility model provides a kind of weighing device for grinding pad's explosion map;

[0022] Figure 4 The utility model provides a kind of weighing device for grinding pad's sectional view;

[0023] Figure 5 The utility model provides a kind of weighing device for grinding pad's structure schematic diagram of clamping assembly and base.

[0024] In the figure: 1, base;11, right angle tripod;12, arc frame;2, clamping plate;22, annular portion;23, arc plate;231, through hole;24, connecting portion;26, connecting arc block;4, rotation abutment;41, telescopic connecting rod;43, limit slot;44, elastic member. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments.

[0026] In the description of the utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model.

[0027] As Figure 1 A kind of weighing device for grinding pad, including base 1, base 1 is equipped with two pieces of vertical extension clamping plate 2, two pieces of clamping plate 2 are oppositely spaced, base 1 extends in horizontal direction, as the bottom support of entire weighing device, avoid the situation of toppling over, while base 1 is also convenient to place on measuring equipment, it is convenient to carry out last weighing, grinding pad is placed in the interval space of two pieces of clamping plate 2, interval space setting distance should be moderate, ensure that it will not be due to setting too small and lead to the difficult situation of grinding pad is put into, also need to ensure that it will not be due to setting distance too large, lead to the bending situation of grinding pad.

[0028] The grinding pad is placed in the weighing device of the application, and the original horizontal placement is changed to vertical placement. The advantage of this is that the grinding pad itself has a large area but a small thickness. By using this feature, the weighing area of the measuring device can be small, and the grinding pad can be directly weighed. At the same time, the grinding pad can be prevented from being contaminated by direct contact with the measuring device.

[0029] Further, the two clamping plates 2 are symmetrically arranged, and the sizes of the two clamping plates 2 are consistent, which can reduce manufacturing costs and costs. In actual use, two identical clamping plates 2 can be used, and installation is more convenient. There is no need to distinguish between them and they can be installed directly. At the same time, the overlapping area of the two clamping plates 2 can be enlarged, and the contact area with the grinding pad can be larger. A larger area can better support the grinding pad.

[0030] The height of the clamping plate 2 should not be too low. The height of the clamping plate 2 exceeds the height of the center position of the grinding pad. The height of the center position of the grinding pad can be understood as the height of the center of the grinding pad. Of course, the higher the height of the clamping plate 2, the more conducive to placing the grinding pad. In actual work, clamping plates 2 of different sizes and heights can be designed for different grinding pads.

[0031] In order to better support the bottom of the vertically arranged grinding pad, as shown in Figure 4 , a connecting arc block 26 is arranged at the bottom of the clamping plate 2. The shape of the connecting arc block 26 matches the circumference of the grinding pad. The outer ring of the grinding pad is fitted into the arc-shaped recess of the connecting arc block 26. On the one hand, it can better support the grinding pad, and on the other hand, it can avoid damaging the circumference of the grinding pad.

[0032] As shown in Figure 3 , in order to better connect and fix the base 1 and the clamping plate 2, the base 1 includes an arc-shaped frame 12. The bottom of the clamping plate 2 is connected to the base 1 through the arc-shaped frame 12. The shape of the arc-shaped frame 12 matches the bottom of the base 1 and is fixed by adhesion or other methods.

[0033] The grinding pad is placed on the connecting arc block 26 and weighed together with the clamping plate 2 and the base 1 to determine the weight of the grinding pad. In the actual measurement process, the overall weight of the weighing device needs to be measured first, then the grinding pad is placed in the weighing device, and the combined weight of the grinding pad and the weighing device is measured. The weight of the grinding pad is obtained by subtracting the weight of the weighing device measured before.

[0034] As shown in Figure 2 and 3As shown, the clamping plate 2 includes an annular portion 22, a connecting portion 24 and an arc-shaped plate 23 connected in sequence from top to bottom, all of which are fixed installation structures, the arc-shaped plate 23 is fixedly installed with a connecting arc block 26, the arc-shaped plate 23 is provided with a through hole 231, when the grinding pad is placed in the weighing device, the grinding pad can be observed through the through hole 231 to ensure that it is placed in place, and when it needs to be taken out, the bottom of the grinding pad can be directly touched through the through hole 231, so that the grinding pad can be taken out together, avoiding damage to the grinding pad caused by directly lifting it. Of course, the number of through holes 231 can be multiple, which can reduce the overall weight on the one hand and make it more convenient to take out the grinding pad on the other hand.

[0035] The annular portion 22 includes a support rod and an outer ring, the support rod is arranged inside the outer ring, and the two ends of the support rod are connected with the outer ring. Further, the support rod can be a cross structure to provide higher internal support, and at the same time, the outer ring can be a double-layer annular structure, and the annular portion 22 is designed as a hollow structure to avoid the whole clamping plate 2 being too heavy, and the hollow structure can also avoid excessive contact with the grinding pad, and the support rods of the cross structure are connected with the two annular portions respectively.

[0036] The connecting portion 24 includes a plurality of spaced connecting rods, the two ends of the connecting rod are respectively connected with the annular portion 22 and the arc-shaped plate 23 vertically, and the connecting rod realizes the connecting effect while further reducing the weight of the whole device.

[0037] As shown in the figure, Figure 3 The weighing device further includes a plurality of right-angled tripods 11, two right-angle sides of the right-angled tripod 11 are respectively abuttingly installed with the base 1 and the clamping plate 2, since the clamping plate 2 extends vertically upward, the bottom of the clamping plate 2 needs to avoid breaking, and the right-angled tripod 11 can strengthen the support strength of the clamping plate 2, as shown in the figure, the number of right-angled tripods 11 is three, which support the two side portions and the middle portion respectively, and the two clamping plates 2 are respectively provided with three right-angled tripods 11.

[0038] As shown in the figure, Figure 5 Further, the weighing device further includes two rotating abutting members 4, the two rotating abutting members 4 are respectively arranged on the two sides of the clamping plate 2, the rotating shaft of the rotating abutting member 4 penetrates through the two clamping plates 2, and the abutting rod of the rotating abutting member 4 is located at least in the extension area of the spacing space, the abutting rod can abut against the grinding pad to play a supporting role, the rotating abutting member 4 is a supporting tool, which is distributed on the two sides of the clamping plate 2, so that the rotating abutting member 4 further assists in supporting the grinding pad, ensures that the grinding pad can remain in the central position, guarantees the accuracy of the measurement data and avoids the situation that the grinding pad rolls to cause the center of gravity to deviate and fall or separate from the clamping plate 2.

[0039] One abutting rod of the rotating abutting piece 4 is connected with the abutting rod of another rotating abutting piece 4 through the telescopic connecting rod 41, the distance between the abutting rods of the two rotating abutting pieces 4 can be adjusted through the telescopic connecting rod 41, which is better suitable for the grinding pad of different sizes, and the telescopic connecting rod 41 can also provide external support to the clamping plate 2, so as to avoid the situation that the clamping plate 2 is tilted outward.

[0040] The rotating abutting piece 4 ensures that the grinding pad can be kept in the central position, guarantees the accuracy of the measurement data, and avoids the situation that the grinding pad rolls to cause the center of gravity to deviate and tilt or deviate from the clamping plate 2.

[0041] The clamping plate 2 further comprises a limiting groove 43 and an elastic piece 44 arranged in an up-down manner, the telescopic connecting rod 41 is located between the limiting groove 43 and the elastic piece 44, the telescopic connecting rod 41 moves in the up-down space limited by the limiting groove 43, and the bottom of the telescopic connecting rod 41 abuts against the elastic piece 44.

[0042] When the telescopic connecting rod 41 moves up and down, the telescopic connecting rod 41 will be telescoped synchronously, and the rotating abutting piece 4 will be rotated to change the angle of the rotating abutting piece 4, the elastic piece 44 is connected between the telescopic connecting rod 41 and the clamping plate 2, when the grinding pad is not placed, the telescopic connecting rod 41 is always located at the top end of the limiting groove 43, when the grinding pad is placed in the two clamping plates 2, the rotating abutting piece 4 is contacted and pressed by the grinding pad under the action of gravity and is opened to both sides, under the action of the telescopic connecting rod 41, the angles of the rotating abutting pieces 4 on both sides are synchronous, so that the rotating abutting piece 4 realizes the central clamping of the grinding pad;

[0043] The overall material of the device is transparent polyvinyl chloride, which has non-flammability, high strength, weather resistance, excellent geometric stability and electrical insulation.

[0044] When the user uses, only needs to place the grinding pad in the clamping plate 2, through the through hole 231, the user can observe that the grinding pad falls smoothly to the bottom, and then the whole device can be placed on the measuring equipment to measure, and the weight of the device is deducted to determine the weight of the grinding pad.

[0045] The above is only the preferred specific implementation manner of the present application, but the protection scope of the present application is not limited to this, any skilled person in the technical field according to the technical scheme and the application concept of the present application within the technical range disclosed by the present application can make equivalent replacement or change, which should be covered in the protection scope of the present application.

[0046] Any combination of the technical features in the above-described embodiments can be made, and for the sake of brevity, not all possible combinations are described, however, it is to be understood that the application embraces all such possible combinations.

[0047] The above-described embodiments only express several implementation manners of the application, and the description is relatively specific and detailed, but it should not be understood as a limitation on the patent scope of the application. It should be pointed out that, for ordinary skilled persons in the art, some modifications and improvements can be made without departing from the concept of the application, and these all belong to the protection scope of the application. Therefore, the patent protection scope of the application should be subject to the appended claims.

Claims

1. A weighing device for abrasive pads, characterized in that, Includes a base (1), on which two vertically extending clamping plates (2) are provided. The two clamping plates (2) are arranged opposite each other at intervals. Each clamping plate (2) has a connecting arc block (26) at its bottom. The grinding pad is placed vertically in the space between the two clamping plates (2). The shape of the connecting arc block (26) matches the circumference of the grinding pad. The outer ring of the grinding pad is embedded in the arc-shaped recess of the connecting arc block (26). The height of the clamping plate (2) exceeds the height of the center position of the grinding pad. The grinding pad is placed on the connecting arc block (26) and weighed together with the clamping plate (2) and the base (1) to determine the weight of the grinding pad.

2. The weighing device for a grinding pad according to claim 1, characterized in that, The clamping plate (2) includes an annular part (22), a connecting part (24) and an arc plate (23) connected in sequence from top to bottom. The arc plate (23) is fixed to the connecting arc block (26). The arc plate (23) is provided with a through hole (231). The top of the connecting arc block (26) is located in the through hole (231).

3. A weighing device for a grinding pad according to claim 2, characterized in that, The annular portion (22) includes a support rod and an outer ring. The support rod is disposed in the inner ring of the outer ring, and the end of the support rod is connected to the outer ring.

4. A weighing device for a grinding pad according to claim 2, characterized in that, The connecting part (24) includes a plurality of spaced connecting rods, the two ends of which are vertically connected to the annular part (22) and the arc plate (23).

5. A weighing device for a grinding pad according to claim 1, characterized in that, The weighing device also includes multiple right-angled tripods (11), the two right-angled sides of which are respectively abutted against the base (1) and the clamping plate (2).

6. A weighing device for a grinding pad according to claim 1, characterized in that, An arc-shaped frame (12) is provided on the base (1), and the bottom of the clamping plate (2) is fixedly connected to the base (1) through the arc-shaped frame (12).

7. A weighing device for a grinding pad according to claim 1, characterized in that, The weighing device also includes two rotating abutment members (4), which are respectively disposed on both sides of the clamping plate (2). The rotating shaft of the rotating abutment member (4) passes through the two clamping plates (2), and the abutment rod of the rotating abutment member (4) is at least partially located in the extension area of ​​the interval space.

8. A weighing device for a grinding pad according to claim 7, characterized in that, The abutment rod of one of the rotating abutment members (4) is connected to the abutment rod of the other rotating abutment member (4) via a telescopic connecting rod (41).

9. A weighing device for a grinding pad according to claim 8, characterized in that, The clamping plate (2) also includes a limiting groove (43) and an elastic element (44) arranged vertically. The telescopic connecting rod (41) is located between the limiting groove (43) and the elastic element (44). The telescopic connecting rod (41) moves in the vertical space restricted by the limiting groove (43). The bottom of the telescopic connecting rod (41) abuts against the elastic element (44).

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