Electric control system for supplying a grinding liquid

Abstract

The utility model provides a kind of for grinding fluid supply electric control system, including electromagnetic valve box, control unit and at least two groups of power module, electromagnetic valve box is equipped with electrically connected relay and self-holding solenoid valve, relay is switched to open or closed position after being switched on power to supply self-holding solenoid valve after receiving signal;Control unit is electrically connected relay, can output open or closed signal to relay: at least two power module is electrically connected control unit and relay, power module all have: an electric supply unit, electrically connected one external power supply, and a parallel connector, series in electric supply unit, power module is connected to control unit by parallel connector, and power module is independent between each other for electric circuit;Thus after short power supply, let self-holding solenoid valve switch position after maintaining unchanged, avoid subsequent abnormal factor and cause liquid supply pipeline interruption.

Description

[0001] This utility model claims priority to a Taiwan patent application filed on December 25, 2024, with application number 113214252. Technical Field

[0002] This utility model relates to the field of grinding fluid supply for machine tools, and in particular to an electronic control system for grinding fluid supply that will not suddenly stop supplying fluid due to abnormal conditions. Background Technology

[0003] In semiconductor manufacturing, Chemical Mechanical Polishing (CMP) is a critical process, and the polishing slurry typically needs to be mixed before use. The polishing slurry supply system places extremely high demands on production stability, product yield, and equipment safety. However, traditional slurry supply systems usually consist of a piping system responsible for supplying the polishing slurry and an electrical control system that controls the opening and closing of valves in a distribution valve box. The opening and closing of valves in the distribution valve box directly controls the connectivity of the piping. In existing technologies, if any part of the electrical control system malfunctions, it can easily cause the valves in the piping to automatically close, thus interrupting the slurry supply and significantly impacting production operations.

[0004] like Figure 1 The diagram shown is an architecture diagram of an existing electronic control system. The existing electronic control system 10 includes a power supply unit 11, a DC power supply connector 12, a control unit 13, and a solenoid valve box 14. The electronic control system 10 controls the opening and closing of components within the solenoid valve box 14 to control whether the air supply pipeline connected to the air pressure supply source 20 and the diversion valve box 30 is connected, thereby controlling the opening and closing of valves within the diversion valve box 30, thus maintaining the normal operation of the liquid supply pipeline to continuously supply grinding fluid to the grinding machine. In the prior art, the electrical control system 10 is connected to external power by a power supply unit 11, and DC power is supplied to the control unit 13 via a DC power supply parallel connector 12. The control unit 13 is an industrial computer / programmable controller that controls and monitors the operation of each device. The solenoid valve box 14 is equipped with an electrically connected relay 141 and a solenoid valve 142. When the air supply line needs to be connected, the control unit 13 sends a signal to the relay 141, which connects the power line and provides continuous power to keep the solenoid valve 142 in the open position. When the solenoid valve 142 is in the open position, it can connect the air supply line of the air pressure supply source 20 and the diversion valve box 30, thereby connecting the liquid supply line of the diversion valve box 30.

[0005] However, in the aforementioned electronic control system 10, if the external power supply is interrupted, or if the power supply unit 11, DC power connector 12, relay 141, solenoid valve 142 malfunctions, or even if the software or hardware of the control unit 13 is damaged, the liquid supply will be interrupted, directly affecting the operation of multiple grinding machines in the factory, resulting in a large number of defective products and causing serious losses to the manufacturer. In addition, under this architecture, the relay 141 and solenoid valve 142 must also be kept energized 24 hours a day due to work requirements, which not only consumes energy but also makes the components prone to burnout due to malfunction, thus directly affecting the operation of the production line. In view of this drawback, this utility model considers and designs an improved architecture. Utility Model Content

[0006] The main purpose of this invention is to provide an electronic control system for supplying grinding fluid. This system controls the connection between the air pressure supply source and multiple air supply lines in the diversion valve box, thereby controlling the opening and closing of the valves in the diversion valve box to maintain the normal operation of the fluid supply lines. This invention uses at least two sets of power modules and a self-holding solenoid valve to control the opening and closing of multiple air supply lines. The self-holding solenoid valve maintains the open or closed position after switching, so even if a single component malfunctions, the original open or closed position will not change, ensuring the normal operation of each valve in the diversion valve box and effectively maintaining the possibility of 100% plant operation.

[0007] The secondary objective of this invention is to achieve an energy-saving electronic control system. The self-holding solenoid valve magnet only needs to be energized when the signal is received to maintain the set open or closed position. As a result, it is not necessary to supply power to the relay and solenoid valve for a long time as in the prior art. This invention can reduce energy consumption and extend the service life of the components.

[0008] To achieve the above objectives, the present invention adopts the following technical solution:

[0009] This utility model discloses an electrical control system for supplying grinding fluid, comprising: a solenoid valve box, a control unit, and at least two power modules. The solenoid valve box is equipped with an electrically connected relay and a self-holding solenoid valve. After receiving a signal, the relay can be powered to switch the self-holding solenoid valve to an open or closed position, and maintain the open or closed position after switching. The control unit is electrically connected to the relay and can output an open or closed signal to the relay to control the relay to power the self-holding solenoid valve. The system also includes at least two power modules that provide power to the electrically connected control unit and the relay. Each power module has: a power supply unit electrically connected to an external power source, and a parallel connector connected in series with the power supply unit. The multiple power modules are connected in parallel to the control unit via the parallel connector, and the multiple power modules are electrically independent of each other.

[0010] In a preferred embodiment of this utility model, the solenoid valve box is provided with several pipes that are respectively connected to the air pressure supply source and the diversion valve box. When the self-holding solenoid valve is switched to the open position, it can connect the air pressure supply source and the corresponding air supply line in the diversion valve box to control the operation of the corresponding valve in the diversion valve box.

[0011] In a preferred embodiment of this utility model, the solenoid valve box is further provided with a parallel connector, which is connected in parallel to two sets of the power modules to provide power to the relay.

[0012] In a preferred embodiment of this utility model, the circuits of the parallel connector connected in parallel to each of the power modules are also equipped with fuses.

[0013] In a preferred embodiment of the present invention, the control unit further includes an alarm unit, which is disposed in the control unit and is used to issue alarm messages.

[0014] The advantage of this invention is that it uses at least two sets of power modules and a self-holding solenoid valve as a switch to connect the control air pressure supply source and multiple air supply pipelines in the diversion valve box. By utilizing the cooperation of each component in the system, when a single component in the entire system is damaged, the other components can still maintain normal operation, reducing the dependence between components and avoiding interruption of the grinding fluid supply. Attached Figure Description

[0015] Figure 1 This is an architecture diagram of an existing electronic control system.

[0016] Figure 2 This is a structural diagram of the present invention.

[0017] Symbol explanation:

[0018] 10: Electronic control system;

[0019] 11: Power supply unit;

[0020] 12: DC power supply parallel connector;

[0021] 13: Control unit;

[0022] 14: Solenoid valve box;

[0023] 141: Relay;

[0024] 142: Solenoid valve;

[0025] 20: Air pressure supply source;

[0026] 30: Diverter valve box;

[0027] 50: Solenoid valve box;

[0028] 51: Relay;

[0029] 52: Self-holding solenoid valve;

[0030] 53: Parallel connector;

[0031] 54: Fuse;

[0032] 60: Control unit;

[0033] 70: Power module;

[0034] 71: Power supply unit;

[0035] 72: Parallel connector. Detailed Implementation

[0036] To facilitate understanding of this utility model, it will be described in detail below with reference to the accompanying drawings and embodiments. The drawings show some, but not all, embodiments of this utility model. This utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without any inventive effort are within the scope of protection of this utility model.

[0037] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

[0038] like Figure 2 The diagram shows the architecture of this utility model, which is an electrical control system for supplying grinding slurry. It includes a solenoid valve box 50, a control unit 60, and at least two sets of power modules 70. The solenoid valve box 50 is equipped with several pipes connecting a pressure supply source 20 and a diversion valve box 30. The diversion valve box 30 is further connected to a slurry supply line to the grinding machine (not shown in the diagram). This electrical control system controls the connectivity of the multiple air supply lines formed by the pipes, preventing abnormal interruptions in the air supply lines. This ensures a normal supply of grinding slurry, maintaining 100% equipment uptime and ensuring grinding quality, thus preventing defective products.

[0039] The structure of each component of this utility model will then be described:

[0040] The solenoid valve box 50 contains an electrically connected relay 51 and a self-holding solenoid valve 52. Upon receiving a signal, the relay 51 powers the self-holding solenoid valve 52 to switch to the open or closed position. When the self-holding solenoid valve 52 switches to the open position, it connects the gas supply line from the air pressure source 20 and outputs the gas through another line to the diversion valve box 30 to control the valves within the box. Conversely, when the self-holding solenoid valve 52 switches to the closed position, it interrupts the gas supply line. Because this invention uses a self-holding solenoid valve 52, after switching, the self-holding solenoid valve 52 can continuously maintain the open or closed position, waiting for the next signal before switching again. This method eliminates the need for continuous power supply after switching, saving power, reducing the failure rate, and preventing abnormal switching due to power outages.

[0041] The solenoid valve box 50 is also equipped with a connector 53, which has lines connected in parallel to two sets of power modules 70. Each line is also equipped with a fuse 54 to provide stable power. This design also ensures that the relay 51 and the self-holding solenoid valve 52 can still operate normally when a single line or one of the components is damaged.

[0042] The control unit 60 is electrically connected to the relay 51 inside the solenoid valve box 50. It outputs an open or closed signal to the relay 51, causing the relay 51 to connect to the power module 70, providing power to switch the self-holding solenoid valve 52 to the open or closed position. In this embodiment, the control unit 60 is an industrial computer or a programmable controller. In actual operation, when the self-holding solenoid valve 52 needs to be opened, the control unit 60 sends an open signal to the relay 51 via software. After connecting the open coil, the power supply stops, and the self-holding solenoid valve 52 automatically remembers and remains in the open position. Conversely, when the self-holding solenoid valve 52 needs to be closed, the control unit 60 also sends a close signal to the relay 51 via software. After connecting the close coil, the power supply stops, and the self-holding solenoid valve 52 automatically remembers and remains in the closed position. Thus, this invention achieves the design goal of zero energy consumption for the solenoid valve box 50 under normal conditions. Additionally, the control unit 60 may also be equipped with an alarm unit (not shown in the figure). The alarm unit is used to issue an alarm according to the system status. The alarm unit is a buzzer or a warning light to achieve the purpose of quick reminder.

[0043] At least two power modules 70 are used to provide power and are electrically connected to the control unit 60 and the relay 51. Each power module 70 has a power supply unit 71 and a parallel connector 72. The power supply unit 71 is electrically connected to an external power source. The parallel connector 72 is connected in series with the power supply unit 71. The plurality of power modules 70 are connected in parallel to the control unit 60 using the parallel connector 72, and the electrical circuits of the plurality of power modules 70 are independent.

[0044] Specifically, the multiple power modules 70 are different power sources and can independently supply power to the control unit 60. The connector 72 is connected in parallel with at least two sets of power modules 70. If one power module 70 fails, it can be immediately powered by another, so it will not affect the operation of the control unit 60. It can also issue an alarm through the alarm unit to remind the user to carry out maintenance.

[0045] In summary, this utility model utilizes two sets of power modules 70 to receive external AC power, which differs from... Figure 1 In existing technologies, the single power supply means that a power outage in the power supply unit 11 will immediately cause the machine to stop. The design of this invention uses a dual-circuit connection to two external power supplies, which are connected in parallel via the power supply unit 71 and the parallel connector 72 to supply power to the control unit 60 or other components. Therefore, a single component failure in one of the power modules 70 will not cause a power outage and machine shutdown, thus maintaining normal system operation.

[0046] Furthermore, the self-holding solenoid valve 52 inside the solenoid valve box 50 is itself a dual-coil solenoid valve structure, unlike... Figure 1 The solenoid valve 142 requires energization to operate normally; therefore, in the prior art... Figure 1 The previous method required a continuous power supply. This invention uses a self-holding solenoid valve 52. After the control unit 60 sends an opening signal, the self-holding solenoid valve 52 automatically switches to the open position and remains there. Conversely, when it needs to be closed, the control unit 60's software must send a closing signal for the self-holding solenoid valve 52 to switch to the closed position and remain there. In this way, under normal conditions, there is no need to continuously supply power to the relay 51 or the self-holding solenoid valve 52, achieving zero energy consumption. Furthermore, because there is no need for prolonged power supply for excitation, the probability of component burnout is effectively reduced, extending the service life of the entire solenoid valve box 50 and lowering the operational risk costs due to downtime caused by malfunctions.

[0047] The self-holding solenoid valve 52 of this utility model is responsible for controlling whether the air supply line of the valve in the diversion valve box 30 of the grinding fluid supply system is connected or not. Because the double coil structure of the self-holding solenoid valve 52 has the function of automatic memory of the actuation position, after the valve in the diversion valve box 30 is opened or closed by the control, no matter if one of the external power is interrupted, or any component such as the power supply unit 71, the connector 72, the control unit 60, the relay 51, or the self-holding solenoid valve 52 malfunctions, it will not affect the normal operation of the valve in the diversion valve box 30. Therefore, the fluid supply will not be interrupted, effectively increasing the possibility of the factory's operating rate to 100% and meeting the needs of manufacturers.

[0048] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the scope of the embodiments of the present utility model. All equivalent variations and modifications made within the scope of the claims of the present utility model are covered by the patent scope of the present utility model.

Claims

1. An electronic control system for supplying grinding slurry, characterized in that, include: A solenoid valve box is equipped with an electrically connected relay and a self-holding solenoid valve. After receiving a signal, the relay can connect to power to switch the self-holding solenoid valve to the open or closed position, and maintain the open or closed position after switching. A control unit, electrically connected to the relay, is capable of outputting an open or closed signal to the relay to control the relay to connect power to switch the self-holding solenoid valve; and At least two power modules provide power to the control unit and the relay that are electrically connected. Each power module has: a power supply unit electrically connected to an external power source, and a parallel connector connected in series with the power supply unit. Multiple power modules are connected in parallel to the control unit via the parallel connector, and the multiple power modules are electrically independent of each other.

2. The electronic control system for supplying grinding slurry according to claim 1, characterized in that, The solenoid valve box is provided with several pipes that are respectively connected to the air pressure supply source and the diversion valve box. When the self-holding solenoid valve is switched to the open position, it can connect the air pressure supply source and the corresponding air supply line in the diversion valve box to control the operation of the corresponding valve in the diversion valve box.

3. The electronic control system for supplying grinding slurry according to claim 1, characterized in that, Includes: the solenoid valve box is equipped with a parallel connector, which is connected in parallel to two sets of the power modules.

4. The electronic control system for supplying grinding slurry according to claim 3, characterized in that, The parallel connector, which is connected in parallel to the lines of each of the power modules, is also equipped with a fuse.

5. The electronic control system for supplying grinding slurry according to claim 1, characterized in that, The control unit also includes an alarm unit, which is disposed in the control unit and is used to issue alarm messages.

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