A continuous production device of high-purity tetramethylsilane

Abstract

The utility model discloses a kind of continuous production device of high-purity tetramethylsilane, including receiving support, the receiving support top is fixedly connected with control electricity box, the receiving support top is fixedly connected with support sleeve frame, two installation conical barrels are fixedly sleeved in the support sleeve frame, the installation conical barrel side wall is connected with installation valve, the installation conical barrel top is provided with installation cover.The utility model, by mixed liquid falls into the inside of connecting drawer, and after being filtered by connecting filter screen, connecting filter element and connecting filter cloth, then be discharged into the inside bottom of adjusting shell through multiple liquid discharge holes on connecting drawer, so that hydrolysis impurity removal is accelerated, and the mixed liquid of hydrolysis is fully purified in multiple stages, to improve use effect.

Description

Technical Field

[0001] This utility model relates to the field of silane production technology, and in particular to a continuous production apparatus for high-purity tetramethylsilane. Background Technology

[0002] High-purity tetramethylsilane, as a key electronic material, is widely used in semiconductor, optoelectronic, and liquid crystal display processes by TMS. Its high purity makes it a precursor for chemical vapor deposition and plasma-enhanced chemical vapor deposition, used to prepare high-quality silicon carbide thin films, significantly improving the performance and stability of semiconductor devices. The core role of continuous production equipment for silane is to optimize the process flow and improve production efficiency. In traditional continuous production equipment, when producing silane, most of them add the low-boiling-point methylchlorosilane containing tetramethylsilane to water for hydrolysis to remove some impurities. However, hydrolysis alone cannot effectively remove impurities, resulting in the need for multiple purification processes, which affects subsequent production and reduces the effectiveness of use. Utility Model Content

[0003] The purpose of this invention is to address the shortcomings of existing technologies by proposing a continuous production apparatus for high-purity tetramethylsilane.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: a continuous production device for high-purity tetramethylsilane, comprising a receiving bracket, an electrical control box fixedly connected to the top of the receiving bracket, a support sleeve fixedly connected to the top of the receiving bracket, two mounting conical barrels fixedly fitted inside the support sleeve, mounting valves connected to the side walls of the mounting conical barrels, a mounting cover provided on the top of the mounting conical barrels, an electric heating pipe wound around the outer side wall of the mounting conical barrels, and a mounting assembly connected to the top of the mounting cover;

[0005] The front of the receiving bracket is provided with an adjustment housing, and the top of the adjustment housing is connected to a material extraction component.

[0006] Two adjusting push rods are provided through both sides of the outer wall of the adjusting housing. An adjusting U-shaped plate is fixedly connected between the other ends of the two adjusting push rods. An adjusting V-shaped filter screen is fixedly connected between one end of the two adjusting push rods. Fixing components are connected to both sides of the outer wall of the adjusting housing.

[0007] An adjustment processing pipe is fixedly connected to the surface of the adjustment housing, an adjustment valve is connected to the side wall of the adjustment processing pipe, and a connecting component is connected to the surface of the adjustment housing.

[0008] As a further description of the above technical solution: the installation assembly includes an installation tube that passes through and is rotatably connected to the top of the installation cover. A second synchronous wheel is fixedly sleeved on the outer wall of the installation tube. An installation frame is fixedly sleeved on the outer wall of the installation tube. Multiple adsorption columns are fixedly connected to the surface of the installation frame. An installation stirring frame is fixedly sleeved on the outer wall of the installation tube. A drive assembly for adjusting the rotation of the second synchronous wheel is connected to the bottom of the support frame. The adsorption columns adsorb impurities in the mixture.

[0009] As a further description of the above technical solution: the drive assembly includes a drive housing fixedly connected to the bottom of the support frame, a drive motor fixedly connected between the two sides of the inner wall of the drive housing, a drive rod fixedly connected to the output end of the drive motor, the end of the drive rod passing through the drive housing and the support frame and extending to the outside of the support frame, and two first synchronous pulleys fixedly sleeved on the outer wall of the drive rod. The first synchronous pulleys are driven by meshing with their corresponding second synchronous pulleys through a synchronous toothed belt, and the drive motor is used to drive the drive rod to rotate.

[0010] As a further description of the above technical solution: the material extraction assembly includes a first branch pipe fixedly connected to the top of the adjusting shell, a material extraction pump fixedly connected to the end of the first branch pipe, and two second branch pipes fixedly connected to the outlet of the material extraction pump. The end of the second branch pipe is rotatably connected to one end of its corresponding mounting pipe. The material extraction pump drives the mounting pipes on the two second branch pipes to extract the decomposed mixture inside the conical barrel.

[0011] As a further description of the above technical solution: the fixing component includes a fixing support plate fixedly connected to the outer wall of the adjusting housing, a fixing housing fixedly connected to the top of the fixing support plate, and a fixing motor fixedly connected between the two sides of the inner wall of the fixing housing, so as to drive the fixing push plate to rotate.

[0012] As a further description of the above technical solution: the fixed motor output shaft passes through the fixed support plate and is fixedly connected to the fixed push plate. The bottom of the fixed push plate is rotatably connected to the fixed rotating shaft. The fixed rotating shaft is slidably connected to the corresponding adjusting ring plate inside the adjusting ring plate. The fixed push plate drives the fixed rotating shaft to slide inside the adjusting ring plate.

[0013] As a further description of the above technical solution, the connecting assembly includes a connecting port opened on the surface of the adjusting housing, a connecting drawer slidably connected inside the connecting port, a plurality of drainage holes through the bottom of the connecting drawer, a connecting filter cloth fixedly connected between the two sides of the inner wall of the connecting drawer, and a connecting filter screen connected to the top of the connecting filter cloth through a connecting filter element. Through the cooperation between the connecting filter cloth, the connecting filter element and the connecting filter screen, the mixture is filtered in three stages.

[0014] As a further description of the above technical solution: a temperature controller is fixedly connected to the top of the mounting cover, a feed pipe is fixedly connected to the top of the mounting cover, an external thread is provided on the outer wall of the feed pipe, a feed cover is threadedly connected to the outer wall of the feed pipe, a vent pipe is fixedly connected to the top of the mounting cover, and a vent valve is connected to the side wall of the vent pipe, which serves to open and close the vent pipe.

[0015] This utility model has the following beneficial effects:

[0016] The drive assembly enables the drive motor to rotate two first synchronous pulleys. Simultaneously, the two first synchronous pulleys mesh with their corresponding second synchronous pulleys via a synchronous toothed belt, causing the mounting tubes on the second synchronous pulleys to rotate. The mounting assembly allows the mounting tubes to drive the mounting stirring frame, mixing materials and additives and accelerating hydrolysis and impurity removal. Because multiple adsorption columns are mounted on the mounting tubes via mounting sleeves, the rotating mounting sleeves also filter and adsorb the mixture after hydrolysis and impurity removal, reducing impurities remaining after decomposition. The extraction assembly enables the extraction pump to drive the mounting tubes on the two second branch pipes to extract the mixture from inside the mounting conical tank. The mixture then flows through the first branch pipe into the regulating housing. The fixing assembly allows the solid... A fixed motor drives a fixed push plate and a fixed rotating shaft to rotate. The fixed rotating shaft then slides inside its corresponding adjusting ring plate, causing the adjusting push rod on the adjusting ring plate to move along the direction on the adjusting housing. The adjusting push rod also moves the adjusting V-shaped filter, causing the two adjusting V-shaped filters to come into contact with each other. This allows impurities in the mixture to undergo double filtration between the two adjusting V-shaped filters. The connecting assembly allows the mixture to fall into the connecting drawer and undergo three stages of filtration: connecting filter, connecting filter element, and connecting filter cloth. Finally, the mixture is drained into the bottom of the adjusting housing through multiple drain holes on the connecting drawer, accelerating hydrolysis and impurity removal. This multi-stage purification process of the hydrolyzed mixture improves its performance. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of a continuous production apparatus for high-purity tetramethylsilane proposed in this utility model.

[0018] Figure 2 This is a schematic diagram of the internal structure of the conical barrel used in the continuous production of high-purity tetramethylsilane according to this utility model.

[0019] Figure 3 for Figure 1 Enlarged structural diagram at point A;

[0020] Figure 4This is a schematic diagram of the internal structure of the regulating shell of a continuous production device for high-purity tetramethylsilane proposed in this utility model.

[0021] Figure 5 for Figure 1 Enlarged structural diagram at point B.

[0022] Legend:

[0023] 1. Support bracket; 2. Control box; 3. Conical barrel installation; 4. Cover installation; 5. Heating pipe; 6. Temperature controller; 7. Vent pipe; 8. Installation pipe; 9. Mounting sleeve; 10. Adsorption column; 11. Stirring rack installation; 12. Drive motor; 13. Drive rod; 14. First synchronous pulley; 15. Synchronous toothed belt; 16. Adjusting housing; 17. First branch pipe; 18. Feed pump; 19. Second branch pipe; 20. Adjusting processing pipe; 21. Adjusting push rod; 22. Adjusting guide plate; 23. Adjusting V-shaped filter screen; 24. Fixing support plate; 25. Fixing motor; 26. Fixing push plate; 27. Fixing rotating shaft; 28. Connecting drawer; 29. ​​Connecting filter cloth; 30. Connecting filter screen. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Reference Figure 1-5This utility model provides a continuous production apparatus for high-purity tetramethylsilane, comprising a support bracket 1, a control box 2 fixedly connected to the top of the support bracket 1, a support sleeve fixedly connected to the top of the support bracket 1, two mounting conical barrels 3 fixedly fitted inside the support sleeve, mounting valves connected to the side walls of the mounting conical barrels 3, a mounting cover 4 provided on the top of the mounting conical barrels 3, a temperature controller 6 fixedly connected to the top of the mounting cover 4, a feed pipe fixedly connected to the top of the mounting cover 4, an external thread on the outer wall of the feed pipe, a feed cover threaded to the outer wall of the feed pipe, and a vent pipe 7 fixedly connected to the top of the mounting cover 4, with a vent valve connected to the side wall of the vent pipe 7. The outer wall of the conical barrel 3 is wound with an electric heating pipe 5, and the top of the mounting cover 4 is connected to an installation assembly. The installation assembly is used to mix and decontaminate the additives and materials. The installation assembly includes an installation tube 8 that passes through and is rotatably connected to the top of the mounting cover 4. A second synchronous wheel is fixedly sleeved on the outer wall of the installation tube 8. An installation frame 9 is fixedly sleeved on the outer wall of the installation tube 8. Multiple adsorption columns 10 are fixedly connected to the surface of the installation frame 9. An installation stirring frame 11 is fixedly sleeved on the outer wall of the installation tube 8. The installation tube 8 drives the installation stirring frame 11 to rotate, so that the installation stirring frame 11 can mix and decontaminate the additives and materials.

[0026] The bottom of the support frame is connected to a drive assembly for adjusting the rotation of the second synchronous wheel. The drive assembly includes a drive housing fixedly connected to the bottom of the support frame. A drive motor 12 is fixedly connected between the two sides of the inner wall of the drive housing. A drive rod 13 is fixedly connected to the output end of the drive motor 12. The end of the drive rod 13 passes through the drive housing and the support frame and extends to the outside of the support frame. Two first synchronous wheels 14 are fixedly sleeved on the outer wall of the drive rod 13. The first synchronous wheels 14 are driven by meshing with their corresponding second synchronous wheels through a synchronous toothed belt 15. The drive assembly is used to drive the second synchronous wheels to rotate.

[0027] The front of the support bracket 1 is provided with an adjustment housing 16. The top of the adjustment housing 16 is connected to a material extraction component. The material extraction component includes a first branch pipe 17 fixedly connected to the top of the adjustment housing 16. A material extraction pump 18 is fixedly connected to the end of the first branch pipe 17. Two second branch pipes 19 are fixedly connected to the outlet of the material extraction pump 18. The end of the second branch pipe 19 is rotatably connected to one end of the corresponding mounting pipe 8. Through the material extraction component, the purpose of material extraction is achieved.

[0028] Two adjusting push rods 21 are provided through both sides of the outer wall of the adjusting housing 16. An adjusting U-shaped plate 22 is fixedly connected between the other ends of the two adjusting push rods 21. An adjusting V-shaped filter screen 23 is fixedly connected between one end of the two adjusting push rods 21. Fixing components are connected to both sides of the outer wall of the adjusting housing 16. The fixing components include a fixing support plate 24 fixedly connected to the outer wall of the adjusting housing 16. A fixing housing is fixedly connected to the top of the fixing support plate 24. A fixing motor 25 is fixedly connected between the two sides of the inner wall of the fixing housing. The output shaft of the fixing motor 25 passes through the fixing support plate 24 and is fixedly connected to a fixing push plate 26. A fixing shaft 27 is rotatably connected to the bottom of the fixing push plate 26. The fixing shaft 27 is slidably connected to the corresponding adjusting U-shaped plate 22. The fixing components push the two adjusting V-shaped filters 23 into contact, thereby filtering the decomposed and impurity-removed mixture.

[0029] An adjustment processing pipe 20 is fixedly connected to the surface of the adjustment housing 16. An adjustment valve is connected to the side wall of the adjustment processing pipe 20. A connection assembly is connected to the surface of the adjustment housing 16. The connection assembly includes a connection port on the surface of the adjustment housing 16. A connection drawer 28 is slidably connected inside the connection port. Multiple drainage holes are opened through the bottom of the connection drawer 28. A connection filter cloth 29 is fixedly connected between the two sides of the inner wall of the connection drawer 28. A connection filter screen 30 is connected to the top of the connection filter cloth 29 through a connection filter element. The connection assembly serves to further filter the decomposed and impuritized mixture.

[0030] Working principle: In use, first start the electric heating tube 5 to conduct heat to the conical barrel 3, and at the same time monitor the internal temperature of the conical barrel 3 through the temperature controller 6. Then start the drive motor 12, which drives the two first synchronous pulleys 14 to rotate. At the same time, the two first synchronous pulleys 14 are driven by the synchronous toothed belt 15 to mesh with their corresponding second synchronous pulleys, which drives the installation tube 8 on the second synchronous pulley to rotate. Then the installation tube 8 also drives the installation stirring frame 11 to stir and mix the materials and additives, accelerating the dehydration and impurity removal. Because multiple adsorption columns 10 are installed on the installation tube 8 through the installation sleeve 9, the installation sleeve 9 also filters and adsorbs impurities in the mixture during the dehydration and impurity removal process when it rotates.

[0031] Then, the pump 18 is started, which drives the installation pipes 8 on the two second branch pipes 19 to draw the mixture inside the conical barrel 3. Then, the mixture is discharged into the regulating shell 16 through the first branch pipe 17. At the same time, the fixed motor 25 is started, which drives the fixed push plate 26 and the fixed rotating shaft 27 to rotate.

[0032] Next, the fixed rotating shaft 27 slides inside its corresponding adjusting ring plate 22, causing the adjusting push rod 21 on the adjusting ring plate 22 to move along the direction on the adjusting housing 16. Then, the adjusting push rod 21 also drives the adjusting V-shaped filter 23 to move, so that the two adjusting V-shaped filters 23 come into contact with each other, thereby performing double filtration of impurities in the mixture between the two adjusting V-shaped filters 23, so that the filtered mixture falls into the connecting drawer 28.

[0033] The mixture undergoes three stages of filtration: passing through the connecting filter screen 30, the connecting filter element, and the connecting filter cloth 29. Then, it drains through multiple drain holes on the connecting drawer 28 into the bottom of the regulating housing 16 for further filtration. Next, the regulating valve on the regulating treatment pipe 20 is activated, allowing the filtered mixture to be discharged through the regulating treatment pipe 20. Finally, the connecting drawer 28 is pulled as needed to separate it from the connecting port, thereby cleaning the impurities inside the connecting drawer 28.

[0034] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

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