A probe testing device

Abstract

This utility model discloses a probe testing device, relating to the field of testing technology, comprising: a testing layer; the testing layer includes: a support plate, a substrate plate, a tensioning mechanism, and a probe module; the support plate has a first mounting area and a second mounting area; the back of the substrate plate is detachably mounted in the first mounting area, and the product to be tested is detachably mounted in the front of the substrate plate; the probe module is detachably mounted in the second mounting area, and the probe module is used to electrically connect with the product to be tested to obtain the electrical signal of the product to be tested; wherein, the tensioning mechanism is mounted on the support plate and is used to clamp or release the substrate plate. In this technical solution, the detachable design of the second mounting area and the probe module allows for the replacement of different probe modules according to different tested objects, meeting actual production needs. Simultaneously, the tensioning mechanism ensures a more stable electrical connection between the probe module and the product to be tested, avoiding open circuits and making the test results more accurate.

Description

Technical Field

[0001] This utility model relates to the field of testing technology, and in particular to a probe testing device. Background Technology

[0002] A probe testing device is a device or system that uses a probe module to directly or indirectly contact the object under test (such as electronic devices, integrated circuits, material surfaces, etc.) in various detection, measurement, or testing scenarios to obtain information such as its electrical characteristics, physical parameters, or functional status.

[0003] In practical applications, different probes are needed to test different objects. However, the probe modules on traditional probe testing devices are fixed, which makes the probe testing devices less adaptable and unable to meet actual production needs. Utility Model Content

[0004] In view of this, the present invention provides a probe testing device in which the carrier plate and the probe module are detachably connected, so that different probe modules can be replaced according to different test objects to adapt to different needs.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A probe testing device includes: a test layer;

[0007] The test layer includes: a support plate, a load plate, a tensioning mechanism, and a probe module;

[0008] The carrier plate has a first mounting area and a second mounting area; the back of the carrier plate can be detachably mounted in the first mounting area, and the product to be tested can be detachably mounted in the front of the carrier plate; the probe module can be detachably mounted in the second mounting area, and the probe module is used to electrically connect with the product to be tested to obtain the electrical signal of the product to be tested;

[0009] The tensioning mechanism is installed on the support plate and is used to clamp or release the support plate.

[0010] Preferably, the first mounting area and the back of the carrier plate can slide relative to each other, the position of the tensioning mechanism is opposite to the position of the probe module, and the carrier plate slides toward the probe module during the process of the tensioning mechanism clamping the carrier plate.

[0011] Preferably, the carrier plate is provided with a stop elastic mechanism, and the bearing plate is provided with a positioning part; when the carrier plate slides toward the probe module to a preset position, the stop elastic mechanism cooperates with the positioning part to fix the carrier plate to the bearing plate.

[0012] Preferably, the tensioning mechanism includes: a support plate, a handle, and a fixed shaft;

[0013] The support plate is mounted on the carrier plate, and a fixed shaft is provided on the support plate. The handle is rotatably connected to the fixed shaft. The two opposite ends of the handle are a clamping end and a force-applying end, respectively. The force-applying end is used to apply force to drive the clamping end to clamp or release the carrier plate.

[0014] Preferably, the clamping end is provided with a clamping pin, and the clamping pin is used to clamp or release the carrier plate; the support plate is provided with an arc-shaped groove, the bottom end of the clamping pin passes through the clamping end and abuts against the arc-shaped groove, and the clamping pin and the clamping end are in sliding fit;

[0015] The arc-shaped slide is a sloping guide structure, with the end of the arc-shaped slide closer to the carrier plate being the high end and the end farther from the carrier plate being the low end. When the bottom end of the locking pin is located at the high end, the top end of the locking pin locks the carrier plate. When the bottom end of the locking pin slides from the high end to the low end, the top end of the locking pin releases the carrier plate.

[0016] Preferably, the support plate is further provided with two limiting parts; one limiting part is a clamping limit position, and the other limiting part is a releasing limit position, and the two together form the movement track of the force-applying end.

[0017] Preferably, the probe module includes: a mounting block, an elastic floating device, and a probe;

[0018] The front of the elastic floating device is equipped with a mounting block, and the bottom of the elastic floating device is detachably mounted in the second mounting area. The probe passes through the elastic floating device and the mounting block in sequence and is electrically connected to the product to be tested.

[0019] Preferably, the bottom of the elastic floating device is provided with an elastic positioning post, and the second mounting area is provided with a slot adapted to the bottom of the elastic floating device, so that the bottom of the elastic floating device and the slot can be plugged in and plugged in.

[0020] Wherein, after the bottom of the elastic floating device is inserted into the slot, the elastic positioning post abuts against the peripheral wall of the slot to restrict the movement of the elastic floating device.

[0021] Preferably, the probe testing device further includes: multiple sets of support members, with adjacent test layers supported by a set of support members, and a set of support members including multiple support columns;

[0022] The test layer consists of multiple layers, and each test layer has a support hole on its bearing plate. The number of support holes is multiple, and the number of support holes in each test layer is not less than the number of support columns in each group of support columns.

[0023] The first end of the support column, which is supported between adjacent test layers, is inserted into the support hole of the upper carrier plate, and the second end is inserted into the support hole of the lower carrier plate, so as to realize the connection of multiple test layers.

[0024] Preferably, the number of support columns in a set of support columns is N, and the number of support holes on the bearing plate of each test layer is at least 2N, where N is a positive integer. The support holes on the bearing plate of each test layer for inserting the first and second ends of the support columns are staggered in the vertical direction.

[0025] As can be seen from the above technical solution, the probe testing device provided by this utility model, by utilizing the detachable design of the second mounting area and the probe module, allows for the replacement of different probe modules according to different test objects, thus adapting to different needs and enabling the probe testing device to meet actual production requirements. Simultaneously, the tensioning mechanism ensures a more stable electrical connection between the probe module and the product under test, preventing open circuits and resulting in more accurate test results. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 First-view structural diagram of this probe testing device (single-layer test layer).

[0028] Figure 2 A second-view structural diagram of this probe testing device (single test layer, with part of the carrier plate hidden).

[0029] Figure 3 for Figure 2 A magnified view of the structure at point C.

[0030] Figure 4 A third-view structural diagram (single-layer test layer) provided for this probe testing device.

[0031] Figure 5 A fourth-view structural diagram (single-layer test layer) provided for this probe testing device.

[0032] Figure 6 for Figure 5 A sectional view along the AA cutting plane;

[0033] Figure 7 for Figure 5 A sectional view along the BB cutting plane;

[0034] Figure 8 First-view structural diagram of this probe testing device (double-layer test layer).

[0035] Figure 9 A second-view structural diagram (double-layer test layer) provided for this probe testing device.

[0036] The meanings of the various reference numerals in the figure are as follows:

[0037] 10 is the bearing plate, 11 is the positioning part, 12 is the support hole, and 13 is the slot plate;

[0038] 20 is the carrying plate, 21 is the stop elastic mechanism, 211 is the indexing pin, 212 is the sleeve, 213 is the control rod, 22 is the limit post, and 23 is the hard block.

[0039] 30 is the tensioning mechanism, 31 is the support plate, 311 is the arc-shaped slide groove, 312 is the limit pin, 32 is the handle, 321 is the clamping end, 322 is the force-applying end, 323 is the clamping pin, and 33 is the fixed shaft.

[0040] 40 is the probe module, 41 is the mounting block, 42 ​​is the elastic floating device, 421 is the elastic positioning post, and 43 is the probe.

[0041] 50 is the support column; 60 is the product to be tested. Detailed Implementation

[0042] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0043] To avoid the low adaptability of traditional probe testing devices, which fail to meet actual production needs, the probe testing device provided in this embodiment of the invention, such as... Figure 1 As shown, it includes: a test layer;

[0044] The test layer includes: a support plate 10, a loading plate 20, a tensioning mechanism 30, and a probe module 40;

[0045] The carrier plate 10 is provided with a first mounting area and a second mounting area; the back of the carrier plate 20 can be detachably mounted in the first mounting area, and the product to be tested 60 can be detachably mounted in the front of the carrier plate 20; the probe module 40 can be detachably mounted in the second mounting area, and the probe module 40 is used to electrically connect with the product to be tested 60 to obtain the electrical signal of the product to be tested 60.

[0046] The tensioning mechanism 30 is installed on the bearing plate 10 and is used to clamp or release the load plate 20.

[0047] In the above technical solution, the product to be tested 60 is first mounted on the carrier plate 20, then the carrier plate 20 is mounted on the support plate 10, and the carrier plate 20 is then clamped by the tensioning mechanism 30. After clamping, the probe module 40 and the product to be tested 60 are electrically connected to obtain the electrical signal of the product to be tested 60. In this technical solution, the second mounting area and the detachable design of the probe module 40 allow for the replacement of different probe modules 40 according to different test objects to adapt to different needs, enabling this probe testing device to meet actual production requirements. At the same time, the tensioning mechanism 30 ensures a more stable electrical connection between the probe module 40 and the product to be tested 60, avoiding open circuits and making the test results more accurate.

[0048] In one of the alternative technical solutions, such as Figure 1 As shown, the first mounting area and the back of the carrier plate 20 can slide relative to each other. The position of the tensioning mechanism 30 is opposite to the position of the probe module 40. During the process of the tensioning mechanism 30 clamping the carrier plate 20, the carrier plate 20 slides towards the probe module 40. Specifically, the vertical direction between the tensioning mechanism 30 and the probe module 40 is the first direction X, which is consistent with the length direction of the carrier plate 10 and also consistent with the sliding direction of the carrier plate 20. In use, after the carrier plate 20 is installed on the carrier plate 10, during the process of the tensioning mechanism 30 clamping the carrier plate 20, the carrier plate 20 slides towards the probe module 40, so that the product to be tested 60 on the carrier plate 20 is electrically connected to the probe module 40.

[0049] In one of the alternative technical solutions, such as Figure 2 As shown, the support plate 10 is provided with two slot plates 13, which are arranged at intervals along the width direction of the support plate 10. This forms a slot between the two slot plates 13, which serves as a track for the removal and insertion of the load plate 20. It should be noted that the length direction of any slot plate 13 is consistent with the length direction of the support plate 10.

[0050] The slot forms a track for the relative sliding of the loading plate 20, thereby ensuring the positional accuracy of the loading plate 20 during operation.

[0051] In one of the alternative technical solutions, such as Figure 1 and Figure 2 As shown, to avoid overpressure between the probe module 40 and the product under test 60, and to improve the reliability of this probe testing device and the accuracy of testing the product under test 60, a stop elastic mechanism 21 is provided on the carrier plate 20 (to protect the probe module 40 and the product, avoiding the problem of overpressure damage to the product under test 60 or the probe module 40 that is prone to occur in the prior art). A positioning part 11 is provided on the carrier plate 10, such as... Figure 2 As shown; when the carrier plate 20 slides towards the probe module 40 to a preset position, the stop elastic mechanism 21 cooperates with the positioning part 11 to fix the carrier plate 20 onto the support plate 10. Specifically, as Figure 5 and Figure 6 As shown, the stop elastic mechanism 21 includes: an indexing pin 211, a sleeve 212, and a control rod 213 (wherein the indexing pin 211 and the control rod 213 can be an integral structure). The indexing pin 211 is disposed within the sleeve 212, and the control rod 213 is used to control the indexing pin 211 to engage or disengage from the positioning part 11 (which can be an opening). Preferably, the stop elastic mechanism 21 further includes: an elastic element (not shown in the figures). The indexing pin 211 is disposed within the sleeve 212, and the indexing pin 211 and the sleeve 212 are connected by the elastic element. The elastic element provides elastic restoring force, allowing the bottom end of the indexing pin 211 to engage with the opening on the support plate 10. Specifically, the top of the sleeve 212 is provided with an inclined surface, and the top ends of the control rod 213 and the indexing pin 211 are connected. When the stop elastic mechanism 21 is not engaged with the positioning part 11, the control rod 213 is stuck at the high end of the top of the sleeve 212 (which is an inclined structure). When the stop elastic mechanism 21 and the positioning part 11 need to be engaged, a pulling force is applied to the control rod 213. Under the action of the elastic restoring force of the elastic element, the control rod 213 returns to the low end of the top of the sleeve 212 (the top end of the indexing pin 211 decreases with the height of the control rod 213, so that the bottom end of the indexing pin 211 can be engaged in the opening on the bearing plate 10, thus realizing the fixation of the bearing plate 10 and the carrying plate 20). In addition, the elastic element is a spring.

[0052] In one of the alternative technical solutions, such as Figure 2 and Figure 3 As shown, the tensioning mechanism 30 includes: a support plate 31, a handle 32, and a fixed shaft 33;

[0053] A support plate 31 is mounted on a carrier plate 10. A fixed shaft 33 is provided on the support plate 31. A handle 32 is rotatably connected to the fixed shaft 33. The two ends of the handle 32 are a clamping end 321 and a force-applying end 322, respectively. The force-applying end 322 is used to apply force to drive the clamping end 321 to clamp or release the carrier plate 20. In use, the operator applies an external force to the force-applying end 322, causing the handle 32 to rotate around the fixed shaft 33, thereby clamping or releasing the clamping end 321 onto the carrier plate 20. This operation is simple, requires no additional power source (reducing the risk of power failure), and lowers equipment cost and complexity. It avoids the complexity and high cost of traditional power tensioning structures, while improving the reliability of the equipment.

[0054] In one embodiment, such as Figure 2 and Figure 3 As shown, the clamping end 321 is provided with a clamping pin 323, which clamps or releases the carrier plate 20; the support plate 31 is provided with an arc-shaped sliding groove 311, the bottom end of the clamping pin 323 passes through the clamping end 321 and abuts against the arc-shaped sliding groove 311, and the clamping pin 323 and the clamping end 321 are in sliding fit; specifically, the force-applying end 322 is provided with an opening for the clamping pin 323 to slide into.

[0055] The arc-shaped slide 311 is a sloping guide structure, with the end of the arc-shaped slide 311 closer to the carrier plate 20 being the high end and the end farther from the carrier plate 20 being the low end. When the bottom end of the locking pin 323 is at the high end, the top end of the locking pin 323 locks the carrier plate 20; when the bottom end of the locking pin 323 slides from the high end to the low end, the top end of the locking pin 323 releases the carrier plate 20. Furthermore, as a preferred embodiment, such as... Figure 1 and Figure 3 As shown, the portion of the carrier plate 20 that mates with the top of the clamping pin 323 is provided with a hardening block 23 (when clamped, the clamping pin 323 abuts against the hardening block 23). The hardening block 23 and the carrier plate 20 can be detachably assembled, or they can be an integrated structure. The hardening block 23 has high hardness and strong wear resistance, which can protect the carrier plate 20 and extend its service life. The material of the hardening block 23 can be quenched steel or cast iron.

[0056] In the above technical solution, initially (when the carrying plate 20 is not clamped), the bottom end of the clamping pin 323 is not at the high end. After the carrying plate 20 is installed on the bearing plate 10, a first force is applied to the force-applying end 322, and the entire handle 32 rotates along the fixed shaft 33. Since the clamping pin 323 is set on the clamping end 321, it rotates synchronously with the clamping end 321, gradually moving from the end away from the carrying plate 20 to the end closer to the carrying plate 20. At the same time, during the rotation, the clamping pin 323 also moves along the arc-shaped slide groove 311, gradually moving from the low end to the high end. When the clamping pin 323 reaches the high end, the carrying plate 20 is clamped. Figure 3 As shown; if it is necessary to release the carrier plate 20, a second force is applied to the force application end 322 (the second force is opposite in direction to the first force). The movement trajectory of the clamping pin 323 can be understood as from the high end to the low end. When the bottom end of the clamping pin 323 is not at the high end, the release of the carrier plate 20 is achieved.

[0057] In an alternative embodiment, such as Figure 2 and Figure 3 As shown, the support plate 31 is also provided with two limiting parts; one limiting part is the clamping limit position, and the other limiting part is the release limit position. The two together form the movement track of the force-applying end 322. Specifically, the limiting part is a limiting pin 312. The two limiting pins 312 are arranged at different positions on the support plate 31. The force-applying end 322 can only move between the two limiting pins 312. When the force-applying end 322 moves to the point where it abuts against one of the limiting pins 312, assuming that the position of the limiting pin 312 is the clamping limit position (that is, when the bottom end of the clamping pin 323 is at the high end), the clamping pin 323 achieves ultimate clamping of the carrier plate 20, such as... Figure 2 As shown; when the force-applying end 322 moves to abut against another limiting pin 312, assuming that the position of the limiting pin 312 is the release limit position (that is, when the bottom end of the clamping pin 323 is at the low end), the clamping end 321 achieves a limit release of the carrier plate 20. It should be noted that, by setting the limiting part, on the one hand, it avoids the handle 32 from rotating excessively when clamping the carrier plate 20, causing the clamping to become loose again; on the other hand, it limits the rotation range of the handle 32 to avoid interference between the handle 32 and other components (such as the support column 50) and damage to them. Preferably, the limiting part is provided with a groove, and the handle 32 is provided with a protrusion that cooperates with the groove. When the handle 32 moves to the position, the groove and the protrusion cooperate with each other to play a fixing role.

[0058] In one alternative technical solution, the probe module 40 includes: a mounting block 41, an elastic floating device 42, and a probe 43, such as Figure 2 and Figure 4 As shown,

[0059] The probe module 40 includes: a mounting block 41, an elastic floating device 42, and a probe 43;

[0060] A mounting block 41 is installed on the front of the elastic floating device 42, and the bottom surface of the elastic floating device 42 is detachably installed in the second mounting area. The probe 43 passes through the elastic floating device 42 and the mounting block 41 in sequence and is electrically connected to the product 60 to be tested. Specifically, the elastic floating device 42 includes an elastic element. Through the elastic deformation of the elastic element (such as a spring, rubber block, elastic hinge, etc.), it adapts to the positional deviation between the probe 43 and the product 60 to be tested, solves the problem of connector patch misalignment, and avoids stress concentration or movement jamming caused by rigid connection.

[0061] In one of the alternative technical solutions, such as Figure 4 As shown, the bottom of the elastic floating device 42 is provided with an elastic positioning post 421, and the second mounting area is provided with a slot adapted to the bottom of the elastic floating device 42, so that the bottom of the elastic floating device 42 and the slot can be plugged in and out. When the bottom of the elastic floating device 42 is inserted into the slot, the elastic positioning post 421 abuts against the peripheral wall of the slot, providing elasticity to restrict the movement of the elastic floating device 42, thereby restricting the movement of the probe module 40. When it is necessary to remove the bottom of the elastic floating device 42 from the slot, the elasticity of the elastic positioning post 421 is compressed. This locking structure allows it to adapt to the testing requirements of different products, enabling the reuse of the probe module 40 and improving resource utilization. In another embodiment, a magnetic attraction portion is provided on the second mounting area, and the elastic floating device 42 and the magnetic attraction portion are magnetically connected. Preferably, the elastic positioning post 421 includes an elastic body, a guide rod, and a positioning post. The elastic body is a cylindrical spring structure, which is sleeved on the outside of the guide rod. Its two ends abut against the bottom of the mounting block 41 and the head of the positioning post, respectively. When the positioning post is squeezed by an external force, the spring is compressed and stores energy. After the external force disappears, it pushes the positioning post to reset.

[0062] In one embodiment, such as Figure 4 As shown, the carrier plate 20 is provided with four limiting posts 22, which are arranged in four different directions to form a limiting space within which the product 60 to be tested is placed.

[0063] In another embodiment, such as Figure 8 and Figure 9 As shown, the probe testing device also includes: multiple sets of support members, with adjacent test layers supported by a set of support members, and a set of support columns including multiple support columns 50;

[0064] The test layer consists of multiple layers. Each test layer has a support hole 12 on its support plate 10. The number of support holes 12 is multiple, and the number of support holes 12 in each test layer is not less than the number of support columns 50 in each group of support columns.

[0065] The first end of the support column 50, which is supported between adjacent test layers, is inserted into the support hole 12 of the upper support plate 10, and the second end is inserted into the support hole 12 of the lower support plate 10, as shown below. Figure 7 As shown, this configuration enables the connection of multiple test layers. In the above setup, by using a set of support columns 50 to connect adjacent test layers, multiple test layers can be stacked, allowing for the testing of more products 60 within a limited space, thus saving space and costs.

[0066] In one optional technical solution, the number of support columns 50 in a set of support columns is N, and the number of support holes 12 on the support plate 10 of each test layer is at least 2N, where N is a positive integer. The support holes 12 into which the first and second ends of the support columns 50 on the support plate 10 of each test layer are inserted are staggered in the vertical direction. Specifically, each support plate 10 of the test layer is provided with staggered first and second support holes. The first support hole is connected through the second end of the support column 50 (the first support column), and the first end of the support column 50 is connected to the lower support plate 10. The second support hole is connected through the first end of the support column 50 (the second support column), and the second end of the support column 50 is connected to the upper support plate 10. In this solution, the support columns 50 adopt a staggered design, which facilitates the stacking of multiple tooling fixtures, thereby greatly reducing space occupation.

[0067] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0068] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A probe testing device, characterized in that, include: Test layer; The test layer includes: a support plate (10), a load plate (20), a tensioning mechanism (30), and a probe module (40). The carrier plate (10) is provided with a first mounting area and a second mounting area; the back of the carrier plate (20) can be detachably mounted in the first mounting area, and the product to be tested (60) can be detachably mounted on the front of the carrier plate (20); the probe module (40) can be detachably mounted in the second mounting area, and the probe module (40) is used to electrically connect with the product to be tested (60) to obtain the electrical signal of the product to be tested (60); The tensioning mechanism (30) is installed on the support plate (10) and is used to clamp or release the load plate (20).

2. The probe testing device according to claim 1, characterized in that, The first installation area and the back of the carrier plate (20) can slide relative to each other. The position of the tensioning mechanism (30) is opposite to the position of the probe module (40). During the process of the tensioning mechanism (30) clamping the carrier plate (20), the carrier plate (20) slides toward the probe module (40).

3. The probe testing device according to claim 2, characterized in that, The loading plate (20) is provided with a stop elastic mechanism (21), and the bearing plate (10) is provided with a positioning part (11). When the loading plate (20) slides toward the probe module (40) to a preset position, the stop elastic mechanism (21) cooperates with the positioning part (11) to fix the loading plate (20) onto the bearing plate (10).

4. The probe testing device according to claim 2, characterized in that, The tensioning mechanism (30) includes: a support plate (31), a handle (32), and a fixed shaft (33); The support plate (31) is installed on the carrier plate (10). A fixed shaft (33) is provided on the support plate (31). The handle (32) is rotatably connected to the fixed shaft (33). The two ends of the handle (32) are respectively the clamping end (321) and the force-applying end (322). The force-applying end (322) is used to apply force to drive the clamping end (321) to clamp or release the carrier plate (20).

5. The probe testing device according to claim 4, characterized in that, The clamping end (321) is provided with a clamping pin (323), and the clamping pin (323) is used to clamp or release the carrier plate (20); the support plate (31) is provided with an arc-shaped sliding groove (311), the bottom end of the clamping pin (323) passes through the clamping end (321) and abuts against the arc-shaped sliding groove (311), and the clamping pin (323) and the clamping end (321) are in sliding fit; The arc-shaped groove (311) is a sloping guide structure, and the end of the arc-shaped groove (311) closer to the carrier plate (20) is the high end, and the end farther away from the carrier plate (20) is the low end; when the bottom end of the clamping pin (323) is located at the high end, the top end of the clamping pin (323) clamps the carrier plate (20), and when the bottom end of the clamping pin (323) slides from the high end to the low end, the top end of the clamping pin (323) releases the carrier plate (20).

6. The probe testing apparatus according to claim 5, characterized in that, The support plate (31) is also provided with two limiting parts; one of the limiting parts is the clamping limit position, and the other of the limiting parts is the releasing limit position, and the two together form the movement track of the force-applying end (322).

7. The probe testing apparatus according to claim 1, characterized in that, The probe module (40) includes: a mounting block (41), an elastic floating device (42), and a probe (43). The elastic floating device (42) has a mounting block (41) installed on its front side. The bottom surface of the elastic floating device (42) is detachably installed in the second mounting area. The probe (43) passes through the elastic floating device (42) and the mounting block (41) in sequence and is electrically connected to the product to be tested (60).

8. The probe testing apparatus according to claim 7, characterized in that, The bottom of the elastic floating device (42) is provided with an elastic positioning post (421), and the second installation area is provided with a slot that matches the bottom of the elastic floating device (42) so that the bottom of the elastic floating device (42) and the slot can be plugged in and plugged in. When the bottom of the elastic floating device (42) is inserted into the slot, the elastic positioning post (421) abuts against the peripheral wall of the slot to restrict the movement of the elastic floating device (42).

9. The probe testing apparatus according to any one of claims 1-8, characterized in that, The probe testing device further includes: multiple sets of support members, with adjacent test layers supported by a set of support members, and a set of support members including multiple support columns (50). The number of test layers is multiple, and each test layer has a support hole (12) on its support plate (10). The number of support holes (12) is multiple, and the number of support holes (12) in each test layer is not less than the number of support columns (50) in each group of support members. The first end of the support column (50) supported between adjacent test layers is inserted into the support hole (12) of the upper carrier plate (10), and the second end is inserted into the support hole (12) of the lower carrier plate (10) to achieve the connection of multiple test layers.

10. The probe testing apparatus according to claim 9, characterized in that, The number of the support columns (50) in a set of support members is N, and the number of support holes (12) on the bearing plate (10) of each test layer is at least 2N, where N is a positive integer. The support holes (12) on the bearing plate (10) of each test layer for inserting the first and second ends of the support columns (50) are staggered in the vertical direction.

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