Clamping tool for robot mask transport

Abstract

The utility model discloses a kind of clamping tool for mechanical hand transmission mask, including left support arm, right support arm, first clamping finger, second clamping finger, third clamping finger and fourth clamping finger;Wherein, the first clamping finger is connected on the front end portion of the left support arm, the second clamping finger is connected on the rear end portion of the left support arm, the third clamping finger is connected on the front end portion of the right support arm, the fourth clamping finger is connected on the rear end portion of the right support arm, the left support arm and the right support arm are respectively used to be connected on the clamping execution component on mechanical hand, the left support arm and the right support arm are used to move towards under the drive of the clamping execution component in turn and then hold the mask.The utility model transmits mask by clamping the side of mask, can reduce the contact area with mask, also can avoid direct contact with the pattern area of mask, can reduce the risk of damage and pollution to mask.

Description

Technical Field

[0001] This utility model relates to a clamping fixture for a robotic arm to transfer a mask. Background Technology

[0002] Masks are an indispensable component in photolithography. Mask transport is essential during mask production, and currently, it typically relies on robotic arms for handling. For example, Chinese patent CN115258593B discloses a mask transport device in which the mask is lifted by a mask plate fork and then transported by a robotic arm. However, the large contact area between the mask plate fork and the bottom of the mask when lifting it significantly increases the risk of damage and contamination to the patterned areas on the mask. Summary of the Invention

[0003] The technical problem to be solved by this utility model is to overcome the defects of the prior art and provide a clamping fixture for transferring masks by a robot arm. It transfers the mask by clamping the side of the mask, which can reduce the contact area with the mask and avoid direct contact with the pattern area of ​​the mask, thereby reducing the risk of damage and contamination to the mask.

[0004] To solve the above-mentioned technical problems, the technical solution of this utility model is: a clamping fixture for transferring masks by a robotic arm, including a left support arm, a right support arm, a first clamping finger, a second clamping finger, a third clamping finger and a fourth clamping finger; The first clamping finger is connected to the front end of the left support arm; The second clamping finger is connected to the rear end of the left support arm; The third clamping finger is connected to the front end of the right support arm; The fourth clip is connected to the rear end of the right support arm; The left support arm and the right support arm are respectively connected to the clamping actuator on the robot arm. The left support arm and the right support arm are driven by the clamping actuator to move towards each other, thereby causing the first clamping finger to abut against the front end of the left side of the mask, the second clamping finger to abut against the rear end of the left side of the mask, the third clamping finger to abut against the front end of the right side of the mask, and the fourth clamping finger to abut against the rear end of the right side of the mask, thereby clamping the mask.

[0005] Furthermore, the clamping fixture for transferring the mask by the robotic arm also includes a positioning mechanism, which is connected to the left support arm and the right support arm and is used to abut against the front and rear sides of the clamped mask to position the front and rear positions of the mask.

[0006] A further specific structure of the positioning mechanism is provided, wherein the positioning mechanism includes a first positioning pin, a second positioning pin, a third positioning pin, and a fourth positioning pin; The first locating pin is connected to the front end of the left support arm and is used to abut against the front side of the clamped mask; The second locating pin is connected to the rear end of the left support arm and is used to abut against the rear side of the clamped mask; The third positioning pin is connected to the front end of the right support arm and is used to abut against the front side of the clamped mask; The fourth locating pin is connected to the rear end of the right support arm and is used to abut against the rear side of the clamped mask.

[0007] Furthermore, the lower ends of the first positioning pin, the second positioning pin, the third positioning pin, and the fourth positioning pin are all tapered structures that are larger at the top and smaller at the bottom. Both the first positioning pin and the second positioning pin are located below the left support arm; Both the third positioning pin and the fourth positioning pin are located below the right support arm; Both the first and second gripping fingers are located below the left support arm; The third and fourth gripping fingers are both located below the right support arm.

[0008] Furthermore, the clamping fixture for transferring the mask by the robotic arm also includes at least one in-situ sensor, which is connected to at least one of the left support arm and the right support arm and is used to detect the mask and generate a signal when the left support arm and the right support arm move downward toward the mask into place.

[0009] Furthermore, the clamping fixture for transferring the mask by the robotic arm also includes a left pressure sensor, a right pressure sensor, and an abutment seat; The left support arm is used to connect to the left slider in the clamping actuator, and the right support arm is used to connect to the right slider in the clamping actuator. The clamping actuator is used to drive the left slider and the right slider to move towards each other or away from each other, thereby driving the left support arm and the right support arm to move towards each other or away from each other. The abutment is used to connect to the fixed part in the clamping actuator and the abutment is located between the left support arm and the right support arm; The left pressure sensor is connected to the left support arm and is located on the left side of the abutment seat; The right pressure sensor is connected to the right support arm and is located on the right side of the abutment seat; The left pressure sensor and the right pressure sensor are respectively used to abut against the abutment seat and generate pressure signals when the first clamping finger, the second clamping finger, the third clamping finger and the fourth clamping finger clamp the mask.

[0010] Furthermore, the left support arm has a left adjustment block, and the left pressure sensor is connected to the left adjustment block; The right support arm has a right adjustment block, and the right pressure sensor is connected to the right adjustment block.

[0011] Furthermore, the left pressure sensor is locked to the left adjustment block by a left bolt. The left pressure sensor has a left oblong hole, and the left bolt passes through the left oblong hole and is threaded to the left adjustment block. The right pressure sensor is locked to the right adjustment block by a right bolt. The right pressure sensor has a right waist-shaped hole, and the right bolt passes through the right waist-shaped hole and is threaded to the right adjustment block.

[0012] Furthermore, the first clamping finger includes a first finger block and a first supporting finger. The first finger block is connected to the front end of the left support arm and is used to abut against the front end of the left side of the mask when clamping the mask. The first supporting finger is connected to the first finger block, and the lower end of the first supporting finger extends obliquely downward to the bottom of the mask. The second clamping finger includes a second finger block and a second supporting finger. The second finger block is connected to the rear end of the left support arm and is used to abut against the rear end of the left side of the mask when clamping the mask. The second supporting finger is connected to the second finger block, and the lower end of the second supporting finger extends obliquely downward to the bottom of the mask. The third gripping finger includes a third finger block and a third supporting finger. The third finger block is connected to the front end of the right support arm and is used to abut against the front end of the right side of the mask when gripping the mask. The third supporting finger is connected to the third finger block, and the lower end of the third supporting finger extends obliquely downward to the bottom of the mask. The fourth gripping finger includes a fourth finger block and a fourth supporting finger. The fourth finger block is connected to the rear end of the right support arm and is used to abut against the rear end of the right side of the mask when gripping the mask. The fourth supporting finger is connected to the fourth finger block, and the lower end of the fourth supporting finger extends obliquely downward to the bottom of the mask.

[0013] Furthermore, a rectangular membrane frame is connected to the lower surface of the mask. When the first finger block, the second finger block, the third finger block, and the fourth finger block clamp the mask and the two narrow sides of the membrane frame connected to the mask are located on the left and right sides, the left narrow side of the membrane frame is located between the first supporting finger and the second supporting finger, and the right narrow side of the membrane frame is located between the third supporting finger and the fourth supporting finger.

[0014] The above technical solution involves first mounting the left and right support arms onto a clamping actuator, which is connected to a robotic arm. The robotic arm moves the clamping actuator, thereby moving the left and right support arms above the mask. Then, the clamping actuator moves the left and right support arms away from each other. Next, the robotic arm moves the clamping actuator downward, moving the left and right support arms downward toward the mask. Then, the clamping actuator drives the left and right support arms to move toward each other, causing the first gripper finger to press against the front end of the left side of the mask, the second gripper finger to press against the rear end of the left side of the mask, the third gripper finger to press against the front end of the right side of the mask, and the fourth gripper finger to press against the rear end of the right side of the mask, thereby clamping the mask. The robotic arm can then move the clamped mask. This clamping fixture transfers the mask by clamping its side, which reduces the contact area with the mask and avoids direct contact with the patterned area of ​​the mask, thereby reducing the risk of damage and contamination to the mask. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the clamping fixture for transferring masks by a robotic arm according to the present invention; Figure 2 This is a schematic diagram of the structure of the clamping fixture for transferring masks by a robotic arm, connected to the clamping execution component. Figure 3 This is a schematic diagram of the clamping fixture of the present invention for transferring masks by a robotic arm when clamping the mask; Figure 4 This is a schematic diagram of the bottom structure of the clamping fixture for transferring masks by a robotic arm according to this utility model when clamping the mask; Figure 5 This is a schematic diagram of the structure of the first clamping finger of this utility model; In the diagram: 100, Mask; 1, Left support arm; 2, Right support arm; 3, First gripper finger; 4, Second gripper finger; 5, Third gripper finger; 6, Fourth gripper finger; 7, Clamping actuator; 8, First positioning pin; 9, Second positioning pin; 10, Third positioning pin; 11, Fourth positioning pin; 12, Left pressure sensor; 13, Right pressure sensor; 14, Abutment seat; 15, Left slider; 16, Right slider; 17, Left adjusting block; 18, Right adjusting block; 19, Left oblong hole; 20, Right oblong hole; 21, First finger block; 22, First supporting finger; 23, Second finger block; 24, Second supporting finger; 25, Third finger block; 26, Third supporting finger; 27, Fourth finger block; 28, Fourth supporting finger; 29, Membrane frame. Detailed Implementation

[0016] To make the contents of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0017] like Figures 1-5 As shown, a clamping fixture for transferring masks by a robotic arm includes a left support arm 1, a right support arm 2, a first clamping finger 3, a second clamping finger 4, a third clamping finger 5, and a fourth clamping finger 6. The first clamping finger 3 is connected to the front end of the left support arm 1; The second clamping finger 4 is connected to the rear end of the left support arm 1; The third clamping finger 5 is connected to the front end of the right support arm 2; The fourth clamping finger 6 is connected to the rear end of the right support arm 2; The left support arm 1 and the right support arm 2 are respectively connected to the clamping execution component 7 on the robotic arm. Driven by the clamping execution component 7, the left support arm 1 and the right support arm 2 move towards each other, thereby causing the first gripper finger 3 to abut against the front end of the left side of the mask 100, the second gripper finger 4 to abut against the rear end of the left side of the mask 100, the third gripper finger 5 to abut against the front end of the right side of the mask 100, and the fourth gripper finger 6 to abut against the rear end of the right side of the mask 100, thus clamping the mask 100. Specifically, the clamping fixture for transferring the mask by the robotic arm needs to be installed on the clamping execution component 7 on the robotic arm. First, the left support arm 1 and the right support arm 2 are respectively mounted on the clamping actuator 7, which is connected to the robotic arm. The robotic arm moves the clamping actuator 7, thereby moving the left support arm 1 and the right support arm 2 above the mask 100. Then, the clamping actuator 7 moves the left support arm 1 and the right support arm 2 away from each other and separates them. Then, the robotic arm moves the clamping actuator 7 downward, thereby moving the left support arm 1 and the right support arm 2 downward toward the mask 100. Once the mask 100 is in place, the clamping actuator 7 drives the left support arm 1 and the right support arm 2 to move towards each other. This causes the first clamping finger 3 to abut against the front end of the left side of the mask 100, the second clamping finger 4 to abut against the rear end of the left side of the mask 100, the third clamping finger 5 to abut against the front end of the right side of the mask 100, and the fourth clamping finger 6 to abut against the rear end of the right side of the mask 100, thereby clamping the mask 100. The robotic arm can then move the clamped mask 100. In this embodiment, the mask 100 is moved by clamping its side, which reduces the contact area with the mask 100 and avoids direct contact with the patterned area of ​​the mask 100, thus reducing the risk of damage and contamination to the mask 100.

[0018] like Figures 1-4 As shown, the clamping fixture for transferring the mask by the robotic arm may further include a positioning mechanism, which is connected to the left support arm 1 and the right support arm 2 and is used to abut against the front and rear sides of the clamped mask 100 to position the front and rear positions of the mask 100.

[0019] like Figures 1-4 As shown, the positioning mechanism may include a first positioning pin 8, a second positioning pin 9, a third positioning pin 10, and a fourth positioning pin 11; The first positioning pin 8 is connected to the front end of the left support arm 1 and is used to abut against the front side of the clamped mask 100; The second positioning pin 9 is connected to the rear end of the left support arm 1 and is used to abut against the rear side of the clamped mask 100; The third positioning pin 10 is connected to the front end of the right support arm 2 and is used to abut against the front side of the clamped mask 100. The fourth positioning pin 11 is connected to the rear end of the right support arm 2 and is used to abut against the rear side of the clamped mask 100, thereby defining the front and rear position of the mask 100 by the first positioning pin 8, the second positioning pin 9, the third positioning pin 10 and the fourth positioning pin 11.

[0020] like Figures 1-5 As shown, the lower ends of the first positioning pin 8, the second positioning pin 9, the third positioning pin 10, and the fourth positioning pin 11 are all tapered structures that are larger at the top and smaller at the bottom. Both the first positioning pin 8 and the second positioning pin 9 are located below the left support arm 1; The third positioning pin 10 and the fourth positioning pin 11 are both located below the right support arm 2; The first clamping finger 3 and the second clamping finger 4 are both located below the left support arm 1; The third clamping finger 5 and the fourth clamping finger 6 are both located below the right support arm 2.

[0021] Specifically, the clamping fixture for the robotic arm to transfer the mask may further include at least one in-situ sensor. The in-situ sensor is connected to at least one of the left support arm 1 and the right support arm 2 and is used to detect the mask 100 and generate a signal when the left support arm 1 and the right support arm 2 move downwards toward the mask 100 and into position. Specifically, when the robotic arm moves the clamping actuator 7 downwards, thereby moving the left support arm 1 and the right support arm 2 downwards toward the mask 100 and into position, the in-situ sensor detects the mask 100 and generates a signal sent to the controller. The controller then controls the robotic arm to stop moving the left support arm 1 and the right support arm 2 downwards. In this embodiment, one in-situ sensor is connected to each of the left support arm 1 and the right support arm 2. The in-situ sensor may be, but is not limited to, a proximity switch.

[0022] like Figures 1-3 As shown, the clamping fixture for transferring the mask by the robotic arm may also include a left pressure sensor 12, a right pressure sensor 13, and an abutment seat 14. The left support arm 1 is used to connect to the left slider 15 in the clamping execution component 7, and the right support arm 2 is used to connect to the right slider 16 in the clamping execution component 7. The clamping execution component 7 is used to drive the left slider 15 and the right slider 16 to move towards each other or away from each other, thereby driving the left support arm 1 and the right support arm 2 to move towards each other or away from each other. The abutment 14 is used to connect to the fixed part in the clamping actuator 7 and the abutment 14 is located between the left support arm 1 and the right support arm 2; The left pressure sensor 12 is connected to the left support arm 1 and is located on the left side of the abutment seat 14; The right pressure sensor 13 is connected to the right support arm 2 and is located on the right side of the abutment seat 14; The left pressure sensor 12 and the right pressure sensor 13 are respectively used to abut against the abutment seat 14 and generate pressure signals when the first clamping finger 3, the second clamping finger 4, the third clamping finger 5, and the fourth clamping finger 6 clamp the mask 100. Specifically, the pressure signals generated by the left pressure sensor 12 and the right pressure sensor 13 are sent to the controller. When the pressure signal reaches a set threshold, the controller will control the clamping execution component 7 to stop driving the left slider 15 and the right slider 16 to move towards each other, thereby stopping the left support arm 1 and the right support arm 2 from moving towards each other, thus preventing the clamping force on the mask 100 from being too large.

[0023] More specifically, the clamping actuator 7 can be a pneumatic gripper, which is connected to the robotic arm. The abutment seat 14 is connected to the cylinder in the pneumatic gripper. The left support arm 1 is connected to the left slider 15 in the pneumatic gripper, and the right support arm 2 is connected to the right slider 16 in the pneumatic gripper. When the pneumatic gripper drives the left slider 15 and the right slider 16 to move towards or away from each other, it can also drive the left support arm 1 and the right support arm 2 to move towards or away from each other. Of course, in some embodiments, the clamping actuator 7 can also be an electric gripper.

[0024] like Figures 1-3 As shown, the left support arm 1 has a left adjustment block 17, and the left pressure sensor 12 is connected to the left adjustment block 17; The right support arm 2 has a right adjustment block 18, and the right pressure sensor 13 is connected to the right adjustment block 18.

[0025] like Figures 1-3 As shown, the left pressure sensor 12 is locked to the left adjustment block 17 by a left bolt. The left pressure sensor 12 is provided with a left waist-shaped hole 19. The left bolt passes through the left waist-shaped hole 19 and is threaded to the left adjustment block 17. The right pressure sensor 13 is locked to the right adjusting block 18 by a right bolt. The right pressure sensor 13 has a right oblong hole 20, and the right bolt passes through the right oblong hole 20 and is threaded onto the right adjusting block 18. Specifically, the left and right positions of the left pressure sensor 12 can be adjusted through the left oblong hole 19, and the left and right positions of the right pressure sensor 13 can be adjusted through the right oblong hole 20.

[0026] like Figures 1-5 As shown, the first clamping finger 3 includes a first finger block 21 and a first supporting finger 22. The first finger block 21 is connected to the front end of the left support arm 1 and is used to abut against the front end of the left side of the mask 100 when clamping the mask 100. The first supporting finger 22 is connected to the first finger block 21, and the lower end of the first supporting finger 22 extends obliquely downward to the bottom of the mask 100. The second clamping finger 4 includes a second finger block 23 and a second supporting finger 24. The second finger block 23 is connected to the rear end of the left support arm 1 and is used to abut against the rear end of the left side of the mask 100 when clamping the mask 100. The second supporting finger 24 is connected to the second finger block 23, and the lower end of the second supporting finger 24 extends obliquely downward to the bottom of the mask 100. The third gripping finger 5 includes a third finger block 25 and a third supporting finger 26. The third finger block 25 is connected to the front end of the right support arm 2 and is used to abut against the front end of the right side of the mask 100 when gripping the mask 100. The third supporting finger 26 is connected to the third finger block 25, and the lower end of the third supporting finger 26 extends obliquely downward to the bottom of the mask 100. The fourth gripping finger 6 includes a fourth finger block 27 and a fourth supporting finger 28. The fourth finger block 27 is connected to the rear end of the right support arm 2 and is used to abut against the rear end of the right side of the mask 100 when gripping the mask 100. The fourth supporting finger 28 is connected to the fourth finger block 27, and the lower end of the fourth supporting finger 28 extends obliquely downward to the bottom of the mask 100.

[0027] Specifically, the first finger block 21, the second finger block 23, the third finger block 25, and the fourth finger block 27 are used to hold the mask 100, and the first supporting finger 22, the second supporting finger 24, the third supporting finger 26, and the fourth supporting finger 28 are used to extend obliquely below the mask 100 to support the mask 100 and prevent it from falling. Specifically, the first supporting finger 22, the second supporting finger 24, the third supporting finger 26, and the fourth supporting finger 28 all have a certain rigidity and a high degree of smoothness, thereby avoiding damage to the mask 100.

[0028] like Figure 4 As shown, a rectangular membrane frame 29 is connected to the lower surface of the mask 100. When the first finger block 21, the second finger block 23, the third finger block 25 and the fourth finger block 27 clamp the mask 100 and the two narrow sides of the membrane frame 29 connected to the mask 100 are located on the left and right sides, the left narrow side of the membrane frame 29 is located between the first supporting finger 22 and the second supporting finger 24, and the right narrow side of the membrane frame 29 is located between the third supporting finger 26 and the fourth supporting finger 28.

[0029] Specifically, the mask 100 requires a protective film to be applied during the production process. This application involves attaching a protective film to the surface of the mask 100 using a film frame 29 to protect the pattern on the mask 100 surface from physical damage and contamination during handling and use. After the film is applied, the mask 100 is bonded to the film frame 29. The mask 100 has a square structure, while the film frame 29 has a rectangular structure, therefore the film frame 29 has two narrow sides and two long sides. For the same size mask 100, there are many different sizes of film frame 29. For example, a 6-inch mask 100 has a size of 152×152 mm, while the corresponding film frame 29 sizes include 149×113 mm, 149×115 mm, 149×122 mm, 147×122 mm, and 150×122 mm, etc. More specifically, when the first finger block 21, the second finger block 23, the third finger block 25, and the fourth finger block 27 clamp the mask 100, if the two long sides of the membrane frame 29 below the mask 100 are located on the left and right sides, that is, the two narrow sides of the membrane frame 29 are located on the front and back sides, then the left long side of the membrane frame 29 is far from the left side of the mask 100, and the right long side of the membrane frame 29 is far from the right side of the mask 100. In this case, the first supporting finger 22, the second supporting finger 24, the third supporting finger 26, and the fourth supporting finger 28 do not have the risk of interfering with the membrane frame 29. When the first finger block 21, the second finger block 23, the third finger block 25, and the fourth finger block 27 clamp the mask 100, if the two narrow sides of the membrane frame 29 below the mask 100 are located on the left and right sides, that is, the two long sides of the membrane frame 29 are located on the front and back sides, then... Figure 4As shown, the left narrow side of the membrane frame 29 is very close to the left side of the mask 100, and the right narrow side of the membrane frame 29 is very close to the right side of the mask 100. Since the lower ends of the first supporting finger 22, the second supporting finger 24, the third supporting finger 26, and the fourth supporting finger 28 all extend obliquely below the mask 100, the left narrow side of the membrane frame 29 must be positioned between the first supporting finger 22 and the second supporting finger 24, and the right narrow side of the membrane frame 29 must be positioned between the third supporting finger 26 and the fourth supporting finger 28. This is necessary to prevent interference between the first supporting finger 22, the second supporting finger 24, the third supporting finger 26, and the fourth supporting finger 28 and the membrane frame 29. Therefore, the clamping fixture for transferring the mask using a robotic arm in this embodiment can clamp the mask 100 from both the narrow side and the long side of the membrane frame 29, making it more flexible in use. Furthermore, by setting the spacing between the first supporting finger 22 and the second supporting finger 24, and the spacing between the third supporting finger 26 and the fourth supporting finger 28, respectively, sufficiently large, the clamping fixture for transferring masks by a robotic arm in this embodiment of the application can be compatible with various sizes of membrane frames 29 corresponding to the same size mask 100. For example, for a 6-inch mask 100, setting the spacing between the first supporting finger 22 and the second supporting finger 24, and the spacing between the third supporting finger 26 and the fourth supporting finger 28, respectively, to be greater than 122 mm, it can be compatible with various sizes of membrane frames 29 corresponding to the 6-inch mask 100. Regardless of what size membrane frame 29 is attached to the 6-inch mask 100, interference between the membrane frame 29 and the first supporting finger 22, the second supporting finger 24, the third supporting finger 26, and the fourth supporting finger 28 can be avoided.

[0030] In summary, firstly, the left support arm 1 and the right support arm 2 are respectively mounted on the clamping actuator 7, which is connected to the robotic arm. The robotic arm moves the clamping actuator 7, thereby moving the left support arm 1 and the right support arm 2 above the mask 100. Then, the clamping actuator 7 moves the left support arm 1 and the right support arm 2 away from each other and separates them. Finally, the robotic arm moves the clamping actuator 7 downward, thereby moving the left support arm 1 and the right support arm 2 downward toward the mask 100. Once the mold 100 is in place, the clamping actuator 7 drives the left support arm 1 and the right support arm 2 to move towards each other. This causes the first gripper finger 3 to abut against the front end of the left side of the mold 100, the second gripper finger 4 to abut against the rear end of the left side of the mold 100, the third gripper finger 5 to abut against the front end of the right side of the mold 100, and the fourth gripper finger 6 to abut against the rear end of the right side of the mold 100, thereby clamping the mold 100. The robotic arm can then move the clamped mold 100. This clamping fixture moves the mold 100 by clamping its side, reducing the contact area with the mold 100 and avoiding direct contact with the patterned area of ​​the mold 100, thus reducing the risk of damage and contamination to the mold 100.

[0031] The specific embodiments described above further illustrate the technical problems, technical solutions, and beneficial effects of this utility model. It should be understood that the above descriptions are merely specific embodiments of this utility model and are not intended to limit this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A clamping fixture for transferring masks by a robotic arm, characterized in that, Including the left support arm (1), the right support arm (2), the first clamping finger (3), the second clamping finger (4), the third clamping finger (5) and the fourth clamping finger (6); The first clamping finger (3) is connected to the front end of the left support arm (1); The second clamping finger (4) is connected to the rear end of the left support arm (1); The third clamping finger (5) is connected to the front end of the right support arm (2); The fourth clamping finger (6) is connected to the rear end of the right support arm (2); The left support arm (1) and the right support arm (2) are respectively connected to the clamping execution component (7) on the robot arm. The left support arm (1) and the right support arm (2) are driven by the clamping execution component (7) to move towards each other, thereby driving the first clamping finger (3) to abut against the front end of the left side of the mask (100), driving the second clamping finger (4) to abut against the rear end of the left side of the mask (100), driving the third clamping finger (5) to abut against the front end of the right side of the mask (100), and driving the fourth clamping finger (6) to abut against the rear end of the right side of the mask (100), thereby clamping the mask (100).

2. The clamping fixture for transferring a mask by a robotic arm according to claim 1, characterized in that, It also includes a positioning mechanism connected to the left support arm (1) and the right support arm (2) and used to abut against the front and rear sides of the clamped mask (100) to position the front and rear of the mask (100).

3. The clamping fixture for transferring a mask by a robotic arm according to claim 2, characterized in that, The positioning mechanism includes a first positioning pin (8), a second positioning pin (9), a third positioning pin (10), and a fourth positioning pin (11). The first positioning pin (8) is connected to the front end of the left support arm (1) and is used to abut against the front side of the clamped mask (100); The second positioning pin (9) is connected to the rear end of the left support arm (1) and is used to abut against the rear side of the clamped mask (100); The third positioning pin (10) is connected to the front end of the right support arm (2) and is used to abut against the front side of the clamped mask (100); The fourth positioning pin (11) is connected to the rear end of the right support arm (2) and is used to abut against the rear side of the clamped mask (100).

4. The clamping fixture for transferring a mask by a robotic arm according to claim 3, characterized in that, The lower ends of the first positioning pin (8), the second positioning pin (9), the third positioning pin (10), and the fourth positioning pin (11) are all tapered structures with a larger upper end and a smaller lower end. The first positioning pin (8) and the second positioning pin (9) are both located below the left support arm (1); The third positioning pin (10) and the fourth positioning pin (11) are both located below the right support arm (2); The first clamping finger (3) and the second clamping finger (4) are both located below the left support arm (1); The third finger (5) and the fourth finger (6) are both located below the right support arm (2).

5. The clamping fixture for transferring a mask by a robotic arm according to claim 1, characterized in that, It also includes at least one in-situ sensor connected to at least one of the left support arm (1) and the right support arm (2) and used to detect the mask (100) and generate a signal when the left support arm (1) and the right support arm (2) move downward toward the mask (100) into place.

6. The clamping fixture for transferring a mask by a robotic arm according to claim 1, characterized in that, It also includes a left pressure sensor (12), a right pressure sensor (13), and an abutment seat (14). The left support arm (1) is used to connect to the left slider (15) in the clamping execution component (7), and the right support arm (2) is used to connect to the right slider (16) in the clamping execution component (7). The clamping execution component (7) is used to drive the left slider (15) and the right slider (16) to move towards or away from each other, thereby driving the left support arm (1) and the right support arm (2) to move towards or away from each other. The abutment (14) is used to connect to the fixed part in the clamping actuator (7) and the abutment (14) is located between the left support arm (1) and the right support arm (2); The left pressure sensor (12) is connected to the left support arm (1) and located on the left side of the abutment seat (14); The right pressure sensor (13) is connected to the right support arm (2) and located on the right side of the abutment seat (14); The left pressure sensor (12) and the right pressure sensor (13) are respectively used to abut against the abutment seat (14) and generate pressure signals when the first clamping finger (3), the second clamping finger (4), the third clamping finger (5) and the fourth clamping finger (6) clamp the mask (100).

7. The clamping fixture for transferring a mask by a robotic arm according to claim 6, characterized in that, The left support arm (1) has a left adjustment block (17), and the left pressure sensor (12) is connected to the left adjustment block (17); The right support arm (2) has a right adjustment block (18), and the right pressure sensor (13) is connected to the right adjustment block (18).

8. The clamping fixture for transferring a mask by a robotic arm according to claim 7, characterized in that, The left pressure sensor (12) is locked to the left adjustment block (17) by a left bolt. The left pressure sensor (12) is provided with a left waist-shaped hole (19). The left bolt passes through the left waist-shaped hole (19) and is threaded to the left adjustment block (17). The right pressure sensor (13) is locked to the right adjustment block (18) by a right bolt. The right pressure sensor (13) is provided with a right waist-shaped hole (20). The right bolt passes through the right waist-shaped hole (20) and is threaded to the right adjustment block (18).

9. The clamping fixture for transferring a mask by a robotic arm according to claim 1, characterized in that, The first clamping finger (3) includes a first finger block (21) and a first supporting finger (22). The first finger block (21) is connected to the front end of the left support arm (1) and is used to abut against the front end of the left side of the mask (100) when clamping the mask (100). The first supporting finger (22) is connected to the first finger block (21). The lower end of the first supporting finger (22) extends obliquely downward to the bottom of the mask (100). The second clamping finger (4) includes a second finger block (23) and a second supporting finger (24). The second finger block (23) is connected to the rear end of the left support arm (1) and is used to abut against the rear end of the left side of the mask (100) when clamping the mask (100). The second supporting finger (24) is connected to the second finger block (23), and the lower end of the second supporting finger (24) extends obliquely downward to the bottom of the mask (100). The third gripper (5) includes a third finger block (25) and a third supporting finger (26). The third finger block (25) is connected to the front end of the right support arm (2) and is used to abut the front end of the right side of the mask (100) when gripping the mask (100). The third supporting finger (26) is connected to the third finger block (25). The lower end of the third supporting finger (26) extends obliquely downward to the bottom of the mask (100). The fourth gripper (6) includes a fourth finger block (27) and a fourth supporting finger (28). The fourth finger block (27) is connected to the rear end of the right support arm (2) and is used to abut against the rear end of the right side of the mask (100) when gripping the mask (100). The fourth supporting finger (28) is connected to the fourth finger block (27), and the lower end of the fourth supporting finger (28) extends obliquely downward to the underside of the mask (100).

10. The clamping fixture for transferring a mask by a robotic arm according to claim 9, characterized in that, A rectangular membrane frame (29) is connected to the lower surface of the mask (100). When the first finger block (21), the second finger block (23), the third finger block (25), and the fourth finger block (27) clamp the mask (100) and the two narrow sides of the membrane frame (29) connected to the mask (100) are located on the left and right sides, the left narrow side of the membrane frame (29) is located between the first supporting finger (22) and the second supporting finger (24), while the right narrow side of the membrane frame (29) is located between the third supporting finger (26) and the fourth supporting finger (28).

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