An offline adjustable planar cathode structure

Abstract

The utility model relates to an offline adjustable plane cathode structure relates to vacuum coating technology field, including cathode body base and install as the magnetic steel structure of magnetic field source on the cathode body base, be equipped with a plurality of adjusting mechanism for adjusting the relative position of magnetic steel structure and cathode body base on the cathode body base, still be equipped with the guide mechanism to the magnetic steel structure movement process and guide effect in between cathode body base and magnetic steel structure, through adjusting mechanism connect the cathode body base and magnetic steel structure into an adjustable whole, the utility model discloses through the synergies of cathode body base, magnetic steel structure, adjusting mechanism, guide mechanism etc. module, can realize the quick regulation of magnetic field uniformity, has improved the coating efficiency and also improved the utilization rate of target material, reduced the replacement frequency of target material.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, specifically to an offline adjustable planar cathode structure. Background Technology

[0002] As is well known, magnetic field uniformity is a core factor in ensuring coating quality and target utilization during the coating production process. The uniformity of the magnetic field is inextricably linked to the arrangement and relative positions of the magnets within the planar cathode, which serves as the magnetic field source. Traditional planar cathodes have their internal magnetic steel structure (the magnet carrier) connected to the cathode base by screws, making it non-adjustable and relying solely on machining precision. This inevitably leads to uneven magnetic field distribution, which cannot be effectively corrected. Consequently, target utilization is low, with high utilization in areas of strong magnetic field and low utilization in areas of weak magnetic field, resulting in frequent target changes and impacting the overall efficiency of the coating production line. Utility Model Content

[0003] The purpose of this invention is to provide an offline adjustable planar cathode structure. Through the coordinated action of modules such as the cathode body base, magnet structure, adjustment mechanism, and guide mechanism, the uniformity of the magnetic field can be quickly adjusted, which improves the coating efficiency, increases the utilization rate of the target material, and reduces the frequency of target material replacement.

[0004] The technical solution adopted in this utility model is: An offline adjustable planar cathode structure includes a cathode body base and a magnetic steel structure mounted on the cathode body base as a magnetic field source. The cathode body base is provided with a plurality of adjustment mechanisms for adjusting the relative position of the magnetic steel structure and the cathode body base. A guide mechanism is also provided between the cathode body base and the magnetic steel structure to guide the movement of the magnetic steel structure. The cathode body base and the magnetic steel structure are connected into an adjustable whole through the adjustment mechanisms.

[0005] As a preferred embodiment, several rows of adjustment mechanisms are provided along the length of the cathode body base.

[0006] As a preferred embodiment, the adjustment mechanism consists of a support block, a support stud, multi-specification adjustment shims, and a demagnetizing adjustment screw. The support stud is installed in the mounting hole of the cathode body base, with its lower end face contacting the upper end face of the magnet structure. Multi-specification adjustment shims are installed between its upper end face and the support block. The threaded section of the demagnetizing adjustment screw passes through the support block and the support stud in sequence and is screwed into the threaded hole on the magnet structure.

[0007] As a preferred embodiment, the multi-specification adjustment shims consist of multiple shims of different thicknesses. By adding or removing shims of different thicknesses, the length of the demagnetizing adjustment screw screw screwed into the threaded hole on the magnet structure is adjusted, thereby adjusting the relative position of the magnet structure and the cathode body base.

[0008] As a preferred embodiment, the lower end face of the cathode body base is provided with several grooves for installing the magnet structure, and the magnet structure in each groove corresponds to multiple adjustment mechanisms.

[0009] As a preferred embodiment, the guiding mechanism consists of a guide bar, a guide block, and a locking connector, and the guiding mechanism is disposed within the groove.

[0010] As a preferred embodiment, the guide strip is fixed to the groove wall of the cathode body base and is fixed to the cathode body base as an integral structure by fastening screw II.

[0011] As a preferred embodiment, the guide block is fixed to the side of the magnetic steel structure by fastening screw I.

[0012] The beneficial effects of this utility model are: To address the shortcomings of existing technologies, this solution provides an offline adjustable planar cathode structure, optimized as follows: Several adjustment mechanisms are used to adjust the relative position of the magnet structure and the cathode base. A guiding mechanism is also provided between the cathode base and the magnet structure to guide the movement of the magnet structure. The adjustment mechanisms connect the cathode base and the magnet structure into an adjustable whole. Through the synergistic action of the cathode base, magnet structure, adjustment mechanisms, and guiding mechanisms, rapid adjustment of the magnetic field uniformity can be achieved, improving coating efficiency and target material utilization while reducing target material replacement frequency. This invention has the following technical effects: Firstly, the structure is flexible and compact: it fully considers spatial design, and while meeting the requirements, the structure is relatively small, flexible and compact. Secondly, it is easy and efficient to adjust: the evenly distributed multi-support structure effectively ensures the flatness of the magnetic steel structure and ensures the uniformity of the magnetic field. Thirdly, the design of the semi-circular guide block and the grooved guide strip has a high fault tolerance rate, which can effectively avoid jamming and seizing, and has a long service life. Fourth, high consumable utilization rate: The adjustable planar cathode has a high utilization rate of the target material, which can save costs efficiently and reduce the replacement frequency. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a schematic diagram of the overall layout and cross-sectional view of an offline adjustable planar cathode structure; Figure 2 This is an exploded schematic diagram of an offline adjustable planar cathode structure. Figure 3 for Figure 2 A cross-sectional view along line AA.

[0015] Figure label: 1. Cathode base; 2. Magnetic steel structure; 3. Adjustment mechanism; 31. Support block; 32. Support stud; 33. Multi-specification adjustment shims; 34. Demagnetizing adjustment screw; 35. Fastening screw III; 4. Guide mechanism; 41. Guide block; 42. Guide bar; 43. Fastening screw I; 44. Fastening screw II. Detailed Implementation

[0016] The present invention will now be described in detail through exemplary embodiments. However, it should be understood that, without further description, elements, structures, and features in one embodiment may be advantageously incorporated into other embodiments.

[0017] It should be noted that, unless otherwise defined, the technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this utility model pertains; the words "a," "an," or "the" and similar terms used in the specification and claims of this utility model patent application do not express a quantity limitation, but rather indicate the presence of at least one; the words "comprising" or "including" and similar terms indicate that the elements or objects preceding "comprising" or "including" cover the elements or objects listed following "comprising" or "including" and their equivalents, but do not exclude other elements or objects having the same function; The following is in conjunction with the appendix Figure 1-3 The specific structural composition and installation process of an offline adjustable planar cathode structure are described in detail below: As shown in the figure, an offline adjustable planar cathode structure mainly consists of a cathode body base 1, a magnetic steel structure 2, an adjustment mechanism 3, and a guide mechanism 4. The cathode base 1 is the main body of the planar cathode structure, with no relative displacement, and is a fixed component. The magnet structure 2 is the magnetic field source of the planar cathode structure, with relative longitudinal displacement (0-4mm) relative to the cathode base 1, and is a movable component. Several adjustment mechanisms 3 are provided on the cathode base 1 to adjust the relative position of the magnet structure 2 and the cathode base 1. The adjustment mechanisms 3 can adjust the longitudinal displacement of the magnet structure 2 by adding or removing shims inside them. A guide mechanism 4 is also provided between the cathode base and the magnet structure to guide the movement of the magnet structure. The guide mechanism 4 ensures that the magnet structure 1 only has longitudinal displacement and no displacement in other directions.

[0018] exist Figure 2 In the illustrated embodiment, the support block 31, support stud 32, multi-specification adjusting shims 33, demagnetizing adjusting screw 34, and fastening screw Ⅲ 35 constitute a [missing information - likely a component name or structure]. Figure 1 The adjustment mechanism 3 is provided in the cathode body base 1. The support stud 32 is installed in the mounting hole of the cathode body base 1, and its lower end contacts the upper end face of the magnet structure 2. A multi-specification adjustment shim 33 is provided between its upper end face and the support block 31. The threaded section of the demagnetizing adjustment screw 34 passes through the support block 31 and the support stud 32 in sequence and is screwed into the threaded hole on the magnet structure 2.

[0019] In this embodiment, the multi-specification adjustment shim 33 is composed of multiple shims of different thicknesses. By adding or removing shims of different thicknesses, the length of the demagnetizing adjustment screw 34 screwed into the threaded hole on the magnet structure 2 is adjusted, thereby adjusting the relative position of the magnet structure 2 and the cathode body base 1. The support block 31 is fixed to the upper end face of the cathode body base 1 by fastening screw III 35.

[0020] In this embodiment, the guide block 41, guide strip 42, fastening screw I 43, and fastening screw II 44 constitute a [structure / component]. Figure 1 The guide mechanism 4 in the middle; the cathode body base 1 and the magnetic steel structure 2 are connected into an adjustable whole by the support block 31, support stud 32, multi-specification adjustment shim 33, demagnetization adjustment screw 34, and fastening screw Ⅲ 35.

[0021] In this embodiment, the guide bar 42 is connected to the cathode body base 1 by fastening screw II 44, forming a fixed whole; the guide block 41 is connected to the side of the magnet structure 2 by fastening screw I 43, forming a fixed whole.

[0022] An offline adjustable planar cathode structure is installed as follows: First, select suitable multi-specification adjustment shims 33, whose thickness needs to be guaranteed to be 2mm. In this embodiment, five 0.1mm shims, one 0.5mm shim, and one 1mm shim are used. After being tested by a special magnetic field detection mechanism, the relative displacement between the cathode body base 1 and the magnet structure 2 is changed by adding or removing shims of different thicknesses in the multi-specification adjustment shims 33 according to the strength of the magnetic field after testing (approximately 1mm corresponds to 50Gs), thereby effectively adjusting the uniformity of the magnetic field.

[0023] This solution provides an offline adjustable planar cathode structure design, which is simple in structure, reliable in operation, and can effectively adjust the uniformity of the magnetic field, improve coating efficiency and target material utilization, and has broad application prospects.

[0024] The parts not described in detail in the above embodiments are existing technologies.

[0025] It should be noted that although the present invention has been described through the above embodiments, there may be other various embodiments of the present invention. Without departing from the spirit and scope of the present invention, those skilled in the art can obviously make various corresponding changes and modifications to the present invention, but all such changes and modifications should fall within the scope of protection of the appended claims and their equivalents.

Claims

1. An offline adjustable planar cathode structure, comprising a cathode body base and a magnetic steel structure mounted on the cathode body base as a magnetic field source, characterized in that: The cathode body base is provided with several adjustment mechanisms for adjusting the relative position of the magnet structure and the cathode body base. A guide mechanism is also provided between the cathode body base and the magnet structure to guide the movement of the magnet structure. The cathode body base and the magnet structure are connected into an adjustable whole through the adjustment mechanisms.

2. An off-line tunable planar cathode structure as claimed in claim 1, wherein: Several rows of adjustment mechanisms are provided along the length of the cathode body base.

3. An offline adjustable planar cathode structure according to claim 1 or 2, characterized in that: The adjustment mechanism consists of a support block, a support stud, multi-specification adjustment shims, and a demagnetizing adjustment screw. The support stud is installed in the mounting hole of the cathode body base, and its lower end face contacts the upper end face of the magnet structure. Multi-specification adjustment shims are installed between its upper end face and the support block. The threaded section of the demagnetizing adjustment screw passes through the support block and the support stud in sequence and is screwed into the threaded hole on the magnet structure.

4. An off-line tunable planar cathode structure as claimed in claim 3, wherein: The multi-specification adjustment shims consist of multiple shims of different thicknesses. By adding or removing shims of different thicknesses, the length of the demagnetizing adjustment screw screw screwed into the threaded hole on the magnet structure is adjusted, thereby adjusting the relative position of the magnet structure and the cathode body base.

5. An off-line tunable planar cathode structure as claimed in claim 1, wherein: The lower end face of the cathode body base is provided with several grooves for installing the magnet structure, and the magnet structure in each groove corresponds to multiple adjustment mechanisms.

6. The offline adjustable planar cathode structure according to claim 5, characterized in that: The guiding mechanism consists of a guide bar, a guide block, and a locking connector, and is disposed within a groove.

7. The offline adjustable planar cathode structure according to claim 6, characterized in that: The guide bar is fixed to the groove wall of the cathode body base and is fixed to the cathode body base as an integral structure by fastening screw II.

8. The offline adjustable planar cathode structure according to claim 6, characterized in that: The guide block is fixed to the side of the magnetic steel structure by fastening screw I.

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