A fourier infrared test sample stage

Abstract

The utility model discloses a Fourier infrared test sample stage, including stage body, be provided with multiple sets of test sample clamp no.

Description

Technical Field

[0001] This utility model relates to the field of spectroscopic experimental instrument technology, specifically to a Fourier transform infrared (FTIR) test sample stage. Background Technology

[0002] Fourier transform infrared spectroscopy is a technique used to obtain the infrared absorption or emission spectra of solid, liquid, or gaseous materials. It identifies the types of functional groups contained in the molecules of a substance by measuring the absorption of infrared light by the sample, and can even be used for quantitative analysis. The test sample stage is a crucial but often overlooked component of an FTIR spectrometer. Its core function is to present the sample to the infrared beam in the most suitable and controllable way to ensure the acquisition of high-quality and reliable spectral data.

[0003] The shortcomings of existing technologies lie in the fact that during the epitaxial growth testing of semiconductor materials, it is necessary to promptly measure the growth results of the current material to determine the conditions for the next growth. Because the current Fourier transform infrared (FTIR) testing sample stage is vertical, it can only meet the requirements for single-wafer testing at a time. Furthermore, it requires manual replacement of test points and test samples, significantly reducing testing efficiency. Utility Model Content

[0004] The purpose of this invention is to provide a Fourier transform infrared (FTIR) test sample stage to address the aforementioned shortcomings in the prior art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a Fourier transform infrared (FTIR) test sample stage, comprising a stage body, wherein multiple sets of test sample clamps are provided on the stage body, and test sample clamps are provided in the test sample clamps. The test sample clamps are used in combination to adapt to samples of different specifications for testing; the stage body is also provided with a limiting structure.

[0006] As a further description of the above technical solution:

[0007] The platform body is designed in a wafer-like structure.

[0008] As a further description of the above technical solution:

[0009] The test sample fixture is designed as a rectangular structure, with rounded corners at all four corners and recessed grooves on all four sides.

[0010] As a further description of the above technical solution:

[0011] The second test sample fixture is shaped and set in the groove structure one on the first test sample fixture. The second test sample fixture is also designed as a rectangular structure. The four corners of the second test sample fixture are all set as rounded corner structures two, and the four sides of the second test sample fixture are all set as inner groove structures two.

[0012] As a further description of the above technical solution:

[0013] The test sample fixture is also provided with an opening.

[0014] As a further description of the above technical solution:

[0015] The platform limiting structure is a concave groove provided on the platform body.

[0016] In the above technical solution, the Fourier transform infrared testing sample stage provided by this utility model has the following beneficial effects:

[0017] This invention features a horizontal stage body with a wafer-like structure, on which multiple sets of combinable test sample fixtures are integrated. The stage, with its horizontal testing layout, can simultaneously support and fix multiple test samples. Through the combined use of test sample fixture one and test sample fixture two, samples of different specifications can be stored at once, greatly improving testing efficiency. Furthermore, the limiting structure on the stage body further ensures the accuracy and repeatability of sample placement, guaranteeing the accuracy and reliability of test data. This device has a reasonable structural design, is simple to operate, and has strong applicability.

[0018] It should be understood that the foregoing general description and the following detailed description are exemplary and illustrative only, and are not intended to limit this disclosure.

[0019] This application provides an overview of various implementations or examples of the technology described in this disclosure, and is not a full disclosure of the entire scope or all features of the disclosed technology. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings.

[0021] Figure 1 An overall structural perspective view provided for an embodiment of this utility model;

[0022] Figure 2 Overall structural plan view provided for embodiments of this utility model;

[0023] Figure 3A schematic diagram of the structure of a test sample fixture provided in an embodiment of this utility model;

[0024] Figure 4 This is a schematic diagram of the test sample fixture II provided in an embodiment of the present utility model.

[0025] Explanation of reference numerals in the attached figures:

[0026] 1. Stage body; 2. Test sample fixture one; 3. Test sample fixture two; 4. Rounded corner structure one; 5. Groove structure one; 6. Rounded corner structure two; 7. Groove structure two; 8. Opening; 9. Concave recessed groove. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the described embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0028] Please see Figure 1-4 This embodiment provides a Fourier transform infrared (FTIR) test sample stage, including a stage body 1. The stage body 1 is used for testing semiconductor infrared materials. The stage body 1 is designed in a wafer-like structure to better match the testing equipment. The stage body 1 is provided with multiple sets of test sample clamps 1-2. Test sample clamps 1-2 are provided with test sample clamps 2-3. The test sample clamps 1-2 and test sample clamps 2-3 are used in combination to adapt to the testing of samples of different specifications. The stage body 1 is also provided with a limiting structure.

[0029] In a further embodiment of this utility model, the test sample holder 2 is designed as a rectangular structure, consistent with the shape of the test sample. The four corners of the test sample holder 2 are all rounded with corner structures 4 to protect the edges and corners of the rectangular sample. The four sides of the test sample holder 2 are all provided with inner groove structures 5 to safely restrict the testing of the rectangular sample. The test sample holder 2 also has an opening 8 to facilitate the placement or removal of the sample by the operator. The test sample holder 3 is shaped and positioned within the groove structure 5 on the test sample holder 2. It is also designed as a rectangular structure. The four corners of the second test sample fixture are all set with rounded corner structure 26, and the four sides of the second test sample fixture 3 are all set with inner groove structure 27. The structure of the second test sample fixture 23 is the same as that of the first test sample fixture 2, but its size is slightly smaller than that of the first test sample fixture 2. Furthermore, the rounded corner structure 26 and the groove structure 27 in the second test sample fixture 23 are the same in shape and function as the rounded corner structure 4 and the inner groove structure 5 in the first test sample fixture 2. The second test sample fixture 23 is embedded in the first test sample fixture for use, which is convenient for testing smaller sample sizes.

[0030] In a further embodiment of this utility model, the platform limiting structure is a concave groove 9 provided on the platform body 1, which facilitates installation and removal by operators.

[0031] Working principle: First, the stage body 1 is matched and installed with the testing equipment. At this time, the testing stage is placed horizontally, and the Fourier transform infrared test interference light is perpendicularly hit on the sample surface. Then, if the sample size is slightly larger, the sample to be tested is placed in sample holder 1 for direct testing. If the sample size is slightly smaller, the test sample holder 2 3 is embedded and installed with the sample holder 1. Then, the test samples are placed along the long side of the test sample holder to ensure that the entire sample is completely embedded in the test sample holder 2 3. Then, according to the set program, automatic multi-piece testing is realized. Finally, the testing system obtains the spectrum of the sample by fast Fourier transform based on the acquired interference pattern with the sample, and thus obtains the test result, completing the test.

[0032] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A Fourier transform infrared (FTIR) test sample stage, comprising a stage body (1), characterized in that: The platform body (1) is provided with multiple sets of test sample fixtures (2), and test sample fixtures (3) are provided in the test sample fixtures (2). The test sample fixtures (2) and test sample fixtures (3) are used in combination to adapt to samples of different specifications for testing. The platform body (1) is also provided with a limiting structure.

2. The Fourier transform infrared (FTIR) test sample stage according to claim 1, characterized in that, The platform body (1) is designed in a wafer-like structure.

3. The Fourier transform infrared (FTIR) test sample stage according to claim 1, characterized in that, The test sample fixture (2) is designed as a rectangular structure. The four corners of the test sample fixture (2) are all set as rounded corner structures (4), and the four sides of the test sample fixture (2) are all set as inner groove structures (5).

4. The Fourier transform infrared (FTIR) test sample stage according to claim 3, characterized in that, The test sample fixture 2 (3) is shaped in the groove structure 1 (5) on the test sample fixture 1 (2). The test sample fixture 2 (3) is also designed as a rectangular structure. The four corners of the test sample fixture 2 are all set as rounded corner structure 2 (6), and the four sides of the test sample fixture 2 (3) are all set as inner groove structure 2 (7).

5. The Fourier transform infrared (FTIR) test sample stage according to claim 1, characterized in that, The test sample fixture (2) is also provided with an opening (8).

6. The Fourier transform infrared (FTIR) test sample stage according to claim 1, characterized in that, The platform limiting structure is a concave groove (9) provided on the platform body (1).

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