Protective mechanism for side wall passivation coating and coating equipment for side wall passivation coating

Abstract

The utility model discloses a kind of protective mechanism for side wall passivation coating and coating equipment for side wall passivation coating, it includes cylinder mounting seat;One side and the cylinder mounting seat connection lift cylinder;With the other side connection of lift cylinder lift connecting plate;Support column is located on lift connecting plate;Valve baffle is located on support column, for when carrying out side wall passivation coating shielding, double-flange vacuum bellows are equipped with on the outside of support column, double-flange vacuum bellows are sealed with sealing ring. Protective mechanism of the utility model, unnecessary chemical reaction caused by valve mouth airflow turbulence is reduced, precursor waste in coating process is reduced, precursor use rate is increased, and damage of valve and other sealing elements can also be prevented.

Description

Technical Field

[0001] This utility model relates to the field of sidewall passivation coating technology, and in particular to a protective mechanism for sidewall passivation coating and a coating equipment for sidewall passivation coating. Background Technology

[0002] In traditional photovoltaic processes, a material inlet and outlet channel is provided on the side wall of the coating equipment. The front end of the material inlet and outlet channel is connected to the inside of the coating equipment cavity, and the end of the material inlet and outlet channel is connected to the outside of the cavity and is equipped with a valve. The valve is used to close and open the material inlet and outlet channel.

[0003] When coating is required, the valve must first be opened, allowing the wafer to pass through the infeed / outfeed channel to reach the carrier plate inside the cavity. Then, the valve is used to close the infeed / outfeed channel. However, during the coating process, the airflow inside the cavity enters the infeed / outfeed channel along the front end, causing turbulent airflow within the cavity, resulting in uneven airflow and unsatisfactory deposition. Furthermore, sputtered particles from the thin film deposition also enter the infeed / outfeed channel through the front end of the outfeed channel and deposit on the infeed / outfeed channel and valves. Regular cleaning is required after deposition, which is time-consuming, labor-intensive, significantly increases costs, and adds to the production process. Even the heat generated by the heating device inside the coating equipment cavity can reach the valves through the infeed / outfeed channel, easily damaging valves and other seals.

[0004] Therefore, whether an improved protective mechanism can be provided based on the shortcomings of existing technologies has become a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] The technical problem to be solved by this utility model is to overcome the defects in the prior art and provide a protective mechanism for sidewall passivation coating.

[0006] The present invention solves the above-mentioned technical problems through the following technical solution: The first aspect of this utility model is a protective mechanism for sidewall passivation coating, comprising: Cylinder mounting bracket; A lifting cylinder connected to a cylinder mounting base on one side; A lifting connecting plate connected to the other side of the lifting cylinder; Support columns installed on the lifting connection plate; The valve baffle, mounted on the support column, is used to shield the valve during the sidewall passivation coating process. A double-flange vacuum bellows is installed on the outside of the support column, and the double-flange vacuum bellows is sealed with a sealing ring.

[0007] Preferably, the double-flange vacuum bellows includes an upper flange and a lower flange, with the lower flange connected to a support column.

[0008] Preferably, there are two sealing rings, located on the upper and lower sides of the double-flange vacuum bellows, respectively.

[0009] The second aspect of this utility model is a coating device for sidewall passivation coating, which includes the protective mechanism for sidewall passivation coating of the first aspect of this utility model.

[0010] Preferably, the coating equipment includes a cavity, and the portion of the protective mechanism above the upper flange is located inside the cavity.

[0011] Preferably, the coating equipment includes a valve, and a valve baffle blocks the valve opening during coating.

[0012] Based on common knowledge in the field, the above-mentioned preferred conditions can be combined arbitrarily to obtain various preferred embodiments of this utility model.

[0013] The positive and progressive effects of this utility model are as follows: The protective mechanism for sidewall passivation coating of this utility model includes a cylinder mounting base, a lifting cylinder, a lifting connecting plate, a support column, and a valve baffle. This protective mechanism for sidewall passivation coating reduces unnecessary chemical reactions caused by turbulent airflow at the valve port, reduces waste of precursors during the coating process, increases the utilization rate of precursors, and also prevents damage to valves and other sealing components. Attached Figure Description

[0014] Figure 1 This is a structural diagram of the protective mechanism for sidewall passivation coating according to the present invention.

[0015] Figure 2 To have Figure 1 The structural diagram of the coating equipment for the protective mechanism in the middle.

[0016] Explanation of reference numerals in the attached figures: 1 Valve baffle 2. Sealing ring 3 Double-flange vacuum bellows 4 Support Columns 5 Lifting Cylinder 6 Lifting connecting plate 7 Cylinder Mounting Mount 8 cavities 9 Sprayer Plates 10 carrier boards 11 motors 12 Inner heaters 13. External heater 14. Intake System 15. Vent System 16 chips 17. Valve A. Protective agency. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the present utility model or its application or use. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0018] It should be noted that in the claims and specification of this patent, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one" does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes the element.

[0019] like Figure 1 As shown, the first aspect of this utility model discloses a protective mechanism for sidewall passivation coating. The protective mechanism includes a cylinder mounting base 7, a lifting cylinder 5, a lifting connecting plate 6, a support column 4, and a valve baffle 1. One side of the lifting cylinder 5 (left side in the figure) is connected to the cylinder mounting base 7, and the other side of the lifting cylinder 5 (right side in the figure) is connected to the lifting connecting plate 6. The support column 4 is disposed on the lifting connecting plate 6, and the valve baffle 1 is disposed on the support column 4. A double-flange vacuum bellows 3 is provided on the outside of the support column 4, and a sealing ring 2 is used to seal the double-flange vacuum bellows 3.

[0020] Preferably, the double-flange vacuum bellows 3 includes an upper flange and a lower flange, and two sealing rings 2 are provided. When the protective mechanism is installed on the coating equipment, the mounting base 7 is installed below the cavity of the coating equipment, the upper flange of the double-flange vacuum bellows 3 is connected to the cavity and sealed with the sealing rings 2, the support column 4 is connected to the valve baffle 1, the lower flange of the bellows 3 is connected to the support column 4 and sealed with the sealing rings 2, the support column 4 is installed on the lifting connecting plate 6, the lifting connecting plate 6 is installed on the lifting cylinder 5, and the lifting cylinder 5 drives the lifting connecting plate 6 and the double-flange vacuum bellows 3 to move up and down.

[0021] like Figure 2 As shown, the second aspect of this utility model discloses a coating apparatus for sidewall passivation coating. The protective mechanism A of the first aspect of this utility model is installed below the cavity, for example, it can be as follows: Figure 2 As shown in the lower right corner, the upper half of the protective mechanism A, for example, the part above the upper flange, is located inside the cavity, while the lower half is located outside the cavity. The coating equipment includes a cavity 8, a spray plate 9, a carrier plate 10, a motor 11, an inner heater 12, an outer heater 13, an air inlet system 14, and an air outlet system 15. When coating is required, the cassette containing the wafer 16 is first loaded... Figure 2 The substrate (not shown) is placed on a circular carrier plate 10. Precursors enter the spray plate 9 from the air intake system 14 and are then sprayed out by the spray plate 9 and adsorbed onto the wafer 16. The motor 11 drives the carrier plate 10 and the wafer 16 to rotate, passing through different precursors in sequence and adsorbing onto the surface of the wafer 16 to react and form a film. The inner heater 12 and the outer heater 13 provide energy for the reaction.

[0022] During the coating process, the gate valve (GV valve) 17 is opened, and the robot arm delivers the wafer 16 onto the carrier plate 10 inside the cavity. After the loading is completed, the gate valve 17 is closed, and the valve baffle in the protective mechanism A rises to cover the valve port of the gate valve 17, thus resolving the airflow turbulence problem. After the coating is completed, before opening the gate valve 17, the valve baffle descends, and the robot arm enters the cavity to remove the wafer 16.

[0023] The protective mechanism and coating device of this utility model are used for sidewall passivation coating, which reduces unnecessary chemical reactions caused by turbulent airflow at the valve port, reduces the waste of precursors during the coating process, increases the utilization rate of precursors, and can also prevent damage to valves and other sealing components.

[0024] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A shield mechanism for passivating a sidewall plating, characterized by, include: Cylinder mounting bracket; A lifting cylinder connected to a cylinder mounting base on one side; A lifting connecting plate connected to the other side of the lifting cylinder; Support columns installed on the lifting connection plate; The valve baffle, mounted on the support column, is used to shield the valve during the sidewall passivation coating process. A double-flange vacuum bellows is installed on the outside of the support column, and the double-flange vacuum bellows is sealed with a sealing ring.

2. The protective mechanism for sidewall passivation coating as described in claim 1, characterized in that, The double-flange vacuum bellows consists of an upper flange and a lower flange, with the lower flange connected to the support column.

3. The protective mechanism for sidewall passivation coating as described in claim 1, characterized in that, There are two sealing rings, located on the upper and lower sides of the double-flange vacuum bellows, respectively.

4. A coating apparatus for sidewall passivation coating, characterized in that, It has a protective mechanism for sidewall passivation coating as described in any one of claims 2 to 3.

5. The coating equipment for sidewall passivation coating as described in claim 4, characterized in that, The coating equipment includes a cavity, and the part of the protective mechanism located above the upper flange is inside the cavity.

6. The coating apparatus for sidewall passivation coating as described in claim 4, characterized in that, The coating equipment includes a valve, and a valve baffle blocks the valve opening during coating.

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