Two-axis ultra-precision machine tool motion error compensation device based on laser interference

Abstract

The utility model relates to machine tool processing technical field especially is two axis super precision machine tool motion error compensation device based on laser interference, including X axis linear drive module and Y axis linear drive module, the output of X axis linear drive module is installed Y axis linear drive module, the output of Y axis linear drive module is installed with dynamic compensation conveying mechanism, and dynamic compensation conveying mechanism includes conveying base, and the upper surface of conveying base is hinged with adjustable installation lid, and the inside installation of conveying base has drive support subassembly, and the upper surface rotation of drive support subassembly is connected with two left and right symmetrical linkage swing arms, in the utility model, through dynamic compensation conveying mechanism realizes the inclination precision regulation, and with the linkage of worm push block, oblique drive part and adjustable installation lid, one -way compensation delivery end longitudinal plane deviation, restores high -precision motion track, guarantees processing accuracy and product quality.

Description

Technical Field

[0001] This utility model relates to the field of machine tool processing technology, specifically to a two-axis ultra-precision machine tool motion error compensation device based on laser interference. Background Technology

[0002] Two-axis ultra-precision machine tools based on laser interferometry have become key equipment for achieving high-precision machining due to their superior performance. Laser interferometry technology provides the machine tool with extremely high measurement accuracy, which can accurately capture the minute displacement changes in the movement of each axis of the machine tool, providing reliable data support for the entire machining process and ensuring that the machine tool achieves high-precision positioning and control during operation.

[0003] During the operation of a two-axis ultra-precision machine tool, the precise transport of components is usually achieved by the coordinated work of the X-axis linear motor and the Y-axis linear motor. This dual-axis working mode, under the high-precision monitoring and feedback adjustment of laser interferometry technology, can meet the stringent requirements of high-precision positioning and movement for complex machining tasks. Under the precise guidance of laser interferometry signals, the X-axis and Y-axis linear motors accurately control the movement trajectory and position of the components. Whether it is a small displacement adjustment or a complex spatial movement, it can achieve extremely high repeatability and smoothness of movement, laying a solid foundation for high-precision machining.

[0004] However, in actual use, the system revealed a significant problem, especially at the Y-axis linear motor conveyor end. When the Y-axis linear motor conveyor end carries an object for conveying operations, the object's gravity has a significant impact on the conveyor end. Due to gravity, the pressure on the lower part of the conveyor end is significantly greater than that on the upper part. Over time, this uneven wear accumulates, eventually causing the Y-axis linear motor conveyor end to tilt downwards. This results in the conveyor end no longer being on the same vertical plane, which disrupts the machine tool's original high-precision motion trajectory, causing positional deviations of components during conveying, thus affecting processing accuracy and reducing product quality.

[0005] Therefore, a two-axis ultra-precision machine tool motion error compensation device based on laser interferometry is proposed to address the above problems. Utility Model Content

[0006] The purpose of this invention is to provide a two-axis ultra-precision machine tool motion error compensation device based on laser interferometry, so as to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, this utility model provides the following technical solution:

[0008] A two-axis ultra-precision machine tool motion error compensation device based on laser interferometry includes an X-axis linear drive module and a Y-axis linear drive module. The output end of the X-axis linear drive module is equipped with the Y-axis linear drive module, and the output end of the Y-axis linear drive module is equipped with a dynamic compensation conveying mechanism. The dynamic compensation conveying mechanism includes a conveying base, the upper surface of which is hinged with an adjustable mounting cover. A drive support assembly is installed inside the conveying base. The upper surface of the drive support assembly is rotatably connected to two left-right symmetrical linkage swing arms. Each of the two linkage swing arms has a set of unidirectional meshing tooth grooves on one corresponding side. A reset spring and an oblique drive component are installed between the two linkage swing arms. The oblique drive component meshes with the unidirectional meshing tooth grooves. A worm-shaped push block that fits against each other is installed on one side of the oblique drive component. The vertical projection of the worm-shaped push block is nautilus-shaped.

[0009] As a further optimization of this utility model, the adjustable mounting cover includes a mounting cover body, an inclined mating block is fixed at the center of the lower surface of the mounting cover body, the lower surface of the inclined mating block has an inclined structure, buffer pads are provided at the four corners of the lower surface of the mounting cover body, and a hinge seat is integrally formed on one side of the lower surface of the mounting cover body.

[0010] As a further optimization of this utility model, each group of unidirectional meshing tooth grooves includes multiple unidirectional meshing tooth grooves arranged linearly, and one side of the interior of each unidirectional meshing tooth groove has an inclined structure.

[0011] As a further optimization of this utility model, the drive support assembly includes four support columns, a drive mounting plate is fixed between the four support columns, a drive output shaft is rotatably connected to one side of the drive mounting plate, the top end of the drive output shaft is fixed to one side of the middle of the worm-shaped push block, the bottom end of the drive output shaft extends to the bottom of the drive mounting plate, and the bottom end of the drive output shaft is fixedly connected to the output end of the precision servo motor.

[0012] As a further optimization of this utility model, the following features are provided: the position of the supporting column corresponds to the position of the buffer pad; there is a gap between the inner side of the drive mounting plate and the conveying base; the drive mounting plate and the conveying base are parallel to each other; and the precision servo motor is fixedly connected to the lower surface of the drive mounting plate through the mounting base.

[0013] As a further optimization of this utility model, the inclined driving component includes a driving base, with at least three one-way meshing teeth fixed on both sides of the driving base. One side of each one-way meshing tooth has an inclined structure, and an inclined push rod is fixed on the top of the driving base.

[0014] As a further optimization of this utility model, the upper surface of the inclined push rod has an arc-shaped structure, the inclined push rod is located below the inclined mating block, and the inclined push rod slides in contact with the inclined mating block.

[0015] As a further optimization of this utility model, a linear guide rail is fixed to the middle of the upper surface of the drive mounting plate, and the linear guide rail is slidably connected to the inner side of the drive base.

[0016] As a further optimization of this utility model, the inner side of the conveying base is provided with an installation cavity, and the top of the inner side of the installation cavity of the conveying base is fixed with a connecting seat for cooperating with the hinge seat.

[0017] As a further optimization of this utility model, the angle between the X-axis linear drive module and the Y-axis linear drive module is 90°, and the Y-axis linear drive module and the conveying base are parallel to each other.

[0018] Compared with the prior art, the beneficial effects of this utility model are:

[0019] In this invention, the tilt angle is precisely adjusted through a dynamic compensation conveying mechanism. By leveraging the linkage of the worm-shaped push block, the oblique drive component, and the adjustable mounting cover, the longitudinal plane deviation at the conveying end is compensated in one direction, restoring a high-precision motion trajectory and ensuring processing accuracy and product quality. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0021] Figure 2 This is a schematic diagram of the dynamic compensation conveying mechanism of this utility model;

[0022] Figure 3 This utility model Figure 2 A schematic diagram of the structure at point A;

[0023] Figure 4 This is a schematic diagram of the back structure of the adjustable mounting cover of this utility model;

[0024] Figure 5 This is a schematic diagram of the structure of the drive support component of this utility model;

[0025] Figure 6 This is a schematic diagram of the rear structure of the drive support assembly of this utility model;

[0026] Figure 7 This is a schematic diagram of the oblique drive component of this utility model.

[0027] In the diagram: 1. X-axis linear drive module; 2. Y-axis linear drive module;

[0028] 3. Dynamic compensation conveying mechanism; 31. Conveying base; 32. Adjustable mounting cover; 33. Drive support assembly; 34. Linkage swing arm; 35. One-way meshing toothed groove; 36. Return spring; 37. Inclined drive component; 38. Worm-shaped push block; 39. Linear guide rail;

[0029] 321. Mounting cover body; 322. Angled mating block; 323. Buffer pad; 324. Hinge seat;

[0030] 331. Support column; 332. Drive mounting plate; 333. Drive output shaft; 334. Precision servo motor;

[0031] 371. Drive base; 372. One-way meshing teeth; 373. Angled push rod. Detailed Implementation

[0032] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0033] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0034] Please see Figures 1-7 This utility model provides a technical solution:

[0035] A two-axis ultra-precision machine tool motion error compensation device based on laser interferometry includes an X-axis linear drive module 1 and a Y-axis linear drive module 2. The output end of the X-axis linear drive module 1 is equipped with the Y-axis linear drive module 2. The angle between the X-axis linear drive module 1 and the Y-axis linear drive module 2 is 90°. The Y-axis linear drive module 2 is parallel to the conveying base 31. The output end of the Y-axis linear drive module 2 is equipped with a dynamic compensation conveying mechanism 3. The dynamic compensation conveying mechanism 3 includes the conveying base 31, and the upper surface of the conveying base 31 is hinged with... An adjustable mounting cover 32 is installed inside the conveying base 31, and a drive support assembly 33 is installed inside. The upper surface of the drive support assembly 33 is rotatably connected to two left-right symmetrical linkage swing arms 34. A set of one-way meshing tooth grooves 35 are opened on the corresponding side of the two linkage swing arms 34. A reset tension spring 36 and an oblique drive member 37 are installed between the two linkage swing arms 34. The oblique drive member 37 meshes with the one-way meshing tooth grooves 35. A worm-shaped push block 38 that fits against each other is installed on one side of the oblique drive member 37. The vertical projection of the worm-shaped push block 38 is nautilus-shaped.

[0036] As a further implementation of this solution, the adjustable mounting cover 32 includes a mounting cover body 321. An inclined mating block 322 is fixed at the center of the lower surface of the mounting cover body 321. The lower surface of the inclined mating block 322 has an inclined structure. Buffer pads 323 are provided at the four corners of the lower surface of the mounting cover body 321. A hinge seat 324 is integrally formed on one side of the lower surface of the mounting cover body 321. The inclined structure of the inclined mating block 322, the buffer pad 323, and the hinge seat 324 of the adjustable mounting cover 32 are adapted to the pushing action of the inclined push rod 373 to realize unidirectional rotation compensation of the mounting cover.

[0037] As a further implementation of this solution, each set of unidirectional meshing tooth grooves 35 includes multiple linearly arranged unidirectional meshing tooth grooves 35. One side of the interior of the unidirectional meshing tooth groove 35 has an inclined structure. The unidirectional meshing tooth groove 35 has an inclination of 15°-20°, a tooth height of 2-3mm, and a spacing of 4-5mm. The inclined structure of the unidirectional meshing tooth groove 35, in conjunction with the unidirectional meshing tooth 372, enables the unidirectional sliding of the inclined drive component 37, ensuring the opening and closing reset of the linkage swing arm 34 and preventing the component from loosening in the reverse direction during the compensation process.

[0038] As a further implementation of this solution, the drive support assembly 33 includes four support columns 331, a drive mounting plate 332 is fixed between the four support columns 331, a drive output shaft 333 is rotatably connected to one side of the drive mounting plate 332, the top end of the drive output shaft 333 is fixed to one side of the middle of the worm-shaped push block 38, the bottom end of the drive output shaft 333 extends to the bottom of the drive mounting plate 332, and the bottom end of the drive output shaft 333 is fixedly connected to the output end of the precision servo motor 334, which provides stable drive support for the worm-shaped push block 38.

[0039] As a further implementation of this solution, the position of the support column 331 corresponds to the position of the buffer pad 323, there is a gap between the inner side of the drive mounting plate 332 and the conveying base 31, the drive mounting plate 332 and the conveying base 31 are parallel to each other, the precision servo motor 334 is fixedly connected to the lower surface of the drive mounting plate 332 through the mounting base, and the positions of the support column 331 and the buffer pad 323 correspond to each other, ensuring the buffering and positioning when the adjustable mounting cover 32 is closed, avoiding collision and wear of components, and extending the service life of the device;

[0040] As a further implementation of this solution, the inclined drive component 37 includes a drive base 371, with at least three one-way meshing teeth 372 fixed on both sides of the drive base 371. One side of the one-way meshing teeth 372 has an inclined structure, and an inclined push rod 373 is fixed on the top of the drive base 371. The inclined structure of the one-way meshing teeth 372 and the arc-shaped structure of the inclined push rod 373 of the inclined drive component 37 are adapted to the one-way meshing tooth groove 35 and the inclined mating block 322, thereby improving the smoothness and fit of the compensation action.

[0041] As a further implementation of this solution, the upper surface of the inclined push rod 373 has an arc-shaped structure. The inclined push rod 373 is located below the inclined mating block 322. The inclined push rod 373 and the inclined mating block 322 are in sliding engagement. By means of the inclined structure, the translation of the inclined drive member 37 is converted into the rotation of the adjustable mounting cover 32, so as to realize the adjustment of the longitudinal plane inclination and correct the inclination deviation of the Y-axis conveying end.

[0042] As a further implementation of this solution, a linear guide rail 39 is fixed in the middle of the upper surface of the drive mounting plate 332. The linear guide rail 39 is slidably connected to the inner side of the drive base 371. The slidable connection between the linear guide rail 39 and the drive base 371 provides a moving guide for the inclined drive component 37, avoids component offset during the compensation process, and ensures the straightness and accuracy of the compensation trajectory.

[0043] As a further implementation of this solution, the inner side of the conveying base 31 is provided with an installation cavity, and the top of the inner side of the installation cavity of the conveying base 31 is fixed with a connecting seat for cooperating with the hinge seat 324, so as to provide stable hinge support for the adjustable mounting cover 32.

[0044] Workflow: Assemble the X-axis linear drive module 1 and the Y-axis linear drive module 2 at a 90° angle. Install the dynamic compensation conveying mechanism 3 at the Y-axis output end to ensure that the conveying base 31 is parallel to the Y-axis. Hinge the adjustable mounting cover 32 to the conveying base 31 via the hinge seat 324 to complete the component pre-assembly.

[0045] The motion trajectory of the Y-axis linear drive module 2 is monitored in real time by external detection instruments such as laser interferometer. When the conveying end is detected to tilt downwards and deviate from the preset longitudinal plane due to gravity wear, a compensation signal is sent to the external controller. After receiving the signal, the external controller starts the precision servo motor 334.

[0046] When the Y-axis tilts due to wear caused by gravity, the external controller activates the precision servo motor 334, whose output drives the drive output shaft 333 to rotate, which in turn drives the worm-shaped push block 38 to rotate. When the worm-shaped push block 38 rotates in a nautilus-like shape, it pushes the oblique drive component 37 forward along the linear guide rail 39. The drive base 371 engages and slides with the one-way meshing tooth groove 35 of the linkage arm 34 through the one-way meshing tooth 372. During the forward movement of the oblique drive component 37, the two linkage arms 34 are limited to a certain range of opening and closing by the tension of the reset spring 36. At the same time, the oblique push rod 373 slides in cooperation with the oblique mating block 322 in an oblique structure. The oblique push rod 373 pushes the oblique mating block 322, causing the adjustable mounting cover 32 to rotate along the hinge seat 324 to the outside of the conveying base 31, thus completing the longitudinal plane tilt compensation of the Y-axis conveying end. After the adjustment is completed, the reset spring 36 resets the two linkage arms 34 for easy adjustment next time.

[0047] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A two-axis ultra-precision machine tool motion error compensation device based on laser interferometry, characterized in that: The device includes an X-axis linear drive module (1) and a Y-axis linear drive module (2), characterized in that: the output end of the X-axis linear drive module (1) is equipped with a Y-axis linear drive module (2), and the output end of the Y-axis linear drive module (2) is equipped with a dynamic compensation conveying mechanism (3); The dynamic compensation conveying mechanism (3) includes a conveying base (31), an adjustable mounting cover (32) is hinged to the upper surface of the conveying base (31), a drive support assembly (33) is installed inside the conveying base (31), and two left-right symmetrical linkage swing arms (34) are rotatably connected to the upper surface of the drive support assembly (33). A set of one-way meshing tooth grooves (35) are opened on the corresponding side of the two linkage swing arms (34). A reset spring (36) and an oblique drive member (37) are installed between the two linkage swing arms (34). The oblique drive member (37) meshes with the one-way meshing tooth grooves (35). A snail-shaped push block (38) that fits against each other is installed on one side of the oblique drive member (37). The vertical projection of the snail-shaped push block (38) is nautilus-shaped.

2. The two-axis ultra-precision machine tool motion error compensation device based on laser interferometry according to claim 1, characterized in that: The adjustable mounting cover (32) includes a mounting cover body (321), an inclined mating block (322) is fixed at the center of the lower surface of the mounting cover body (321), the lower surface of the inclined mating block (322) is inclined, buffer pads (323) are provided at the four corners of the lower surface of the mounting cover body (321), and a hinge seat (324) is integrally formed on one side of the lower surface of the mounting cover body (321).

3. The two-axis ultra-precision machine tool motion error compensation device based on laser interferometry according to claim 1, characterized in that: Each set of unidirectional meshing grooves (35) includes multiple unidirectional meshing grooves (35) arranged in a linear manner, with one side of the unidirectional meshing groove (35) having an inclined structure.

4. The two-axis ultra-precision machine tool motion error compensation device based on laser interferometry according to claim 1, characterized in that: The drive support assembly (33) includes four support columns (331), and a drive mounting plate (332) is fixed between the four support columns (331). A drive output shaft (333) is rotatably connected to one side of the drive mounting plate (332). The top end of the drive output shaft (333) is fixed to one side of the middle of the worm-shaped push block (38), and the bottom end of the drive output shaft (333) extends to the bottom of the drive mounting plate (332). The bottom end of the drive output shaft (333) is fixedly connected to the output end of the precision servo motor (334).

5. The two-axis ultra-precision machine tool motion error compensation device based on laser interferometry according to claim 4, characterized in that: The position of the support column (331) corresponds to the position of the buffer pad (323). There is a gap between the drive mounting plate (332) and the inner side of the conveying base (31). The drive mounting plate (332) and the conveying base (31) are parallel to each other. The precision servo motor (334) is fixedly connected to the lower surface of the drive mounting plate (332) through the mounting base.

6. The two-axis ultra-precision machine tool motion error compensation device based on laser interferometry according to claim 1, characterized in that: The oblique drive component (37) includes a drive base (371), on both sides of the drive base (371) are fixed at least three one-way meshing teeth (372), one side of the one-way meshing teeth (372) is inclined, and an oblique push rod (373) is fixed above the drive base (371).

7. The two-axis ultra-precision machine tool motion error compensation device based on laser interferometry according to claim 6, characterized in that: The upper surface of the inclined push rod (373) has an arc-shaped structure. The inclined push rod (373) is located below the inclined mating block (322). The inclined push rod (373) and the inclined mating block (322) are in sliding engagement.

8. The two-axis ultra-precision machine tool motion error compensation device based on laser interferometry according to claim 4, characterized in that: A linear guide rail (39) is fixed in the middle of the upper surface of the drive mounting plate (332), and the linear guide rail (39) is slidably connected to the inner side of the drive base (371).

9. The two-axis ultra-precision machine tool motion error compensation device based on laser interferometry according to claim 1, characterized in that: The inner side of the conveying base (31) is provided with an installation cavity, and the top of the inner side of the installation cavity of the conveying base (31) is fixed with a connecting seat for cooperating with the hinge seat (324).

10. The two-axis ultra-precision machine tool motion error compensation device based on laser interferometry according to claim 1, characterized in that: The angle between the X-axis linear drive module (1) and the Y-axis linear drive module (2) is 90°, and the Y-axis linear drive module (2) and the conveying base (31) are parallel to each other.

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