A ground substrate based on a cross-shaped gasket and a discharge mechanism for ozone generation

Abstract

The utility model discloses a kind of grounding substrate and discharge mechanism for ozone generation based on cross gasket, it is related to ozone production technical field, the grounding substrate includes substrate main body, the substrate main body is conductive metal body, discharge cavity for ionizing oxygen-containing gas is opened in the substrate main body, it further includes cross gasket;The cross gasket is centrally fixed in discharge cavity;One side of the discharge cavity is provided with the air inlet hole for oxygen-containing gas to enter, and air inlet hole and one of the cross gasket strip end transverse alignment, the other side of the discharge cavity is provided with the ozone outlet hole distributed with air inlet hole opposite position.This utility model relies on cross gasket to the oxygen-containing gas in the discharge cavity is evenly separated, so that airflow orderly evenly passes through entire discharge cavity, to ensure that electric field in discharge cavity is fully and evenly handled to gas, facilitate ozone uniform and efficient generation, improve ozone generation efficiency.

Description

Technical Field

[0001] This utility model relates to the field of ozone production technology, and in particular to a grounding substrate based on a cross-shaped gasket and a discharge mechanism for ozone generation. Background Technology

[0002] Ozone plays multiple roles in semiconductor manufacturing processes. For example, ozone is an excellent precursor in the ALD (Alternating Discharge) process. When depositing high-dielectric-constant materials or metal oxides, ozone provides a sufficient oxygen source to ensure accurate stoichiometry, high purity, good density, and controllable growth rate of the thin film. Therefore, ozone generation devices are required in semiconductor manufacturing processes.

[0003] Ozone generating devices generally include a discharge mechanism. The discharge mechanism discharges oxygen-containing gas to produce ozone for use in semiconductor manufacturing. Existing ozone generating discharge mechanisms consist of conductive plates, ceramic separators, ceramic pads, tungsten plates, and base plates arranged sequentially from top to bottom. The tungsten plate and base plate form the grounding electrode. The ceramic pads are generally arranged in multiple circular pieces, circumferentially distributed between the tungsten plate and the conductive plates or the dielectric plates below the conductive plates. They support the conductive plates and facilitate the formation of a discharge gap between the tungsten plate and the conductive plates, allowing the incoming oxygen-containing gas to react and generate ozone.

[0004] The shortcomings of existing ozone generation discharge mechanisms are as follows: because the existing discharge mechanisms use multiple ceramic pads as support components at the edge of the discharge gap between the conductive plate and the grounding electrode, they only serve a supporting function. After the oxygen-containing gas enters the discharge gap, it cannot be effectively guided to diffuse evenly. It is easy for most of the gas to flow directly from the gas inlet to the gas outlet through the shortest path, failing to fully benefit from the ionization effect of the electric field in the discharge gap. Furthermore, after the gas enters the discharge gap, the flow is relatively disordered and unevenly distributed due to the lack of effective guidance, thus affecting the ozone generation effect and efficiency. Utility Model Content

[0005] The purpose of this invention is to provide a grounding substrate based on a cross-shaped gasket and a discharge mechanism for ozone generation, so as to solve the technical problem in the prior art that the discharge mechanism is not convenient to make oxygen-containing gas pass through the entire discharge gap in an orderly and uniform manner, which affects the ozone generation effect.

[0006] The technical problem to be solved by this utility model can be achieved through the following technical solution: A grounding substrate based on a cross-shaped gasket includes a substrate body, the substrate body being a conductive metal body and grounded through a wire, the substrate body having a discharge cavity for ionizing oxygen-containing gas, and also including a cross-shaped gasket. The cross-shaped gasket is fixedly disposed in the discharge cavity in the center; an air inlet for oxygen-containing gas is opened on one side of the discharge cavity, and the air inlet is laterally aligned with the end of one of the ribs of the cross-shaped gasket; an ozone outlet is opened on the other side of the discharge cavity, which is opposite to the air inlet.

[0007] Preferably, the ends of the cross-shaped gasket ribs aligned with the air inlet are provided with V-shaped guide surfaces.

[0008] Preferably, the substrate body is a stainless steel structure.

[0009] Preferably, the height of the cross-shaped gasket is equal to the depth of the discharge cavity.

[0010] Preferably, the discharge cavity is a cylindrical cavity.

[0011] An ozone generation discharge mechanism includes a grounding substrate based on a cross-shaped pad.

[0012] The beneficial effects of this utility model are: 1. This utility model relies on a cross-shaped gasket to uniformly separate the oxygen-containing gas entering the discharge cavity, so that the airflow passes through the entire discharge cavity in an orderly and uniform manner, thereby ensuring that the electric field in the discharge cavity fully and uniformly processes the gas, facilitating the uniform and efficient generation of ozone and improving the ozone generation efficiency.

[0013] 2. This utility model uses a cross-shaped gasket that is directly installed in the discharge cavity, which can effectively provide stable support for the dielectric plate and conductive sheet of the discharge mechanism. Moreover, the complete cross-shaped gasket is more convenient to assemble than the multiple independent ceramic gaskets in the existing discharge mechanism. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of a grounding substrate based on a cross-shaped gasket in this utility model; Figure 2 This is a schematic diagram showing the relative positions of the substrate body, conductive sheet, and cross-shaped gasket in this utility model. Figure 3 This is a schematic diagram of the overall structure of a discharge mechanism for ozone generation in this utility model; Figure 4 This is a schematic diagram of the overall structure of the discharge mechanism after the cooling plate is assembled in this utility model.

[0015] Explanation of reference numerals in the attached figures: 1. Conductive sheet; 2. Power cord; 3. Gas supply pipe; 4. Dielectric board; 5. Substrate body; 6. Discharge cavity; 7. Cross-shaped gasket; 8. Ozone outlet; 9. Cooling plate; 10. Air inlet; 11. V-shaped guide surface; 12. Through hole. Detailed Implementation

[0016] The specific embodiments of this utility model are described in detail below, but it should be understood that the protection scope of this utility model is not limited to the specific embodiments.

[0017] Example 1

[0018] like Figures 1-2 As shown, a grounding substrate based on a cross-shaped pad is used to be installed in an ozone generation discharge mechanism used in semiconductor manufacturing processes. The grounding substrate serves as a grounding electrode, and a potential difference can be generated between it and the conductive sheet 1 of the ozone generation discharge mechanism to facilitate ozone generation through discharge. The grounding substrate includes a substrate body 5, which is a conductive metal body and grounded through a wire. A discharge cavity 6 for ionizing oxygen-containing gas is formed on the substrate body 5. Under the operation of the entire ozone generation discharge mechanism, the discharge cavity 6 generates an alternating electric field. This alternating electric field acts on the oxygen-containing gas in the discharge cavity 6, causing the oxygen molecules to ionize and form plasma. The oxygen molecules decompose into oxygen atoms, which then combine with undecomposed oxygen molecules to generate ozone. The grounding substrate also includes a cross-shaped gasket 7, which is centrally fixed inside the discharge cavity 6. The cross-shaped gasket 7 protrudes from the inside of the discharge cavity 6. The cross-shaped gasket 7 can be composed of four short ribs circumferentially distributed at equal intervals or two long ribs perpendicularly intersecting each other. The width of the cross-shaped gasket 7 is smaller than the inner diameter of the discharge cavity 6, that is, there is a certain gap between the end of each rib of the cross-shaped gasket 7 and the inner wall of the discharge cavity 6. An air inlet 10 for oxygen-containing gas to enter is opened on one side of the discharge cavity 6, and the air inlet 10 is laterally aligned with the end of one of the ribs of the cross-shaped gasket 7. An ozone outlet 8 is opened on the other side of the discharge cavity 6, which is opposite to the air inlet 10.

[0019] When oxygen-containing gas enters the discharge cavity 6 through the air inlet 10, it is directly opposite the end of one of the ribs of the cross-shaped gasket 7, which facilitates the splitting of the airflow into two. Due to the perfect symmetry of the cross structure, the two airflows will each enter the fan-shaped areas on both sides of the rib and continue to flow along the discharge cavity 6. Since the ozone outlet 8 is opposite to the air inlet 10 and is guided by the cross-shaped gasket 7, the airflow can pass through the entire internal area of ​​the discharge cavity 6 in an orderly and uniform manner, ensuring that all gases participating in the reaction have similar residence times and forming a stable and symmetrical flow field. In this way, under the action of the electric field, the sufficiency and uniformity of the gas reaction are guaranteed, which facilitates the uniform and efficient generation of ozone.

[0020] In some specific implementations of this embodiment, such as Figure 1As shown, the ends of the cross-shaped gaskets 7 aligned with the air inlet 10 are provided with V-shaped guide surfaces 11, which facilitate smoother airflow division.

[0021] It should be noted that V-shaped guide surfaces 11 can also be provided at the ends of other ribs of the cross-shaped gasket 7.

[0022] In some specific embodiments of this example, the substrate body 5 is a stainless steel structure that is conductive.

[0023] In some specific embodiments of this example, the cross-shaped pad 7 and the substrate body 5 are an integrated metal structure, which can be stamped in one go by a stamping process. This makes it easier to ensure that the cross-shaped pad 7 has uniform size and can easily support the dielectric plate 4 and conductive sheet 1 of the discharge mechanism, ensuring that the discharge cavity 6 is uniform and improving discharge efficiency and stability. Compared with the existing multiple ceramic pads, this avoids problems such as ceramic debris. In addition, the integrated cross-shaped pad 7 and the substrate body 5 are made of the same material, which also facilitates the provision of a heat dissipation path with extremely low thermal resistance.

[0024] In addition, when the cross-shaped gasket 7 is a metal structure, in order to avoid short circuit to ground of the high voltage electrode, a through hole 12 with the same shape as the cross-shaped gasket 7 is opened on the conductive plate 1 of the discharge mechanism.

[0025] In some other specific embodiments of this example, the cross-shaped gasket 7 may also be made of a non-metallic material, such as Teflon. If it is made of a non-metallic material, then there is no need to open a through hole 12 on the conductive sheet 1 of the discharge mechanism.

[0026] In some specific embodiments of this example, the height of the cross-shaped gasket 7 may be equal to the depth of the discharge cavity 6.

[0027] In some specific embodiments of this example, the discharge cavity 6 is a cylindrical cavity, which allows gas to easily fill the entire area.

[0028] Example 2

[0029] refer to Figure 3As shown, a discharge mechanism for ozone generation includes a conductive sheet 1, a dielectric plate 4, a gas supply pipe 3, and a grounding substrate as described in Embodiment 1. A power line 2 is electrically connected to one side of the conductive sheet 1, which energizes the conductive sheet 1. The dielectric plate 4 is disposed between the conductive sheet 1 and the substrate body 5 of the grounding substrate. The dielectric plate 4 is a ceramic sheet, but other insulating materials can also be selected according to actual needs. The gas supply pipe 3 is connected to the air inlet 10 and is used to transport oxygen-containing gas, allowing the oxygen-containing gas to enter the discharge cavity 6 through the air inlet 10. Here, the gas supply pipe 3 avoids the dielectric plate 4 and is connected to the edge of the substrate body 5. It should be noted that the diameter of the dielectric plate 4 is larger than the diameter of the discharge cavity 6, so that the edge of the dielectric plate 4 can be supported on the edge of the discharge cavity 6. The diameter of the conductive sheet 1 is smaller than the diameter of the discharge cavity 6, ensuring that the electric field is effectively generated in the discharge cavity 6.

[0030] The specific principle behind ozone generation is as follows: When high-voltage electricity is applied to the conductive plate 1 through the power line 2, the current cannot flow directly to the grounding electrode due to the obstruction of the dielectric plate 4. Charge accumulates on the side of the dielectric plate 4 closest to the conductive plate 1; this accumulated charge induces an opposite charge on the other side of the dielectric plate 4. This generates an alternating electric field that acts on the discharge cavity 6 filled with oxygen-containing gas. The alternating electric field ionizes the oxygen molecules in the discharge cavity 6, forming plasma. Oxygen molecules decompose into oxygen atoms, which then combine with undecomposed oxygen molecules to generate ozone. In addition, since the height of the cross-shaped gasket 7 can be equal to the depth of the discharge cavity 6, the cross-shaped gasket 7 can effectively support the dielectric plate 4 and conductive sheet 1 stacked above. Compared with the multiple independent ceramic gaskets in the existing discharge mechanism, the complete cross-shaped gasket 7 transforms the original point support into a line support with a larger range, which can provide more uniform and stable support and help prevent deformation or breakage due to uneven force.

[0031] Furthermore, the cross-shaped gasket 7 is installed within the discharge cavity 6, making assembly much simpler and faster than simultaneously aligning and placing multiple independent ceramic gaskets. This helps reduce assembly errors and improves production efficiency and product consistency.

[0032] Example 3

[0033] Based on Example 2, and referring to Figure 4To ensure the normal operation of the entire discharge mechanism, cooling plates 9 can be installed on both the upper and lower sides of the entire discharge mechanism to dissipate the heat generated during the ozone generation process. In addition, a layer of dielectric material can be installed above the conductive sheet 1, and a ceramic partition can be installed above the dielectric material. A cylindrical sleeve of matching size can also be fixed between the upper and lower cooling plates 9 to fix and limit the internal dielectric material, conductive sheet 1, grounding substrate and other components, ensuring that the whole is effectively pressed together.

[0034] To facilitate understanding of the embodiments of this solution by those skilled in the art, the working principle of this solution will now be briefly explained in conjunction with specific application scenarios: The tungsten plate and ceramic gasket of the original discharge mechanism are removed, so that the substrate body 5 is made of conductive metal material and grounded through a wire, so as to facilitate the generation of a voltage difference between it and the conductive sheet 1, and facilitate the generation of an electric field in the discharge cavity 6. At the same time, a cross-shaped gasket 7 is installed in the center of the discharge cavity 6. When the conductive sheet 1 and the dielectric plate 4 are pressed on the substrate body 5 in sequence, they can be effectively supported by the cross-shaped gasket 7. Then, oxygen-containing gas is supplied into the discharge cavity 6 through the gas supply pipe 3. The oxygen-containing gas enters the discharge cavity 6 through the air inlet 10 and energizes the conductive sheet 1. When oxygen-containing gas enters the discharge cavity 6 through the air inlet 10, it is directly opposite the end of one of the ribs of the cross-shaped gasket 7, which facilitates the splitting of the airflow into two. Due to the perfect symmetry of the cross structure, the two airflows will each enter the fan-shaped areas on both sides of the rib and continue to flow along the discharge cavity 6. Since the ozone outlet 8 is opposite to the air inlet 10 and is guided by the cross-shaped gasket 7, the airflow can pass through the entire internal area of ​​the discharge cavity 6 in an orderly and uniform manner, ensuring that all the gases participating in the reaction have similar residence times and forming a stable and symmetrical flow field. In this way, under the action of the electric field, the sufficiency and uniformity of the gas reaction are guaranteed, which facilitates the uniform and efficient generation of ozone.

[0035] The above-disclosed embodiments are only a few specific examples of the present utility model. However, the embodiments of the present utility model are not limited thereto. Any changes that can be conceived by those skilled in the art should fall within the protection scope of the present utility model.

Claims

1. A grounding substrate based on a cross-shaped gasket, comprising a substrate body (5), wherein a discharge cavity (6) for ionizing oxygen-containing gas is formed on the substrate body (5), characterized in that, It also includes a cross-shaped gasket (7); The cross-shaped gasket (7) is centrally fixed inside the discharge cavity (6); one side of the discharge cavity (6) is provided with an air inlet (10) for oxygen-containing gas to enter, and the air inlet (10) is laterally aligned with the end of one of the ribs of the cross-shaped gasket (7); the other side of the discharge cavity (6) is provided with an ozone outlet (8) opposite to the air inlet (10).

2. A grounding substrate based on a cross-shaped gasket according to claim 1, characterized in that, The cross-shaped gasket (7) aligned with the air inlet (10) has a V-shaped guide surface (11) at the end of its rib.

3. A grounding substrate based on a cross-shaped gasket according to claim 1, characterized in that, The substrate body (5) is a stainless steel structure.

4. A grounding substrate based on a cross-shaped gasket according to claim 1, characterized in that, The height of the cross-shaped gasket (7) is equal to the depth of the discharge cavity (6).

5. A grounding substrate based on a cross-shaped gasket according to claim 1, characterized in that, The discharge cavity (6) is a cylindrical cavity.

6. A discharge mechanism for ozone generation, characterized in that, The grounding substrate based on a cross-shaped pad as described in any one of claims 1 to 5.

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