Gas seal assembly and continuous dehydrogenation apparatus using the same

Abstract

The application discloses a gas seal assembly and a continuous dehydrogenation device adopting the same. The gas seal assembly comprises a gas seal body, at least one rotating joint is arranged at two ends of the gas seal body, the rotating joint comprises a containing cavity, a gas outlet and a gas inlet, the containing cavity is provided with an opening, and the containing cavity is suitable for containing a pipe; the gas outlet is close to the opening or located at the opening, and the gas outlet is communicated with the containing cavity; the gas inlet is away from the opening, the gas inlet is arranged towards the gas outlet, the gas inlet is communicated with the containing cavity, and the gas inlet is suitable for positive pressure gas input; wherein, the gas inlet and the gas outlet form a gas seal channel along the cavity wall of the containing cavity, and the corresponding cavity wall of the gas seal channel is gradually narrowed from the end close to the gas inlet to the end close to the gas outlet, so that the gas seal channel forms a converging channel in the direction from the gas inlet to the gas outlet. The continuous dehydrogenation device comprises at least one gas seal assembly. Through the above arrangement, the sealing performance of the continuous dehydrogenation device can be improved.

Description

Technical Field

[0001] This application relates to the field of polysilicon processing technology, and in particular to a continuous dehydrogenation device for the production of particulate silicon. Background Technology

[0002] Fluidized bed reactor (FBR) is a mainstream process for producing polycrystalline silicon. Compared with the traditional Siemens process, the fluidized bed process has advantages such as low energy consumption and continuous operation. In addition, the product of the fluidized bed process is granular polycrystalline silicon (referred to as "granular silicon"), which is convenient for downstream processes (such as single crystal pulling).

[0003] However, granular silicon prepared by the fluidized bed method still has problems affecting its product quality, one of the most significant being excessive hydrogen content. In the fluidized bed process, hydrogen gas is typically introduced into the reactor as a carrier gas. Because granular silicon has a large specific surface area, its surface easily adsorbs a large number of hydrogen atoms, resulting in a high hydrogen content in the final granular silicon product.

[0004] In the subsequent single-crystal pulling process, granular silicon needs to be fed into a crucible for high-temperature melting. Hydrogen adsorbed in the granular silicon will precipitate during melting due to the high temperature, producing the so-called "hydrogen jump" phenomenon, where the sudden release of hydrogen causes silicon material to splash. This phenomenon not only affects the stability of the crystal pulling process but may even lead to single-crystal growth failure, thus severely impacting production efficiency and product yield. Furthermore, relevant national standards impose strict requirements on the hydrogen content in granular silicon; therefore, dehydrogenation treatment of the granular silicon before use is an essential step.

[0005] In existing technologies, high-temperature annealing is commonly used to dehydrogenate particulate silicon, a process typically carried out in batches under vacuum (negative pressure). However, this batch processing method is incompatible with the continuous production mode of fluidized bed reactors, leading to bottlenecks in the production process and low overall production efficiency. Furthermore, to achieve a vacuum environment, the dehydrogenation equipment requires a complex vacuum system, placing extremely stringent requirements on the equipment's sealing performance, which not only increases equipment costs but also raises maintenance difficulty and operating costs.

[0006] Therefore, there is an urgent need in this field for an airtight structure that can improve the sealing performance of equipment. Utility Model Content

[0007] To address the shortcomings of existing technologies, the purpose of this application is to provide a gas sealing assembly and a continuous dehydrogenation device using the gas sealing assembly, which can improve the sealing performance of the continuous dehydrogenation device.

[0008] To achieve the above objectives, this application provides the following technical solution:

[0009] An air seal assembly includes an air seal body, with at least one rotatable joint at each end of the air seal body. Each rotatable joint includes a receiving cavity, an outlet, and an inlet. The receiving cavity has an external opening and is suitable for accommodating a pipe fitting. The outlet is located near or at the opening and communicates with the receiving cavity. The inlet is located away from the opening and faces the outlet, communicating with the receiving cavity and is suitable for positive pressure gas input. The inlet and outlet form an air seal channel along the cavity wall of the receiving cavity, and the cavity wall corresponding to the air seal channel gradually narrows from the end near the inlet to the end near the outlet, so that the air seal channel forms a converging channel from the inlet to the outlet.

[0010] Furthermore, the gas seal assembly includes a flexible conduit, the two ends of which are respectively connected to one end of the gas seal body near the air inlet and another fitting.

[0011] Furthermore, the air seal assembly includes a flexible conduit. When two air seal assemblies are provided, the accommodating cavities of the two air seal bodies each accommodate a pipe fitting, and the two ends of the flexible conduit are respectively connected to the ends of the two air seal bodies near the air inlet.

[0012] Furthermore, the gas seal assembly also includes a water-cooled jacket, which is fitted between the flexible pipe and the fitting to form a thermal shield for the flexible pipe.

[0013] Furthermore, the gas seal body also includes a water-cooling channel located inside it.

[0014] Furthermore, multiple air inlets and outlets are provided. At least a portion of the multiple air inlets extends in the extension direction of the gas seal body, so that the positive pressure gas input into the air inlet enters the gas seal channel in a vortex shape. At least a portion of the multiple air outlets extends in a direction away from the gas seal body, so that the positive pressure gas is suitable for input from the air inlet and output from the air outlet, so as to form a local dynamic positive pressure gas film in the gas seal channel.

[0015] To achieve the above objectives, this application provides the following technical solution:

[0016] A continuous dehydrogenation apparatus for the production of particulate silicon, the continuous dehydrogenation apparatus comprising at least two of the aforementioned pipe fittings and at least one of the aforementioned gas sealing components.

[0017] Furthermore, a feed quartz tube, a heating quartz tube, a cooling quartz tube, and a receiving cylinder are sequentially connected along the material conveying path. The feed quartz tube is adapted to vibrate, and the heating quartz tube and the cooling quartz tube are adapted to rotate along their respective tube axes to convey particulate silicon material. The two tubes are one of the following combinations: feed quartz tube and heating quartz tube, heating quartz tube and cooling quartz tube, or cooling quartz tube and receiving cylinder.

[0018] Furthermore, when there are two gas seal bodies, the accommodating cavities of the two gas seal bodies respectively accommodate the heating quartz tube and the cooling quartz tube.

[0019] Furthermore, at least one positioning rod group, each positioning rod group positioning an air seal assembly; the feed quartz tube extends into the heating quartz tube; the heating quartz tube extends into the cooling quartz tube; and the cooling quartz tube extends into the receiving cylinder.

[0020] The aforementioned gas seal assembly and the continuous dehydrogenation equipment using the gas seal assembly improve the sealing performance of the continuous dehydrogenation equipment by providing a gas seal body adapted to accommodate at least one pipe fitting, so that the gas seal body can seal its connection with the pipe fitting. Attached Figure Description

[0021] Figure 1 This is an overall schematic diagram of the continuous dehydrogenation equipment provided in the embodiments of this application.

[0022] Figure 2 This is an overall side view of the continuous dehydrogenation equipment provided in an embodiment of this application.

[0023] Figure 3 A cross-sectional view of a first type of gas sealing assembly provided in an embodiment of this application.

[0024] Figure 4 A cross-sectional view of a second type of gas sealing assembly provided in an embodiment of this application.

[0025] Figure 5 Examples of this application Figure 2 Sectional view along line II.

[0026] Figure 6 Examples of this application Figure 5 A magnified view of a portion of point A in the middle.

[0027] Figure 7 Examples of this application Figure 5 A magnified view of a section at point B in the middle.

[0028] Figure 8 Examples of this application Figure 5 A magnified view of a section at point C. Attached image description:

[0030] 1. Continuous dehydrogenation equipment; 10. Feed quartz tube; 20. Heating quartz tube; 30. Cooling quartz tube; 100. Gas seal assembly; 11. Receptacle; 12. Gas outlet; 13. Gas inlet; 14. Gas seal channel; 15. Opening; 16. Flexible pipe; 17. Water-cooled jacket; 110. First gas seal assembly; 111. First flexible pipe; 112. First water-cooled jacket; 113. First gas seal body; 1131. First gas seal channel; 1132. First gas inlet; 1133. First gas outlet; 1134. First positioning part; 120. Second gas seal assembly; 121. Second flexible pipe; 122. Second gas seal body; 1221. Second gas seal channel; 1222. 1223, Second air inlet; 1224, Second air outlet; 1225, Second positioning part; 123, Third air seal body; 1231, Third air seal channel; 1232, Third air inlet; 1233, Third air outlet; 1234, Third positioning part; 124, Second water cooling jacket; 125, Graphite ring; 130, Third air seal assembly; 133, Fourth air seal body; 1331, Fourth air seal channel; 1332, Fourth air inlet; 1333, Fourth air outlet; 1334, Fourth positioning part; 40, Receiving cylinder; 41, Receiving terminal; 50, Positioning rod group; 51, First positioning rod group; 52, Second positioning rod group; 53, Third positioning rod group; 54, Fourth positioning rod group. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings.

[0032] It should be noted that the terms "first," "second," "third," "fourth," etc., used in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should also be understood that the term "and / or" as used herein refers to and includes any or all possible combinations of one or more associated listed items. Similarly, the words "comprising" or "including" and similar terms mean that the element or object preceding "comprising" or "including" covers the element or object listed following "comprising" or "including" and its equivalents, and does not exclude other elements or objects. Unless otherwise expressly specified and limited, the words "connected" or "linked" and similar terms are not limited to physical or mechanical connections, and can include electrical connections, which can be direct or indirect connections, and are not limited to the only connection between the connected parties.

[0033] Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0034] like Figure 1and Figure 2 As shown, this application provides a continuous dehydrogenation device 1 for the production of granular silicon, which aims to solve the problems of low dehydrogenation efficiency, inability to produce continuously, and high equipment cost in the prior art. This continuous dehydrogenation device 1 is basically horizontal, meaning it supports the conveying of materials primarily in a horizontal direction. The direction of material movement is defined as from feed to discharge.

[0035] Specifically, the continuous dehydrogenation apparatus 1 includes at least two pipe fittings and at least one gas seal assembly 100. Each gas seal assembly 100 is adapted to accommodate the two pipe fittings and allow the two pipe fittings to rotate within the gas seal assembly 100 along its pipe axis. The gas seal assembly 100 is adapted to seal its connection with the two pipe fittings to achieve a seal for the continuous dehydrogenation apparatus 1.

[0036] More specifically, the continuous dehydrogenation equipment 1 includes a feed quartz tube 10, a heating quartz tube 20, a cooling quartz tube 30, and a receiving cylinder 40, which are sequentially connected along the material conveying path.

[0037] In this embodiment, one end of the feed quartz tube 10 is connected to the preceding particulate silicon production equipment, and the other end of the feed quartz tube 10 extends into the heating quartz tube 20, with an extension length of up to 300 mm. In some embodiments, the preceding particulate silicon production equipment may be a fluidized bed production equipment (not shown).

[0038] The feeding end of the heating quartz tube 20 is connected to and accommodates the feeding quartz tube 10, and the other end of the heating quartz tube 20 extends into the cooling quartz tube 30, with an extension length of up to 300 mm.

[0039] The feed end of the cooling quartz tube 30 is connected to and accommodates the heating quartz tube 20, while the other end of the cooling quartz tube 30 extends into the receiving cylinder 40.

[0040] One end of the receiving cylinder 40 is connected to and accommodates the cooling quartz tube 30, while the other end of the receiving cylinder 40 is open, allowing the receiving cylinder 40 to continuously discharge dehydrogenated granular silicon into packaging bags. During equipment operation, the feeding quartz tube 10 vibrates, while the heating quartz tube 20 and cooling quartz tube 30 rotate along their respective tube axes, enabling the granular silicon material to be continuously fed, dehydrogenated, cooled, and finally packaged into packaging bags along the feeding quartz tube 10, heating quartz tube 20, and cooling quartz tube 30.

[0041] In this embodiment, the air seal assembly 100 is adapted to house the feed quartz tube 10 and the heating quartz tube 20; and / or, the air seal assembly 100 is adapted to house the heating quartz tube 20 and the cooling quartz tube 30; and / or, the air seal assembly 100 is adapted to house the cooling quartz tube 30 and the receiving cylinder 40.

[0042] As an optional implementation, the continuous dehydrogenation device 1 of this application further includes at least one positioning rod group 50, each positioning rod group 50 positioning a gas seal assembly 100 so that the gas seal assembly 100 can be positioned in the continuous dehydrogenation device 1.

[0043] like Figure 3 and Figure 4 As shown, in one implementation, the gas seal assembly 100 includes a gas seal body adapted to accommodate at least one pipe fitting, such that the gas seal body can seal its connection with the pipe fitting.

[0044] Specifically, the gas seal body includes at least one rotatable joint at each end, the rotatable joint including a receiving cavity 11, an outlet 12, and an inlet 13. The receiving cavity 11 is adapted to receive a pipe fitting, allowing the pipe fitting to rotate within the receiving cavity 11 along its axis. More specifically, the receiving cavity 11 has an external opening 15, the outlet 12 is located near or at the opening 15, and the outlet 12 also communicates with the receiving cavity 11. The inlet 13 is located away from the opening 15 and towards the outlet 12, and the inlet 13 also communicates with the receiving cavity 11. In this application, the inlet 13 is adapted for outputting positive pressure gas, and the outlet 12 is adapted for outputting positive pressure gas.

[0045] For example, in this application, the positive pressure gas may be argon.

[0046] In this embodiment, the air inlet 13 and the air outlet 12 form an air-sealing channel 14 along the cavity wall of the accommodating cavity 11. The cavity wall corresponding to the air-sealing channel 14 gradually narrows from the end near the air inlet 13 to the end near the air outlet 12, so that the air-sealing channel 14 forms a converging channel in the direction from the air inlet 13 to the air outlet 12. The converging channel can minimize the pressure drop and ensure that the gas pressure at the air outlet 12 is close to the supply pressure. This allows the positive pressure gas to act directly on the joint between the air seal body and the pipe, thereby forming a strong positive pressure barrier that is higher than the internal gas pressure of the pipe. This is beneficial for effectively preventing the gas inside the pipe from diffusing outward and for driving the positive pressure gas to flow along the air-sealing channel 14 from the air inlet 13 to the air outlet 12, so as to establish a stable gas film.

[0047] Furthermore, the converging channel formed by the air seal channel 14 can also create a high-speed airflow at the air outlet 12. This high-speed airflow can prevent external impurities from seeping in and can continuously release positive pressure gas, so that the continuously released positive pressure gas can build a directional pressure gradient, thereby allowing impurities to stay away from the joint between the air seal body and the pipe fitting, thus preventing impurities from entering from the joint between the air seal body and the pipe fitting.

[0048] like Figure 3 and Figure 4As shown, in one implementation, the air seal assembly 100 includes an elastic pipe 16, with both ends of the elastic pipe 16 connected to one end of the air seal body near the air inlet 13 and another pipe fitting, respectively, so that the air seal body and the other pipe fitting can achieve a relatively small movement.

[0049] For example, when the air-sealing assembly 100 accommodates the feed quartz tube 10 and the heating quartz tube 20, the resilient conduit 16 includes a first resilient conduit 111 (see...). Figure 6 The gas seal body houses the heating quartz tube 20. One end of the first elastic pipe 111 is connected to the flange on the feed quartz tube 10. The first elastic pipe 111 is fitted outside the feed quartz tube 10, and the other end of the first elastic pipe 111 is connected to the gas seal body.

[0050] As another implementation, when there are two air seal assemblies 100, the accommodating cavities 11 of the two air seal bodies each accommodate a pipe fitting, and the two ends of the elastic pipe 16 are respectively connected to the end of the two air seal bodies near the air inlet 13, so that the two air seal bodies can achieve relatively small movements.

[0051] For example, when the gas seal assembly 100 accommodates the heating quartz tube 20 and the cooling quartz tube 30, the accommodating cavities 11 of the two gas seal bodies respectively accommodate the heating quartz tube 20 and the cooling quartz tube 30, and the elastic conduit 16 includes a second elastic conduit 121 (see...). Figure 7 The two ends of the second elastic pipe 121 are respectively connected to the two air-sealed bodies, and the second elastic pipe 121 is fitted outside the heating quartz tube 20.

[0052] In this application, the flexible conduit 16 may be a bellows.

[0053] In this embodiment, in order to achieve thermal shielding of the elastic pipe 16, the air seal assembly 100 of this application also includes a water-cooled jacket 17, which is fitted between the elastic pipe 16 and the pipe fitting, so that the heat generated by the pipe fitting will not be transferred to the elastic pipe 16.

[0054] For example, when the air-sealing assembly 100 accommodates the feed quartz tube 10 and the heating quartz tube 20, the water-cooling jacket 17 includes a first water-cooling jacket 112 (see...). Figure 6 At least a portion of the first water-cooled jacket 112 is located between the first elastic conduit 111 and the outer wall of the feed quartz tube 10, and at least a portion of the first water-cooled jacket 112 is also located between the flange on the feed quartz tube 10 and the feed end of the heating quartz tube 20, so that the first water-cooled jacket 112 can establish the thermal shielding required by the first elastic conduit 111.

[0055] For example, when the gas seal assembly 100 houses the heating quartz tube 20 and the cooling quartz tube 30, the water cooling jacket 17 includes a second water cooling jacket 124 (see...). Figure 7 At least a portion of the second water-cooling jacket 124 is located between the second elastic conduit 121 and the outer wall of the heated quartz tube 20, so that the second water-cooling jacket 124 can establish the thermal shielding required for the second elastic conduit 121.

[0056] As one implementation, the air seal body of this application also includes a water-cooling channel (not shown) located inside it, which allows cooling water to circulate.

[0057] like Figure 3 and Figure 4 As shown, in one implementation, multiple air inlets 13 and multiple air outlets 12 are provided. At least a portion of the multiple air inlets 13 extends in the extension direction of the gas seal body, so that the positive pressure gas input into the air inlet 13 is input into the gas seal channel 14 in a vortex shape. At least a portion of the multiple air outlets 12 extends in a direction away from the gas seal body, so that the positive pressure gas is suitable for input from the air inlet 13 and output from the air outlet 12, so as to form a local dynamic positive pressure gas film in the gas seal channel 14.

[0058] When the gas sealing assembly 100 is working, positive pressure gas is continuously pumped in from the inlet 13 and pumped out from the outlet 12 to form a local dynamic positive pressure vortex gas film in the gas sealing channel, generally along the gas flow direction f. This can prevent ambient gas from outside the equipment from entering the equipment, thereby achieving dynamic gas sealing.

[0059] like Figure 5 As shown, in one implementation, the air seal assembly includes a first air seal assembly 110 connecting the feed quartz tube 10 and the heating quartz tube 20, a second air seal assembly 120 connecting the heating quartz tube 20 and the cooling quartz tube 30, and a third air seal assembly 130 connecting the cooling quartz tube 30 and the receiving cylinder 40.

[0060] like Figure 6 As shown, the first air-sealing assembly 110 includes a first elastic conduit 111, a first water-cooling jacket 112, and a first air-sealing body 113. The first elastic conduit 111 is connected to a flange on the feed quartz tube 10 at its feed end, i.e., the first elastic conduit 111 is connected to the feed quartz tube 10. The first elastic conduit 111 is fitted over the feed quartz tube 10, thereby providing conditions for small relative movements between the feed quartz tube 10 and the heating quartz tube 20 while simultaneously achieving a seal between the feed end and the feed quartz tube 10 through the first air-sealing assembly 110.

[0061] The first air seal body 113 is fitted onto the feed end of the heating quartz tube 20, connecting to and accommodating at least a portion of the heating quartz tube 20. The inner wall of the first air seal body 113 gradually approaches the outer wall of the heating quartz tube 20 along the material movement direction, thereby forming a first air seal channel 1131 that gradually narrows along the material movement direction between the inner wall of the first air seal body 113 and the outer wall of the heating quartz tube 20.

[0062] When the first gas seal assembly 110 is working, positive pressure gas is continuously pumped in from the first inlet 1132 and pumped out from the first outlet 1133, forming a local dynamic positive pressure vortex gas film in the first gas seal channel 1131, generally along the gas flow direction f1. This prevents ambient gas from outside the equipment from entering the equipment, thereby achieving dynamic gas sealing. The first gas seal body 113 is also provided with an internal water cooling channel, which allows cooling water to circulate.

[0063] In some embodiments, the positioning rod assembly 50 includes a first positioning rod assembly 51, and the first air seal body 113 includes a first positioning part 1134, which is connected to the first positioning rod assembly 51.

[0064] like Figure 7 As shown, the second air-sealing assembly 120 includes a second flexible conduit 121, a second air-sealing body 122, a third air-sealing body 123, and a second water-cooling jacket 124. That is, the second air-sealing assembly 120 includes two air-sealing bodies. The second flexible conduit 121 is fitted onto the heating quartz tube 20. The second air-sealing body 122 is fitted onto the heating quartz tube 20. The third air-sealing body 123 is fitted onto the cooling quartz tube 30.

[0065] The second elastic conduit 121 is connected to the second air seal body 122 via a graphite ring 125 at the feed end and to the third air seal body 123 at the discharge end. In other words, the second elastic conduit 121 can connect the two air seal bodies (i.e., the second air seal body 122 and the third air seal body 123) of the second air seal assembly 120, thereby achieving the sealing between the second air seal body 122 and the third air seal body 123 while providing conditions for the relative small-amplitude movement between the heating quartz tube 20 and the cooling quartz tube 30.

[0066] In the extending direction of the heating quartz tube 20 and the cooling quartz tube 30, the inner wall of the second air seal body 122 gradually approaches the outer wall of the heating quartz tube 20 in a direction opposite to the material movement direction, so that the inner wall of the second air seal body 122 can form a second air seal channel 1221 that gradually narrows in a direction opposite to the material movement direction with the outer wall.

[0067] In the extending direction of the heating quartz tube 20 and the cooling quartz tube 30, the inner wall of the third air seal body 123 gradually approaches the outer wall of the cooling quartz tube 30 along the material movement direction, so that the inner wall of the third air seal body 123 can form a third air seal channel 1231 that gradually narrows along the material movement direction between the outer wall and the inner wall.

[0068] When the second gas sealing assembly 120 is working, positive pressure gas is continuously pumped in from the second inlet 1222 and pumped out from the second outlet 1223, and pumped in from the argon inlet 1232 and pumped out from the third outlet 1233, respectively, so as to form a local dynamic positive pressure vortex gas film in the second gas sealing channel 1221 generally along the gas flow direction f2, and a local dynamic positive pressure vortex gas film in the third gas sealing channel 1231 generally along the gas flow direction f3, thereby preventing ambient gas from outside the equipment from entering the equipment, and thus achieving dynamic gas sealing.

[0069] The second air seal body 122 and the third air seal body 123 are also provided with internal water cooling channels, which allow cooling water to circulate.

[0070] In some embodiments, the positioning rod group 50 includes a second positioning rod group 52 and a third positioning rod group 53, the second air seal body 122 includes a second positioning part 1224, the second positioning part 1224 is connected to the second positioning rod group 52, and the third air seal body 123 includes a third positioning part 1234, the third positioning part 1234 is connected to the third positioning rod group 53.

[0071] like Figure 8 As shown, the third air seal assembly 130 includes a fourth air seal body 133, which is connected to a flange on the receiving cylinder 40. The fourth air seal body 133 is fitted onto the cooling quartz tube 30. The inner wall of the fourth air seal body 133 gradually approaches the outer wall of the cooling quartz tube 30 in a direction opposite to the material movement direction, thereby forming a fourth air seal channel 1331 between the inner wall of the fourth air seal body 133 and the outer wall, which gradually narrows in a direction opposite to the material movement direction.

[0072] When the third gas seal assembly 130 is working, positive pressure gas is continuously pumped in from the fourth inlet 1332 and pumped out from the fourth outlet 1333, so as to form a local dynamic positive pressure vortex gas film in the fourth gas seal channel 1331 in a general direction of gas flow f4, thereby preventing ambient gas from outside the equipment from entering the equipment and thus achieving dynamic gas seal.

[0073] In some embodiments, the positioning rod assembly 50 includes a fourth positioning rod assembly 54, and the fourth air seal body 133 includes a fourth positioning part 1334, which is connected to the fourth positioning rod assembly 54.

[0074] like Figure 5 and Figure 8 As shown, the receiving cylinder 40 of the continuous dehydrogenation equipment 1 also includes a receiving terminal 41 extending in the direction of gravity, which is covered by a rubber corrugated pipe.

[0075] The continuous dehydrogenation equipment 1 provided in this application operates as follows: The particulate silicon material to be dehydrogenated, produced by the preceding process, enters the feed quartz tube 10 through a feeding system (e.g., a vibrating conveyor system). Under the sealed protection of the first gas-sealing assembly 110, the particulate silicon material is vibrated and conveyed to a continuously rotating heating quartz tube 20. Inside the heating quartz tube 20, the particulate silicon is fully heated in a high-temperature (e.g., 1300°C) and positive-pressure oxygen-free argon atmosphere, and the hydrogen adsorbed on its surface and inside is released due to the breakage of silicon-hydrogen bonds. The rotating tube ensures uniform heating and thorough dehydrogenation of the material. Subsequently, the dehydrogenated, hot particulate silicon enters a continuously rotating cooling quartz tube 30 for cooling under the sealed protection of the second gas-sealing assembly 120. Finally, the cooled particulate silicon product enters the receiving cylinder 40 under the sealed protection of the third gas-sealing assembly 130 and is packaged into a packaging bag through the receiving terminal 41. Throughout the process, each gas sealing component works in conjunction with other parts of the dehydrogenation equipment, using a dynamic positive pressure gas film to prevent ambient gases from entering the equipment, ensuring continuous material entry and exit, realizing continuous dehydrogenation of granular silicon, and solving the problem of low batch production efficiency in the background technology.

[0076] It should be understood that those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.

Claims

1. A gas-sealing assembly, characterized in that, The air seal assembly includes: An air seal body, wherein each end of the air seal body includes at least one rotational joint, the rotational joint comprising: A receiving cavity having an external opening, the receiving cavity being adapted to receive a pipe fitting; An air outlet, wherein the air outlet is located near the opening or at the opening, and the air outlet communicates with the receiving cavity; and An air inlet is located away from the opening and is positioned towards the air outlet. The air inlet is connected to the accommodating cavity and is suitable for positive pressure gas input. The air inlet and the air outlet form an air-sealed channel along the cavity wall of the accommodating cavity, and the cavity wall corresponding to the air-sealed channel gradually narrows from the end near the air inlet to the end near the air outlet, so that the air-sealed channel forms a converging channel in the direction from the air inlet to the air outlet.

2. The gas sealing assembly according to claim 1, characterized in that, The gas seal assembly includes a flexible conduit, the two ends of which are respectively connected to one end of the gas seal body near the air inlet and another pipe fitting.

3. The gas-sealing assembly according to claim 1, characterized in that, The air seal assembly includes an elastic pipe. When there are two air seal assemblies, the accommodating cavities of the two air seal bodies each accommodate a pipe fitting, and the two ends of the elastic pipe are respectively connected to the ends of the two air seal bodies near the air inlet.

4. The gas-sealing assembly according to claim 2 or 3, characterized in that, The gas seal assembly also includes a water-cooled jacket, which is fitted between the elastic pipe and the fitting to form a thermal shield for the elastic pipe.

5. The gas-sealing assembly according to claim 4, characterized in that, The gas seal body also includes a water-cooling channel located inside it.

6. The gas-sealing assembly according to claim 1, characterized in that, Multiple air inlets and multiple air outlets are provided. At least a portion of the multiple air inlets extends in the extension direction of the gas seal body, so that the positive pressure gas input into the air inlet enters the gas seal channel in a vortex shape. At least a portion of the multiple air outlets extends in a direction away from the gas seal body, so that the positive pressure gas is suitable for input from the air inlet and output from the air outlet, so as to form a local dynamic positive pressure gas film in the gas seal channel.

7. A continuous dehydrogenation apparatus for the production of granular silicon, characterized in that, include: At least two pipe fittings as described in any one of claims 1 to 6; At least one gas seal assembly as described in any one of claims 1 to 6.

8. The continuous dehydrogenation equipment according to claim 7, characterized in that, include: A feed quartz tube, a heating quartz tube, a cooling quartz tube, and a receiving cylinder are sequentially connected along the material conveying path. The feed quartz tube is adapted to vibrate, and the heating quartz tube and the cooling quartz tube are adapted to rotate along their respective tube axes to convey particulate silicon material. The two tubes are one of the following combinations: the feed quartz tube and the heating quartz tube, the heating quartz tube and the cooling quartz tube, or the cooling quartz tube and the receiving cylinder.

9. The continuous dehydrogenation equipment according to claim 8, characterized in that, include: When two gas seal bodies are provided, the accommodating cavities of the two gas seal bodies respectively accommodate the heating quartz tube and the cooling quartz tube.

10. The continuous dehydrogenation equipment according to claim 8, characterized in that, Also includes: At least one positioning rod group, each of the positioning rod groups positioning one of the air seal assemblies; the feed quartz tube extends into the heating quartz tube; the heating quartz tube extends into the cooling quartz tube; the cooling quartz tube extends into the receiving cylinder.

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