Annealing and drying device for palladium-coated wire

Abstract

The utility model discloses a kind of palladium-coated wire annealing drying devices, including the conveying mechanism, pre-cleaning mechanism, depth cleaning mechanism, flushing mechanism, drying mechanism and quality detection mechanism sequentially arranged along palladium-coated wire conveying direction, and each mechanism is linked with control system and works. Palladium-coated wire accurate conveying is realized by conveying belt with anti-slip pattern and positioning sensor in conveying mechanism;Pre-cleaning mechanism removes larger particle impurities using high-pressure air purge;Depth cleaning mechanism removes stubborn impurities and oxide layer by rotating nylon brush in cooperation with weak acid cleaning solution;Flushing mechanism flushes residual cleaning fluid with fan-shaped clean water spray head;Drying mechanism uses air heater and drying cover to dry quickly;Quality detection mechanism detects in real time and feedbacks adjustment parameter through image detection device. The device can realize efficient, accurate automatic cleaning in palladium-coated wire annealing drying process, improve product quality and production efficiency (finished product rate increases 10%), reduce production cost, and be suitable for large-scale production.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor material manufacturing technology, specifically to a palladium plating wire annealing and drying device. Background Technology

[0002] In the metal wire processing industry, palladium-plated wire is widely used in semiconductor packaging fields such as wire bonding due to its excellent conductivity, corrosion resistance, and stability. The annealing and drying process of the bonding wire is a key step in the semiconductor packaging process. This process can effectively improve the mechanical properties, electrical properties, process adaptability, and reliability of the palladium-plated wire, and has a significant impact on the quality of the final product.

[0003] However, during the annealing and drying process, the surface of palladium-plated wires easily absorbs dust and impurities from the environment. At the same time, an oxide layer may also form during the annealing process. If these contaminants are not effectively removed, they will directly affect the surface quality of the palladium-plated wires, thereby reducing their core properties such as conductivity and corrosion resistance, and ultimately affecting the reliability of semiconductor packaging products.

[0004] In existing technologies, ultrasonic cleaning before annealing is mainly used to clean palladium plating lines. However, this method has obvious drawbacks: on the one hand, the additional ultrasonic cleaning process reduces production efficiency and makes it difficult to meet the needs of large-scale production; on the other hand, the high-frequency vibration of ultrasonic cleaning can easily damage the plating layer on the surface of the palladium plating line, leading to an increased defect rate, while significantly increasing equipment operating costs and time costs.

[0005] Another type of device is used for cleaning metal wires after annealing and drying. It achieves cleaning through a water tank, guide wheels, and a simple water circulation system. The guide wheels move the wire through the water tank, and surface impurities are removed by washing. However, this device is only suitable for simple surface impurity removal and cannot handle the stubborn oxide layer formed after palladium-plated wire annealing. Furthermore, the lack of an efficient drying method after washing easily leads to residual moisture on the surface of the palladium-plated wire, causing corrosion and further reducing product quality. In addition, the washing process may also corrode the plating of the palladium-plated wire, affecting its performance stability. Utility Model Content

[0006] The purpose of this invention is to provide a palladium-plated wire annealing and drying device to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a palladium-plated wire annealing and drying apparatus, comprising:

[0008] A conveying mechanism for conveying palladium-plated wires includes a motor-driven conveyor belt with positioning sensors on both sides. The positioning sensors are electrically connected to a control system to control the start, stop, and speed of the conveyor belt.

[0009] The pre-cleaning mechanism, deep cleaning mechanism, rinsing mechanism, drying mechanism, and quality inspection mechanism are arranged sequentially along the palladium plating line conveying direction;

[0010] The pre-cleaning mechanism is a high-pressure air blowing device, which includes multiple high-pressure air nozzles evenly distributed above and below the palladium plating line;

[0011] The deep cleaning mechanism includes a rotary brush cleaning device and a cleaning fluid supply system. The rotary brush cleaning device contains multiple nylon cleaning brushes driven by a motor, and the cleaning fluid supply system sprays a weakly acidic cleaning fluid onto the surface of the palladium plating line through a nozzle.

[0012] The rinsing mechanism includes multiple fan-shaped water nozzles for rinsing off residual cleaning fluid and impurities from the surface of the palladium-plated wire.

[0013] The drying mechanism includes a hot air blower and a drying hood. The hot air blower is used to provide hot air, and the drying hood is used to guide the hot air evenly to the palladium plating line.

[0014] The quality inspection mechanism includes an image inspection device, which is electrically connected to the control system and is used to detect the surface cleanliness and scratches of the palladium-plated line and feed back signals to the control system.

[0015] Preferably, the surface of the conveyor belt is provided with anti-slip texture, and the operating speed of the conveyor belt is 1-3m / min.

[0016] Preferably, the distance between the high-pressure air nozzle and the palladium plating line is 5-10 cm, the pressure of the high-pressure air is 0.5-0.8 MPa, and the purging time is 10-20 seconds.

[0017] Preferably, the rotating brush of the cleaning device rotates at a speed of 300-500 revolutions per minute, and the cleaning time is 30-60 seconds.

[0018] Preferably, the cleaning solution has a pH value of 5-6 and its components include surfactants, corrosion inhibitors, and deionized water.

[0019] Preferably, the water pressure of the clean water nozzle is 0.3-0.5 MPa, and the rinsing time is 20-30 seconds.

[0020] Preferably, the temperature of the hot air blown out by the hot air blower is 80-100℃, and the drying time is 30-40 seconds.

[0021] Preferably, the image detection device includes a high-definition camera and image analysis software, and the control system can adjust the cleaning fluid concentration or the cleaning brush speed according to the feedback signal from the image detection device.

[0022] Preferably, it also includes a main frame for mounting the various components, and the control system can receive signals from the positioning sensor and the image detection device, and control the operating parameters of the motor, the hot air blower and each nozzle.

[0023] Compared with the prior art, the beneficial effects of this utility model are: this utility model realizes efficient, precise and automatic cleaning of palladium plating lines during the annealing and drying process, improves the quality and production efficiency of palladium plating lines, and reduces production costs. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of this utility model.

[0025] In the diagram: 1. Conveyor belt; 2. Positioning sensor; 3. High-pressure air purging device; 4. Cleaning brush; 5. Hot air blower; 6. Drying hood; 7. Image detection device. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] Please see Figure 1 This utility model provides a technical solution: a palladium plating wire annealing and drying device, comprising:

[0028] A conveying mechanism for conveying palladium-plated wires includes a conveyor belt 1 driven by a motor, and positioning sensors 2 are provided on both sides of the conveyor belt 1. The positioning sensors 2 are electrically connected to a control system to control the start, stop and speed of the conveyor belt.

[0029] The pre-cleaning mechanism, deep cleaning mechanism, rinsing mechanism, drying mechanism, and quality inspection mechanism are arranged sequentially along the palladium plating line conveying direction;

[0030] The pre-cleaning mechanism is a high-pressure air blowing device 3, which includes multiple high-pressure air nozzles evenly distributed above and below the palladium plating line;

[0031] The deep cleaning mechanism includes a rotary brush cleaning device and a cleaning liquid supply system. The rotary brush cleaning device includes multiple nylon cleaning brushes 4 driven by motors. The cleaning liquid supply system sprays a weakly acidic cleaning liquid onto the surface of the palladium plating line through a nozzle.

[0032] The rinsing mechanism includes multiple fan-shaped water nozzles for rinsing off residual cleaning fluid and impurities from the surface of the palladium-plated wire.

[0033] The drying mechanism includes a hot air blower 5 and a drying hood 6. The hot air blower is used to provide hot air, and the drying hood is used to guide the hot air evenly to the palladium plating line.

[0034] The quality inspection mechanism includes an image inspection device 7, which is electrically connected to the control system and is used to detect the surface cleanliness and scratches of the palladium-plated line and feed back the signal to the control system.

[0035] In an embodiment of this utility model, the surface of the conveyor belt is provided with anti-slip texture, and the operating speed of the conveyor belt is 1-3m / min.

[0036] In an embodiment of this utility model, the distance between the high-pressure air nozzle and the palladium plating line is 5-10 cm, the pressure of the high-pressure air is 0.5-0.8 MPa, and the purging time is 10-20 seconds.

[0037] In an embodiment of this utility model, the rotating brush of the cleaning device rotates at a speed of 300-500 revolutions per minute, and the cleaning time is 30-60 seconds.

[0038] In an embodiment of this invention, the cleaning solution has a pH value of 5-6 and its components include surfactants, corrosion inhibitors, and deionized water.

[0039] In an embodiment of this utility model, the water pressure of the clean water nozzle is 0.3-0.5 MPa, and the rinsing time is 20-30 seconds.

[0040] In an embodiment of this utility model, the temperature of the hot air blown out by the hot air blower is 80-100℃, and the drying time is 30-40 seconds.

[0041] In an embodiment of this utility model, the image detection device includes a high-definition camera and image analysis software, and the control system can adjust the cleaning fluid concentration or the cleaning brush speed according to the feedback signal from the image detection device.

[0042] In embodiments of this utility model, a main frame for mounting the various components is also included. The control system can receive signals from the positioning sensor and the image detection device, and control the operating parameters of the motor, the hot air blower, and each nozzle.

[0043] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A palladium-plated wire annealing and drying apparatus, characterized in that, include: A conveying mechanism for conveying palladium-plated wires includes a motor-driven conveyor belt with positioning sensors on both sides. The positioning sensors are electrically connected to a control system to control the start, stop, and speed of the conveyor belt. The pre-cleaning mechanism, deep cleaning mechanism, rinsing mechanism, drying mechanism, and quality inspection mechanism are arranged sequentially along the palladium plating line conveying direction; The pre-cleaning mechanism is a high-pressure air blowing device, which includes multiple high-pressure air nozzles evenly distributed above and below the palladium plating line; The deep cleaning mechanism includes a rotary brush cleaning device and a cleaning fluid supply system. The rotary brush cleaning device contains multiple nylon cleaning brushes driven by a motor, and the cleaning fluid supply system sprays a weakly acidic cleaning fluid onto the surface of the palladium plating line through a nozzle. The rinsing mechanism includes multiple fan-shaped water nozzles for rinsing off residual cleaning fluid and impurities from the surface of the palladium-plated wire. The drying mechanism includes a hot air blower and a drying hood. The hot air blower is used to provide hot air, and the drying hood is used to guide the hot air evenly to the palladium plating line. The quality inspection mechanism includes an image inspection device, which is electrically connected to the control system and is used to detect the surface cleanliness and scratches of the palladium-plated line and feed back signals to the control system.

2. The palladium plating wire annealing and drying apparatus according to claim 1, characterized in that, The conveyor belt has anti-slip textures on its surface, and the conveyor belt runs at a speed of 1-3 m / min.

3. The palladium plating wire annealing and drying apparatus according to claim 1, characterized in that, The distance between the high-pressure air nozzle and the palladium plating line is 5-10 cm, the pressure of the high-pressure air is 0.5-0.8 MPa, and the purging time is 10-20 seconds.

4. The palladium plating wire annealing and drying apparatus according to claim 1, characterized in that, The rotating brush cleaning device has a brush rotation speed of 300-500 revolutions per minute and a cleaning time of 30-60 seconds.

5. The palladium plating wire annealing and drying apparatus according to claim 1, characterized in that, The cleaning solution has a pH of 5-6 and its components include surfactants, corrosion inhibitors, and deionized water.

6. The palladium plating wire annealing and drying apparatus according to claim 1, characterized in that, The water pressure of the clean water nozzle is 0.3-0.5MPa, and the rinsing time is 20-30 seconds.

7. The palladium plating wire annealing and drying apparatus according to claim 1, characterized in that, The hot air blown out by the hot air blower has a temperature of 80-100℃ and a drying time of 30-40 seconds.

8. The palladium plating wire annealing and drying apparatus according to claim 1, characterized in that, The image detection device includes a high-definition camera and image analysis software, and the control system can adjust the cleaning fluid concentration or the cleaning brush speed according to the feedback signal from the image detection device.

9. The palladium plating wire annealing and drying apparatus according to claim 1, characterized in that, It also includes a main frame for mounting the various components. The control system can receive signals from the positioning sensor and the image detection device, and control the operating parameters of the motor, the hot air blower and each nozzle.

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