Evaporation apparatus with oxygen-free copper crucible

Abstract

The utility model discloses an oxygen -free copper crucible for evaporation equipment relates to oxygen -free copper crucible technical field. Including crucible seat, the inside of crucible seat has the mounting groove, the both sides wall in the mounting groove all are equipped with the sliding slot, the mounting groove is equipped with oxygen -free copper crucible through the sliding slot sliding assembly, the both sides of oxygen -free copper crucivor correspond the position of sliding slot all are fixed with trapezoidal slide, still be equipped with quick detach unit above trapezoidal slide, the top of mounting groove has with quick detach unit's quick detach slot of adaptation. Oxygen -free copper crucible for evaporation equipment of the utility model, through setting up the sliding cooperation structure of sliding slot and trapezoidal slide, and combining the quick detach unit of operable, make oxygen -free copper crucible can easily from the perpendicular sliding of mounting groove or slide out. When needing to replace or maintain specific crucible, operate quick detach unit to remove the locking of trapezoidal slide, can take out the crucible alone.

Description

Technical Field

[0001] This utility model relates to the technical field of oxygen-free copper crucibles, specifically an oxygen-free copper crucible for evaporation equipment. Background Technology

[0002] An oxygen-free copper crucible is a container made of oxygen-free copper, primarily used in high-temperature experiments or industrial processes such as vacuum coating, crystal growth, or metal smelting. Oxygen-free copper is a high-purity copper alloy with extremely low oxygen content (typically no more than 0.003%) and total impurities controlled at low levels (e.g., no more than 0.05%), achieving a copper purity of over 99.95%. This material undergoes deoxidation through special processes (such as smelting in a graphite crucible), thus preventing residual oxygen from affecting performance. Currently, most conventional oxygen-free copper crucibles are set individually. However, some evaporation equipment uses multiple oxygen-free copper crucibles. Therefore, a single support base is often used to support multiple oxygen-free copper crucibles simultaneously. However, since most conventional oxygen-free copper crucibles are directly fixed on the support base, it is not possible to disassemble or adjust a single oxygen-free copper crucible independently, which makes the actual application quite inconvenient. Therefore, an oxygen-free copper crucible for evaporation equipment is proposed. Utility Model Content

[0003] In view of the shortcomings of the prior art, this utility model provides an oxygen-free copper crucible for evaporation equipment, which solves the defects and deficiencies of the prior art.

[0004] To achieve the above objectives, this utility model provides the following technical solution: An oxygen-free copper crucible for an evaporation device includes a crucible base with an internal mounting groove. Sliding grooves are formed on both sides of the mounting groove. An oxygen-free copper crucible is slidably mounted on the mounting groove via these sliding grooves. Trapezoidal sliders are fixed on both sides of the oxygen-free copper crucible at positions corresponding to the sliding grooves. A quick-release unit is provided above the trapezoidal sliders. The top of the mounting groove has a quick-release groove adapted to the quick-release unit. The quick-release unit includes an upper mounting plate and a lower mounting plate arranged in parallel. A support ring is fixed between the upper mounting plate and the lower mounting plate. Abutment members are provided on both sides of the bottom of the support ring for corresponding to the trapezoidal slider.

[0005] This invention relates to an oxygen-free copper crucible for evaporation equipment. Through a sliding fit structure between a groove and a trapezoidal slider, combined with an operable quick-release unit, the oxygen-free copper crucible can easily slide vertically into or out of the mounting slot. When a specific crucible needs to be replaced or maintained, the quick-release unit is operated to release the lock on the trapezoidal slider, allowing the crucible to be removed individually without disturbing other crucibles or disassembling the entire base, greatly improving maintenance efficiency and equipment flexibility.

[0006] Preferably, the abutting member includes an annular guide groove formed at the bottom of the support ring and guide rings slidably disposed on both sides inside the annular guide groove. An abutting block is connected to the bottom of the guide ring, the end of the abutting block has an upper abutting slope, and the top of the trapezoidal slider has a lower abutting slope.

[0007] Preferably, the support ring has movable grooves on both sides of its surface, and the movable grooves are adapted to the trapezoidal slider.

[0008] Preferably, the surfaces of the upper and lower mounting plates have through grooves that are adapted to the positions corresponding to the movable groove on both sides.

[0009] Preferably, the top of the support ring is provided with a connecting block corresponding to the lower abutment block through a strip groove, and the connecting block is connected to the corresponding lower abutment block through the strip groove.

[0010] Preferably, the surfaces of the two connecting blocks are respectively connected to a first toothed ring and a second toothed ring, and a gear meshes between the first toothed ring and the second toothed ring.

[0011] Preferably, a support spring is connected to the bottom of the mounting groove, and a support plate is fixed to the end of the support spring. The support plate is in contact with the bottom of the oxygen-free copper crucible.

[0012] Preferably, a support shaft is connected to the middle of the gear, the bottom end of the support shaft is movably connected to the lower mounting plate, and the top end of the support shaft passes through the upper mounting plate to the outside.

[0013] This invention provides an oxygen-free copper crucible for evaporation equipment. It has the following beneficial effects: 1. The oxygen-free copper crucible for evaporation equipment of this utility model, through the sliding fit structure of the sliding groove and the trapezoidal slider, combined with an operable quick-release unit, allows the oxygen-free copper crucible to easily slide vertically into or out of the mounting groove. When it is necessary to replace or maintain a specific crucible, the quick-release unit is operated to release the lock on the trapezoidal slider, and the crucible can be removed individually without disturbing other crucibles or disassembling the entire base, greatly improving maintenance efficiency and equipment usage flexibility.

[0014] 2. The contact element in the quick-release unit, through the tight fit between its upper contact slope and the lower contact slope of the trapezoidal slider, provides effective radial locking force after the crucible is installed in place, preventing displacement due to vibration or thermal stress during operation and ensuring stable installation of the crucible. Simultaneously, the cooperation between the groove and the slider ensures precise guidance and circumferential positioning during crucible installation.

[0015] 3. The quick-release unit is integrated into the quick-release slot at the top of the mounting slot, with a compact structure that does not occupy too much extra space. Through the transmission design of gears and gear rings, the two abutting blocks can move synchronously in opposite directions or in opposite directions, making the locking and unlocking actions coordinated. The operation can be completed by turning only one gear (such as by using an external tool), which is simple and efficient. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of the oxygen-free copper crucible used in the evaporation equipment of this utility model; Figure 2 This is a schematic diagram of the structure of the oxygen-free copper crucible part of the evaporation equipment described in this utility model; Figure 3 This is a schematic diagram of the structure of the quick-release unit of the oxygen-free copper crucible for the evaporation equipment described in this utility model; Figure 4 This is a schematic diagram of the locked state of the quick-release unit of the oxygen-free copper crucible for the evaporation equipment described in this utility model; Figure 5 This is a structural diagram showing the disassembly of the quick-release unit of the oxygen-free copper crucible for the evaporation equipment described in this utility model; Figure 6 This is a schematic diagram of the structure of the oxygen-free copper crucible mounting groove for the evaporation equipment described in this utility model.

[0017] In the diagram, 1 is the crucible holder; 11 is the mounting groove; 12 is the slide; 13 is the oxygen-free copper crucible; 14 is the trapezoidal slider; and 15 is the quick-release groove. 110. Support spring; 111. Support plate; 140. Lower contact slope; 2. Quick-release unit; 21. Upper mounting plate; 22. Lower mounting plate; 23. Support ring; 24. Abutting component; 26. Movable groove; 27. Through groove; 28. Connecting block; 230. Slotted groove; 240. Annular guide groove; 241. Guide ring; 242. Abutting block; 243. Upper abutting slope; 280. First gear ring; 281. Second gear ring; 282. Gear; 283. Support shaft. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] Example: like Figures 1-6 As shown, this utility model embodiment provides an oxygen-free copper crucible for an evaporation device, including a crucible base 1. The crucible base 1 has an installation groove 11 inside. Both sides of the installation groove 11 are provided with sliding grooves 12. An oxygen-free copper crucible 13 is slidably mounted on the installation groove 11 through the sliding grooves 12. Trapezoidal sliders 14 are fixed on both sides of the oxygen-free copper crucible 13 at positions corresponding to the sliding grooves 12. A quick-release unit 2 is also provided above the trapezoidal sliders 14. The top of the installation groove 11 has a quick-release groove 15 adapted to the quick-release unit 2. The quick-release unit 2 includes an upper mounting plate 21 and a lower mounting plate 22 arranged in parallel. A support ring 23 is fixedly connected between the upper mounting plate 21 and the lower mounting plate 22. Abutment members 24 are provided on both sides of the bottom of the support ring 23 for corresponding to the trapezoidal slider 14.

[0020] Because the oxygen-free copper crucible for the evaporation equipment of this invention has the above structure, by setting a sliding fit structure between the sliding groove 12 and the trapezoidal slider 14, and combining it with the operable quick-release unit 2, the oxygen-free copper crucible 13 can easily slide vertically into or out of the mounting groove 11. When it is necessary to replace or maintain a specific crucible, the quick-release unit 2 is operated to release the lock on the trapezoidal slider, and the crucible can be taken out individually without disturbing other crucibles or disassembling the entire base, which greatly improves maintenance efficiency and equipment usage flexibility.

[0021] Furthermore, in another embodiment, the abutment 24 includes an annular guide groove 240 formed at the bottom of the support ring 23 and guide rings 241 slidably disposed on both sides inside the annular guide groove 240. The guide rings 241 can slide along the annular guide groove 240. An abutment block 242 is connected to the bottom of the guide ring 241. The end of the abutment block 242 has an upper abutment slope 243. The top of the trapezoidal slider 14 has a lower abutment slope 140. The upper abutment slope 243 can form a sliding abutment with the lower abutment slope 140. In this way, the trapezoidal slider 14 can slide along the height direction of the slide groove 12, thereby realizing the disassembly or locking of the oxygen-free copper crucible 13.

[0022] Because the oxygen-free copper crucible used in the evaporation equipment of this utility model has the above structure, such as Figure 4 As shown, at this time, the top of the lower abutting slope 140 abuts against the bottom of the abutting block 242. The trapezoidal slider 14, which is subjected to the abutment, will slide towards the bottom, thereby pressing the oxygen-free copper crucible into the mounting groove 11. At the same time, when the abutting block 242 is rotated in the opposite direction so that it does not abut against the lower abutting slope 140 below, the locking of the oxygen-free copper crucible can be released.

[0023] Furthermore, in another embodiment, the support ring 23 has movable grooves 26 on both sides of its surface, the movable grooves 26 being adapted to the trapezoidal slider 14, and the trapezoidal slider 14 being able to slide freely within the movable grooves 26.

[0024] The upper mounting plate 21 and the lower mounting plate 22 have through grooves 27 on both sides of their surfaces at positions corresponding to the movable groove 26. Through the cooperation of the through grooves 27 and the movable groove 26, the unlocked oxygen-free copper crucible 13 and the trapezoidal slider 114 on it can be removed.

[0025] The top of the support ring 23 is provided with a connecting block 28 corresponding to the lower abutment block 242 through a strip groove 230. The connecting block 28 is connected to the corresponding lower abutment block 242 through the strip groove 230.

[0026] Because the oxygen-free copper crucible used in the evaporation equipment of this utility model has the above structure, turning the connecting block 28 can drive the corresponding abutment block 242 below to slide, thereby realizing the adjustment of the relative position with the trapezoidal slider 14.

[0027] Furthermore, in another embodiment, the surfaces of the two connecting blocks 28 are respectively connected to a first toothed ring 280 and a second toothed ring 281, and a gear 282 meshes between the first toothed ring 280 and the second toothed ring 281.

[0028] A support spring 110 is connected to the bottom of the mounting groove 11, and a support plate 111 is fixed to the end of the support spring 110. The support plate 111 is in contact with the bottom of the oxygen-free copper crucible 13.

[0029] A support shaft 283 is connected to the middle of the gear 282. The bottom end of the support shaft 283 is movably connected to the lower mounting plate 22, and the top end of the support shaft 283 passes through the upper mounting plate 21 to the outside.

[0030] Because the oxygen-free copper crucible for the evaporation equipment of this utility model has the above structure, under the action of the support spring 110 in its natural state, the oxygen-free copper crucible 13 can move towards the top. Therefore, when it needs to be installed, the support shaft 283 needs to be rotated to drive the gear 282 to rotate. The gear 282 can mesh with the first toothed ring 280 and the second toothed ring 281 on both sides, thereby driving the corresponding connecting block 28 to move, so that the abutment ring 242 moves to one side of the through groove 27, so that the abutment block 242 will not block the through groove 27. Then, the trapezoidal slider 14 on the oxygen-free copper crucible 13 is aligned with the through groove 27 and the movable groove 26, and it is moved into the mounting groove 11 so that the trapezoidal slider 14 can be slidably assembled with the sliding groove 12. At this moment, the trapezoidal slider 14 and the upper abutment block 242 form a shape like... Figure 3 In the aforementioned state, the rotating support shaft 283 moves the abutment block 242 through the action of the gear 282. In the moving state, the upper abutment slope 243 on the surface of the abutment block 242 will gradually abut against the lower abutment slope 140. The lower abutment slope 140, which is subjected to the abutment action, will drive the trapezoidal slider 14 to move down, thereby moving the oxygen-free copper crucible 13 down and installing it in place. Finally, the lower abutment slope 140 abuts against the bottom of the abutment block 142, forming a lock on the oxygen-free copper crucible 13, thus satisfying the disassembly and assembly requirements of the oxygen-free copper crucible 13.

[0031] Unless otherwise specified, in this utility model, terms such as "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe orientation or positional relationships in this utility model are for illustrative purposes only and should not be construed as limiting this patent. For those skilled in the art, the specific meaning of the above terms can be understood in conjunction with the accompanying drawings and according to the specific circumstances.

[0032] Unless otherwise expressly specified and limited, the terms "set up," "connected," and "linked" in this utility model should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0033] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Any simple modifications or equivalent changes made to the above embodiments based on the technical essence of the present utility model shall fall within the protection scope of the present utility model.

Claims

1. An oxygen-free copper crucible for evaporation equipment, characterized in that: The system includes a crucible base (1), which has an internal mounting groove (11). The mounting groove (11) has sliding grooves (12) on both sides. An oxygen-free copper crucible (13) is slidably mounted on the mounting groove (11) through the sliding grooves (12). Trapezoidal sliders (14) are fixed on both sides of the oxygen-free copper crucible (13) at positions corresponding to the sliding grooves (12). A quick-release unit (2) is also provided above the trapezoidal sliders (14). The top of the mounting groove (11) has a quick-release groove (15) that is compatible with the quick-release unit (2). The quick-release unit (2) includes an upper mounting plate (21) and a lower mounting plate (22) arranged in parallel. A support ring (23) is fixedly connected between the upper mounting plate (21) and the lower mounting plate (22). Abutment members (24) are provided on both sides of the bottom of the support ring (23) to correspond with the trapezoidal slider (14).

2. The oxygen-free copper crucible for evaporation equipment according to claim 1, characterized in that: The abutting member (24) includes an annular guide groove (240) opened at the bottom of the support ring (23) and guide rings (241) slidably disposed on both sides inside the annular guide groove (240). The bottom of the guide ring (241) is connected to an abutting block (242). The end of the abutting block (242) has an upper abutting slope (243), and the top of the trapezoidal slider (14) has a lower abutting slope (140).

3. The oxygen-free copper crucible for evaporation equipment according to claim 2, characterized in that: The support ring (23) has movable grooves (26) on both sides of its surface, which are adapted to the trapezoidal slider (14).

4. The oxygen-free copper crucible for evaporation equipment according to claim 3, characterized in that: The upper mounting plate (21) and the lower mounting plate (22) have through grooves (27) on both sides of their surfaces at positions corresponding to the movable groove (26).

5. The oxygen-free copper crucible for an evaporation apparatus according to claim 2, characterized in that: The top of the support ring (23) is provided with a connecting block (28) corresponding to the lower abutment block (242) through a strip groove (230). The connecting block (28) is connected to the corresponding lower abutment block (242) through the strip groove (230).

6. The oxygen-free copper crucible for an evaporation apparatus according to claim 5, characterized in that: The surfaces of the two connecting blocks (28) are respectively connected to a first toothed ring (280) and a second toothed ring (281), and a gear (282) meshes between the first toothed ring (280) and the second toothed ring (281).

7. The oxygen-free copper crucible for an evaporation apparatus according to claim 1, characterized in that: The bottom of the mounting groove (11) is connected to a support spring (110), and the end of the support spring (110) is fixed with a support plate (111). The support plate (111) is in contact with the bottom of the oxygen-free copper crucible (13).

8. The oxygen-free copper crucible for an evaporation apparatus according to claim 6, characterized in that: The gear (282) is connected to a support shaft (283) in the middle. The bottom end of the support shaft (283) is movably connected to the lower mounting plate (22). The top end of the support shaft (283) passes through the upper mounting plate (21) to the outside.

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