A thermal mass flow meter for measuring dirty high humidity media
By introducing a grid assembly and a rotating mechanism into the thermal mass flow meter, the measurement problem in high humidity and impurity environments is solved, achieving accurate measurement and equipment protection.
Patent Information
- Application Number
- CN202522148976.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-11
- Publication Date
- 2026-11-03
- Estimated Expiration
- 2035-10-11
AI Technical Summary
Existing thermal gas mass flow meters are difficult to operate normally in environments with high humidity and impurities, leading to inaccurate measurement results or equipment damage.
A thermal mass flow meter with a grid assembly and a rotating mechanism was designed. The grid plate prevents high-humidity gas from directly contacting the probe, and the electric heating tube reduces humidity. Centrifugal force is used to remove impurities, ensuring heat dissipation performance.
This effectively avoids the impact of high humidity on measurements, ensuring measurement accuracy and extending equipment lifespan.
Smart Images

Figure CN224933502U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of flow meter technology, specifically a thermal mass flow meter for measuring the dirt of high humidity media. Background Technology
[0002] A thermal gas mass flow meter is an instrument that directly measures the mass flow rate of a gas based on the principle of heat conduction. It is widely used in various fields requiring precise gas measurement and control, such as semiconductor manufacturing, environmental monitoring, bio-fermentation, compressed air measurement, and scientific research experiments.
[0003] In the prior art, patent announcement number CN211651707 discloses a thermal gas mass flow meter, which includes a flow meter body with a signal input terminal, a signal output terminal and a power supply terminal. The flow meter body is connected to a connecting pipe, and an end cap is provided at the end of the connecting pipe. The connecting pipe is connected to a measuring pipe, and flanges are provided at both ends of the measuring pipe. The measuring pipe is connected to a threaded pipe.
[0004] Conventional thermal mass flow meters are primarily suitable for the accurate measurement of pure, impurity-free gaseous media. Their working principle is based on the thermal conduction effect, calculating flow rate by measuring the heat carried away by the gas. However, in practical industrial applications, measurement conditions often involve gases containing large amounts of solid particles, dust, and other impurities, or operating in high-humidity environments. In such harsh environments with high levels of impurities and humidity, traditional thermal flow meters often fail to function properly. Impurities contaminate the sensor surface, affecting heat transfer efficiency, while high humidity can lead to condensation buildup, interfering with temperature measurement accuracy, ultimately resulting in inaccurate measurement results or even equipment damage. Therefore, this paper proposes a thermal mass flow meter for measuring dirty media in high-humidity conditions. Utility Model Content
[0005] The purpose of this invention is to provide a thermal mass flow meter for measuring the dirt of high-humidity media, in order to solve the problems in the prior art.
[0006] To achieve the above objectives, this utility model provides the following technical solution: a thermal mass flow meter for measuring the dirtiness of high-humidity media, comprising a detection tube, flanges fixedly installed at both ends of the detection tube, a positioning slot provided on the detection tube, a detection probe inserted into the positioning slot, a rectifier provided inside the detection tube, and a grid assembly installed on the detection tube. The grid assembly includes a positioning sleeve fixedly installed on the detection tube, a lifting seat slidably installed inside the positioning sleeve, a grid plate provided above the lifting seat, a nut seat provided at the bottom of the positioning sleeve, a threaded rod threadedly installed on the nut seat, the upper end of the threaded rod rotatably installed on the lifting seat, and a rotating mechanism installed on the lifting seat.
[0007] Preferably, a limiting groove is provided on the inner wall of the positioning sleeve, and a sliding support foot is fixedly installed on the side wall of the lifting seat, and the sliding support foot is slidably installed in the limiting groove.
[0008] Preferably, the bottom of the lifting seat is provided with a rotating connecting seat, and the upper end of the threaded rod is rotatably installed on the bottom of the lifting seat through the rotating connecting seat.
[0009] Preferably, the lifting seat is slidably mounted on the positioning sleeve via sliding support feet, the threaded rod is mounted on the positioning sleeve via a nut seat, and the detection probe is inserted into the detection tube via a positioning slot.
[0010] Preferably, the rotating mechanism includes a motor fixedly installed inside the lifting seat and a turntable rotatably installed on the upper end of the lifting seat, with the output end of the motor fixedly installed in the middle of the turntable, the grid plate fixedly installed at the edge of the turntable, a conductive ring fixedly installed inside the lifting seat, a power cord connected to the conductive ring, a positioning base fixedly installed on the turntable, an electric heating tube fixedly installed on the positioning base, and conductive sliders fixedly installed on the power pins of the electric heating tube, with the conductive sliders in sliding contact with the conductive ring.
[0011] Preferably, the upper end of the lifting base is provided with a rotating groove, and the turntable is rotatably mounted on the lifting base through the rotating groove.
[0012] Preferably, a docking groove is provided in the middle of the turntable, and the output end of the motor is connected to the turntable through the docking groove.
[0013] Preferably, the grid plate is mounted on the outside of the detection probe by rotating it via a turntable.
[0014] Compared with the prior art, the beneficial effects of this utility model are: 1. In this application, when the threaded rod rotates and moves upward, it drives the lifting seat to move upward synchronously. During the upward movement of the lifting seat, it moves the grid plate and the heating element to the outside of the detection probe. By heating the probe with the heating element, the humidity of the environment around the detection probe can be effectively reduced, avoiding direct contact between the probe and high-humidity gas, thereby overcoming the limitations of thermal flow meters when measuring high-humidity gases.
[0015] 2. In this application, when impurities accumulate on the surface of the grating plate, a high-speed rotation can be achieved by using a motor-driven turntable. When the turntable rotates at high speed, it drives the grating plate to rotate synchronously at high speed. Under the action of centrifugal force, the accumulated impurities on the grating plate will be thrown off, thereby ensuring the heat dissipation performance of the grating plate. Attached Figure Description
[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2This is a partial structural schematic diagram of the present invention; Figure 3 This is a schematic diagram of the grille assembly of this utility model; Figure 4 This is a schematic diagram of the rotating mechanism of this utility model; Figure 5 This is a schematic diagram of the assembly of the electric heating tube of this utility model.
[0017] The markings in the diagram are: 1. Detection tube; 2. Flange; 3. Detection probe; 4. Positioning slot; 5. Rectifier; 6. Grille assembly; 601. Positioning sleeve; 602. Limiting slide; 603. Lifting seat; 604. Grille plate; 605. Sliding support; 606. Threaded rod; 607. Nut seat; 7. Rotating mechanism; 701. Motor; 702. Turntable; 703. Heating element; 704. Conductive ring; 705. Positioning base; 706. Conductive slide; 707. Power cord. Detailed Implementation
[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0019] Example 1: As Figure 1 and Figure 2 As shown, this utility model provides a technical solution for a thermal mass flow meter for measuring the dirt of high humidity media, including a detection tube 1, flanges 2 fixedly installed at both ends of the detection tube 1, a positioning slot 4 opened on the detection tube 1, a detection probe 3 inserted into the positioning slot 4, a rectifier 5 inside the detection tube 1, a grid assembly 6 installed on the detection tube 1, and a rotating mechanism 7 installed on the lifting seat 603.
[0020] Specifically, the rectifier 5 reduces the dependence of the thermal gas mass flow meter on long straight pipes, thereby stabilizing the gas state and enabling its application in complex environments with short straight pipe sections. The detection tube 1 can be installed on the pipe to be tested via the flange 2, and the detection probe 3 can be installed inside the detection tube 1 via the positioning slot 4. The cooperation between the grid assembly 6 and the rotating mechanism 7 solves the problem that thermal flow meters cannot measure high-humidity gases.
[0021] Example 2: Figure 2 and Figure 3As shown, the grid assembly 6 includes a positioning sleeve 601 fixedly installed on the detection tube 1. A lifting seat 603 is slidably installed inside the positioning sleeve 601. A grid plate 604 is provided above the lifting seat 603. A nut seat 607 is provided at the bottom of the positioning sleeve 601. A threaded rod 606 is threadedly installed on the nut seat 607, and the upper end of the threaded rod 606 is rotatably installed on the lifting seat 603. A limiting groove 602 is provided on the inner wall of the positioning sleeve 601. A sliding support 605 is fixedly installed on the side wall of the lifting seat 603, and the sliding support 605 is slidably installed in the limiting groove 602. A rotating connecting seat is provided at the bottom of the lifting seat 603, and the upper end of the threaded rod 606 is rotatably installed on the bottom of the lifting seat 603 through the rotating connecting seat.
[0022] Specifically, rotating the threaded rod 606 causes it to move upwards, which in turn moves the lifting seat 603 upwards. As the lifting seat 603 moves upwards, it moves the grid plate 604 and the heating element 703 to the outside of the detection probe 3. The heating element 703 raises its temperature, reducing the humidity around the detection probe 3 and preventing the probe from directly contacting high-humidity gas, thus solving the defect of thermal flow meters in measuring high-humidity gases. Most of the heat generated by the heating element 703 is dissipated into the medium through the grid plate 604, having minimal impact on the probe.
[0023] Example 3: Figure 4 and Figure 5 As shown, the rotating mechanism 7 includes a motor 701 fixedly installed inside the lifting base 603 and a turntable 702 rotatably installed on the upper end of the lifting base 603. The output end of the motor 701 is fixedly installed in the middle of the turntable 702. The grid plate 604 is fixedly installed at the edge of the turntable 702. A conductive ring 704 is fixedly installed inside the lifting base 603. A power line 707 is connected to the conductive ring 704. A positioning base 705 is fixedly installed on the turntable 702. An electric heating tube 703 is fixedly installed on the positioning base 705. A conductive slider 706 is fixedly installed on the power pin of the electric heating tube 703. The conductive slider 706 slides in contact with the conductive ring 704. A rotating groove is opened at the upper end of the lifting base 603. The turntable 702 is rotatably installed on the lifting base 603 through the rotating groove.
[0024] Specifically, when impurities accumulate on the grille plate 604, the motor 701 drives the turntable 702 to rotate at high speed. The high-speed rotation of the turntable 702 causes the grille plate 604 to rotate at the same speed. Under the action of centrifugal force, the impurities accumulated on the grille plate 604 are thrown off, thus ensuring the heat dissipation effect of the grille plate 604.
[0025] During the rotation of turntable 702, conductive slider 706 will rotate around conductive ring 704 to ensure power supply to heating tube 703.
[0026] Working Principle: The detection tube 1 can be installed on the pipe to be tested via flange 2, and the detection probe 3 can be installed inside the detection tube 1 via positioning slot 4. During testing, the threaded rod 606 is first rotated upwards. After the threaded rod 606 moves upwards, it drives the lifting seat 603 upwards. The lifting seat 603 then moves the grid plate 604 and the heating element 703 to the outside of the detection probe 3. The heating element 703 heats up, reducing the humidity around the detection probe 3 and preventing the probe from directly contacting high-humidity gas, thus overcoming the defect of thermal flow meters that cannot measure high-humidity gas. Most of the heat generated by the heating element 703 is dissipated into the medium through the grid plate 604, with negligible impact on the probe. When impurities accumulate on the grid plate 604, the motor 701 drives the turntable 702 to rotate at high speed. The high-speed rotation of the turntable 702 drives the grid plate 604 to rotate at high speed. Under the action of centrifugal force, the impurities accumulated on the grid plate 604 are thrown off, thus ensuring the heat dissipation effect of the grid plate 604. Furthermore, during the rotation of the turntable 702, the conductive slider 706 will rotate around the conductive ring 704 to ensure the power supply of the heating element 703.
[0027] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.
Claims
1. A thermal mass flow meter for measuring the dirt of a high-humidity medium, comprising a detection tube (1), wherein flanges (2) are fixedly installed at both ends of the detection tube (1), and a positioning slot (4) is provided on the detection tube (1), wherein a detection probe (3) is inserted into the positioning slot (4), characterized in that: The detection tube (1) is equipped with a rectifier (5), and a grid assembly (6) is installed on the detection tube (1). The grid assembly (6) includes a positioning sleeve (601) fixedly installed on the detection tube (1). A lifting seat (603) is slidably installed inside the positioning sleeve (601). A grid plate (604) is provided above the lifting seat (603). A nut seat (607) is provided at the bottom of the positioning sleeve (601). A threaded rod (606) is threaded on the nut seat (607), and the upper end of the threaded rod (606) is rotatably installed on the lifting seat (603). A rotating mechanism (7) is installed on the lifting seat (603).
2. A thermal mass flow meter for measuring the dirtiness of high-humidity media according to claim 1, characterized in that: The positioning sleeve (601) has a limiting groove (602) on its inner wall, and the lifting seat (603) has a sliding support (605) fixedly installed on its side wall, and the sliding support (605) is slidably installed in the limiting groove (602).
3. A thermal mass flow meter for measuring the dirtiness of high-humidity media according to claim 2, characterized in that: The bottom of the lifting seat (603) is provided with a rotating connecting seat, and the upper end of the threaded rod (606) is rotatably installed on the bottom of the lifting seat (603) through the rotating connecting seat.
4. A thermal mass flow meter for measuring the dirtiness of high-humidity media according to claim 3, characterized in that: The lifting seat (603) is slidably mounted on the positioning sleeve (601) via the sliding support foot (605), the threaded rod (606) is mounted on the positioning sleeve (601) via the nut seat (607), and the detection probe (3) is inserted into the detection tube (1) via the positioning slot (4).
5. A thermal mass flow meter for measuring the dirtiness of high-humidity media according to claim 4, characterized in that: The rotating mechanism (7) includes a motor (701) fixedly installed in the lifting seat (603) and a turntable (702) rotatably installed on the upper end of the lifting seat (603). The output end of the motor (701) is fixedly installed in the middle position of the turntable (702). The grid plate (604) is fixedly installed at the edge of the turntable (702). A conductive ring (704) is fixedly installed in the lifting seat (603). A power line (707) is connected to the conductive ring (704). A positioning base (705) is fixedly installed on the turntable (702). An electric heating tube (703) is fixedly installed on the positioning base (705). A conductive slider (706) is fixedly installed on the power pin of the electric heating tube (703). The conductive slider (706) slides in contact with the conductive ring (704).
6. A thermal mass flow meter for measuring the dirtiness of high-humidity media according to claim 5, characterized in that: The upper end of the lifting seat (603) is provided with a rotating groove, and the turntable (702) is rotatably mounted on the lifting seat (603) through the rotating groove.
7. A thermal mass flow meter for measuring the dirtiness of high-humidity media according to claim 6, characterized in that: The turntable (702) has a docking groove in the middle, and the output end of the motor (701) is connected to the turntable (702) through the docking groove.
8. A thermal mass flow meter for measuring the dirtiness of high-humidity media according to claim 7, characterized in that: The grid plate (604) is rotatably mounted on the outside of the detection probe (3) via a turntable (702).
