A brake mechanism of a rotary translation worktable of a full-automatic wire bonding machine

CN224936060UActive Publication Date: 2026-11-03GUANGDONG ADA SEMICON EQUIP CO LTD
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Patent Information

Application Number
CN202522557662.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-12-02
Publication Date
2026-11-03
Estimated Expiration
2035-12-02

AI Technical Summary

Technical Problem

这种抖动会直接干扰焊针与焊点的对位,导致焊线位置偏移、成型不良、弧高不一致等诸多质量问题,严重影响了封装产品的良率与可靠性

Benefits of technology

1. 通过为旋转、X轴、Y轴三个运动自由度分别独立设置功能相同的刹车单元,形成了高度模块化的结构。这不仅便于制造、装配与维护,更使得该刹车机构能够灵活适配于各种复杂的多轴运动平台;

✦ Generated by Eureka AI based on patent content.

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Abstract

The application relates to the technical field of automatic wire welding machine rotary translation workbench, and discloses a brake mechanism of a full-automatic wire welding machine rotary translation workbench, which comprises a rotary brake assembly, an X-axis translation brake assembly and a Y-axis translation brake assembly, the rotary brake assembly is arranged on the rotary part of the workbench, the X-axis translation brake assembly is arranged on the X-axis translation part of the workbench, and the Y-axis translation brake assembly is arranged on the Y-axis translation part of the workbench; the rotary brake assembly, the X-axis translation brake assembly and the Y-axis translation brake assembly each comprise at least one brake unit, the brake unit comprises a linear driving piece and a brake pad capable of being compressed by the linear driving piece. The application has the effects of quickly stopping the equipment from moving and reducing the shaking of the workbench during the working process.
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Description

Technical Field

[0001] This application relates to the field of rotary translation worktables for automatic wire bonding machines, and in particular to a braking mechanism for a rotary translation worktable of a fully automatic wire bonding machine. Background Technology

[0002] A wafer-level wire bonding machine is an advanced semiconductor device used in wafer-level packaging (WLP). Its core function is to form upright, uniformly high wires or bumps on the wafer using vertical wire bonding technology, thereby achieving high-density, high-reliability electrical interconnections between the chip and the packaging substrate or other chips. This equipment places extremely high demands on bonding precision, stability, and efficiency.

[0003] In existing wafer-level wire bonding machines, a rotary translation stage is typically used to hold and position the wafer. The basic workflow is as follows: a robotic arm first transports the wafer to the vacuum chuck of the stage and secures it; then, the wire bonding mechanism of the wire bonding machine performs wire bonding operations in a specific area of ​​the wafer; after the work in that area is completed, the rotary translation stage precisely rotates or translates by an angle and distance according to a preset program, moving the next area of ​​the wafer to be processed under the chuck for continued wire bonding. This process is repeated until the wire bonding task for the entire wafer is completed.

[0004] However, to achieve high-precision motion, existing rotary translation stages typically employ components such as crossed roller bearings and crossed roller guides. While these components possess high precision and rigidity, after prolonged use or high-speed operation, minute assembly gaps and misalignments inevitably exist between their moving parts. When the wire bonding machine operates at high frequency and high load, the resulting impacts and vibrations are transmitted to the stage, causing continuous, minute vibrations due to these misalignments. This vibration directly interferes with the alignment of the solder pins and solder joints, leading to numerous quality problems such as wire misalignment, poor forming, and inconsistent arc height, severely impacting the yield and reliability of packaged products. Utility Model Content

[0005] In order to quickly stop the equipment and reduce the vibration of the worktable during operation, this application provides a braking mechanism for the rotary translation worktable of a fully automatic wire bonding machine.

[0006] The braking mechanism of the rotary translation worktable of the fully automatic wire bonding machine provided in this application adopts the following technical solution: A braking mechanism for a rotary translation worktable of a fully automatic wire bonding machine includes a rotary brake assembly, an X-axis translation brake assembly, and a Y-axis translation brake assembly, wherein: The rotary brake assembly is disposed on the rotating part of the worktable, the X-axis translation brake assembly is disposed on the X-axis translation part of the worktable, and the Y-axis translation brake assembly is disposed on the Y-axis translation part of the worktable. The rotary brake assembly, the X-axis translation brake assembly, and the Y-axis translation brake assembly each include at least one brake unit, and the brake unit includes a linear drive member and a brake pad that can be pressed by the linear drive member.

[0007] Optionally, the linear drive is a pneumatic drive.

[0008] Optionally, the pneumatic drive component includes a cylinder block, a cylinder head, and a piston, wherein: The cylinder head is located at one end of the cylinder body and is provided with a nozzle for introducing compressed gas and a pressure distribution structure. The piston is axially movable within the cylinder body; The pressure distribution structure directs gas to the pressure-receiving surface of the piston to drive the piston to press against the brake pads.

[0009] Optionally, the air pressure distribution structure is a guide groove provided on the cylinder head, and the guide groove is provided on the side surface of the cylinder head facing the piston.

[0010] Optionally, a sealing ring is provided between the piston and the cylinder.

[0011] Optionally, a pressure relief gap is formed between the lower end of the piston and the inner wall of the cylinder.

[0012] Optionally, the brake pads are made of an elastic material.

[0013] Optionally, the pneumatic drive unit further includes an adjustment seat, which has an elongated slot for adjusting the installation position of the cylinder.

[0014] Optionally, the pneumatic drive unit is provided with a plurality of pistons, and the pneumatic distribution structure guides gas to the pressure-receiving surfaces of the plurality of pistons.

[0015] Optionally, the rotary brake assembly includes a plurality of the brake units and is arranged around the rotation axis of the worktable.

[0016] In summary, this application includes at least one of the following beneficial technical effects: 1. By independently setting up functionally identical braking units for the three degrees of freedom of motion—rotation, X-axis, and Y-axis—a highly modular structure is formed. This not only facilitates manufacturing, assembly, and maintenance, but also allows the braking mechanism to be flexibly adapted to various complex multi-axis motion platforms; 2. The control system adopts a timing logic of stopping the motor first and then tightening the brake, and releasing the brake first and then starting the motor. Combined with the method of pressing multiple pistons in sequence from near to far, the concentrated braking force is decomposed into a progressive action sequence, which greatly reduces braking impact and mechanism vibration, and keeps the worktable absolutely still at the moment of wire bonding, thus improving the wire bonding accuracy and equipment stability. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of an embodiment of this application.

[0018] Figure 2 This is a schematic diagram illustrating the structure of the rotary table assembly in the embodiments of this application.

[0019] Figure 3 This is a schematic diagram illustrating the structure of the X-axis moving component in the embodiments of this application.

[0020] Figure 4 This is a schematic diagram illustrating the structure of the Y-axis moving component in the embodiments of this application.

[0021] Figure 5 This is a schematic diagram illustrating the structure of the pneumatic drive component in the embodiments of this application.

[0022] Figure 6 This is a schematic diagram illustrating the position of the long slot on the adjusting seat in an embodiment of this application.

[0023] Figure 7 This is a schematic diagram illustrating the relative positions of the cylinder head and the guide groove in an embodiment of this application.

[0024] Explanation of reference numerals in the attached figures: 1. Y-axis moving assembly; 11. Y-axis base plate; 12. Y-axis guide rail; 13. Y-axis guide rail slider; 2. X-axis moving assembly; 21. X-axis base plate; 22. X-axis guide rail; 23. X-axis guide rail slider; 24. X-axis horizontal plate; 3. Rotary table assembly; 31. Rotary base; 32. Rotary table; 33. Rotary drive motor; 34. Belt; 4. Worktable assembly; 5. Rotary brake assembly; 6. X-axis translation brake assembly; 7. Y-axis translation brake assembly; 8. Brake unit; 9. Pneumatic drive component; 91. Cylinder block; 911. Air nozzle; 92. Cylinder head; 921. Guide groove; 93. Piston; 931. Sealing ring; 94. Adjusting seat; 941. Long slot hole; 10. Brake pad. Detailed Implementation

[0025] The following is in conjunction with the appendix Figures 1-7 This application will be described in further detail.

[0026] This application discloses a braking mechanism for a fully automatic wire bonding machine's rotary translation worktable.

[0027] A fully automatic wire bonding machine rotary translation worktable includes a Y-axis moving assembly 1, an X-axis moving assembly 2, a rotary table assembly 3, and a worktable assembly 4, which are installed in a bottom-to-top direction.

[0028] The Y-axis moving assembly 1 includes a Y-axis base plate 11, a Y-axis guide rail 12, and a Y-axis guide rail slider 13. The Y-axis base plate 11 is positioned at a predetermined location, the Y-axis guide rail 12 is fixedly mounted on the top of the Y-axis base plate 11, and the Y-axis guide rail slider 13 is mounted on the Y-axis guide rail 12 and slides in cooperation with the Y-axis guide rail 12.

[0029] X-axis moving assembly 2 includes an X-axis base plate 21, an X-axis guide rail 22, an X-axis guide rail slider 23, and an X-axis horizontal plate 24. The X-axis base plate 21 is mounted on the Y-axis guide rail slider 13 and moves with the Y-axis guide rail slider 13 in the Y-axis direction. The X-axis guide rail 22 is mounted on top of the X-axis base plate 21, and the X-axis guide rail slider 23 is mounted on the X-axis guide rail 22 and slides in cooperation with it. The X-axis horizontal plate 24 is mounted on the X-axis guide rail slider 23 and moves with the X-axis guide rail slider 23 in the X-axis direction. X-axis moving assembly 2 moves along the X-axis direction by driving a corresponding ball screw via an independent motor. Y-axis moving assembly 1 moves along the Y-axis direction by driving a corresponding ball screw via an independent motor.

[0030] The rotary table assembly 3 includes a rotating base 31, a rotary table 32, a rotary drive motor 33, and a belt 34. The rotating base 31 is mounted on the X-axis horizontal plate 24 and moves with the X-axis horizontal plate 24 in the X-axis direction. The rotary table 32 is mounted on the rotating base 31 and rotatably engages with the rotating base 31. The rotary drive motor 33 is fixedly mounted on the rotating base 31. The rotary drive motor 33 and the rotary table 32 are connected by a belt 34. The worktable assembly 4 is mounted on the rotary table 32.

[0031] A braking mechanism for a fully automatic wire bonding machine's rotary translation worktable includes a rotary brake assembly 5, an X-axis translation brake assembly 6, and a Y-axis translation brake assembly 7, each corresponding to different degrees of freedom of the worktable's motion. The rotary brake assembly 5 is located in the rotary motion portion of the worktable, the X-axis translation brake assembly 6 is located in the X-axis linear translation portion of the worktable, and the Y-axis translation brake assembly 7 is located in the Y-axis linear translation portion of the worktable. Each of the three brake assemblies includes at least one brake unit 8. Each brake unit 8 includes a linear drive component that provides power and a brake pad 10 that can be directly pressed by the linear drive component.

[0032] When the worktable needs to be positioned and locked, the control system first stops the drive motor, allowing the worktable to achieve initial positioning via the lead screw transmission system. Then, the control system sends commands to the brake units 8 corresponding to each direction of movement as needed. Upon receiving the signal, the linear drive unit extends its output end and presses against the brake pad 10. The brake pad 10 engages with the moving parts, generating braking force and completely locking the worktable in the target position, eliminating any slight displacement or residual vibration caused by transmission chain backlash. When re-movement is required, the linear drive unit retracts, releasing the pressure on the brake pad 10 and completely separating it from the moving parts. The control system then restarts the drive motor, resuming the precise movement of the worktable. This timing control mechanism effectively suppresses and eliminates micro-vibrations caused by transmission system misalignment, ensuring that the worktable remains absolutely stationary and stable during high-precision wire welding operations.

[0033] The rotary brake pad 10 in the direction of rotation is installed at the bottom of the rotary table 32, the X-axis brake pad 10 in the X-axis direction is installed at the bottom of the X-axis horizontal plate 24 through the X-axis brake pad 10 seat, and the Y-axis brake pad 10 in the Y-axis direction is installed at the bottom of the X-axis base plate 21 through the Y-axis brake pad 10 seat.

[0034] The linear drive unit is a pneumatic drive unit 9. The pneumatic drive unit 9 includes a cylinder body 91, a cylinder head 92, and a piston 93. The cylinder head 92 is located at one end of the cylinder body 91 and is provided with a nozzle 911 for receiving compressed gas and a pneumatic distribution structure responsible for gas distribution. The piston 93 is axially movable within the internal cavity of the cylinder body 91.

[0035] When compressed gas enters through the nozzle 911, it is guided by the pressure distribution structure to the entire pressure-bearing surface of the piston 93. The gas pressure generates an axial driving force on the pressure-bearing surface, pushing the piston 93 to move linearly towards the brake pad 10, ultimately converting the gas pressure energy into mechanical clamping force.

[0036] With a continuous supply of air pressure, the piston 93 maintains a stable pressure on the brake pads 10, thereby maintaining the braking effect. When the brake is released, the air valve 911 stops supplying air and releases pressure.

[0037] The air pressure distribution structure is a guide groove 921 machined on the cylinder head 92, and the guide groove 921 is located on the end face of the cylinder head 92 facing the piston 93.

[0038] When compressed gas enters through the nozzle 911, it first enters the guide groove 921 area. The guide groove 921 uses its preset groove shape to rapidly diffuse the incoming gas and guide it to the entire pressure-bearing surface of one or more pistons 93, ensuring that the gas pressure can act on the piston 93 evenly and efficiently, thereby converting the gas energy into mechanical energy that drives the piston 93 to move to the maximum extent.

[0039] A sealing ring 931 is provided between the piston 93 and the cylinder 91. The sealing ring 931 prevents gas from leaking downwards and ensures that the gas pressure acts quickly and evenly on the entire pressure surface of the piston 93, pushing it to move downwards.

[0040] A pressure relief gap is formed between the lower end of piston 93 and the inner wall of cylinder 91. When compressed gas pushes piston 93 downward, the air volume in its back pressure chamber decreases rapidly, and the pressure increases. At this time, the compressed air is continuously and smoothly discharged to the atmosphere outside cylinder 91 through the pressure relief gap.

[0041] This ensures that the pressure in the back pressure chamber does not create significant resistance during the downward movement of piston 93, allowing piston 93 to complete the entire working stroke without any delay under air pressure drive, until it firmly presses against brake pad 10.

[0042] The brake pad 10 is made of an elastic material with good rebound properties. In this embodiment, the brake pad 10 uses an elastic metal part to ensure that it can rebound quickly and completely after frequent small deformations, so as to realize the rapid reset of the brake pad 10 and avoid dragging with moving parts.

[0043] The pneumatic drive unit 9 also includes an adjustment seat 94, which is fixedly mounted on a moving part corresponding to its function. For the rotary brake assembly 5, the adjustment seat 94 of the pneumatic drive unit 9 is fixedly mounted on the platform base that enables the rotary motion. For the X-axis translation brake assembly 6, the adjustment seat 94 of the pneumatic drive unit 9 is fixedly mounted on the moving part that enables the X-axis translation. For the Y-axis translation brake assembly 7, the adjustment seat 94 of the pneumatic drive unit 9 is fixedly mounted on the moving part that enables the Y-axis translation.

[0044] The adjusting seat 94 has an elongated slot 941 for adjusting the mounting position of the cylinder 91. During assembly or maintenance, the operator first loosens the fasteners, such as bolts, that pass through the slot 941. Then, the cylinder 91 can be moved along the length of the slot 941 to precisely adjust the initial position of the cylinder 91 and its internal piston 93 relative to the brake pad 10. Once the position is optimal, the fasteners are tightened, fixing the relative position of the cylinder 91 and the adjusting seat 94, thereby achieving precise calibration of the brake unit 8.

[0045] The cylinder 91 has multiple pistons 93 integrated inside. These pistons 93 are arranged in parallel, and the air pressure distribution structure is in fluid communication with the pressure-bearing surfaces of all pistons 93, so as to uniformly guide the compressed gas into the cylinder and apply it to the pressure-bearing surfaces of the multiple pistons 93.

[0046] The multiple pistons 93 do not move in complete synchronization. Instead, the gas flows sequentially to the pressure-bearing surfaces of each piston 93 in order from near to far through the gas pressure distribution structure.

[0047] When the braking command is issued, compressed gas enters the air pressure distribution structure from the valve 911. The gas first reaches and acts on the pressure-receiving surface of the nearest piston 93, which is the first to activate and begin to compress the brake pads 10. Subsequently, the gas continues to flow forward, reaching the pressure-receiving surfaces of the second, third, and so on, until the last piston 93, driving them to engage in operation in this sequence.

[0048] The entire clamping process begins at an initial contact point and gradually expands to the entire braking area. When the brakes are released, all pistons 93 simultaneously release pressure and reset. This gradual clamping method makes the braking process smoother and gentler.

[0049] The rotary brake assembly 5 includes multiple brake units 8, which are arranged around the rotation axis of the worktable. The frictional braking force generated by each brake unit 8 forms a braking torque relative to the rotation axis. Through multi-point synchronous braking, efficient and smooth braking of the rotational motion is achieved without the need for a single huge force, which significantly reduces braking impact.

[0050] The implementation principle of the braking mechanism of the rotary translation worktable of the fully automatic wire bonding machine according to the embodiment of this application is as follows: When the rotary translation worktable of the fully automatic wire bonding machine needs to be locked, the control system first controls the drive motor to stop running, so that the worktable achieves preliminary positioning through the transmission system; then, the control system sends a command to the corresponding braking unit 8, and compressed air enters the guide groove 921 on the end face of the cylinder head 92 through the air nozzle 911, and is evenly diffused to the pressure surface of multiple pistons 93 arranged in parallel. The gas pushes each piston 93 downward in sequence from near to far. The air in the back pressure chamber is smoothly discharged through the pressure relief gap. The output end of the piston 93 gradually presses the elastic metal brake pad 10 against the rotating platform, X-axis or Y-axis moving parts. Through the friction braking force and braking torque generated at multiple points, the residual vibration of the transmission system is eliminated, so that the worktable reaches and maintains an absolutely stationary state; when movement needs to be resumed, the air nozzle 911 stops supplying air and releases pressure, all pistons 93 are synchronously reset, the brake pad 10 elastically rebounds and separates from the moving parts, and then the control system restarts the drive motor, and the worktable resumes precise movement.

[0051] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A braking mechanism for a rotating and translating worktable of a fully automatic wire bonding machine, characterized in that: Includes a rotary brake assembly, an X-axis translation brake assembly, and a Y-axis translation brake assembly, wherein: The rotary brake assembly is disposed on the rotating part of the worktable, the X-axis translation brake assembly is disposed on the X-axis translation part of the worktable, and the Y-axis translation brake assembly is disposed on the Y-axis translation part of the worktable. The rotary brake assembly, the X-axis translation brake assembly, and the Y-axis translation brake assembly each include at least one brake unit, and the brake unit includes a linear drive member and a brake pad that can be pressed by the linear drive member.

2. The braking mechanism of the rotary translation worktable of a fully automatic wire bonding machine according to claim 1, characterized in that: The linear drive is a pneumatic drive.

3. The braking mechanism of the rotary translation worktable of a fully automatic wire bonding machine according to claim 2, characterized in that: The pneumatic drive component includes a cylinder block, a cylinder head, and a piston, wherein: The cylinder head is located at one end of the cylinder body and is provided with a nozzle for introducing compressed gas and a pressure distribution structure. The piston is axially movable within the cylinder body; The pressure distribution structure directs gas to the pressure-receiving surface of the piston to drive the piston to press against the brake pads.

4. The braking mechanism of the rotary translation worktable of a fully automatic wire bonding machine according to claim 3, characterized in that: The air pressure distribution structure is a guide groove provided on the cylinder head, and the guide groove is provided on the side surface of the cylinder head facing the piston.

5. The braking mechanism of the rotary translation worktable of a fully automatic wire bonding machine according to claim 3, characterized in that: A sealing ring is provided between the piston and the cylinder.

6. The braking mechanism of the rotary translation worktable of a fully automatic wire bonding machine according to claim 3, characterized in that: A pressure relief gap is formed between the lower end of the piston and the inner wall of the cylinder.

7. The braking mechanism of the rotary translation worktable of a fully automatic wire bonding machine according to claim 1, characterized in that: The brake pads are made of an elastic material.

8. The braking mechanism of the rotary translation worktable of a fully automatic wire bonding machine according to claim 3, characterized in that: The pneumatic drive also includes an adjustment seat, which has an elongated slot for adjusting the installation position of the cylinder.

9. The braking mechanism of the rotary translation worktable of a fully automatic wire bonding machine according to claim 3, characterized in that: The pneumatic drive unit is provided with a plurality of pistons, and the pneumatic distribution structure guides gas to the pressure-receiving surfaces of the plurality of pistons.

10. The braking mechanism of the rotary translation worktable of a fully automatic wire bonding machine according to claim 1, characterized in that: The rotary brake assembly includes a plurality of brake units and is arranged around the rotation axis of the worktable.