Coating equipment (ALD)
CN309064868SActive Publication Date: 2025-01-10SOOCHOW JINGTONG INTEGRATED CIRCUIT CO LTD
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Patent Information
- Application Number
- CN202430222837.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-19
- Publication Date
- 2025-01-10
- Estimated Expiration
- 2039-04-19
Smart Images
Figure 000007_ABST
Abstract
1. The name of the product of this design: coating equipment (ALD). 2. The purpose of this design product: to deposit a coating on a wafer at high temperature. 3. The design key point of this appearance design product lies in the shape. 4. The picture or photo that best illustrates the design points: Stereoscopic diagram 1.
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