Calibration substrate
CN309161896SActive Publication Date: 2025-03-11ASM IP HLDG BV
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Patent Information
- Application Number
- CN202430486823.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Priority Date
- 2024-02-05
- Filing Date
- 2024-08-02
- Publication Date
- 2025-03-11
- Estimated Expiration
- 2039-08-02
Smart Images
Figure 000001_ABST
Abstract
1. The name of the product of this design: calibration substrate. 2. Purpose of the product with this design: The product with this design is used to calibrate robots within semiconductor manufacturing tools, and replaces the actual substrate for testing during the calibration process. 3. The design key point of this appearance design product lies in the shape. 4. The picture or photo that best illustrates the design points: Stereoscopic diagram 1.
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