Copper substrate oxidation furnace
CN309226565SActive Publication Date: 2025-04-08GU RUI SEMICONDUCTOR EQUIPMENT (SHENZHEN) CO LTD
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Patent Information
- Application Number
- CN202430408072.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-01
- Publication Date
- 2025-04-08
- Estimated Expiration
- 2039-07-01
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Figure 000023_ABST
Abstract
1. The name of the product of this design: copper substrate oxidation furnace. 2. Purpose of this design product: used for pre-oxidation process of copper substrate. 3. The design key point of this appearance design product lies in the shape. 4. The picture or photo that best illustrates the design points: three-dimensional diagram of the combined state. 5. Other situations that need explanation Component description: This design product is a component design, in which component 1 is the main unit and component 2 is the vacuum pump.
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