Main body of a cleaning brush for a semiconductor manufacturing apparatus
CN309408393SActive Publication Date: 2025-07-29TOKYO ELECTRON LTD
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Patent Information
- Application Number
- CN202430651182.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Priority Date
- 2024-04-30
- Filing Date
- 2024-10-16
- Publication Date
- 2025-07-29
- Estimated Expiration
- 2039-10-16
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Figure 000005_ABST
Abstract
1. Name of the Design Product: Main Body of Cleaning Brush for Semiconductor Manufacturing Equipment. 2. Use of the Design Product: The whole product is a cleaning brush for removing protrusions and / or deposits on the back surface of a substrate, and the local part is the main body of the cleaning brush. 3. Design Key Points of the Design Product: Lies in the shape of the part for which protection is claimed. 4. Picture or Photograph Most Illustrating the Design Key Points: Perspective View. 5. The left view is symmetrical to the right view, so the left view is omitted; the bottom view is symmetrical to the top view, so the bottom view is omitted. 6. Other Circumstances Requiring Explanation: Other Explanation: This design claims protection for a partial design. The part represented by the solid line is the part for which protection is claimed, and the part represented by the dashed line is the part for which protection is not claimed.
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