Threaded nozzle insert
CN309565349SActive Publication Date: 2025-10-28LAM RES CORP
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Patent Information
- Application Number
- CN202430657591.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Priority Date
- 2022-12-09
- Filing Date
- 2023-06-07
- Publication Date
- 2025-10-28
- Estimated Expiration
- 2038-06-07
Smart Images
Figure 000007_ABST
Abstract
1. The name of this design product: threaded nozzle insert. 2. Purpose of this design product: This design product is used in semiconductor processing tools used for processing semiconductor substrates or wafers, and can be screwed into the underside of the tool's nozzle and is used to flow processing gas to the semiconductor wafer. 3. The key design points of this design product lie in the shape, pattern and their combination. 4. The image or photograph that best illustrates the design's key points: a 3D model.
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