Multi-channel epitaxial growth in-situ monitoring apparatus controller

Abstract

1. The name of the design product: multi-channel epitaxial growth in-situ detection equipment controller. 2. The use of the design product: used for collecting process parameter information in the process of semiconductor epitaxial growth and processing and outputting detection signals. 3. The design points of the design product: the combination of shape and pattern. 4. The picture or photo that best shows the design points: perspective view.

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