carrier ring

CN309639796SActive Publication Date: 2025-11-28LAM RES CORP
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Patent Information

Application Number
CN202430780894.5
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Priority Date
2022-05-13
Filing Date
2022-11-14
Publication Date
2025-11-28
Estimated Expiration
2037-11-14

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Abstract

1. Name of the designed product: load ring. 2. Use of the designed product: used in semiconductor processing device, specifically used to support semiconductor substrate (or wafer) during substrate processing. 3. Design points of the designed product: in the shape of the product. 4. Picture or photo that best shows the design points: perspective view 1.
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