top of the main tube of the reactor tube

Abstract

1. Name of the design product: top of main tube of reaction tube 2. Use of the design product: The product is a reaction tube, which is housed inside a substrate in a multi-stage arrangement in a substrate processing apparatus and is processed under a prescribed gas atmosphere. The portion shown in solid line is the top of the main tube of the reaction tube. 3. Design points of the design product: The shape of the portion shown in solid line. 4. Picture or photograph best indicating the design points: perspective view 5. Other matters to be stated Other matters to be stated: The portion shown in solid line in the view is the portion intended to be protected, and the dashed line is a boundary line for distinguishing the portion intended to be protected from other portions.

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