Condensing lens for wafer heating

CN309754960SActive Publication Date: 2026-01-27TOKYO ELECTRON LTD
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Patent Information

Application Number
CN202530182137.2
Authority / Receiving Office
CN · China
Patent Type
Designs(China)
Current Assignee / Owner
Priority Date
2024-10-21
Filing Date
2025-04-08
Publication Date
2026-01-27
Estimated Expiration
2040-04-08

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Abstract

1. Name of the product in this design: Concentrating lens for wafer heating. 2. Application of the product of this design: The products of Design 1 and Design 2 are used as focusing lenses for heating wafers. 3. The key design feature of this product is its shape. 4. The picture or photo that best illustrates the key design points: Design 1 3D diagram 1. 5. Design 1 is designated as the basic design. 6. Other situations requiring explanation: This item is a focusing lens used in a heater for heating wafers to make the secondary light shield directional, thereby improving the heating efficiency of the wafer. This item, as shown in the "Usage Reference Diagram," is used between a substrate containing a chip and heater wires. This item is completely transparent. Figure 2 is a diagram showing the overall state as an opaque object. The rear view is symmetrically represented to the front view, and the left view is symmetrically represented to the right view; therefore, the rear view and left view are omitted. Design 1 is used as a single unit.
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