Condensing lens for wafer heating
CN309754960SActive Publication Date: 2026-01-27TOKYO ELECTRON LTD
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Patent Information
- Application Number
- CN202530182137.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Priority Date
- 2024-10-21
- Filing Date
- 2025-04-08
- Publication Date
- 2026-01-27
- Estimated Expiration
- 2040-04-08
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Figure 000005_ABST
Abstract
1. Name of the product in this design: Concentrating lens for wafer heating. 2. Application of the product of this design: The products of Design 1 and Design 2 are used as focusing lenses for heating wafers. 3. The key design feature of this product is its shape. 4. The picture or photo that best illustrates the key design points: Design 1 3D diagram 1. 5. Design 1 is designated as the basic design. 6. Other situations requiring explanation: This item is a focusing lens used in a heater for heating wafers to make the secondary light shield directional, thereby improving the heating efficiency of the wafer. This item, as shown in the "Usage Reference Diagram," is used between a substrate containing a chip and heater wires. This item is completely transparent. Figure 2 is a diagram showing the overall state as an opaque object. The rear view is symmetrically represented to the front view, and the left view is symmetrically represented to the right view; therefore, the rear view and left view are omitted. Design 1 is used as a single unit.
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