air ring shroud

Abstract

1. The name of the design product: gas ring cover. 2. The use of the design product: set downstream of the gas introduction part of semiconductor manufacturing devices and the like, used for placing the rectification plate for rectifying the gas and covering the inner wall of the gas ring supporting the gas introduction part. 3. The design points of the design product: in shape. 4. The picture or photo that best shows the design points: perspective view 1. 5. In the reference diagram in use, 1 is the gas introduction part, 2 is the rectification plate, 3 is the product, and 4 is the gas ring.

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