Radio frequency generator (RFP 10013)
CN309869009SActive Publication Date: 2026-03-24SHANGHAI IAN AI SEMICON TECH CO LTD
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Designs(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-05
- Publication Date
- 2026-03-24
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Figure 000001_ABST
Abstract
1. The name of the design product: Radio Frequency Generator (RFP10013). 2. The use of the design product: The design product is mainly used for generating plasma to realize key processes such as etching, thin film deposition, cleaning, and other semiconductor applications. 3. The design points of the design product: in shape. 4. The picture or photo that best indicates the design points: perspective view.
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