Particle beam processing device

Abstract

Particle beam processing device (100) with a particle beam generator (10), which a housing (11) comprising a first housing section (12) rotatably mounted about a first axis of rotation (D1) on the particle beam processing device (100), and a second housing section (14) comprising a first end and a second end opposite the first end, and being rotatably mounted at the first end about a second axis of rotation (D2) on the first housing section (12) and being vacuum-tightly connected to it, and a beam generating device (9) which is installed in the second housing section (14) and adapted to generate a particle beam along a beam axis (S1), in which the second axis of rotation (D2) is arranged at an angle α to the first axis of rotation (D1) and the particle beam generated by the beam generating device (9) exits the particle beam generator (10) at the second end of the second housing section (14) along the beam axis (S1).

Description

[0001] The present invention relates to a particle beam processing device according to claim 1.

[0002] A particle beam processing device is known, for example, from DE 10 2009 039 621 A1. An example of a particle beam processing device is an electron beam processing device in which an electron beam generator is used to process workpieces in a vacuum chamber. Electron beam generators are generally known (see, for example, US 5 089 686 A).

[0003] DE 34 28 748 A1 discloses a gear head for manipulators.

[0004] DE 40 01 885 A1 shows a multi-axis industrial robot.

[0005] DE 10 2009 039 621 A1 discloses a particle beam processing device.

[0006] US patent 2011 / 0114839A1 relates to a method for manufacturing a three-dimensional workpiece using an electron beam.

[0007] JP S59 - 13 587 A discloses an electron beam welding device.

[0008] US 4 227 088 A concerns computer-assisted high-speed tomography.

[0009] The object of the invention is to improve a known particle beam generator with regard to its practical applicability.

[0010] This problem is solved by a particle beam processing device according to claim 1.

[0011] Further developments of the invention are specified in the dependent claims.

[0012] A particle beam generator design with a two-part housing, incorporating two integrated axes of movement, where one pivot axis runs inclined through part of the generator housing and the generator's rotation axis is located above the pivot axis, allows for easy swiveling of the particle beam generator. The combination of the rotation and pivot axes makes it possible to approach any position in space. With suitable software control, in conjunction with appropriate devices for linear or rotary movement of the particle beam generator, any desired machining operation can be performed.

[0013] Further features and advantages will become apparent from the description of exemplary embodiments based on the figures. These show: Fig. 1 a schematic section through a particle beam generator of a first embodiment; Fig. 2A a sectional view along line II-II in Fig. 1 in an initial state of the particle beam generator; and Fig. 2B a sectional view along line II-II in Fig. 1 in a tilted state of the particle beam generator.

[0014] An exemplary embodiment of a particle beam processing device, for example with an electron beam generator, is described below with reference to the figures.

[0015] The Fig. Figure 1 shows a particle beam generator 10 in a vertical cross-section. The particle beam generator 10 has a housing 11 comprising a first housing section 12 and a second housing section 14. The two housing sections 12 and 14 are connected to each other in a manner described in more detail below, such that an interior space is defined within the housing 11 that is sealed off from the outside.

[0016] The first housing section 12 is adapted to be rotatable about a first axis of rotation D1 on a particle beam processing device 100, which is located in Fig. The particle beam generator 10 can be attached in a suitable manner, for example, to a chamber wall of a vacuum chamber, a rotatable disk which may be part of a disk chassis with one or more eccentric disks, a linear motion device which may penetrate a chamber wall or a disk as previously described, or any other means of transport arranged within a vacuum chamber. Fig. Figure 1 schematically shows a wall section 102 of the particle beam processing device 100. As in Fig. As shown in Figure 1, the first housing section 12 has a cylindrical projecting section 13 at one end, which is designed for rotatable mounting in the wall section 102 of the particle beam processing device 100 via suitable bearings and seals. Section 13 may contain an opening 30 for the passage of a high-voltage cable 32, which is required to supply power to a beam generation device 9. The particle beam generator 10 is mounted on the particle beam processing device 100 such that it is rotatable about a first axis of rotation D1 with respect to the same. For this purpose, in the section shown in Figure 1, a bearing 30 is provided for the passage of a high-voltage cable 32, which is required to supply power to a beam generation device 9. Fig. In the embodiment shown in Figure 1, a drive engagement section 28 in the form of a toothed ring or the like is provided on the first housing section 12. By means of a suitable drive device, the particle beam generator 10, in particular the first housing section 12, can thus be rotated about the axis of rotation D1.

[0017] The second housing section 14 extends from the first housing section 12 towards the distal end of the particle beam generator 10. In the Fig. In the exemplary embodiment shown in Figure 1, the housing 11 is essentially cylindrical, so that the first housing section 12 and the second housing section 14 are also essentially cylindrical. It is understood, however, that other housing shapes can also be used, for example, rectangular shapes and the like.

[0018] The second housing section 14 is rotatably mounted on the first housing section 12 about a second axis of rotation D2. The beam generation device 9 is mounted on or in the second housing section 14 and is adapted to generate a particle beam along a beam axis S1. Such beam generation devices are known. A workpiece can be processed in the particle beam processing device 100 by means of the particle beam generated by the beam generation device 9, for example, to perform welding or drilling operations on it. The beam axis S1 is arranged at an angle to the second axis of rotation D2, that is, it is not parallel to it.

[0019] The second axis of rotation D2 is arranged at an angle α to the first axis of rotation D1. In other words, the second axis of rotation D2 is not parallel to the first axis of rotation D1. In the Fig. In the embodiment shown in Figure 1, the angle α = 45°. However, it is understood that other angles α can be used in other embodiments, for example, angles such that 0° < α < 90°, 10° ≤ α ≤ 80°, 20° ≤ α ≤ 70°, 30° ≤ α ≤ 60°, 40° ≤ α ≤ 50°, and any combination of the specified or other limits. In the exemplary embodiment, the angle between the beam axis S1 and the second axis of rotation D2 is equal to the angle α. In other embodiments, however, it may differ from the angle α.

[0020] The second housing section 14 is rotatably connected to the first housing section 12 via a bearing 20 and a seal 24 surrounding the opening between the first housing section 12 and the second housing section 14.

[0021] In the exemplary cylindrical housing shape of the present embodiment, an opening is formed in section perpendicular to the second axis of rotation D2 between the first housing section 12 and the second housing section 14, which has the shape of an ellipse, as for example in Fig. Figure 2A shows that, in order to maintain the vacuum-tight connection between the two housing sections when the second housing section 14 rotates about the second axis of rotation D2, flanges are provided at the connection point between the housing sections on the first housing section 12 and the second housing section 14. Specifically, the first housing section 12 has a flange 16 that extends around the first housing section 12 in a plane perpendicular to the second axis of rotation D2. Furthermore, the second housing section 12 has a second flange 18 that extends around the second housing section 14 parallel to the first flange 16. A bearing 20 is provided between the first flange 16 and the second flange 18, by means of which the second housing section 14 is rotatably mounted relative to the first housing section 12.

[0022] At the in Fig. In the embodiment shown in Figure 1, the first flange 16 has a circular cross-section in the plane perpendicular to the second axis of rotation D2, as shown in Figure 1. Fig. 2A is shown. As also shown in Fig. As shown in Figure 2A, a projecting wall section 22, which projects from the second flange 18 and extends towards the first flange 16, is designed to surround it, as also shown in Figure 2A. Fig. Figure 2A shows the following. In the exemplary embodiment, the bearing 20 is arranged between the first flange 16 and the wall section 22. Furthermore, the seal 24 is provided between the facing surfaces of the first flange 16 and the second flange 18, so that it maintains a sealing connection between the second housing section 14 and the first housing section 12 when the second housing section 14 rotates relative to the first housing section 12.

[0023] To rotate the second housing section 14 relative to the first housing section 12, the second flange 18 has a drive engagement section 26, which is designed to engage with a drive device for rotating the second housing section 14 about the second axis of rotation D2. The drive device, not shown, can, for example, be attached to the first housing section 12.

[0024] During machining of a workpiece with the particle beam generator 10, it may be necessary to pivot the generator so that the beam axis S1 runs at an angle to the first axis of rotation D1. The pivoted beam axis S1 can then be moved around the workpiece by rotating the particle beam generator 10 about the first axis of rotation D1 and, if necessary, by moving the component to which the particle beam generator 10 is attached. The two-part design of the housing 11 allows the particle beam generator 10 to be pivoted in this way without having to be attached to a separate pivoting device. This particularly simplifies the routing of the high-voltage cable 32 to the beam generation device 9. The principle of pivoting the beam axis S1 is explained in more detail below with reference to the figures.

[0025] The Fig. 2A shows the section along line II-II in Fig. 1 in an initial state of the particle beam generator 10, in which the beam axis S1 coincides with the first axis of rotation D1. The first housing section 12 and the second housing section 14 are oriented such that they extend essentially along the first axis of rotation D1 and the beam axis S1, respectively. The second axis of rotation D2 runs at an angle α of 45° to the first axis of rotation D1. In other words, the "cut" that divides the housing 11 into the first housing section 12 and the second housing section 14 also runs at an angle of 45° to the first axis of rotation D1. That is, the flanges 16 and 18 also lie in a plane that is inclined at 45° with respect to the first axis of rotation D1. The first housing section 12 defines a first opening O1, which is surrounded by the flange 16, as shown in Fig. 2A is shown. Likewise, the second housing section 14 defines a second opening O2, which is surrounded by the flange 18. The second opening O2 is in Fig. 2 shown as a dashed line and corresponds to the one in Fig. The initial state shown in 1 essentially corresponds to the first opening O1.

[0026] When the second housing section 14 is rotated about the second axis of rotation D2, the second opening O2 is rotated relative to the first opening O1. According to the guidance of the second housing section 14 via the flange 18 and the wall section 22 on the first flange 16, the second housing section 14 is thereby displaced from the plane of the sheet relative to the first housing section 12. Fig. 1 outwards or, in the reverse direction of rotation, into the plane of the blade. Due to the inclination of the second axis of rotation D2, a pivoting of the beam axis S1 inevitably results. In other words, when the second housing section 14 is removed from the in Fig. 2A initial state shown as in Fig. As 2B is rotated clockwise around the second axis of rotation D2, indicated by the arrow, the end of the second housing section 14, from which the particle beam exits along the beam axis S1, moves into Fig. 1 out of the plane of the sheet and in the direction of the second axis of rotation D2. In the Fig. The state shown in 2B, in which a rotation of 90° about the second axis of rotation D2 has taken place, is therefore the second housing section 14 with respect to the plane perpendicular to the first axis of rotation D1 (with respect to the in Fig. The particle beam processing device 100 (shown in Figure 1) has been pivoted upwards. Thus, by suitable movement and rotation of the particle beam generator 10, a workpiece could now be processed with a particle beam traveling at an angle to the wall on which the particle beam generator is mounted.

[0027] If the second housing section 14 is now removed from the state that was in Fig. As shown in Figure 2B, when rotated a further 90° clockwise, the first opening O1 and the second opening O2 are again essentially superimposed. The second housing section 14 is then moved back into the plane of the leaf. Fig. 1 pivoted, whereby the end of the second housing section 14 in Fig. moved 1 further upwards. It is obvious that a total rotation of 180° from the in Fig. The initial state shown in Figure 1 leads to a pivoting of the second housing section 14 by 90° about the second axis of rotation D2, so that it is essentially arranged horizontally. In this state, machining of a workpiece with a horizontally oriented particle beam could therefore be carried out.

[0028] It follows directly from the foregoing that a further rotation of the second housing section 14 about the second axis of rotation D2 will move the second housing section 14 back towards its initial position. This would be reached after a rotation of 360°. However, considering the routing of the high-voltage cable 32, it may be advantageous to limit the rotation of the second housing section 14 relative to the first housing section 12 by a suitable limiting device, for example, to a rotation of 180°. That is, the second housing section 14 is returned to its initial position by reversing the direction of rotation.

[0029] It is obvious to a person skilled in the art that, in order to carry out suitable machining operations in all spatial directions, a corresponding control system with appropriate programming can be provided, which controls the rotation of the second housing section 14 about the second axis of rotation D2, the rotation of the first housing section 12 about the first axis of rotation D1, optionally the movement of the first housing section 12, the rotation and / or the movement of the wall section 102 of the particle beam processing device 100, etc., according to the desired machining operation.

[0030] Although the exemplary embodiment has been described with an angle α = 45° between the second axis of rotation D2 and the first axis of rotation D1, it is obvious that other angles can also be used. Corresponding to the different angles α, a rotation of the second housing section 14 by 180° results in a pivoting of the second housing section 14 about the plane perpendicular to the first axis of rotation D1 by an angle of 2α. Other desired pivot angles, or the rotations required about the second axis of rotation D2, can easily be obtained through simple geometric considerations.

[0031] Although the circular flanges 16, 18, which allow the rotation of the second housing section 14 relative to the first housing section 12 while maintaining the seal of the housing 11, have been described above, it is obvious that any modifications can be made without exceeding the scope of the claims. The essential requirement is simply that the rotation of the second housing section 14 relative to the first housing section 12 is enabled while maintaining the seal. Furthermore, any suitable seals and / or bearings can be used to rotatably mount the second housing section 14 on the first housing section 12. Likewise, any suitable drive devices can be used to drive the rotations of the second housing section 14 and the first housing section 12.

[0032] It is explicitly emphasized that all features disclosed in the description and / or the claims are to be considered separate and independent of one another for the purposes of the original disclosure as well as for the purpose of limiting the claimed invention, irrespective of the combinations of features in the embodiments and / or the claims. It is explicitly stated that all range specifications or specifications of groups of units disclose every possible intermediate value or subgroup of units for the purposes of the original disclosure as well as for the purpose of limiting the claimed invention, in particular also as a boundary of a range specification.

Claims

[1] Particle beam processing device (100) with a particle beam generator (10) which a housing (11) comprising a first housing section (12) rotatably mounted about a first axis of rotation (D1) on the particle beam processing device (100), and a second housing section (14) comprising a first end and a second end opposite the first end, and being rotatably mounted at the first end about a second axis of rotation (D2) on the first housing section (12) and being vacuum-tightly connected to it, and a beam generating device (9) which is installed in the second housing section (14) and adapted to generate a particle beam along a beam axis (S1), in which the second axis of rotation (D2) is arranged at an angle α to the first axis of rotation (D1) and the particle beam generated by the beam generating device (9) exits the particle beam generator (10) at the second end of the second housing section (14) along the beam axis (S1). [2] Particle beam processing device according to claim 1, wherein the first housing section (12) has a first flange (16) which extends in a plane perpendicular to the second axis of rotation (D2) around the first housing section (12), the second housing section (14) has a second flange (18) which extends around the second housing section (14) parallel to the first flange (16) and the second housing section (14) is rotatably mounted on the first housing section (12) via a bearing (20) provided between the first flange (16) and the second flange (18) about the second axis of rotation (D2). [3] Particle beam processing device according to claim 2, wherein the first flange (16) has a circular cross-section in the plane perpendicular to the second axis of rotation (D2) and the second flange (18) has a projecting wall section (22) extending towards and surrounding the first flange (16), wherein the bearing (20) is arranged between the first flange (16) and the wall section (22). [4] Particle beam processing device according to claim 2 or 3, in which a first circumferential seal (24) is provided between the first flange (16) and the second flange (18), which maintains the vacuum-tight connection between the second housing section (14) relative to the first housing section (12) when the second housing section (14) is rotated. [5] Particle beam processing device according to one of claims 2 to 4, wherein the second flange (18) has a first drive engagement section (26) designed for engagement with a drive device for rotating the second housing section (14) about the second axis of rotation (D2). [6] Particle beam processing device according to claim 5, wherein the first housing section (12) has a second drive engagement section (28) which is designed for engagement with a drive device for rotating the first housing section (14) about the first axis of rotation (D1). [7] Particle beam processing device according to one of the preceding claims, wherein the beam axis (S1) is at an angle to the second axis of rotation (D2). [8] Particle beam processing device according to claim 7, wherein the angle is equal to the angle α. [9] Particle beam processing device according to one of the preceding claims, wherein: 0° < α < 90°, for example 10° ≤ α ≤ 80°, 20° ≤ α ≤ 70°, 30° ≤ α ≤ 60°, 40° ≤ α ≤ 50°, in particular α = 45°.

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