Contact arrangement for electrically contacting a rotatably mounted shaft and bearing arrangement for rotatably mounting an electrode

Abstract

Contact arrangement (200) for electrically contacting a rotatably mounted shaft (202), wherein the contact arrangement comprises: • a carbon brush cage (100) for guiding several carbon brushes (204) on the rotatably mounted shaft (202); • wherein the carbon brush cage (100) is assembled from several cage elements (100k), each of the several cage elements (100k) being designed to guide at least one carbon brush (204) of the several carbon brushes (204).

Description

[0001] The invention relates to a contacting arrangement for electrically contacting a rotatably mounted shaft and a bearing arrangement for rotatably mounting an electrode.

[0002] In general, electrodes can be used in coating technology for various processes and / or pretreatments. For example, in a sputtering process (also known as cathode sputtering or sputter deposition), a tubular target (or tubular cathode) can be used from which the coating material can be sputtered or atomized. Generally, a tubular electrode (cathode and / or anode) can rotate during the process. This can, for example, enable a long-term stable process, such as a long-term stable coating process. In magnetron sputtering (magnetic field-assisted cathode sputtering), for example, a tubular cathode can be used that rotates during the sputtering process. A magnet array is arranged inside the tubular cathode to generate plasma and thus influence, among other things, the sputtering rate and / or other process parameters of the sputtering process.Furthermore, a magnetron arrangement can also have several tubular cathodes (tubular targets), for example in a so-called double-tube magnetron (a so-called RDM - Rotatable Dual Magnetron).

[0003] US 2014 / 0183998 A1 discloses a current diverting ring used to dissipate voltages induced in a motor shaft. DE 112010004148 T5 discloses a connector for a medical device assembly. US 200 / 0159763 A1 discloses a system for dissipating electrical charges located on a rotatable shaft.

[0004] According to various embodiments, a contact arrangement is provided for electrically contacting a rotatably mounted shaft, e.g., based on carbon brushes (or other suitable abrasive elements) that rub against the outer surface of the shaft. Furthermore, a corresponding bearing arrangement is provided for rotatably mounting an electrode, wherein the bearing arrangement comprises the rotatably mounted shaft, which is electrically contacted by means of the contact arrangement, and wherein the electrode (e.g., a tubular electrode) is coupled to the shaft. For example, a tubular target for a magnetron can be mechanically rotatably mounted and electrically contacted by means of the bearing arrangement, wherein the bearing arrangement, for example, enables a design that allows for easy maintenance and / or repair of the bearing arrangement or its wear parts.

[0005] Visually, a bearing arrangement (e.g., a so-called end block) can provide a power supply (e.g., to supply a predetermined electrical potential to the tubular electrode), a cooling water supply (e.g., to cool the tubular electrode), and / or a rotatable mounting for the tubular electrode (e.g., for homogeneous atomization of the surface of a tubular magnetic field target). A bearing arrangement that provides both mechanical support and power supply and / or cooling water supply is also referred to as a media end block.

[0006] According to various embodiments, a media end block is provided for rotatably mounting a tubular electrode, wherein the media end block has a shaft to which the tubular electrode can be coupled, wherein the shaft is electrically contacted by means of current brushes, wherein the current brushes are fixed or mounted by means of a multi-part cage.

[0007] In addition to the use of rotatably mounted electrodes as cathodes in sputtering technology, rotatably mounted electrodes can be used as anodes in a so-called SAD process (SAD = Spotless arc Activated Deposition), by means of which high-rate electron beam evaporation can be realized.

[0008] Carbon brushes can be held or mounted by means of a carbon brush cage, whereby the carbon brush cage and the carbon brushes mounted by the carbon brush cage form a so-called brush ring or carbon brush ring, which surrounds the shaft to be electrically contacted in a ring-like manner. Conventionally, a brush ring can be fitted onto the shaft, so that the brush brush cage of the brush ring can be designed as a single piece.

[0009] One aspect of various embodiments can be clearly seen in the ability to easily and quickly mount and dismount a floatingly mounted grinding brush ring on a shaft with a larger diameter on both sides. Furthermore, according to various embodiments, a cost-effective grinding brush cage is provided. Also according to various embodiments, an electrically insulating material is used for the grinding brush cage. Furthermore, the material of the grinding brush cage can be designed to provide a visual indication of thermal overload. The grinding brush cage serves to position and guide several current brushes on a concentric shaft. According to various embodiments, the grinding brush cage is designed to allow for self-adjustment of the grinding brushes (i.e., a constant surface pressure).Furthermore, the carbon brush cage can be designed such that any mechanical load on it is caused solely by the torque generated by the pressed-on brushes on the rotating shaft. The carbon brush cage can also serve as the electrical contact for a wear contact. Additionally, the carbon brush cage is designed for reuse after, for example, the brushes have been replaced.

[0010] According to various embodiments, a contacting arrangement for electrically contacting a rotatably mounted shaft can comprise the following: a carbon brush cage for guiding several carbon brushes on the rotatably mounted shaft; wherein the carbon brush cage is assembled from several cage elements, each of the several cage elements being configured to guide at least one carbon brush of the several carbon brushes.

[0011] In other words, an arrangement for electrically contacting a rotatably mounted shaft may comprise: a cage for guiding several grinding elements on the rotatably mounted shaft; wherein the cage is assembled from several cage elements, each of the several cage elements being configured to guide at least one grinding element of the several grinding elements.

[0012] According to various embodiments, the contact arrangement comprising the carbon brush cage for guiding several carbon brushes and the several carbon brushes can also be referred to as a brush ring or carbon brush ring.

[0013] According to various embodiments, a carbon brush cage for guiding several carbon brushes on the rotatably mounted shaft can be assembled from several cage elements, each of the several cage elements being designed to guide at least one carbon brush of the several carbon brushes.

[0014] According to various embodiments, the carbon brush cage or carbon brush ring can be provided in such a way that it makes floating contact with the shaft. Visually, a gap can remain between the carbon brush cage and the shaft. Furthermore, the shaft can be rotatably mounted in a sleeve by means of a bearing, whereby a gap can remain between the carbon brush cage and the sleeve. Thus, the carbon brush cage or carbon brush ring is not subjected to mechanical stress due to the shaft's running tolerances when the shaft rotates.

[0015] According to various embodiments, the electrical energy required for processing can be transferred via the shaft to a tubular electrode coupled to the shaft by means of the contact arrangement (e.g. by means of sliding electrical contacts).

[0016] According to various embodiments, the carbon brush cage can have at least three cage elements for guiding at least three carbon brushes. One carbon brush can be guided in each cage element. It is understood that two or more carbon brushes, appropriately sized, can also be guided in each cage element, which can be functionally considered as a single carbon brush.

[0017] According to various embodiments, the multiple cage elements can be made of or consist of a plastic. According to various embodiments, the multiple cage elements can be made of or consist of a fiber-reinforced plastic.

[0018] According to various embodiments, the carbon brush cage can be assembled from several identical cage elements. For example, several or all cage elements can thus be manufactured cost-effectively using an injection molding process and only one mold (e.g., made of plastic).

[0019] According to various embodiments, the rotatably mounted shaft can have a first region and a second region, as well as a grinding region arranged between the first and second regions. In this grinding region, the multiple carbon brushes are held, for example, by means of the carbon brush cage assembled from cage elements, and grind against the shaft. The outer diameter of the shaft in the grinding region is smaller than in the first and second regions. Visually, the shaft can be stepped down on both sides from the grinding region in the axial direction to a larger diameter, so that, for example, a one-piece carbon brush cage cannot simply be fitted axially onto the shaft.

[0020] According to various embodiments, a bearing arrangement (e.g., an end block or an end block assembly) for rotatably supporting an electrode can comprise the following: a sleeve, a shaft, a bearing (e.g., a rolling bearing) by means of which the shaft is rotatably supported in the sleeve; wherein the sleeve and the shaft are provided such that, in the axial direction, a bearing area, a first sealing area, a grinding area, and a second sealing area are provided, the bearing being arranged in the bearing area, and a contacting arrangement, as described herein, for electrically contacting the rotatably supported shaft in the grinding area. According to various embodiments, the sleeve can be a single piece, wherein the bearing arrangement is configured such that the shaft and the contacting arrangement can be inserted into the sleeve together. Furthermore, a housing can also be used as the sleeve, or the sleeve can be designed as a housing.

[0021] To illustrate, the cage elements and the corresponding carbon brushes held in the cage elements must first be assembled around the shaft to form a closed carbon brush cage or carbon brush ring before the shaft can be mounted in the sleeve.

[0022] According to various embodiments, the assembly sequence can be as follows: mount the labyrinth seal or wiper on the shaft, then mount the bearing on the shaft, then mount the carbon brush ring on the shaft, then insert the complete shaft (with seal, bearing, and carbon brush ring) into the housing (e.g., into the sleeve or directly into the end block housing), and then insert the vacuum seal into the housing (or into the corresponding area between the shaft and the housing).

[0023] According to various embodiments, the carbon brush cage, assembled from several cage elements, can be floatingly mounted between the shaft and the sleeve in the grinding area. According to various embodiments, the inner diameter of the assembled carbon brush cage can be larger than the outer diameter of the shaft in the grinding area. Thus, for example, a gap can be provided in the grinding area between the shaft and the carbon brush cage, with a gap width ranging from approximately 0.5 mm to approximately 5 mm.

[0024] According to various embodiments, the carbon brush cage, assembled from several cage elements, can have multiple recesses, with the bearing arrangement further comprising a retaining structure that engages in these recesses. Visually, the retaining structure can be fixed to the sleeve, thus preventing, for example, the carbon brush cage from rotating or twisting on the rotating shaft.

[0025] According to various embodiments, the bearing arrangement can further comprise: a labyrinth seal arranged in the first sealing area and a vacuum seal arranged in the second sealing area. According to various embodiments, the bearing arrangement can further comprise: a wiper arranged in the first sealing area and a vacuum seal arranged in the second sealing area.

[0026] According to various embodiments, the outer diameter of the shaft in the grinding area can be smaller than in an intermediate area between the first sealing area and the grinding area. Furthermore, the outer diameter of the shaft in the grinding area can be smaller than in the second sealing area.

[0027] Furthermore, the outer diameter of the shaft in the bearing area may be smaller than in the first sealing area and / or smaller than in the second sealing area.

[0028] According to various embodiments, the shaft can have a radial projection in the intermediate area, against which the labyrinth seal or the wiper is positioned.

[0029] According to various embodiments, the bearing arrangement can further comprise the following: a seal (e.g., a wiper, a labyrinth seal, or any other suitable sealing structure) arranged in the first sealing area. The shaft can have a radial projection in the intermediate area against which the seal is positioned.

[0030] Exemplary embodiments of the invention are shown in the figures and are explained in more detail below.

[0031] They show Fig. 1A a carbon grinding cage assembled from several cage elements in a perspective view, according to various embodiments; Fig. 1B and Fig. 1C a cage element in each of a perspective view, according to different embodiments; Fig. 2A a contact arrangement in a perspective view, according to various embodiments; Fig. 2B a contact arrangement in a cross-sectional view, according to various embodiments; Fig. 3A a bearing arrangement in a cross-sectional view, according to various embodiments; Fig. 3B a detailed representation of the bearing arrangement in a cross-sectional view, according to different embodiments; Fig. 4 a bearing arrangement in a sectional view, according to various embodiments; Fig. 5 a grinding carbon ring, according to various embodiments, with an assembled grinding carbon cage and several grinding carbons in a perspective cut view; and Fig. 6 a bearing arrangement in a perspective sectional view, according to various embodiments.

[0032] The following detailed description refers to the accompanying drawings, which form part thereof and illustrate specific embodiments in which the invention can be implemented. In this context, directional terminology such as "top," "bottom," "front," "back," "anterior," "rear," "right," "left," etc., is used with reference to the orientation of the described figure(s). Since components of embodiments can be positioned in a number of different orientations, the directional terminology serves only for illustration and is in no way limiting. It is understood that other embodiments may be used and structural or logical modifications may be made without deviating from the scope of protection of the present invention.It is understood that the features of the various exemplary embodiments described herein can be combined with one another, unless specifically stated otherwise. The following detailed description is therefore not to be interpreted in a limiting sense, and the scope of protection of the present invention is defined by the appended claims.

[0033] Within the scope of this description, the terms "connected," "attached," and "coupled" are used to describe both direct and indirect connections, direct or indirect links, and direct or indirect couplings. In the figures, identical or similar elements are labeled with identical reference symbols where appropriate.

[0034] Fig. Figure 1A illustrates a carbon grinding cage 100 in a perspective view, according to various embodiments, wherein the carbon grinding cage 100 is assembled from several cage elements 100k. One of these cage elements 100k is in Fig. 1B and Fig. 1C shown individually.

[0035] According to various embodiments, the carbon brush cage 100 can be assembled from at least three cage elements 100k, e.g. from three, four, five, six or more than six cage elements 100k, e.g. from ten or more than ten cage elements 100k, wherein in Fig. Figure 1A shows a carbon grinding cage 100 with five cage elements 100k.

[0036] The assembled carbon brush cage 100 is ring-shaped and has a ring-shaped circumferential groove 100n in which, for example, a spring ring (100f) or a tension spring (100f) can be arranged to press down the carbon brushes held by means of the carbon brush cage 100 (cf. Fig. 2A and Fig. 3B).

[0037] Furthermore, each of the cage elements 100k has a recess structure 100a with at least one recess (e.g., with four recesses, as in Fig. (1B shown) and a projection structure 100v that matches the recess structure 100a. The recess structure 100a and the projection structure 100v are designed to fit each other so that the cage elements 100k can be assembled into the carbon brush cage 100 using the recess structure 100a and the projection structure 100v. The carbon brush cage 100 thus stays together without the need for additional fastening. The spring washer (100f), which can be placed, for example, in the groove 100n, merely presses the carbon brushes onto the shaft and does not serve to hold the cage elements 100k together.

[0038] In other words, the cage elements 100k can each have a plug-in connection structure for joining the cage elements 100k to form a ring-shaped carbon brush cage 100. Furthermore, the cage elements 100k can also be referred to as cage segments 100k.

[0039] According to various embodiments, each cage element 100k can have a semicircular recess 100h on its outer surface (or a corresponding semi-cylindrical recess 100h on its end face). Thus, for example, a hole 100b can be formed when the cage elements 100k are joined together. A retaining structure can, for example, engage at least partially in this hole 100b to define the position of the assembled carbon brush cage 100 on the shaft and / or to support a torque transmitted from the brushes to the carbon brush cage 100.

[0040] According to various embodiments, at least one of the cage elements 100k (or all cage elements 100k) can have an axial cutout 100z, which makes it possible, for example, to contact the brushes and thus, for example, to determine the condition of the brushes after a certain period of use, e.g. by means of a resistance measurement against the shaft, e.g. by means of a multimeter.

[0041] According to various embodiments, each of the cage elements can have a receiving space in which at least one carbon brush can be at least partially received, so that the at least one carbon brush can be guided in contact with the shaft.

[0042] To keep the manufacturing costs for such a cage element (100k) as low as possible, it can, for example, be manufactured as a plastic injection-molded part. In other words, all cage elements (100k) can be manufactured using plastic injection molding.

[0043] According to various embodiments, the plastic from which the cage elements 100k are formed can contain glass, e.g., fiberglass, glass fabric, glass wool, etc. According to various embodiments, the plastic from which the cage elements 100k are formed can contain a ceramic, e.g., ceramic fiber, ceramic fabric, ceramic wool, etc.

[0044] Unlike conventional plastic components, which can be made of polyetheretherketone (PEEK) and are manufactured by machining (e.g., from a solid bar), the 100k cage elements can be made of Fortron, for example. Fortron has only slightly lower strength values ​​compared to PEEK, but somewhat better electrical insulation properties. The thermal and chemical resistance of Fortron is also sufficient for use as a 100k cage element in a 100-gauge carbon brush cage. Furthermore, Fortron is available in various colors. With lighter colors, this allows for the quick detection of thermal overload through discoloration of the material. In this particular application, Fortron 4665B6, for example, can be used.The CTI value (the so-called Comparative Tracking Index), which describes the tracking resistance, is approximately 250 for Fortron 4665B6, but only approximately 150 for PEEK.

[0045] As described above, the positioning of the cage segments relative to each other can be achieved by means of simple plug contacts (e.g. by means of four lugs 100v and four corresponding bores 100a on each of the two end faces of the cage element 100k), whereby a carbon brush can be inserted into each of the cage elements 100k before the grinding carbon ring is assembled around the shaft.

[0046] According to various embodiments, all cage elements 100k can have the same shape and size. Alternatively, different cage elements 100k can be used to assemble the carbon brush cage 100.

[0047] Fig. Figure 2A illustrates a contact arrangement 200 which electrically contacts a shaft 202, in a perspective view, according to various embodiments; furthermore Fig. Figure 2B shows a cross-sectional view of the contact arrangement 200 and the shaft 202. It is clearly illustrated in the Fig. 2A and Fig. Figure 2B shows part of a bearing arrangement by means of which a tubular electrode can be rotatably mounted and electrically contacted. For example, the shaft 202 can have a coupling section 202k, e.g. with one or more bores, for coupling the tubular electrode to the shaft 202. Furthermore, the shaft 202 can be a hollow shaft 202 or at least have an axial bore such that, for example, coolant can be guided through the shaft 202 to the coupled tubular electrode.

[0048] According to various embodiments, the contacting arrangement 200 can be configured to electrically contact the rotatably mounted shaft 202, wherein the contacting arrangement 200 can at least have the following: a carbon brush cage 100 for guiding several carbon brushes 204 on the rotatably mounted shaft 202; wherein the carbon brush cage 100 is assembled from several cage elements 100k (see Figure 1). Fig. 1A to 1C), wherein each of the multiple cage elements 100k is configured to guide at least one of the multiple carbon brushes 204. According to various embodiments, each of the multiple cage elements 100k can be configured to guide exactly one of the multiple carbon brushes 204.

[0049] According to various embodiments, the contacting arrangement 200 can have a carbon brush cage 100 and several carbon brushes 204 guided on the shaft by means of the carbon brush cage 100, or in other words, the contacting arrangement 200 can have a carbon brush ring or be a carbon brush ring.

[0050] Furthermore, the contact arrangement 200 can include a ring spring 100f, which is arranged in the groove 100n of the carbon brush cage 100, so that the ring spring 100f presses each of the carbon brushes 204 against the shaft. The carbon brush cage 100 can be floating, i.e., for example, not in direct contact with the shaft 202.

[0051] Furthermore, the contact arrangement can have 200 lines 210 by means of which the electric current can be coupled into the carbon brushes 204. For example, three lines 210 can contact each carbon brush 204, with each of the carbon brushes being guided by exactly one cage element 100k of the carbon brush cage 100.

[0052] According to various embodiments, the shaft 202 can be stepped down several times, so that, for example, further components can be arranged on the shaft 202 (or between the shaft and the sleeve), e.g. seals, bearings and the like.

[0053] According to various embodiments, the shaft 202 can have a first region 202a and a second region 202b, as well as a grinding region 202s arranged between the first region 202a and the second region 202b, in which the several carbon brushes 204, which are held by means of the carbon brush cage 100 assembled from the cage elements 100k, grind against the shaft 202, wherein the outer diameter of the shaft 202 in the grinding region 202s is smaller than in the first region 202a and in the second region 202b. Visually, the shaft 202 can be stepped down on both sides from the grinding region 202s in the axial direction to a larger diameter, so that the carbon brush cage 100 cannot simply be axially fitted onto the shaft 202, but is assembled from the several cage elements 100k.Because the cage elements hold themselves together after being plugged in, easy assembly and disassembly can be ensured.

[0054] Fig. Figure 3A illustrates a bearing arrangement 300 for rotatably supporting an electrode (e.g., a tubular one), wherein the bearing arrangement 300 may comprise: a sleeve 302, a shaft 202, and a bearing 304 by means of which the shaft 202 is rotatably supported in the sleeve 304, wherein the sleeve 304 and the shaft 202 are provided such that, in the axial direction 301, a bearing area 301a, a first sealing area 301b, a grinding area 301s, and a second sealing area 301c are provided, the bearing 304 being located in the bearing area 301a. Furthermore, the bearing arrangement 300 comprises a contact arrangement 200 for electrically contacting the rotatably supported shaft 202 in the grinding area 301s.

[0055] As in Fig. As illustrated in Figure 3A, the outer diameter of the shaft 202 in the grinding area 301s can be smaller than in an intermediate area between the first sealing area 301b and the grinding area 301s. Furthermore, the outer diameter of the shaft 202 in the grinding area 301s can also be smaller than in the second sealing area 301c. Thus, for example, a labyrinth seal 312 can be inserted into the first sealing area 301b and a vacuum seal 314 into the second sealing area 301c between the sleeve 302 and the shaft 202. Additionally, the bearing 304 can be inserted into the bearing area 301a between the sleeve 302 and the shaft 202. As shown in Fig. As illustrated in 3A, the shaft 202 can be arranged in such a way that it can be pulled out of the sleeve 302 in the axial direction 301.

[0056] The labyrinth seal 312 can, for example, be arranged between the bearing 304 (e.g., a rolling bearing) and the contact arrangement 200 (e.g., the carbon brush cage 100 and the carbon brushes 204). This prevents, for example, grease used to lubricate the bearing 304 from entering the area for electrical contacting the shaft 202 (e.g., the grinding area 301s). Furthermore, the shaft 202 can have a radial projection 202v in the intermediate area between the first sealing area 301b and the grinding area 301s (see radial direction 301r in [reference]). Fig. 3A), on which the labyrinth seal 312 is attached. For example, the labyrinth seal 312 can be inserted into the first sealing area 301b in the axial direction 301 during the assembly of the bearing arrangement 300.

[0057] According to various embodiments, the sleeve 302 can be the housing 302 of the wear cartridge 300, which can be inserted into a housing (e.g., an end block housing). The modularly assembled bearing arrangement 300 can, for example, be referred to as a wear cartridge.

[0058] According to various embodiments, the sleeve 302 can be provided as an end block housing, or the sleeve 302 can be a section of an end block housing. Thus, the shaft with bearing, all seals, and carbon brush ring can be directly installed in an end block housing.

[0059] Fig. 3B illustrates the grinding area 301s of the in Fig. 3A shows a detailed view of the bearing arrangement 300, according to various embodiments.

[0060] According to various embodiments, the shaft 202 can be electrically contacted by means of the contact arrangement 200. The contact arrangement 200 can further comprise a metal ring 318 (e.g., a copper ring or two copper half-shells) which electrically contacts the carbon brushes 204 via the leads 210. The metal ring 318 can, for example, be attached to the sleeve 302.

[0061] According to various embodiments, the grinding carbon cage 100, assembled from several cage elements 100k, can be floatingly mounted between the shaft 202 and the sleeve 302 in the grinding area 301s. For example, a gap can be provided between the grinding carbon cage 100 and the shaft 202. Furthermore, a gap can be provided between the grinding carbon cage 100 and the sleeve 302, as well as between the grinding carbon cage 100 and the metal ring 318.

[0062] Furthermore, the carbon brush cage 100, assembled from several cage elements 100k, can have several recesses 100b (also referred to as holes), wherein the bearing arrangement 300 also has a retaining structure 316 which engages in the several recesses 100b. For example, a screw 316 can be screwed into the sleeve 302 such that the screw 316 extends at least partially into the corresponding recess 100b. The carbon brush cage 100 can be only loosely fixed, i.e., the outer diameter of the screw thread can be smaller than the inner diameter of the recess 100b in the carbon brush cage 100. In this way, a torque support can be provided, with the carbon brush cage 100 remaining floating, so that the carbon brush cage 100 is only subjected to a slight load during rotation of the shaft 202, due to a quasi-static torque.

[0063] According to various embodiments, the carbon brush cage 100 can be designed to be pluggable, being positioned on a shaft 202 which is stepped off on both sides towards the larger diameter (see, for example, Fig. 3A). This may be necessary, for example, because on the left (in the view in Fig. 3A) A labyrinth seal 312 is arranged next to the grinding brush ring 200 (or grinding carbon ring), which prevents the rolling bearing grease from reaching the grinding carbons 204, which could otherwise negatively affect the current transmission there. Furthermore, the labyrinth seal 312 also ensures that the rolling bearing grease is not contaminated by the carbon dust produced (illustratively, the labyrinth seal 312 is a double-sided seal).

[0064] Right (in the view in Fig. 3A) Next to the grinding brush ring 200, the vacuum seal 314 is positioned on a larger diameter. The sealing lip of the vacuum seal 314 facing the grinding brush ring 200 ensures that the carbon dust cannot reach the other lubricated sealing lips and negatively affect the vacuum grease or the sealing effect there.

[0065] Furthermore, the inner diameter of the grinding carbon cage 100 is larger than the shaft diameter at the seat of the grinding carbon cage 100, so that a gap is provided between grinding carbon cage 100 and shaft 202 (see Fig. 3B). The outer diameter of the assembled carbon brush cage 100 is again smaller than the inner diameter of the sleeve 302 or the housing 302 of the wear cartridge 300 (cf. Fig. 3B).

[0066] A cage segment 100k (also referred to as cage element 100k) has a semicircular recess 102h on each outer surface which, when the cage segments 100k are joined together to form the carbon brush cage 100, results in a “bore” 100b (cf. Fig. 1A to 1C). Screws 316, which are screwed into the housing 302 of the wear cartridge 300 and serve as a torque support, can, for example, protrude into these bores 100b of the carbon brush cage 100, as described above. Fig. 4 is illustrated in a sectional view.

[0067] Because the diameter and depth of the bores 100b are larger and deeper respectively than the screws protruding into them, the grinding carbon cage 100 is loosely guided radially and axially from the outside by means of the screws 316 (cf. Fig. 3B). The carbon brush ring 200 is therefore floatingly mounted in the end block. For example, there is no contact between the carbon brush cage 100 and the outer housing 302 or the rotating shaft 202. This arrangement offers the significant advantage that the current brushes 204 can precisely follow the movement of the shaft 202, thus ensuring optimal current contact with the shaft 202.

[0068] The carbon brushes 204 are pressed onto the shaft 202 by means of a tension spring 100f, both ends of which are connected to each other via a sheet metal plate 500b, as for example in Fig. Figure 5 illustrates the contact arrangement 200 in a perspective view. The tension spring 100f rests, for example, against the outer circumference of the several (e.g., five) current brushes and presses them onto the shaft 202. The tension spring 100f does not contribute to holding the brush cage 100 together, since the tension spring 100f is located in a resulting circumferential groove 100n (see Figure 5). Fig. 1A) lies and has no contact with the carbon brush cage 100 (see Fig. 3B). The carbon brush cage 100 is held together exclusively by the force generated by the plug contact (e.g. by means of a press fit).

[0069] Furthermore, in Fig. Figure 6 illustrates the installation situation of the contacting arrangement 200 in a media end block 300 (e.g., a media end block of a sputtering device). According to various embodiments, the media end block 300 can be configured to rotatably mount a tubular cathode (e.g., a sputtering target) in a vacuum chamber.

[0070] According to various embodiments, the pluggable grinding brush ring can be easily assembled and disassembled. Furthermore, individual cage segments 100k and / or individual brushes 204 can be quickly replaced. At the same time, significant cost reductions can be achieved due to material selection and manufacturing processes. Additionally, a floating bearing for the grinding brush ring 200 can be provided, ensuring ideal electrical contact with the shaft 202.

Claims

[1] Contact arrangement (200) for electrically contacting a rotatably mounted shaft (202), wherein the contact arrangement comprises: • a carbon brush cage (100) for guiding several carbon brushes (204) on the rotatably mounted shaft (202); • wherein the carbon brush cage (100) is assembled from several cage elements (100k), each of the several cage elements (100k) being designed to guide at least one carbon brush (204) of the several carbon brushes (204). [2] Contact arrangement according to claim 1, wherein the carbon brush cage (100) has at least three cage elements (100k) for guiding at least three carbon brushes (204). [3] Contact arrangement according to claim 1 or 2, wherein the multiple cage elements (100k) comprise or consist of a plastic. [4] Contact arrangement according to one of claims 1 to 3, wherein the carbon brush cage (100) is assembled from several identical cage elements (100k). [5] Bearing arrangement (300) for rotatably bearing an electrode, wherein the bearing arrangement (300) comprises: • a sleeve (302); • a wave (202); • a bearing (304) by means of which the shaft (202) is rotatably mounted in the sleeve (302); • wherein the sleeve (302) and the shaft (202) are provided such that in the axial direction (301) a bearing area (301a), a first sealing area (301b), a grinding area (301s) and a second sealing area (301c) are provided, wherein the bearing (304) is arranged in the bearing area (301a), and • a contact arrangement (200) according to one of claims 1 to 4 for electrically contacting the rotatably mounted shaft (202) in the grinding area (301s). [6] Bearing arrangement according to claim 5, wherein the outer diameter of the shaft (202) in the grinding area (301s) is smaller than in an intermediate area between the first sealing area (301b) and the grinding area (301s) and / or wherein the outer diameter of the shaft (202) in the grinding area (301s) is smaller than in the second sealing area (301c). [7] Bearing arrangement according to claim 5 or 6, wherein the grinding carbon cage (100) assembled from the several cage elements (100k) is floatingly mounted between the shaft (202) and the sleeve (302) in the grinding area (301s). [8] Bearing arrangement according to one of claims 5 to 7, wherein the grinding carbon cage (100) assembled from the several cage elements (100k) has several recesses (100b), and wherein the bearing arrangement (300) further comprises a retaining structure (316) which engages in the several recesses (100b). [9] Bearing arrangement according to any one of claims 5 to 8, further comprising: a seal (312) arranged in the first sealing area (301b) and a vacuum seal (314) arranged in the second sealing area (301c). [10] Bearing arrangement according to claim 9, wherein the shaft (202) has a radial projection (202v) in the intermediate area, on which the seal (312) is attached.

Images