Machining device

Abstract

Machining device (1), comprising: a clamping table (14) that holds a workpiece (W); a machining unit (70) that forms a machined groove on the workpiece (W) held by the clamping table (14); a machining feed mechanism (50) that moves the clamping table (14) and the machining unit (70) relatively in a machining feed direction which is an X-axis direction; an index feed mechanism (60) that moves the clamping table (14) and the machining unit (70) in an index feed direction which is a Y-axis direction perpendicular to the machining feed direction; an imaging unit (73) that images the workpiece (W) held by the clamping table (14); a display unit (75) that displays a recorded image of a machined groove, which was obtained by imaging the machined groove formed by the machining of the workpiece (W) by the machining unit (70) using the imaging unit (73); and a control unit (80), wherein the control unit (80) a memory section (81) for a Y-coordinate of a last machined groove (92), which stores a Y-coordinate of a last machined groove (92), and includes a display control unit (83) which causes a marker (85a, 85b), which indicates the last machined groove (92) based on the Y-coordinate to be displayed, to be superimposed on the recorded image displayed on the display unit (75).

Description

BACKGROUND OF THE INVENTIONTechnical field

[0001] The present invention relates to a machining device that machines a workpiece. Description of related technology

[0002] A machining device is equipped with an imaging unit for alignment. By positioning a reference line of a microscope of the imaging unit on a planned machining line, called a road on a workpiece, the workpiece is machined along the road. In this case, a target pattern on the workpiece, the distance from the target pattern to the center of the road, the distance between the roads (index value), and so on are detected in advance in the control means of the machining device. Then, the reference line of the microscope is positioned on the center of the road by detecting the target pattern on the workpiece with the microscope.

[0003] In addition, during machining, a work of adjusting the reference line of the microscope of the imaging unit to the center line of the machining means, a so-called hairline adjustment, is performed (see, for example, Japanese Patent Application Laid-Open No. 2012-146831). In hairline adjustment, a machined groove is formed and imaged on a surface of the workpiece, and the deviation of the reference line of the microscope from the center position of the machined groove is calculated. Since the deviation between the center position of the machined groove and the reference line of the microscope appears as the deviation between the machining means and the microscope, the position at which the center position of the machined groove is selected to coincide with the reference line of the microscope is stored in the control means as the position of the origin, using this deviation as the correction amount.

[0004] US 2016 / 0346956 A1 relates to a machining system comprising a machining device with functional units including a holding unit that holds a workpiece by a holding surface, a machining unit that machines the workpiece held by the holding unit, and a feeding unit that relatively moves the holding unit and the machining unit.

[0005] US 2001 / 0044256 A1 relates to a cutting machine comprising a clamping means for holding a workpiece to be cut and a cutting means for cutting the workpiece held on the clamping means.

[0006] US 2014 / 0218322 A1 relates to systems for controlling machine tools and in particular to systems that display information for an operator of the machine tool. PRESENTATION OF THE INVENTION

[0007] However, as machining of the workpiece continues, a deviation in the positional relationship between the center position of the machining tool and the reference line of the microscope begins to occur. Therefore, machining is temporarily suspended, and in some cases, hairline adjustment is performed. When performing hairline adjustment manually, the position of the reference line of the microscope at the time of suspending machining must be adjusted to the center position of the last machined groove. If quality control or the like is being performed on multiple machined grooves and the view of the last machined groove is lost before performing hairline adjustment, hairline adjustment and so on may be inadvertently performed on another machined groove.

[0008] Therefore, it is an object of the present invention to provide a machining device with which the last machined groove can always be recognized without losing sight of the last machined groove.

[0009] According to one aspect of the present invention, there is provided a machining apparatus comprising: a chuck table that holds a workpiece; a machining unit that forms a machined groove in the workpiece held by the chuck table; a machining feed mechanism that relatively moves the chuck table and the machining unit in a machining feed direction, which is an X-axis direction; an index feed mechanism that relatively moves the chuck table and the machining unit in an index feed direction, which is a Y-axis direction perpendicular to the machining feed direction; an imaging unit that images the workpiece held by the chuck table; a display unit that displays a captured image of a machined groove obtained by imaging the machined groove formed by the machining of the workpiece by the machining unit, with the imaging unit; and a control unit.The control unit includes a last-machined groove Y-coordinate storage part that stores a last-machined groove Y-coordinate, and a display control part that causes a mark indicating the last-machined groove based on the Y-coordinate to be displayed in a superimposed manner on the captured image displayed on the display unit.

[0010] According to this embodiment, the mark indicating the last machined groove is displayed by the display unit in a superimposed manner on the captured image. Since the last machined groove is displayed by the mark on the captured image, it is possible to ensure that the operator always recognizes the position of the last machined groove. Furthermore, the view of the last machined groove is not lost even if the imaging unit is moved and a location other than the last machined groove is checked.

[0011] In the aspect of the present invention, the display control part may switch a direction displayed by the mark according to a current imaging position of the imaging unit and the Y coordinate of the last machined groove.

[0012] According to the present invention, by displaying the mark indicating the last machined groove on the captured image in a superimposed manner, the operator can be made to always recognize the position of the last machined groove without losing sight of the last machined groove.

[0013] The above and other objects, features and advantages of the present invention and the mode for carrying them out will become more apparent and the invention itself will be best understood by studying the following description and the appended claims with reference to the attached drawings which show some preferred embodiments of the invention. SHORT DESCRIPTION OF THE FIGURES Fig. 1 is a perspective view of the shape of a cutting device of the present embodiment; Fig. 2 is a perspective view of the interior of the cutting device of the present embodiment; Fig. 3A and Fig. 3B are diagrams illustrating an example of a stop screen of a comparative example; Fig. 4 is a block diagram illustrating a display controller of a display unit in the present embodiment; Fig. 5A, Fig. 5B and Fig. 5C are diagrams illustrating an example of a stop screen in the present embodiment; Fig. 6A, Fig. 6B, Fig. 6C and Fig. 6D are diagrams illustrating an example of display control in the present embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0014] A cutting device of the present embodiment will be described below with reference to the accompanying drawings. Fig. 1 is a perspective view of the shape of the cutting device of the present embodiment. Fig. 2 is a perspective view of the interior of the cutting device of the present embodiment. Fig. 3A and Fig. 3B are diagrams illustrating an example of a stop screen of a comparative example. Although the description in the present embodiment is made by illustrating the cutting device as a machining device, the machining device is not particularly limited as long as it forms a machined groove.

[0015] As in Fig. 1, a cutting device 1 is equipped with a display unit (display means) 75 that accepts an operation from an operator, and various processing conditions are set in the cutting device 1 through the display unit 75. The cutting device 1 is configured to have cutting blades 71 (see Fig. 2) and a workpiece W held by a chuck table 14 is relatively moved, and the workpiece W is machined along streets on the chuck table 14 based on the setting conditions set by the display unit 75. A surface of the workpiece W is divided into a plurality of regions in a grid-like manner by the streets, and various components are formed in each of the regions obtained by the division.

[0016] A pitch tape T is adhered to the workpiece W, and a ring frame F is adhered to the periphery of the pitch tape T. The workpiece W is brought into the cutting device 1 in the state of being supported by the ring frame F via the pitch tape T. It suffices if the workpiece W is something that will become a machining target. For example, the workpiece W may be a semiconductor wafer or an optical device wafer on which devices are formed. Furthermore, the pitch tape T may be a die attachment film (DAF) tape obtained by adhering a DAF to a tape base, in addition to a normal adhesive tape obtained by applying an adhesive layer to a tape base.

[0017] The cutting device 1 includes a housing 10 that covers the cutting processing space and has a rectangular parallelepiped shape, and a support base 13 that is adjacent to the housing 10 and forms a waiting area and a cleaning area. The center of the upper surface of the support base 13 is open so that it extends toward the inside of the housing 10, and this opening is covered by a moving plate 15 that can move together with the chuck table 14, and a waterproof cover 16 that has an accordion shape. Under the waterproof cover 16, a processing feed mechanism (processing feed unit) 50 (see Fig. 2) which moves the clamping table 14 in a machining feed direction, which is an X-axis direction. In Fig. 1 shows the state in which the chuck table 14 has been shifted to the outside of the housing 10 and made to wait above the support base 13.

[0018] A holding surface 17 is formed in the chuck table 14 by a porous ceramic material, and the workpiece W is sucked and held by a negative pressure generated by this holding surface 17. Four air-operated clamps 18 are arranged around the chuck table 14, and the ring frame F around the workpiece W is clamped and fixed from four sides by the respective collets 18. A pair of centering guides 21 extending along a Y-axis direction are arranged above the chuck table 14. By separating and approaching the pair of centering guides 21 in the X-axis direction, the workpiece W is positioned in the X-axis direction relative to the chuck table 14.

[0019] On the support base 13, a lifting unit 22 on which a cassette is placed is arranged next to the chuck table 14. In the lifting unit 22, a stage 23 on which a cassette is placed is raised and lowered, and the loading / unloading position of the workpiece W in the cassette is adjusted in the height direction. A side surface 11 of the housing 10 is equipped with a push-pull arm 24 that loads and unloads the workpiece W into and from a cassette while causing the pair of centering guides 21 to guide the ring frame F. Furthermore, the side surface 11 of the housing 10 is equipped with a loading arm 31 and a loading arm 41 that transport the workpiece W between the pair of centering guides 21 and the chuck table 14.

[0020] The push-pull arm 24 is driven by a horizontal movement mechanism 25 arranged on the side surface 11 of the housing 10. The horizontal movement mechanism 25 includes a pair of guide rails 26 arranged on the side surface 11 of the housing 10 and parallel to the Y-axis direction, and a slider 27 slidably placed on the pair of guide rails 26 and driven by a motor. A nut member (not shown) is formed on the rear surface side of the slider 27, and a ball screw 28 is screwed to this nut member. A drive motor 29 connected to a part at one end of the ball screw 28 is rotatably driven, and thereby the push-pull arm 24 performs a push-pull movement in the Y-axis direction along the pair of guide rails 26.

[0021] The insertion arm 31 and the removal arm 41 are driven by horizontal movement mechanisms 32 and 42 arranged on the side surface 11 of the housing 10. The horizontal movement mechanisms 32 and 42 include pairs of guide rails 33 and 43 arranged on the side surface 11 of the housing 10 and parallel to the Y-axis direction, and sliders 34 and 44 slidably mounted on the pairs of guide rails 33 and 43 and driven by motors. Nuts (not shown) are formed on the rear surface side of the sliders 34 and 44, and ball screws 35 and 45 are screwed into these nut parts. Drive motors 36 and 46 connected to parts at one end of the ball screws 36 and 46 are rotatably driven, and thereby the insertion arm 31 and the removal arm 41 are transported and moved in the Y-axis direction along the pairs of guide rails 33 and 43.

[0022] As in Fig. 2, the machining feed mechanism 50, which moves the chuck table 14 in the machining feed direction, which is the X-axis direction, is arranged on a base 19 in the housing 10 and the support base 13 (see Fig. 1). The machining feed mechanism 50 includes a pair of guide rails 51 arranged on the base 19 and parallel to the X-axis direction, and an X-axis table 52 slidably mounted on the pair of guide rails 51 and driven by a motor. A nut member (not shown) is formed on the rear side of the X-axis table 52, and a ball screw 53 is screwed into this nut member. A drive motor 54 connected to a part at one end of the ball screw 53 is rotationally driven, thereby moving the chuck table 14 in the machining feed direction along the pair of guide rails 51.

[0023] A gate-shaped upright wall portion 20, which is arranged upright in such a manner as to straddle the movement path of the chuck table 14, is arranged on the base 19. The upright wall portion 20 is equipped with an index feed mechanism (index feed unit) 60 that moves machining units (machining means) 70 in an index feed direction, which is the Y-axis direction perpendicular to the machining feed direction, and a notch feed mechanism (notch feed unit) 65 that moves the machining units 70 in a notch feed direction, which is a Z-axis direction. The index feed mechanism 60 includes a pair of guide rails 61 arranged on the front surface side of the upright wall portion 20 and parallel to the Y-axis direction, and Y-axis tables 62 slidably arranged on the pair of guide rails 61.The cutting feed mechanisms 65 each have a pair of guide rails 66 arranged on the Y-axis table 62 and extending parallel to the Z-axis direction, and a Z-axis table 67 is slidably arranged on the pair of guide rails 66.

[0024] The machining units 70 that cut the workpiece W are arranged below the respective Z-axis tables 67. A nut portion is formed on the rear surface side of each of the Y-axis tables 62, and the Z-axis tables 67 and ball screws 63 and 68 are screwed into these nut portions. Drive motors 64 and 69 are connected to a portion at one end of the ball screws 63 for the Y-axis tables 62 and the ball screws 68 for the Z-axis tables 67, respectively. The respective ball screws 63 and 68 are rotationally driven by the drive motors 64 and 69. Thus, each piece of the machining units 70 is moved along the guide rails in the index feed direction 61, and each piece of the machining units 70 is moved along the guide rails in the cut-in feed direction 66.

[0025] The cutting blade 71, which processes the workpiece W held by the clamping table 14, is rotatably mounted on a spindle of each of the machining units 70. Each cutting blade 71 is formed into a circular disk shape by bonding, for example, diamond abrasive grains with a bonding agent. An imaging unit (imaging means) 73, which images the workpiece W held by the clamping table 14, is arranged on a spindle housing of the machining units 70. The workpiece W imaged by the imaging unit 73 is displayed on the display unit 75 (see Fig. 1), and various operations such as learning at the time of alignment and hairline adjustment are performed on the screen. Furthermore, the cutting device 1 is provided with a control unit (control means) 80 (see Fig. 4), which carries out the overall control of the respective parts of the device.

[0026] As in the comparison example of Fig. 3A, the manual hairline adjustment is carried out by setting a reference line 93 of the imaging unit 73 (see Fig. 2) to the middle position of a machined groove 92 in the width direction on a stop screen 90. The positional relationship between the center line of the cutting blade 71 (see Fig. 2) and the reference line 93 of the imaging unit 73 is corrected by hairline adjustment. Hairline adjustment is performed each time the cutting blade 71 is replaced. Furthermore, hairline adjustment is performed after machining is interrupted to correct any deviation caused during machining in the positional relationship between the cutting blade 71 and the imaging unit 73. To correct the deviation caused during machining, the reference line 93 of the imaging unit 73 must be adjusted to the center position of the last machined groove 92 at the time of interrupting machining.

[0027] However, as in the comparison example of Fig. 3B, when the imaging unit 73 is moved to check the machining quality of another machined groove 92 at the time of interrupting machining, the last machined groove 92 leaves the stop screen 90, and the view of this machined groove 92 is lost in some cases. Even if an attempt is made to return the stop screen 90 to the original position, it is difficult to return it to the accurate position by manual operation, and it is difficult to determine whether the machined groove 92 in the stop screen 90 is the last machined groove 92 or not. Moreover, in the cutting device 1 of the present embodiment, the machined grooves 92 are simultaneously formed by the cutting blades 71 on the first spindle side and the second spindle side.Therefore, even if the last machined groove 92 is displayed on the stop screen 90, it is impossible to immediately determine which of the cutting blades 71 on the first spindle side and on the second spindle side machined this machined groove 92.

[0028] Thus, in the present embodiment, a mark 85a or 85b (see Fig. 4), which shows the last machined groove 92, in a recorded Fig. obtained by imaging from the imaging unit 73 is displayed in a superimposed manner, and the operator is enabled to recognize the position of the last-machined groove 92. Furthermore, the marks 85a and 85b are provided with labels representing the last-machined grooves 92 machined by the cutting blades 71 on the first spindle side and the second spindle side, respectively, and the operator is enabled to recognize which cutting blade 71 machined the last-machined groove 92. This can cause the reference line of the imaging unit 73 to coincide with the center position of the last-machined groove 92 and prevent an operation error such as performing hairline adjustment on a machined groove other than the last-machined groove 92.

[0029] The display control of the display screen is described below with reference to Fig. 4 described. Fig. 4 is a block diagram illustrating the display control of the display unit in the present embodiment.

[0030] As in Fig. As shown in Figure 4, the display unit 75 is, for example, a capacitive touch panel, and the stop screen 90 is displayed thereon at the time of interruption of processing. On the stop screen 90, the recorded Fig. the machined groove 92 formed by machining the workpiece W by the machining units 70, which was obtained by imaging by the imaging unit 73, is displayed. The control unit 80, which carries out the display control of the display screen, is connected to the display unit 75 and the imaging unit 73. The control unit 80 is equipped with a last-machined groove Y-coordinate storage part 81, which stores the Y-coordinate of the last-machined groove 92, a mark storage part 82, which stores the marks 85a and 85b indicating the last-machined groove 92, and a display control part 83, which displays the mark 85a or 85b on the recorded Fig. based on the Y coordinate in an overlaid manner.

[0031] In the last-machined groove Y-coordinate storage section 81, the Y-coordinate is stored, which is the center position of the last-machined groove 92 formed by the immediately preceding machining operation. In this case, the index feed of the cutting blade 71 (see Fig. 6A) is performed in the Y-axis direction, and its position is adjusted to a line of the workpiece W. Then, the workpiece W is machined by the cutting blade 71 along the line. When the machining by the cutting blade 71 is interrupted, the Y coordinate of the center in a width direction of the cutting blade 71 at the time of interruption of the machining is stored in the last-machined groove Y coordinate storage part 81 as the Y coordinate of the last-machined groove 92. In the last-machined groove Y coordinate storage part 81, the Y coordinate of the last-machined groove 92 is updated each time the machining of the workpiece W is interrupted.

[0032] In the marking storage part 82, the marks 85a and 85b formed with arrow images are stored. The mark 85a is provided with a marking Z1, which represents the last machined groove 92 machined by the cutting blade 71 on the first spindle side, and the mark 85b is provided with a marking Z2, which represents the last machined groove 92 machined by the cutting blade 71 on the second spindle side. Due to the markings Z1 and Z2 with which the marks 85a and 85b have been provided, it is possible to immediately visually distinguish which of the cutting blades 71 on the first spindle side and the cutting blade 71 on the second spindle side has the last machined groove 92 in the recorded Fig. edited.

[0033] In the display control part 83, the mark 85a or the mark 85b is displayed in a superimposed manner on the recorded image displayed by the display unit 75. Fig. shown. In this case, the current imaging position is obtained from the imaging unit 73, and the Y coordinate of the last-machined groove 92 is acquired from the last-machined groove Y coordinate storage part 81. Furthermore, the mark 85a or the mark 85b is selectively acquired from the mark storage part 82, depending on whether the imaging unit 73 is present on the first spindle side or the second spindle side. Then, the mark 85a or the mark 85b is positioned on the acquired image based on the Y coordinate of the last-machined groove 92, and the direction indicated by the mark 85a or the mark 85b is switched according to the current imaging position of the imaging unit 73 and the Y coordinate of the last-machined groove 92.

[0034] For example, if the current imaging position of the imaging unit 73 is in a predetermined range centered on the Y coordinate of the last machined groove 92, the mark 85a or 85b is printed in the horizontal direction on the recorded Fig. and the last machined groove 92 is indicated by the mark 85a or 85b from the X-axis direction (see Fig. 6B). Furthermore, if the current imaging position of the imaging unit 73 is outside the predetermined range centered on the last machined groove 92, the mark 85a or 85b is moved in the vertical direction on the recorded Fig. and the last machined groove 92 is indicated from the Y-axis direction by the mark 85a or 85b (see Fig. 5B). The mark 85a or 85b identifies the position of the last machined groove 92 based on the current image position.

[0035] In this way, the mark 85a or the mark 85b on the captured image is displayed so as to indicate the last machined groove 92 on the display unit 75. The respective parts of the control unit 80 are formed of a processor, a memory, and so on, which perform various types of processing. The memory is formed of one or more storage media such as a read-only memory (ROM) and a random access memory (RAM) depending on the purpose. In the memory, for example, a program for driving the respective parts of the device and a program for display control are stored. Furthermore, the control unit 80 may be arranged exclusively for the display unit 75, separate from the control of the entire cutting device 1.

[0036] With reference to Fig. 5A, Fig. 5B and Fig. Figure 5C describes an example of the stop screen showing the last machined groove. Fig. 5A, Fig. 5B and Fig. 5C are diagrams illustrating one example of the stop screen in the present embodiment. In Fig. 5A, Fig. 5B and Fig. 5C, the description is made, where appropriate, using numbers in Fig. 4. Although an example of the stop screen of the first spindle side with Fig. 5A, Fig. 5B and Fig. 5C, the same stop screen is also used for the second spindle side.

[0037] As in Fig. As shown in Figure 5A, the recorded Fig. displayed on the stop screen 90 of the cutting device 1 (see Fig. 1). On this recorded Fig. the reference line 93 of the imaging unit 73 is displayed and the mark 85a indicating the last machined groove 92 is displayed. When the Y-coordinate of the reference line 93 of the imaging unit 73 coincides with the Y-coordinate of the last machined groove 92, the mark 85a of the last machined groove 92 is superimposed in the state in which it is aligned in the X-axis direction. By visually recognizing the mark 85a, the operator can recognize that the recorded Fig. The machined groove 92 shown is the last one. Although the Y coordinates of the machined groove 92 and the reference line 93 are the same here, hairline adjustment is performed if a deviation exists between these Y coordinates.

[0038] The mark 85a is formed from an arrow image, and the arrow image is provided with the label Z1, which represents the first spindle side. This can cause the operator to recognize that the last machined groove 92 indicated by the mark 85a is the last machined groove 92 machined by the cutting blade 71 on the first spindle side. Not only the mark 85a of the machined groove 92 machined by the cutting blade 71 on the first spindle side, but also the mark 85b (see Fig. 4) the machined groove 92, which is machined by the cutting blade 71 on the second spindle side, can be in the recorded Fig. This can cause the operator to simultaneously identify the last machined groove 92 of the first spindle side and the last machined groove 92 of the second spindle side in a stop screen 90.

[0039] In addition, the recorded Fig. In addition to the reference line 93 of the imaging unit 73 and the marker 85a, various operation buttons are displayed. For example, movement buttons 94 for moving the imaging unit 73 (reference line 93) in the Y-axis direction are displayed by manual operation along the right side of the recorded image. Fig. and movement buttons 95 for moving the imaging unit 73 (reference line 93) in the X-axis direction by a manual operation along the lower side of the recorded Fig. In addition, along the left side of the recorded Fig. from the top, a shift key 96 for the macro display, a shift key 97 for the micro display and a position setting key 98 are displayed to automatically cause the Y coordinate of the reference line 93 of the imaging unit 73 to coincide with the Y coordinate of the last machined groove 92.

[0040] As in Fig. As shown in Fig. 5B, when the imaging unit 73 is moved using the move key 94, the orientation of the marker 85a is switched according to the distance between the Y coordinate of the reference line 93 and the Y coordinate of the machined groove 92. For example, when the imaging unit 73 is moved in the Y-axis direction and the reference line 93 of the imaging unit 73 based on the machined groove 92 goes out of the predetermined range, the orientation of the marker 85a is switched from the X-axis direction to the Y-axis direction, and the last machined groove 92 is indicated by the marker 85a from the Y-axis direction. Due to this, even when the imaging unit 73 is moved from the last machined groove 92 and quality control or the like is performed on another machined groove 92, it is possible to cause the operator to recognize the position of the last machined groove 92.

[0041] As in Fig. 5C, the distance from the Y-coordinate of the reference line 93 (current image position) to the Y-coordinate of the last machined groove 92 in the recorded Fig. This can cause the operator to recognize, in addition to the position of the last machined groove 92, the offset amount between the last machined groove 92 and the reference line 93. Furthermore, the distance from the Y coordinate of the last machined groove 92 to the Y coordinate of the reference line 93 of the imaging unit 73 can be displayed as the number of lines of the machined grooves. Although the embodiment in which the mark 85a in the recorded Fig. shown in a micro display, in Fig. 5A, Fig. 5B and Fig. 5C, the mark 85a is similar to the recorded Fig. also displayed in a macro display.

[0042] With reference to Fig. 6A, Fig. 6B, Fig. 6C and Fig. 6D describes an example of display control by the display control part. Fig. 6A, Fig. 6B, Fig. 6C and Fig. 6D are diagrams illustrating one example of display control in the present embodiment. In Fig. 6A, Fig. 6B, Fig. 6C and Fig. 6D, the description is made, where appropriate, using numbers in Fig. 4. Although the display control of the machined groove of the first spindle side with Fig. 6A, Fig. 6B, Fig. 6C and Fig. 6D, the display control is also carried out for the second spindle side according to the same procedure.

[0043] As in Fig. 6A, is processed by the cutting device 1 (see Fig. 1) the imaging unit 73 is positioned on the last machined groove 92 based on a predetermined distance L from the reference line 93 of the imaging unit 73 to the center in the width direction of the cutting blade 71 and the cutting position (Y coordinate) of the cutting blade 71. In addition, the display control part 83 acquires the Y coordinate of the last machined groove 92 from the Y coordinate position storage part 81 of the last machined groove, and the mark 85a is acquired from the mark storage part 82. Then, the acquired Fig. including the last machined groove 92 is recorded by the imaging unit 73 and the reference line 93 of the imaging unit 73 is recorded in the Fig. In addition, the marking 85a is displayed, which indicates the last machined groove 92 (see Fig. 6B and Fig. 6C).

[0044] As in Fig. As shown in Fig. 6B, when the Y coordinate of the reference line 93 of the imaging unit 73 falls within a predetermined range R centered on the Y coordinate of the last machined groove 92, the mark 85a is displayed in a horizontally aligned state based on the Y coordinate of the last machined groove 92 in a superimposed manner on the last machined groove 92. For example, the direction of the mark 85a is aligned in the X-axis direction in the state where the tip of the arrow of the mark 85a is positioned on the Y coordinate of the last machined groove 92. For this reason, the operator recognizes that the machined groove 92 indicated by the tip of the arrow of the mark 85a is the last machined groove 92.In addition, due to the marking Z1 of the mark 85a, the operator recognizes that this machined groove 92 is the last machined groove 92 machined by the cutting blade 71 on the first spindle side.

[0045] As in Fig. As shown in Fig. 6C, when the imaging unit 73 is moved and the Y coordinate of the reference line 93 of the imaging unit 73 exits the predetermined range R centered on the Y coordinate of the last-machined groove 92, the orientation of the mark 85a is switched from the horizontal direction to the vertical direction. For example, in the state where the tip of the arrow of the mark 85a is positioned at the Y coordinate of the last-machined groove 92, the direction of the mark 85a is aligned in the Y-axis direction. As above, the direction indicated by the mark 85a is switched by the display control part 83 according to the distance from the Y coordinate of the last-machined groove 92 to the Y coordinate of the reference line 93 (current imaging position). The predetermined range R is a range set in advance by the operator for the cutting device 1.

[0046] Although the tip of the arrow of marker 85a in Fig. 6B and Fig. 6C is positioned at the Y-coordinate of the last machined groove 92, the present invention is not limited to this embodiment. The tip of the arrow of the mark 85a may deviate from the Y-coordinate of the last machined groove 92, and it is sufficient if the mark 85a on the recorded Fig. at least arranged in such a superimposed manner that it indicates the last machined groove 92. For example, as in Fig. 6D, the last machined groove 92 is not in the recorded Fig. is included, the tip of the arrow of the mark 85a is not positioned at the Y coordinate of the last machined groove 92 and the mark 85a only indicates the direction in which the last machined groove 92 exists with respect to the reference line 93 of the imaging unit 73.

[0047] As described above, according to the cutting device 1 of the present embodiment, the mark 85a or 85b indicating the last machined groove 92 is displayed by the display unit 75 in a superimposed manner on the recorded Fig. Since the last machined groove 92 on the recorded Fig. by the mark 85a or 85b, it is possible to ensure that the operator always recognizes the position of the last machined groove 92. Furthermore, the view of the last machined groove 92 is not lost even if the imaging unit 73 is moved and a location other than the last machined groove 92 is checked.

[0048] In the present embodiment, a touch panel integrating the display function and the operation function is exemplified as the display unit. However, the present invention is not limited to this configuration. The display unit may be formed by a display serving exclusively as a display, with the operation function being transferred to another input device.

[0049] Furthermore, in the present embodiment, the configuration that moves the chuck table in the machining feed direction relative to the machining units is used as the machining feed mechanism. However, the present invention is not limited to this configuration. It suffices if the machining feed mechanism is a configuration that moves the chuck table and the machining units relatively in the machining feed direction, and a configuration that moves the machining units in the machining feed direction relative to the chuck table may be employed.

[0050] Furthermore, in the present embodiment, the configuration that moves the machining units in the index feed direction relative to the chuck table is used as the index feed mechanism. However, the present invention is not limited to this configuration. It suffices if the index feed mechanism is a configuration that moves the chuck table and the machining units relatively in the index feed direction, and a configuration that moves the chuck table in the index feed direction relative to the machining units may be used.

[0051] Although the marker is formed from the arrow image in the present embodiment, the present invention is not limited to this configuration. It is sufficient for the marker to have a shape indicating the last machined groove, and the marker may be formed from, for example, a finger mark.

[0052] Furthermore, in the present embodiment, the configuration in which the orientation of the mark is switched between the Y-axis direction and the X-axis direction is used. However, the present invention is not limited to this configuration. It is sufficient if the orientation of the mark is an orientation indicating the last machined groove, and the mark may be oriented in an oblique direction, for example.

[0053] Although the configuration in which the marking is provided with the marking is adopted in the present embodiment, the present invention is not limited to this configuration. If it is not necessary to distinguish the first spindle side and the second spindle side, as in a single-spindle machining device, the marking need not be provided with the marking.

[0054] Although the description in the present embodiment is made by illustrating a two-spindle cutting device as a machining device, the present invention can be applied to other machining devices that form machined grooves on a workpiece. For example, other machining devices such as a single-spindle cutting device, a laser machining device, and a cluster device obtained by combining can be used.

[0055] In addition, various products such as a semiconductor substrate, an inorganic material substrate, and a packaging substrate can be used as the workpiece. Various substrates made of silicon, gallium arsenide, gallium nitride, silicon carbide, and so on can be used as the semiconductor substrate. Various substrates made of sapphire, ceramic, glass, and so on can be used as the inorganic material substrate. Devices can be formed on the semiconductor substrate, and the inorganic material substrate or the devices need not be formed thereon. Various boards for a chip size package (CSP), a wafer level chip size package (WLCSP), a system-in-package (SIP), and a fan-out wafer level package (FOWLP) can be used as the packaging board. A shield can be formed on the packaging board as a countermeasure against electromagnetic interference (EMI).In addition, lithium tantalate, lithium niobate, raw ceramics and piezoelectric material can be used as a product after forming devices or before forming devices.

[0056] Moreover, although the present embodiments and modification examples are described, what is obtained by combining the above-described embodiments and modification examples in whole or in part can be used as other embodiments of the present invention.

[0057] As described above, the present invention has an effect that the last machined groove can always be recognized without losing sight of the last machined groove, and is particularly effective for a machining device that machines a workpiece with a cutting blade.

Claims

[1] Processing device (1), comprising: a clamping table (14) holding a workpiece (W); a machining unit (70) which forms a machined groove on the workpiece (W) held by the clamping table (14); a machining feed mechanism (50) that relatively moves the chuck table (14) and the machining unit (70) in a machining feed direction, which is an X-axis direction; an index feed mechanism (60) that relatively moves the chuck table (14) and the machining unit (70) in an index feed direction, which is a Y-axis direction perpendicular to the machining feed direction; an imaging unit (73) which images the workpiece (W) held by the clamping table (14); a display unit (75) that displays a captured image of a machined groove obtained by imaging the machined groove formed by the machining of the workpiece (W) by the machining unit (70) by the imaging unit (73); and a control unit (80), wherein the control unit (80) a storage part (81) for a Y coordinate of a last machined groove (92) which stores a Y coordinate of a last machined groove (92), and a display control part (83) that causes a mark (85a, 85b) indicating the last machined groove (92) based on the Y coordinate to be displayed to be displayed in a superimposed manner on the captured image displayed on the display unit (75). [2] The machining apparatus according to claim 1, wherein the display control part (83) changes a direction indicated by the mark according to a current imaging position of the imaging unit (73) and the Y coordinate of the last machined groove (92).

Images