Sealing ring structure with zigzag pattern and method for forming it

Abstract

Procedure, comprehensive: Forming a plurality of dielectric layers (38, 38A); forming a lower section of a sealing ring (42) comprising a plurality of metal layers, each of which extends into one of the plurality of dielectric layers (38, 38A); Application of a first passivation layer (40) over the majority of dielectric layers (38, 38A); Forming an opening (66) in the first passivation layer (40); Forming a through-hole ring (58SR) in the opening (66), which is physically brought into contact with the lower section of the sealing ring (42); Forming a metal ring (60SR) over the first passivation layer (40) and connected to the via ring (58SR), wherein the via ring (58SR) and the metal ring (60SR) form an upper section of the sealing ring (42), and wherein the metal ring (60SR) has a first edge section (42E) with a zigzag pattern; Forming a second passivation layer (62) on the metal ring (60SR); and Performing a singulation process to form a device die, wherein the sealing ring (42) is arranged near edges of the device die, including the formation of the metal ring (60SR) and the via ring (58SR): Forming a covering metal seed layer (48) which extends into the openings (66), wherein the metal seed layer (48) has a copper layer in contact with the passivation layer (40); Plating of a conductive material (54); and Etching of a section of the metal seed layer (48) which is not overlapped by the conductive material (54).

Description

BACKGROUND

[0001] US 9,627,332 B1 relates to the formation of sealing rings as part of the back-end process in semiconductor manufacturing. US 2021 / 0028129 A1 relates to a semiconductor device. US 2016 / 0247771 A1 relates to a semiconductor device with a sealing ring structure surrounding a chip area and a method for manufacturing the device. US 2010 / 0240211 A1 relates to a semiconductor device with a multilayer wire structure and a method for manufacturing it.

[0002] In wafer-level packaging technology, O-ring structures are formed at the edges of the device dies and used to protect the circuits they surround. The O-ring prevents moisture from penetrating the device dies and affecting the circuits they enclose. The O-rings can extend across multiple layers of the integrated circuit structure, such as low-k dielectric layers and the overlying passivation layers. BRIEF DESCRIPTION OF THE DRAWINGS

[0003] Aspects of this disclosure are best understood with reference to the following detailed description in conjunction with the accompanying drawings. It should be noted that, in accordance with industry practice, various features / elements are not shown to scale. In fact, the dimensions of the various features / elements may have been arbitrarily enlarged or reduced for the sake of clarity. The Fig. Figures 1-8 represent cross-sectional views of intermediate stages in the formation of a component die, which has curved sealing rings in accordance with some embodiments. Fig. Figure 9 shows a top view of a component die and sealing rings arranged therein, in accordance with some embodiments. Fig. Figure 10 shows a top view of a device wafer and component die and sealing rings arranged therein in accordance with some embodiments. Fig. Figure 11 shows an enlarged view of an edge section of a component die in accordance with some embodiments. The Fig. Figures 12-17 represent the curved sections of sealing rings in accordance with some embodiments. Fig. Figure 18 represents straight corner sections of sealing rings in accordance with some embodiments. Fig. Figure 19 describes a process flow for forming a sealing ring in accordance with some embodiments. DETAILED DESCRIPTION

[0004] The following disclosure provides numerous different embodiments, or examples, for implementing various features / elements of the invention. Specific examples of components and arrangements are described below to simplify the present disclosure. These are, of course, only examples and are in no way intended to be limiting. For example, forming a first element over or on a second element in the following description may include embodiments in which the first and second elements are formed in direct contact with each other, but may also include embodiments in which additional elements may be formed between the first and second elements in such a way that the first and second elements cannot be arranged in direct contact with each other.Furthermore, the present disclosure may repeat reference numerals and / or symbols in the various examples. This repetition serves the purpose of simplification and clarity and does not in itself prescribe a relationship between the various embodiments and / or configurations discussed.

[0005] Furthermore, terms of spatial relationships, such as "underlying," "below," "lower," "above," "upper," and the like, may be used herein for the sake of simplicity to describe the relationship of one element or feature to another element(s) or feature(s) shown in the figures. The terms of spatial relationships are intended to encompass various orientations of the device during use or operation, in addition to the orientation depicted in the figures. The device may be oriented differently (rotated by 90 degrees or in other orientations), and the terms of spatial relationships used herein may be interpreted accordingly.

[0006] A sealing ring and the method for forming it are provided. In accordance with some embodiments of the present disclosure, the sealing ring has lower sections in dielectric layers with a low k-value and an upper section in a passivation layer. The sealing ring can have a plurality of sections, with adjacent sections being offset from one another to form a zigzag pattern. By offsetting the sections from one another, the otherwise long sections are subdivided into shorter sections. Otherwise, a section of the sealing ring might extend substantially from one edge of the component die in question to the opposite edge, and a high stress could be generated in the sealing ring and the overlying passivation layer, leading to cracking and delamination.The embodiments discussed herein are intended to provide examples to enable the manufacture or use of the subject matter of this disclosure, and adequately trained persons will readily recognize modifications that may be made without departing from the intended scope of the various embodiments. The same reference numerals are used in the various views and illustrative embodiments to identify the same elements. Although embodiments of the method may be discussed as if carried out in a particular sequence, other embodiments of the method may be carried out in any logical order.

[0007] The Fig. Figures 1 to 8 represent cross-sectional views of intermediate stages in the formation of a component die and a sealing ring arranged therein, in accordance with some embodiments of the present disclosure. The corresponding processes are also described in the process flow, which is in Fig. Figure 19 is shown schematically.

[0008] Fig. Figure 1 shows a cross-sectional view of the package component 20. In accordance with some embodiments of the present disclosure, the package component 20 is, or comprises, a component wafer which includes active components and possibly passive components, which are depicted as integrated circuit devices 26. The package component 20 may include a plurality of chips 22 therein, one of which is shown. In accordance with alternative embodiments of the present disclosure, the package component 20 is an intermediate wafer which is free of active components and may or may not include passive components. In accordance with further alternative embodiments, the package component 20 is, or comprises, a package substrate strip which includes, or comprises, a coreless package substrate or a cored package substrate with a core arranged therein.In accordance with additional alternative embodiments of the present disclosure, the package component 20 is a reconstructed wafer comprising discrete device dies and a molding compound that forms the device dies therein. In the following discussion, a device wafer is used as an example of the package component 20, and the package component 20 may also be referred to as wafer 20. The embodiments of the present disclosure may also be applied to intermediate wafers, package substrates, packages, etc.

[0009] In accordance with some embodiments of the present disclosure, the wafer 20 comprises the semiconductor substrate 24 and the elements formed on a top surface of the semiconductor substrate 24. The semiconductor substrate 24 may be composed of or contain crystalline silicon, crystalline germanium, silicon-germanium, carbon-doped silicon, or a III-V composite semiconductor, such as GaAsP, AlInAs, AlGaAs, GaInAs, GaInP, GaInAsP, or the like. The semiconductor substrate 24 may also be a solid semiconductor substrate or a semiconductor-on-insulator (SOI) substrate. Shallow trench isolation regions (STI regions) (not shown) may be formed in the semiconductor substrate 24 to isolate the active regions within the semiconductor substrate 24.Although not shown here, vias may be formed (or not formed) which extend into the semiconductor substrate 24, the vias being used to electrically connect the elements on opposite sides of the wafer 20.

[0010] In accordance with some embodiments of the present disclosure, the wafer 20 has integrated circuit devices 26 formed on the top surface of the semiconductor substrate 120. In accordance with some embodiments, the integrated circuit devices 26 may comprise complementary metal-oxide-semiconductor transistors (CMOS transistors), resistors, capacitors, diodes, and the like. Details of integrated circuit devices 26 are not shown herein. In accordance with alternative embodiments, the wafer 20 is used to form intermediate elements (which are free of active components), and the substrate 24 may be a semiconductor substrate or a dielectric substrate.

[0011] The interlayer dielectric (ILD) 28 is formed over the semiconductor substrate 24 and fills the spaces between the gate stacks of the transistors (not shown) in integrated circuit devices 26. In accordance with some embodiments, the ILD 28 is made of phosphosilicate glass (PSG), borosilicate glass (BSG), boron-doped phosphosilicate glass (BPSG), fluorine-doped silicate glass (FSG), silicon oxide, silicon nitride, or silicon oxynitride (SiO₂). x N y ), dielectric materials with a low k-value or the like, or contain them. The ILD 28 can be formed using rotational coating, flowable chemical vapor deposition (FCVD), plasma-enhanced chemical vapor deposition (PECVD), low-pressure chemical vapor deposition (LPCVD), or the like.

[0012] Contact terminals 30 are formed in the ILD 28 and are used to electrically connect integrated circuit devices 26 to overlying metal traces and vias. In accordance with some embodiments of the present disclosure, the contact terminals 30 are formed from or contain a conductive material selected from the group consisting of tungsten, aluminum, copper, titanium, tantalum, titanium nitride, tantalum nitride, alloys thereof, and / or multiple layers thereof. The formation of the contact terminals 30 may include forming contact openings in the ILD 28, filling the contact openings with one or more conductive materials, and performing a planarization process (such as a chemical-mechanical polishing (CMP) process or a mechanical grinding process) to bring the top surfaces of the contact terminals 30 into a plane with the top surface of the ILD 28.

[0013] Metal conductors 34 and vias 36 are formed above the ILD 28 and the contact terminals 30. The contact terminals and the overlying metal conductors and vias are collectively referred to as the interconnect structure 32. The metal conductors 34 and the vias 36 are formed in dielectric layers 38 (also referred to as intermetal dielectrics (IMDs)). The metal conductors on the same plane are hereinafter collectively referred to as a metal layer. In accordance with some embodiments of the present disclosure, the interconnect structure 32 has a plurality of metal layers, which include the metal conductors 34 interconnected by the vias 36. The metal conductors 34 and the vias 36 may be formed of copper or copper alloys, and may also be formed of other metals.In accordance with some embodiments of the present disclosure, the dielectric layers 38 are formed from dielectric materials with low k-values. The dielectric constants (k-values) of the low-k-value dielectric materials may, for example, be lower than approximately 3.0. The dielectric layers 38 may contain low-k-value carbon-containing dielectric materials, hydrogen silses quioxane (HSQ), methyl silses quioxane (MSQ), or the like. In accordance with some embodiments of the present disclosure, the formation of the dielectric layers 38 comprises the deposition of a porous dielectric material in the dielectric layers 38 and the subsequent execution of a curing process to displace the porous material, leaving the remaining dielectric layers 38 porous.

[0014] The formation of the metal conductors 34 and the vias 36 in the dielectric layers 38 can involve single-damascus processes and / or double-damascus processes. In a single-damascus process for forming a metal conductor or a via, a trench or via opening is first formed in one of the dielectric layers 38 before the trench or via opening is filled with a conductive material. A planarization process, such as a CMP process, is then performed to remove the excess portions of the conductive material above the top surface of the dielectric layer, leaving a metal conductor or a via in the trench or via opening.In a double Damascus process, both a trench and a via are formed in a dielectric layer, with the via being located below and connected to the trench. Conductive materials are then deposited into the trench and the via to form a metal conductor and a via, respectively. The conductive materials may include a diffusion barrier and a copper-containing metal material above the diffusion barrier. The diffusion barrier may contain titanium, titanium nitride, tantalum, tantalum nitride, or similar materials.

[0015] The metal conductors 34 have top conductive (metal) elements, such as metal conductors, metal pads, or vias (designated 34A), in a top dielectric layer (designated dielectric layer 38A), which is the top layer of the dielectric layers 38. The vias 36 in the top dielectric layer 38A are also referred to as top vias 36A. In some embodiments, the dielectric layer 38A is formed from a dielectric material with a low k-value, which is the same as the material of the lower dielectric layers 38. In other embodiments, the dielectric layer 38A is formed from a dielectric material with a non-low k-value, which may contain silicon nitride, undoped silicate glass (USG), silicon oxide, or the like.The dielectric layer 38A can also have a multilayer structure, such as two USG layers with a silicon nitride layer between them. The top metal elements 34A can also be made of copper or a copper alloy and can have a double damascus or single damascus structure. The dielectric layer 38A is sometimes referred to as the top dielectric layer.

[0016] The passivation layer 40 (sometimes referred to as passivation-1 or pass-1) is formed above the interconnect structure 32. The process in question is in process flow 200, which is in Fig. Figure 19 is shown as process 202. In accordance with some embodiments, the passivation layer 40 is formed from a dense dielectric material with a non-low k-value, which has a dielectric constant equal to or higher than that of silicon oxide. The passivation layer 40 can be made from an inorganic dielectric material, which may be selected from, but not limited to, silicon nitride (SiN₂). x ), silicon dioxide (SiO2), silicon oxynitride (SiON x ), silicon oxycarbide (SiOC x) or the like, combinations thereof and / or multiple layers thereof, may be formed or may contain them. The value “x” represents the relative atomic ratio. In accordance with some embodiments, the top surfaces of the top dielectric layer 38A and the metal conductors 34A are coplanar. Accordingly, the passivation layer 40 may be a planar layer. In accordance with alternative embodiments, the top conductive elements protrude higher than the top surface of the top dielectric layer 38A, and the passivation layer 40 is not planar.

[0017] Fig. Figure 10 shows a top view of a wafer 10 and the device die 22 therein. In accordance with some embodiments, each of the component dies 22 has a sealing ring 42, as shown in Fig. Figure 10 shows that the sealing ring 42 is formed as a closed ring (without interruptions therein) which has four sections, each section being located close to an edge of the respective component die 22 and near a respective parting line 44. The parting lines 44 are the areas in the wafer 20 and between the component dies 22, and the future notches that are created when the die is sawn in the wafer 20 can pass through the parting lines 44.

[0018] Referring again to Fig. 1. The sealing ring 42 has several contact terminals 30 (also designated 30SR), several metal conductors 34 (also designated 34SR), and several vias 36 (also designated 36SR). The contact terminals 30SR, the metal conductors 34SR, and the vias 36SR are formed simultaneously and utilize the same formation process as the other contact terminals 30, metal conductors 34, and vias 36, which are used for electrical connections. All of the contact terminals 30SR, metal conductors 34SR, and vias 36SR in the sealing ring 42 can be physically connected to the elements above and below them to form an integrated sealing ring.All of the contact terminals 30SR, metal conductors 34SR and vias 36SR can form a closed ring which, when viewed from above, has no interruption.

[0019] In some embodiments, the contact terminals 30SR are electrically connected to the semiconductor substrate 24. Silicide regions may (or may not) be formed between the contact terminals 30SR and the semiconductor substrate 24, and physically connected to them. In alternative embodiments, the contact terminals 30SR are in physical contact with the semiconductor substrate 24. In other alternative embodiments, the contact terminals 30SR are spaced apart from the semiconductor substrate 24 by a dielectric layer, such as a contact etch stop layer (the underlying ILD 28, not shown), the ILD 28, and / or the like.

[0020] Referring to Fig. 2. The passivation layer 40 is structured in an etching process to form openings 46. The process in question is in process sequence 200, which is in Fig. Figure 19 is shown as process 204. The etching process can include a dry etching process, which involves forming a structured etching mask (not shown), such as a structured photoresist, and subsequently etching the passivation layer 40. The structured etching mask is then removed. The metal conductors 34A and 34SR are exposed through the openings 46.

[0021] Fig. Figure 3 represents the deposition of a metal seed layer 48. The process in question is in process sequence 200, which is in Fig. Figure 19 is shown as process 206. In accordance with some embodiments, the metal seed layer 48 has a copper layer in contact with the passivation layer 40. The deposition process can be carried out using physical vapor deposition (PVD), chemical vapor deposition (CVD), metal-organic chemical vapor deposition (MOCVD), or the like.

[0022] Next, a structured plating mask 50 is created. The relevant process is in process flow 200, which is in Fig. Figure 19 is shown as process 208. In accordance with some embodiments, a plating mask 50 is formed, which is made of or contains a photoresist. Openings 52 are formed in the structured plating mask 50 to expose the metal seed layer 48.

[0023] Then, conductive material (elements) 54 is applied to the openings 52 and to the metal seed layer 48. The relevant process is in process sequence 200, which is in Fig. Figure 19 is shown as process 210. In accordance with some embodiments of the present disclosure, the formation of the conductive material 54 comprises a plating process, which may include an electrochemical plating process, a currentless plating process, or the like. The plating is carried out in a chemical plating solution. The conductive material 54 may contain copper, aluminum, nickel, tungsten, or the like, or alloys thereof. In accordance with some embodiments, the conductive material 54 contains copper and is free of aluminum.

[0024] Next, the plating mask 50 is set, as in Fig. 3 shown, removed, and the resulting structure is in Fig. 4 shown. The process in question is in process flow 200, which is in Fig. Figure 19 is shown as process 212. In a subsequent process, an etching process is carried out to remove the sections of the metal seed layer 48 that are no longer protected by the overlying conductive material 54. The resulting structure is shown in Fig. 5 shown. The process in question is in process flow 200, which is in Fig. Figure 19 is shown as process 214. Throughout the description, the remaining conductive material 54 and the respective underlying metal seed layers 48 are collectively referred to as redistribution layers (RDLs) 56, which have vias 58 (also referred to as vias) extending into the passivation layer 40, and traces / conductor sections 60 (also referred to as metal conductors) above the passivation layer 40.

[0025] The RDLs 56 feature a via ring 58SR and a metal ring 60SR, which become an upper section of the sealing ring 42. The via ring 58SR is in physical contact with the underlying metal ring 34SR. Both the via ring 58SR and the metal ring 60SR form a closed ring without any breaks and surround an inner area of ​​the component die 22. The RDLs 56 also feature the RDLs 56E, which are used for electrical connection. The RDLs 56E also feature vias 58E and metal pads / leads 60E, with the vias 58E physically contacting the uppermost metal elements 34A.

[0026] Referring to Fig. 6. The passivation layer 62 is applied. The process in question is in process flow 200, which is in Fig. Figure 19 is shown as process 216. The passivation layer 62 (sometimes referred to as passivation-2 or pass-2) is formed as a cover layer. In accordance with some embodiments, the passivation layer 62 is formed of or contains an inorganic dielectric material, which may include, but is not limited to, silicon nitride, silicon oxide, silicon oxynitride, silicon oxycarbide, or the like, combinations thereof, or multiple layers thereof. The material of the passivation layer 62 may be the same or a different material than that of the passivation layer 40. Deposition may be carried out by a conformal deposition process, such as ALD, CVD, or the like.Accordingly, the passivation layer 62 can be conformal, with the vertical and horizontal sections having the same or substantially the same thickness, for example, with a deviation of less than approximately 20 percent or 10 percent. It is understood that, regardless of whether the passivation layer 62 is formed from the same material as the passivation layer 40 or not, a discernible interface may be present, which may be visible, for example, in a transmission electron microscope image (TEM image), an X-ray diffraction image (XRD image), or an electron backscatter diffraction image (EBSD image) of the structure.

[0027] Referring to Fig. 7 A polymer layer 64 is applied, cured, and structured, forming openings 66 within it. The process in question is part of process sequence 200, which is described in Fig. Figure 19 is shown as process 218. The polymer layer 64 can contain a photosensitive or a non-photosensitive polymer. The photosensitive polymer can contain polyimide, polybenzoxazole (PBO), benzocyclobutene (BCB), or the like. Structuring the polymer layer 64 in the case of a photosensitive polymer can include performing an exposure process on the polymer layer 64 and subsequent development of the polymer layer 64 to form the aperture 66. In accordance with alternative embodiments in which the polymer layer 64 is not photosensitive, for example, if the polymer layer 64 contains a non-photosensitive epoxy / polymer, structuring the polymer layer 64 can include applying and structuring a photoresist over the polymer layer 64 and etching the polymer layer 64 using the structured photoresist to define aperture structures.

[0028] The passivation layer 62 is then structured in an etching process to widen the openings 66 downwards, thus exposing the underlying metal pads 60E. This process is part of process flow 200, which is described in Fig. Figure 19 is shown as process 220. In accordance with some embodiments, the etching process is carried out by means of a reactive ion etching process (RIE process). The etching gas may contain a carbon- and fluorine-containing gas, argon, oxygen (O₂), and nitrogen (N₂). No opening may be formed to expose the sealing ring 42.

[0029] Fig. Figure 8 represents the formation of electrical connectors 74 and vias 68. The process in question is in process flow 200, which is in Fig. Figure 19 is shown as process 222. In accordance with some embodiments, the formation process includes the application of an opaque metal seed layer (not shown) extending into the openings 66, the formation of a structured plating mask, and the plating of a conductive material into the opening in the plating mask. In accordance with some embodiments, the metal seed layer is a simple copper layer. The plated conductive material may contain copper, nickel, palladium, aluminum, lead-free solder, alloys thereof, and / or multiple layers thereof. The plating mask is then removed, followed by an etching process to remove the portions of the metal seed layer not covered by the plated conductive material, thereby forming the vias 68 and the electrical connectors 74. Fig. Figure 8 presents an example in which the electrical connectors 74 have metal columns 70 and solder pads 72. A remelting process is performed to remelt the solder pads 72. In some embodiments, the electrical connectors 74 can be micro-bumps or controlled collapsing chip interconnect bumps (C4 bumps).

[0030] In accordance with some embodiments, as in Fig. As shown in Figure 8, the undersides of the electrical connectors 74 are in physical contact with the metal conductors / pads 60E, which are arranged beneath the passivation layer 62. In accordance with alternative embodiments, several redistribution lines, which are post-passivation intermediate connections, can be formed between the metal conductors / pads 60E and the electrical connectors 74. Accordingly, the sealing ring(s) 42 can have several metal rings and via rings over and connected to the metal ring 60SR, the metal ring and the via ring extending to the same layers as the post-passivation intermediate connections.

[0031] In a subsequent process, the wafer 20 is separated, for example along the dividing lines 44 (see also Fig. 10) cut into discrete package components 22. The process in question is in process flow 200, which is in Fig. Figure 19 is shown as process 224. Although the package components 22 are consistent with some example implementation forms, component dies 22, the package components 22 can also be intermediate elements, package substrate, packages, or the like.

[0032] In subsequent processes, the component die 22 can be bonded to another package component, such as an intermediate element, a package substrate, a printed circuit board, a package, or the like. The electrical connectors 74 in the component die 22 can be bonded to the other package component by solder bonding. An underfill (not shown) can be placed between the component die 22 and the other package component.

[0033] Fig. Figure 9 shows a top view of the component die 22 in accordance with some embodiments. The component die 22 has edges 22E and corners 22C. A single sealing ring 42 or a plurality of sealing rings 42 may be formed near the circumference of the component die 22, with the outer sealing rings 42 surrounding the respective inner sealing ring 42. The following discussion may refer by way of example to one of the sealing rings, such as the outer sealing ring 42, but the discussion also applies to the other sealing rings 42. Each of the sealing rings 42 may have four edge sections 42E, which are parallel to the respective nearest edges 22E, and four corner sections 42C, which connect adjacent edge sections 42A. In accordance with some embodiments, the sealing ring 42 may have some sections 42R at the corners of the component die 22 as reinforcing structures.

[0034] The sealing ring(s) 42 surrounds / surround an inner area 76, which is used to form IC components 26 ( Fig. 8) and interconnect structures 32 are used. The sealing ring 42 can be electrically potential-free, electrically grounded, or electrically connected to the substrate 24.

[0035] The component die 22 has outer zones 78A (compare Fig. 11) which extend from the outer surfaces of the outermost sealing ring 42 to the nearest edge 22E of the component die 22. The outer zones 78A are also referred to as dummy sacrificial zones, since these zones can be cut during the singulation of the wafer 10 (although they are not intended to be cut) if the singulation process exhibits a greater deviation than expected. In accordance with some embodiments, the width W1 of the dummy sacrificial zone 78A can be greater than approximately 2.7 µm. The large width W1 leaves sufficient space for the polymer layer 64 ( Fig. 8) sufficient contact area on the dielectric layer 62 so that the adhesion of the polymer layer 64 to the passivation layer 62 is strong enough. The width W1 can also be in the range of approximately 5 µm to approximately 10 µm.

[0036] As in Fig. As shown in 9, inner zones are 78B (see also Fig. 11) arranged between the innermost sealing ring 42 and the inner area 76, and the inner zones 78B are sometimes referred to as sealing ring improvement zones. The width W2 ( Fig. 9 and Fig. 11) The sealing ring improvement zone 78B can be in the range of approximately 4 µm to approximately 8 µm. The minimum distance between the sealing ring 42 and its nearest RDL in the interconnect structure and the metal conductors can be greater than 4 µm to avoid violating design rules.

[0037] The zones covered by the sealing ring(s) and the zones between the sealing rings (if more than one sealing ring has been formed) are collectively referred to as sealing ring zones 78C (compare Fig. 11). In accordance with some embodiments, the width W3 of the sealing ring zones can be in the range of between approximately 4.5 µm and approximately 9 µm.

[0038] Fig. Figure 10 shows a top view of wafer 10 and the component die 22 within wafer 10. Separation lines 44 are formed to separate the component dies 22 from each other. Accordingly, the sealing rings 42 in the discrete component dies 22 are arranged near the edges of the component dies 22 after the singulation process.

[0039] Fig. Figure 11 shows an enlarged cross-sectional view of an edge section of a sealing ring 42, with a single sealing ring 42 being shown as an example. The cross-sectional view can be viewed through the cross-section 11 - 11 in Fig. 9 can be obtained (except that Fig. 9 shows two sealing rings 42, while Fig. 11 shows only one sealing ring 42). The width W1 of the dummy sacrificial zone 78A, the width W2 of the sealing ring improvement zone 78B and the width W3 of the sealing ring zone 78C are marked.

[0040] Fig. Figure 12 shows a top view of a section of the metal ring 60SR and the via ring 58SR in accordance with some embodiments. The section shown can be viewed in Fig. 9 in the areas 80. In accordance with some embodiments, the metal ring 60SR is bent and may have a zigzag pattern. The metal ring 60SR has a plurality of sections 60A and 60B. Throughout this description, the extension directions of the edges and centerlines of the sections are referred to as the extension directions of the respective sections. The sections 60A and 60B are longitudinally extended strips whose longitudinal directions are parallel to each other and parallel to the nearest edge 22E of the respective component die 22. The sections 60A and 60B are offset from each other. For example, the sections 60A and 60B oscillate apart with an oscillation area S1. The sections 60A and 60B each have centerlines 82A and 82B, respectively.Throughout this description, the oscillation ranges can be measured from the respective outer or inner edges of the sections of the sealing ring 42, or from the centerlines of the sections of the sealing ring 42. In accordance with some embodiments, the oscillation range S1 is greater than approximately 0.1 µm and can be in the range of approximately 0.5 µm to approximately 2.5 µm.

[0041] In other words, the metal ring 60SR can have a plurality of sections (such as sections 60A and 60B) which have different distances from the respective edges 22E of the component die 22. For example, Fig. Figure 12 shows that sections 60A and 60B are spaced apart by distances D1 and D2 respectively from the edge 22E of the component die 22.

[0042] Sections 60A and 60B are connected to each other by intermediate connecting sections 60C, which have directions of extension that are not parallel to sections 60A and 60B. In some embodiments, the directions of extension of the intermediate connecting sections 60C are neither parallel nor perpendicular to the directions of extension of sections 60A and 60B. In alternative embodiments, the directions of extension of the intermediate connecting sections 60C are perpendicular to the directions of extension of sections 60A and 60B. In some embodiments, the angle α between intermediate connecting sections 60C and their adjacent intermediate connections 60A and 60B can be in the range of approximately 30 degrees to approximately 90 degrees, such as approximately 30 degrees to approximately 60 degrees. In some embodiments, the angle α can also be approximately 45 degrees.

[0043] In accordance with some embodiments, the sections comprising sections 60A and 60B and two intermediate connecting sections 60C form a repeating unit 84. As in Fig. As shown in Figure 9, the component die 22 has four edge sections 42E. Each of the edge sections 42E can be formed by continuously joining a plurality of repeating units 84. In accordance with some embodiments, the plurality of repeating units 84 are identical to one another. In accordance with some embodiments, at least some of the plurality of repeating units 84 differ from one another. For example, the spacing dimensions / lengths, angles α, swing areas, etc., of some of the repeating units 84 may differ from others of the repeating units 84.

[0044] In accordance with some embodiments, as in Fig. As shown in Figure 12, the repeating unit 84 has a spacing dimension P1, which can also be equal to its lengths. It has been found that the value of the spacing dimension P1 influences the reliability and function of the sealing ring 42. Since the edge sections 42E ( Fig. 9) Since the sealing ring 42 can be long, with their lengths being approximately equal to the lengths of the component die 22, the stress generated due to thermal expansion and contraction can be considerable. The high stress can cause the metal ring 60SR to crack ( Fig. 8 and Fig. 11) and the passivation layer 62. The stress can also cause the metal ring 60SR to detach from the passivation layer 62. By forming the metal ring 60SR in a bent shape, the otherwise long sections become shorter, and the stress is reduced.

[0045] The magnitude of the stress is related to the spacing P1 of the repeating units 84, and the larger the spacing P1, the higher the resulting stress. It has been found that the stress generated in the passivation layer 62 and the metal ring 60SR can be too high and cause damage to the passivation layer 62 and the metal ring 60SR if the spacing P1 exceeds a threshold value, such as 90 µm. When the spacing P1 was smaller than the threshold value, no damage or delamination was observed. Accordingly, the spacing P1 is designed to be smaller than approximately 90 µm and can be in the range between approximately 50 µm and approximately 80 µm.It is understood that the example threshold distance dimension P1 may differ from 90 µm, for example if the metal ring 60SR and the passivation layers 62 and 40 have smaller dimensions, for example in terms of their thickness values ​​and widths.

[0046] In accordance with some embodiments, the edge sections in the via ring 58SR are not curved and can be a long, straight section extending from one corner section 42C to the adjacent corner section 42C. Accordingly, the vibration of the sections of the metal ring 60SR can also be considered as a vibration relative to the underlying via ring 58SR (as opposed to a vibration relative to each other and / or to the edges 22E). Regardless of how the sections of the metal ring 60SR are curved, the via ring 58SR is completely overlapped by the metal ring 60SR. The edges of the sections of the metal ring 60SR can be vertically offset from or vertically aligned with the edges of the via ring 58SR.

[0047] Referring to Fig. 12 in accordance with some embodiments which are in Fig. As shown in Figure 12, the centerline 82A of section 60A is further arranged on a first side (+Y-side) of the centerline 82C of the respective via 58SR. The centerline 82B of section 60B is arranged on a second side (-Y-side) of the centerline 82C of the respective via 58SR. The vibration S1 can also be equal to the vibration of the centerlines 82A and 82B from the centerline 82C.

[0048] The vibration of the metal ring 60SR relative to the via ring 58SR, as shown in Fig. Figure 12 shows a double oscillation in which sections 60A and 60B oscillate upwards and downwards relative to the via ring 58SR (in the +Y direction and the -Y direction). In accordance with alternative embodiments, the oscillation of the sections of the metal ring 60SR can be a single oscillation, as shown in Figure 12. Fig. Figure 13 shows that, for example, sections 60A are curved in the +Y direction relative to the via ring 58SR. Sections 60B, on the other hand, are not curved relative to the via ring 58SR, meaning that the center lines 80B of sections 60B are aligned with the center line 80C of the corresponding underlying section of the via ring 58SR, while the center lines 80A of section 80A curve away from the center line 80C. The distance dimension P1 and the curve range S1 can be in similar ranges, as shown in Figure 13. Fig. 12 embodiments shown are discussed.

[0049] In the Fig. 12 and Fig. 13 Each of the repeating units 84 has two offset sections 60A and 60B, and furthermore has two connecting sections 60C. Fig. Figure 14 shows an embodiment in which three sections 60A are arranged offset from each other and from three corresponding intermediate connection sections 60C. Section 60A is curved in the +Y direction relative to the respective via ring 58SR and relative to section 60B. Sections 60B are not curved relative to the via ring 58SR. Section 60D is curved in the -Y direction relative to the respective via ring 58SR and relative to section 60B. The respective center lines 82A (of sections 60A), 82B (of sections 60B), 82C (of the via ring 58SR), and 82D (of sections 60D) are also shown.In accordance with some embodiments, the center lines 82A are formed such that they are curved in the +Y direction relative to the center line 82C, the center line 82B is aligned with the center line 82C, and the center lines 82D are formed such that they are curved in the -Y direction relative to the center line 82C. The distance dimension P1 and the curve regions S1 and S2 can be equal to the distance dimension P1 and the curve region S1, which are defined with reference to... Fig. 12 have been discussed.

[0050] In accordance with the embodiments shown in the preceding figures, the edge sections of the via ring 58 are designed straight without any bending. In accordance with alternative embodiments, the sections of the via ring 58 are also bent and have shorter sections. For example, Fig. Figure 15 shows that the metal ring section 60A is curved relative to the metal ring section 60B, and that the via ring section 58A is curved relative to the via ring section 58B. Likewise, the via ring section 58A and the via ring section 58B are connected to each other by the intermediate connection section 58C. The distance dimension P1 and the curve regions S1 and S3 can be equal to the distance dimension P1 and the curve region S1, which are determined with reference to Fig. 12 have been discussed. In accordance with some embodiments, the swing area S1 is the same as the swing area S3, and the via sections 58A and 58B may be aligned with or offset from the center of the metal ring area sections 60A and 60B, respectively. In accordance with alternative embodiments, the swing area S1 differs from the swing area S3, and the centerline of the via section 58A may be aligned with the centerline of the metal ring section 60A, while the centerline of the via section 58B is offset from the centerline of the metal ring section 60B.

[0051] Fig. Figure 16 represents an embodiment in which each of the repeating units 84 has three different metal ring sections 60A, 60B and 60D, which can all be offset from one another and are not limited to these. Likewise, at least two (or all three) of the via ring sections 58A, 58B and 58D are offset from one another.

[0052] Fig. Figure 17 represents an embodiment comprising two (or more) metal rings 60SR (in separate sealing rings) whose edge sections are bent. In accordance with some embodiments, the sections in one of the metal rings 60SR are bent in the same directions and may have the same flexure ranges as the nearest section of the other metal ring 60SR. In accordance with alternative embodiments, the sections in one of the metal rings 60SR are bent in different directions and / or may have different flexure ranges than the nearest section of the other metal ring 60SR. The spacing dimensions P1 of the repeating units 84 in different metal rings 60SR may be the same or different from one another.

[0053] Fig. 18 represents a corner section 42C (see also Fig. 9) of a sealing ring 42 and the corresponding edge sections 60SR. The metal ring section 60SR in the corner sections 42C of the sealing ring 42 can be short, for example, shorter than approximately 90 µm. Accordingly, the sections of the metal ring 60SR in the corner sections 42C may not be bent due to the relatively low stress. In accordance with other embodiments in which the corner sections 42C are also long, for example, in very large component dies, the metal ring sections 60SR in the corner sections 42C may also be bent. The details of bending the corner sections 42C may be essentially the same as described with reference to the Fig. Figures 12-17 show and discuss this, so the details are not repeated here. The corner sections of the 58SR via ring (not shown) can be straight or bent.

[0054] Although the illustrated embodiments use the metal rings in passivation layers as an example, the zigzag / bent patterns can also be used in other layers, such as the sections of the sealing rings in low k-value dielectric layers and the sections of the sealing rings in the post-passivation interconnect structure. Furthermore, the use of zigzag-patterned metal conductors for voltage reduction, apart from sealing rings, can also be used in other long elements, such as RDLs for conducting current or signals, electrical shielding rings within package components, or the like. The embodiments can also be applied to other package components besides the component dies.For example, the zigzag-patterned metal conductors can be used in the sealing rings and signal / power redistribution structures of integrated fan-out packages, which can be used in large systems (such as artificial intelligence packages (AI packages)) that have very long conductor tracks and therefore high voltages / loads.

[0055] The embodiments of the present disclosure exhibit several advantageous features. By bending metal rings in sealing rings, the otherwise long sections are modified to shorter sections. The stress generated in the metal rings and the adjacent passivation layers is reduced. The fracture rate of the metal rings and the delamination between the metal rings and their adjacent dielectric layers are reduced. This leads to reduced moisture ingress and improved reliability of the resulting package components. Components and elements in the chips 22 are protected from moisture by the sealing ring 42.

[0056] In accordance with some embodiments of the present disclosure, a method comprises forming a plurality of dielectric layers; forming a lower section of a sealing ring comprising a plurality of metal layers, each extending into one of the plurality of dielectric layers; applying a first passivation layer over the plurality of dielectric layers; forming an opening in the first passivation layer; forming a via ring in the opening and physically contacting the lower section of the sealing ring; forming a metal ring over the first passivation layer and connected to the via ring, wherein the via ring and the metal ring form an upper section of the sealing ring, and wherein the metal ring has a first edge section having a zigzag pattern; forming a second passivation layer on the metal ring;and performing a singulation process to form a component die, wherein the sealing ring is arranged near the edges of the component die.

[0057] In one embodiment, the first edge section comprises a plurality of repeating units, each of which has a first section and a second section extending in a direction parallel to a nearest edge of the component die, the first section and the second section being at different distances from the nearest edge of the component die. In one embodiment, the via ring has a first section arranged directly below and in contact with the first section of the first edge section of the metal ring; and a second section arranged directly below and in contact with the second section of the first edge section of the metal ring, the first section and the second section being aligned to form a straight line.

[0058] In one embodiment, the method further comprises applying a polymer layer over and in contact with the second passivation layer. In another embodiment, the method further comprises forming a via that penetrates the second passivation layer, wherein the via is electrically connected to metal conductors in the plurality of dielectric layers. The formation of the metal ring and the via ring comprises forming an inoculation layer (metal seed layer) extending into the opening; plating a conductive material; and etching a portion of the inoculation layer that is not overlapped by the conductive material. In one embodiment, the metal ring has a corner section that connects the first edge section to a second edge section of the metal ring, wherein the entirety of the corner section is straight.

[0059] In accordance with some embodiments of the present disclosure, a structure comprises a die having a substrate; a plurality of dielectric layers over the substrate; a first passivation layer over the plurality of dielectric layers; a sealing ring having a plurality of conductive rings, each extending into one of the plurality of dielectric layers; a via ring extending into the first passivation layer and in physical contact with an uppermost conductive ring of the plurality of conductive rings; and a metal ring over the first passivation layer and connected to the via ring, wherein the metal ring has a first edge section having a zigzag pattern, the first edge section being adjacent to the edge of the die; and a second passivation layer over the metal ring.

[0060] In one embodiment, the first edge section comprises a plurality of repeating units, each of which has a first section and a second section, both of which have longitudinal directions parallel to the edge of the die, the first section and the second section being at different distances from the edge of the die. In another embodiment, each of the repeating units further comprises an intermediate connection section that connects the first section to the second section. In another embodiment, each of the plurality of repeating units has a spacing of less than approximately 90 µm. In another embodiment, the via ring has a second edge section arranged below and overlapping the first edge section of the metal ring, the second edge section of the via ring being straight.In one embodiment, the first edge section of the metal ring is curved in a top view of the structure in relation to the second edge section of the via ring.

[0061] In one embodiment, the first edge section, in plan view, has a first section comprising a first centerline on a first side of a second centerline of the second edge section of the via ring; and a second section comprising a third centerline on a second side of the second centerline, which is opposite the first side. In another embodiment, the first edge section, in plan view, has a first section comprising a first centerline on a side of a second centerline of the second edge section of the via ring; and a second section comprising a third centerline, which is aligned with the second centerline.In one embodiment, the metal ring further comprises a second edge section, which has an additional zigzag pattern; and a corner section, which connects the first edge section and the second edge section, wherein the corner section is straight. In one embodiment, the structure further comprises a polymer layer above and in contact with the second passivation layer.

[0062] In accordance with some embodiments of the present disclosure, a structure comprises a die having a first rim and a second rim which are joined at a corner of the die; a metal ring having a first rim section and a second rim section near the first rim and the second rim respectively, wherein the first rim section has a first section parallel to the first rim, the first section being spaced from the first rim by a first distance; a second section parallel to the first rim, the second section being spaced from the first rim by a second distance which differs from the first distance; and an intermediate connecting section which connects and physically joins the first section and the second section.In one embodiment, the first section, the second section, and the connecting section form a repeating unit, wherein the first edge section has a plurality of additional repeating units that are identical to the repeating unit. In another embodiment, the structure further comprises a third section and a fourth section, including a through-hole ring, arranged below and physically connected to the first section and the second section, respectively, wherein the third section and the fourth section are connected to each other in such a way that they form a straight, continuous section.

[0063] The foregoing sets forth features and elements of several embodiments in such a way as to enable those skilled in the art to better understand the aspects of the present disclosure. Those skilled in the art should recognize that they can readily use the present disclosure as a basis for designing or modifying other processes and structures to achieve the same purposes and / or obtain the same advantages as the embodiments disclosed herein. Those skilled in the art should also recognize that such equivalent designs do not deviate from the concept and scope of the present disclosure, and that they can make a wide variety of changes, substitutions, and redesigns without departing from the concept and scope of the present disclosure.

Claims

[1] Procedure, encompassing: Forming a plurality of dielectric layers (38, 38A); forming a lower section of a sealing ring (42) comprising a plurality of metal layers, each of which extends into one of the plurality of dielectric layers (38, 38A); Application of a first passivation layer (40) over the majority of dielectric layers (38, 38A); Forming an opening (66) in the first passivation layer (40); Forming a through-hole ring (58SR) in the opening (66), which is physically brought into contact with the lower section of the sealing ring (42); Forming a metal ring (60SR) over the first passivation layer (40) and connected to the via ring (58SR), wherein the via ring (58SR) and the metal ring (60SR) form an upper section of the sealing ring (42), and wherein the metal ring (60SR) has a first edge section (42E) with a zigzag pattern; Forming a second passivation layer (62) on the metal ring (60SR); and Performing a singulation process to form a device die, wherein the sealing ring (42) is arranged near edges of the device die, including the formation of the metal ring (60SR) and the via ring (58SR): Forming a covering metal seed layer (48) which extends into the openings (66), wherein the metal seed layer (48) has a copper layer in contact with the passivation layer (40); Plating of a conductive material (54); and Etching of a section of the metal seed layer (48) which is not overlapped by the conductive material (54). [2] Method according to claim 1, wherein the first edge section (42E) has a plurality of repeating units (84), each of the plurality of repeating units (84) having a first section (60A) and a second section (60B) which extend in a direction parallel to a nearest edge of the device die, wherein the first section (60A) and the second section (60B) have different distance values ​​from the nearest edge of the device die. [3] Method according to claim 2, wherein the through-hole plating ring (58SR) comprises: a first section arranged directly below and in contact with the first section (60A) of the first edge section of the metal ring (60SR); and a second section arranged directly below and in contact with the second section (60B) of the first edge section of the metal ring (60SR), wherein the first section and the second section are aligned to form a straight line. [4] Method according to any of the preceding claims, further comprising applying a polymer layer (64) over and in contact with the second passivation layer (62). [5] Method according to one of the preceding claims, further comprising forming a via (68) which penetrates the second passivation layer (62), wherein the via (68) is electrically connected to metal conductors in the plurality of dielectric layers (38, 38A). [6] Method according to one of the preceding claims, wherein the metal ring (60SR) has a corner section (42C) which connects the first edge section (42E) with a second edge section of the metal ring (60SR), wherein an entirety of the corner section (42C) is straight. [7] Structure (32), exhibiting: one Die (22), showing: a substrate (24); a plurality of dielectric layers (38, 38A) over the substrate (24); a first passivation layer (40) over the majority of dielectric layers (38, 38A); a covering metal seed layer (48), in openings (66) in the first passivation layer (40), wherein the metal seed layer (48) has a copper layer in contact with the passivation layer (40), comprising a sealing ring (42): a plurality of conductive rings, each extending into one of the plurality of dielectric layers (38, 38A); a through-hole plating ring (58SR) which extends into the first passivation layer (40) and is in physical contact with an uppermost conductive ring in the plurality of conductive rings; and a metal ring (60SR) above the first passivation layer (40) and connected to the via ring (58SR), wherein the metal ring (60SR) has a first edge section (42E) having a zigzag pattern, the first edge section (42E) being adjacent to an edge of the die (22); and a second passivation layer (62) over the metal ring (60SR). [8] Structure (32) according to claim 7, wherein the first edge section (42E) has a plurality of repeating units (84), each of the repeating units (84) having a first section (60A) and a second section (60B) having longitudinal directions parallel to the edge of the die (22), wherein the first section (60A) and the second section (60B) have different distance values ​​from the edge of the die (22). [9] Structure (32) according to claim 8, wherein each of the repeating units (84) further comprises an intermediate connecting section (60C) which connects the first section (60A) to the second section (60B). [10] Structure (32) according to claim 8 or 9, wherein each of the plurality of repeating units (84) has a spacing dimension (P1) of less than approximately 90 µm. [11] Structure (32) according to any one of the preceding claims 7 to 10, wherein the via ring (58SR) has a second edge section arranged below and overlapping by the first edge section of the metal ring (60SR), and wherein the second edge section of the via ring (58SR) is straight. [12] Structure (32) according to claim 11, wherein the first edge section of the metal ring (60SR) is curved in a top view of the structure (32) in relation to the second edge section of the via ring (58SR). [13] Structure (32) according to claim 12, wherein the first edge section has in the top view: a first section (60A) having a first center line (82A) on a first side of a second center line (82C) of the second edge section of the via ring (58SR); and having a second section (60B) and a third midline (82B) on a second side of the second midline, which is opposite to the first side. [14] Structure (32) according to claim 12, wherein the first edge section has in the top view: a first section (60A) having a first center line (82A) on one side of a second center line (82C) of the second edge section of the via ring (58SR); and having a second section (60B) and a third midline (82B) aligned with the second midline (82C). [15] Structure (32) according to claim 7, wherein the metal ring (60SR) further comprises: having a second border section with an additional zigzag pattern; and a corner section (42C) which connects the first edge section with the second edge section, wherein the corner section (42C) is straight. [16] Structure (32) according to any one of the preceding claims 7 to 15, further comprising a polymer layer (64) over and in contact with the second passivation layer (62).

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