Method for aligning a coupling component with an optical or electronic application component

Abstract

Positioning system (1) for aligning a coupling component (B), in particular an optical fiber, relative to an optical or electronic application component (A), the positioning system (1) comprising: a base body (10) on which the application component (A) can be fixed, a magnetic field generating device (20) arranged on the base body (10) and designed to generate a levitation magnetic field (M), an actuating element (40) which is mechanically decoupled from the base body (10) and movable relative to it, and comprising: at least one permanent magnet (43) and a holding device (45) for holding the coupling component (B), a levitation control device (60) which, in conjunction with a control device (70) functionally connected to the levitation control device (60),a floating movement of the permanent magnet (43) relative to the base body (10) and a coupling of the coupling component (B) to the application component (A) causes, and methods for aligning a coupling component on an optical or electronic application component,

Description

[0001] The invention relates to a method for aligning a coupling component to an optical or electronic application component. The coupling component can be an optical or electrical coupling component.

[0002] Adjustment systems for aligning an optical coupling component, in particular an optical fiber, with respect to or relative to an application component, such as an optical fiber or an optical chip of a wafer, are known from the general state of the art. Through a contactless or contact-based coupling between the optical coupling component and, for example, the optical chip of the wafer, the correct function of the wafer can be tested by transmitting an optical test signal into the wafer based on the coupling, and the test is performed based on a desired effect on or in the wafer.

[0003] The positioning systems known from the prior art comprise a mechanical positioning device such as a linear stage or a hexapod, on which either the application component, for example, the wafer, or the coupling component, such as an optical fiber, is arranged and, in particular, fixed. According to a method using such positioning systems, the coupling component is aligned with respect to the respective application component with a predetermined accuracy.

[0004] The publication "Magnetic levitation of polymeric photo-thermal microgrippers," Elbuken, Waterloo, Ontario, University of Waterloo, Diss. 2008, describes a magnetic field generation device that generates and controls a magnetic field using electromagnets. A microrobot has a gripper with arms, for example, for holding a cable, and magnetic parts. The gripper arms can be photothermally bent. Based on continuous measurement of the position of the actuator and corresponding adjustment of the magnetic field, the position of the actuator is controlled by adjusting the magnetic field.

[0005] DE 10 2016 224 951 A1 describes a conveying device arranged on a machine table and comprising a stator or base body and a transport body. An application component can be fixed to the stator. A levitation field 14, which is an actively controlled magnetic field, is established between the stator 100 and the transport body 200. The levitation field is generated by actuating magnets and stationary magnets on an active surface of the stator. The actuating magnets and stationary magnets are formed in the stator and the transport body, respectively. The levitation field is located between the stator and the transport body, with the transport body floating in the levitation field.

[0006] The publication "Robotic micromanipulation: a) actuators and applications", Bucinskas, Vytautas [et al.], in "Robotic systems and application", Vol. 1, 2021, No. 1, pp. 2-23, ISSN 2669-2473" describes a micro-gripper whose arms can be thermally bent.

[0007] The publication “Optically controlled fiber-optic micro-gripper for sub-millimeter objects”, Pevec, Simon and Donlagic, Denis, in “Optics letters”, Vol 44, 2019, No. 9, pp. 217-2180, ISSN 0146-9592, describes a micro-gripper that can be optically controlled and dielectrically and opto-thermally actuated.

[0008] It is an object of the present invention to provide a method for aligning a coupling component with respect to an application component, which is an alternative to the known methods and which in particular has a higher bandwidth in the control, so that very fast coupling processes between the coupling component and the application component are possible.

[0009] This object is achieved by the features of claim 1. Further embodiments are specified in the dependent claims which refer back to this claim.

[0010] The basis of the invention is an adjustment system which is intended for aligning a coupling component, in particular an optical fiber, with respect to an optical or electronic application component, in particular an optical fiber or an optical chip, and which comprises: a base body on which the application component can be arranged and is preferably fixable, a magnetic field generating device arranged on the base body and designed to generate a levitation magnetic field, at least one actuating body which is mechanically decoupled from the base body and is movable relative to the latter and has: at least one permanent magnet and a holding device for holding the coupling component, a levitation control device which is functionally connected to the magnetic field generating device and is configured to send a magnetic field generating signal to the magnetic field generating device for adjusting and optionally additionally changing one or more of the following properties (E1), (E2) of the magnetic field: (E1) the magnetic field strength distribution, (E2) the magnetic field strength direction, a control device which is functionally connected to the levitation control device and is configured to generate command signals for positioning the at least one actuating body relative to the base body and to send them to the levitation control device, wherein a sequence of command signals results in a dynamic change in the magnetic field strength distribution or the magnetic field strength direction in the levitation magnetic field, with which the permanent magnet and with it the actuating body can be moved relative to the base body and suspended relative to it in accordance with the command signals, preferably in several degrees of freedom and particularly preferably in six degrees of freedom, and the coupling component can be coupled to the application component.

[0011] The movement of the at least one adjusting body relative to the base body is preferably completely free-floating and thus without blocking any degree of freedom; however, it is also conceivable to move the adjusting body in such a way that it is floating relative to the base body that at least one degree of freedom is blocked.

[0012] In this case, at least one preferably small and lightweight actuator is magnetically levitated. The actuator and the magnetic field generating device form a motion system that allows the actuator to move in up to six degrees of freedom to perform the task of probing, i.e., bringing the coupling component closer or relatively roughly closer to the application component, and the task of scanning or alignment, i.e., fine adjustment or movement up to the desired matching or coupling position, at which the physical conditions for coupling and for a corresponding test, e.g., through a scanning process, are met.

[0013] The levitation control device is used, among other things, to adjust the mechanical stiffness of such a system. This offers the advantage that the system stiffness, i.e., the mechanical response to external disturbances, can be made very smooth during probing. Conversely, the system stiffness can subsequently be set very high during the scanning or alignment process, allowing the actuator to follow the trajectories specified by the control device very precisely. Furthermore, the levitation control device can also be used to define or adjust a maximum contact force of the actuator or coupling component when coupling it to an optical or electronic application component.

[0014] In this way, additional and unfavorable vibration modes caused by a force sensor used in state-of-the-art actuating systems are eliminated, since the force sensor, which has a mass, must be moved during the actuating or positioning process.

[0015] It is easily conceivable to provide a plurality of actuating bodies (i.e. two or more actuating bodies), wherein one of the actuating bodies, several or all of the actuating bodies are made to float simultaneously by the magnetic field generating device and are moved or positioned in up to six degrees of freedom by means of the levitation control device, wherein at the same time the mechanical stiffness of the respective movement system consisting of the actuating body or one of the actuating bodies and the magnetic field generating device can be set in a targeted manner and depending on the task to be solved by the movement system (i.e. for example probing or scanning or alignment).

[0016] According to the invention, a method is provided for aligning a coupling component, in particular an optical fiber, with respect to an application component, which is in particular an optical or electronic application component, the method comprising the following steps, of which individual or all steps can be carried out simultaneously or one after the other: (S1) Generation of a levitation magnetic field by a magnetic field generating device, (S2) Arranging at least one actuating body with a permanent magnet in the levitation magnetic field, wherein the coupling component is arranged and preferably fixed to the actuating body, (S3) Changing the levitation magnetic field by a corresponding electrical control of the magnetic field generating device, whereby one or more of the following properties (E1), (E2) of the magnetic field are changed: (E1) the magnetic field strength distribution, (E2) the magnetic field strength direction, (S4) due to the changing properties of the levitation magnetic field, execution of actuating movements of the at least one actuating body in at least three and preferably in six degrees of freedom and thereby coupling one end of the coupling component to a predetermined position of the application component, (S5) in a probing step, changing at least one property (E1), (E2) of the levitation magnetic field, the magnetic field strengths of which lie in a first value range, wherein in the probing step the coupling component is brought closer to the application component up to a predetermined distance before reaching a defined scanning or alignment position or location, (S6) in a scanning or alignment step, generating a further change in at least one property (E1), (E2) of the levitation magnetic field, the magnetic field strengths of which lie in a second value range, wherein the values ​​of the second value range are at least one factor greater than the largest value of the first value range.

[0017] Herein, an application component and a coupling component are understood to be components that can be coupled to one another using the actuating system according to the invention and are coupled to one another in the method according to the invention. The application component is the component to which the coupling component is intended to be coupled or is coupled. Coupling is preferably contactless, although contact coupling is also conceivable.

[0018] According to the method according to the invention, it can be provided that the actuating body is guided by the levitation magnetic field on a first guide component of a guide device.

[0019] According to the method according to the invention, it can be provided that, before the actuating movements of the actuating body are carried out, the coupling component is gripped by a gripping device of the actuating body, wherein the gripping device fixes the coupling component in a predetermined orientation and position relative to a frame part of the actuating body to which the permanent magnet is fastened.

[0020] According to the method according to the invention, it can be provided that the arrangement of the coupling component on the actuating body is realized by holding the coupling component with a gripping device.

[0021] In this case, it can be provided that the gripping device is adjusted between an open state and a gripping state based on thermal energy, preferably based on thermal radiation, in order to hold the coupling component by means of the gripping device. The transition from the open state to the gripping state can be achieved by means of a laser device designed to direct thermal radiation onto the gripping device to actuate it.

[0022] Here, a “wafer” is understood to mean a substrate in the form of a circular or square base plate for electronic components, which is manufactured as a single-crystalline or polycrystalline semiconductor blank, a so-called ingot.

[0023] The term “along” means here in the context of a directional indication mentioned here, which in particular can also relate to the course of a contour line or a surface or a direction of a part or a structural component such as an axis or a shaft or a central axis thereof, in relation to a reference direction or a reference axis, that a section of the course or the tangent to a respective contour line or respective surface or the direction in an explicitly or implicitly specified viewing direction deviates locally or in sections by an angle of a maximum of 45 degrees and in particular of a maximum of 30 degrees from the respective reference direction or reference axis to which the respective directional indication is related.

[0024] The term "transverse" means herein in the context of a directional indication mentioned herein, which in particular can also relate to the course of a contour line or a surface or a direction of a part or a structural component such as an axis or a shaft or a central axis thereof, in relation to a reference direction or a reference axis, that a section of the course or the tangent to a respective contour line or respective surface or the direction in an explicitly or implicitly predetermined viewing direction deviates locally or in sections by an angle which is between 45 degrees and 135 degrees, and preferably by an angle which is between 67 degrees and 113 degrees, from the respective reference direction or reference axis to which the respective directional indication is related.

[0025] Herein, a “distance”, in particular between two objects or two surfaces or reference points, is understood to mean in particular the shortest distance or the shortest distance between the two objects or surfaces or reference points, whereby the shortest distance or the shortest distance is not equal to zero in terms of amount, unless explicitly stated otherwise in this regard.

[0026] Herein, the term "fixed" with respect to two component parts and in particular with respect to two contact points or contact surfaces or reference sides of each of two component parts is understood to mean that the two component parts and in particular the two contact points or contact surfaces or reference sides maintain predetermined positions relative to one another, even if external forces act on at least one of the component parts or internal stresses act in at least one of the component parts or at least one of the component parts executes a movement.

[0027] The term "annular" in relation to a component, and in particular a retaining part, means that, viewed in the direction of a longitudinal axis of the cavity encompassed by the component, a cross-sectional contour results that is defined by an inner edge surface surrounding the cavity and an outer edge surface. The inner edge line resulting from the inner edge surface in the longitudinal axis of the cavity and the outer edge line resulting from the outer edge surface in the longitudinal axis of the cavity can, but must, be non-circular or substantially circular.

[0028] A "central line" or another reference direction of a reference line, such as in particular a central axis or a centrally running line or a center line of at least one structural component or part or region or guideway, is defined herein in particular as a connecting line of the centroids of the smallest cross-sectional areas of the respective structural component along a determined or specified direction or between two determined or specified ends. In the event that the reference line can be curved or at least partially curved, the reference direction can generally be understood as a local central line.However, the reference direction herein can also be understood as the direction of a straight reference line, whereby a line is used to determine the straight reference line whose position relative to the curved line results in the smallest deviation between these lines or the smallest deviation area. The same applies if a straight reference line is to be derived from a curved line.

[0029] If the word "or" is used herein, it is to be understood – unless explicitly stated otherwise – as an inclusive "or" or "adjunction" or "alternative." Specifically, in the formulation "feature A or feature B," this would mean either feature A alone, feature B alone, or the combination of feature A and feature B.

[0030] Embodiments of the invention are described below with reference to the accompanying figures. These show: Fig. 1 a schematic functional representation of an embodiment of an actuating system usable according to the method according to the invention, wherein the actuating body is in a position in which the end of the coupling component is spaced from the application component Fig. 2 the design of the positioning system according to Fig. 1, wherein the actuator is in a position where the end of the coupling component contacts the application component, Fig. 3 a schematic functional representation of a further embodiment of the actuating system, which, compared to the embodiment of the Fig. 1 has a guide system on which the actuating movement of the actuating body is partially guided, wherein the actuating body is in a position in which the end of the coupling component is located at a distance from the location of the application component, Fig. 4 the design of the positioning system according to Fig. 3, wherein the actuator body is in a position where the end of the coupling component contacts the location of the application component,

[0031] The positioning system 1 serves to align a coupling component, in particular an optical fiber, with respect to an optical or electronic application component. The application component is generally assigned the reference symbol "A" and the coupling component is generally assigned the reference symbol "B". Fig. 1, the application component A is shown as a wafer A1 and the coupling component B as an optical fiber B1.

[0032] An actuating system 1 which can be used according to the method according to the invention comprises a base body 10, a magnetic field generating device 20 for generating and optionally changing a levitation magnetic field M, an actuating body 40 with a permanent magnet 43 and with a holding device 45, a levitation control device 60 and a control device 70.

[0033] The base body 10 can be designed as a plate, a hollow body, a frame device, a housing, or in some other way. The magnetic field generating device 20 is arranged on the base body 10.

[0034] The actuating body 40 has a frame part 41, a permanent magnet 43 and a holding device 45 for holding the coupling component B. The permanent magnet 43 and the holding device 45 are each fastened to the frame part 41. The permanent magnet 43 is implemented in terms of its material, its dimensions and its shape such that the actuating body 40 can be moved in a floating and preferably freely floating manner, i.e. without any blocking of a degree of freedom, in the correspondingly changing levitation magnetic field M. In particular, the permanent magnet 43 can be a single neodymium magnet. However, it is also conceivable for the permanent magnet 43 to consist of an arrangement of several individual magnets, which are arranged, for example, in the form of a Halbach array.

[0035] The holding device 45, which is in the Fig. 1 is shown purely schematically, is implemented for fixing and holding the coupling component B in the form of an optical fiber B1. The holding device 45 can be implemented as a gripping device. With the gripping device, it is possible for the holding device 45 to grip the coupling component B, so that this coupling component B is located in a predetermined or defined manner relative to the frame part 41 and is therefore stable in this predetermined position relative to the frame part 41 during the adjusting movement of the adjusting body 40 and the subsequent coupling of the coupling component B to the application component A. When the gripping device is actuated, its actuating state can be changed between a gripping state and an open state. In the gripping state, the coupling component B is held or fixed by the gripping device in a predetermined location and position relative to the adjusting body 40 or the frame part 41.In the open state, the gripping device is designed and in particular shaped or adjusted in such a way that the coupling component B can be fed to the gripping device and received by it, and that the gripping device can be brought into the gripping state in a next step, i.e. in particular shaped or adjusted, wherein in the gripping state the coupling component B is held or fixed to the actuating body 40 or the frame part 41.

[0036] Under the influence of the levitation magnetic field M, the actuating body 40 is levitating relative to the base body 10 in order to perform actuating movements, during which the coupling component B is coupled to the application component A in a predetermined or defined manner. Properties of the levitation magnetic field M, which preferably change, cause actuating movements of the actuating body 40, with which a coupling of an end B1 of the coupling component B, which is fixed to the actuating body 40, to or at a predetermined location P of the application component A is achieved.

[0037] The actuating system 1 can be used to guide movements of the actuating body 40, as shown in the Fig. 3 and Fig. 4, have a guide system 80 or a guide device 81.

[0038] If, as it is in the Fig. 1 and Fig. 2, the actuating system 1 has no guide system or guide device, the actuating body 40 is movable under the influence of the levitation magnetic field M relative to the base body 10 and freely suspended relative to it, i.e. completely mechanically decoupled from it, in particular movable in several degrees of freedom and particularly preferably in six degrees of freedom.

[0039] For this purpose, the levitation magnetic field M is formed in a region located on one side of the longitudinal extension L of the base body 10.

[0040] By means of the levitation magnetic field M generated by the magnetic field generating device 20, the actuating body 40 is manipulated to execute predetermined or defined actuating movements relative to the base body 10. Optionally, it can be provided that the magnetic field generating device 20, when appropriately controlled by the levitation control device 60, changes one or more of the following properties (E1), (E2) of the magnetic field over time: (E1) the magnetic field strength distribution, (E2) the magnetic field strength direction.

[0041] An embodiment of the actuating system 1, which is designed according to the Fig. 3 and Fig.4 has a guide system 80, provides guidance of the actuating body 40 on a guide device 81. For this purpose, the guide device 81 has a first guide component 83, in particular with a guide track 85, and the actuating body 40 has a second guide component 84, in particular with a second guide track 86. The first guide component 83 and, if applicable, the first guide track 85 and the second guide component 84 and, if applicable, the second guide track 86 are designed such that they can be guided to one another, e.g. by the first guide component 83 and, if applicable, the first guide track 85 and the second guide component 84 and, if applicable, the second guide track 86 being movement-coupled. In this case, it can be provided that only one of the guide components 83, 84 has a guide track, while the respective other of the guide components 83, 84 has a guide part that engages in the guide track or bears against it.In this way, the adjusting body 40 is arranged on the first guide component 83 so that it can be linearly moved or displaced. Instead of a guide track, a guide plane can also be provided, so that the adjusting body 40 can perform adjusting movements in two directions when in contact with the guide plane.

[0042] When the actuating body 40 is guided on a guide device 81, the movement of the actuating body 40 in the operating area C of the actuating system 1 is not freely suspended relative to the base body 10, but is realized with less than six degrees of freedom.

[0043] To generate and optionally change the levitation magnetic field M, the levitation control device 60 is functionally connected to the magnetic field generating device 20 via a first functional connection F1 and the control device 70 is functionally connected to the levitation control device 60 via a second functional connection F2.

[0044] To control the levitation control device 60, the control device 70 generates and sends a magnetic field control signal to the levitation control device 60 via the second functional connection F2. The magnetic field control signal is preferably generated in the control device 70 based on a desired command that defines a desired actuating movement of the actuating body 40 relative to the base body 10 or to the magnetic field generating device 20 or to the levitation magnetic field M generated thereby. The desired command can be manually entered into the control device 70 or determined by the control device 70 or another function or generated automatically.Based on the magnetic field control signal, the levitation control device 60 generates a preferably time-dependent magnetic field generation signal and sends this via the first functional connection F1 to the magnetic field generation device 20, which, based on the magnetic field generation signal, generates a levitation magnetic field M with which the actuating body 40 executes the desired actuating movements relative to the base body 10.

[0045] For this purpose, the levitation control device 60 has a control function with which the levitation control device 60 generates the magnetic field generation signal in a time-varying manner such that an actual actuating movement of the actuating body 40, which deviates from the desired actuating movement thereof, is corrected such that the distance between a current point of the actual actuating movement path and the desired actuating movement path or from a corresponding point of the desired actuating movement path is minimized.

[0046] To change the actuation state of the gripping device between a gripping state and an open state, it can be designed such that it can be adjusted between the open state and the gripping state using thermal energy, preferably thermal radiation. For this purpose, the gripping device can be designed, in particular, as a ring-shaped or pincer-shaped holding part.

[0047] The annular or pincer-shaped holding part encloses a holding area in which a portion of the coupling component B can be located, wherein the annular or pincer-shaped holding part is shaped in its open state such that its holding area provided for use with the gripping device is large enough or has a receiving shape in which the coupling component B is located in a portion in the holding area and is movable relative to this in the central line of the holding area. The central line of the holding area is defined herein such that the portion of the coupling component B located in the holding area is movable along the central line of the holding area. This can in particular be a central line or center line of the coupling component B.In the gripping state or in the open state, the pincer-shaped holding part can have an opening that opens the holding area in a direction transverse to the central line of the holding area, so that in the open state it is possible for a section of the coupling component B, which is intended to be received in the holding area, to be movable transversely to the central line of the holding area from the outside into it and vice versa, whereas the section of the coupling component B, in the gripping state, is not movable relative to the pincer-shaped holding part, at least transversely to the central line or center line of the coupling component B. Here, the movements refer to forces with amounts that occur as intended in the method according to the invention.

[0048] In particular, the holding part can be selected or formed, at least in one section, from a material that is deformed from the open state to the gripping state due to the effect of a first thermal radiation, preferably due to the effect of a first thermal radiation, in which at least a section of the annular holding part lies in terms of amount in a first temperature range. The material can also be selected or formed in such a way that is deformed from the gripping state to the open state due to the effect of a second thermal radiation, preferably due to the effect of a second thermal radiation, in which at least a section of the annular holding part lies in terms of amount in a first temperature range. It can be provided that a cooling process follows the second thermal radiation.Alternatively, it can be provided that the values ​​of the first temperature range are greater in magnitude than the values ​​of the first temperature range, or vice versa.

[0049] In one embodiment of the illustrated actuating system 1, the gripping device comprises a laser device that is functionally connected to the actuating device 70 via a third functional connection F3 and is configured such that, based on actuating signals, heat radiation can be directed onto the gripping device to actuate it. To actuate the gripping device, the actuating device 70 sends a corresponding gripping device actuating signal to the gripping device via the third functional connection F3.

[0050] The ring-shaped or pincer-shaped holding part can also be realized in such a way that it can be mechanically changed between the gripping state and the open state.

[0051] The method according to the invention for aligning a coupling component B, in particular an optical fiber, with respect to an application component A, comprises the following steps, of which individual or all steps can be carried out simultaneously or one after the other: (S1) Generation of a levitation magnetic field M by a magnetic field generating device 60, (S2) Arranging at least one adjusting body 40 with a permanent magnet 43 in the levitation magnetic field M, wherein the coupling component B is fixed to the adjusting body 40, (S3) Changing the levitation magnetic field M by a corresponding electrical control of the magnetic field generating device 60, wherein one or more of the following properties (E1), (E2) of the magnetic field are changed: (E1) the magnetic field strength distribution, (E2) the magnetic field strength direction, (S4) due to the changing properties of the levitation magnetic field M, execution of actuating movements of the at least one actuating body 40, wherein the actuating body hovers relative to the application component A, and coupling one end B1 of the coupling component B to a predetermined position P of the application component A, wherein the actuating body 40 is moved in at least three and preferably in six degrees of freedom.

[0052] The method according to the invention can comprise gripping the coupling component B by a gripping device of the actuating body 40 before carrying out the actuating movements, wherein the gripping device fixes the coupling component B in a predetermined orientation and position relative to a frame part 41 of the actuating body 40.

[0053] The method according to the invention can in particular comprise the following steps for coupling the coupling component B to the application component A: (S5) in a probing step, changing at least one property (E1), (E2) of the levitation magnetic field M, whose magnetic field strengths lie in a first value range, wherein in the probing step the coupling component B is brought closer to the application component A up to a predetermined local distance in front of or from a defined scanning or alignment position or location, (S6) in a scanning or alignment step, generating a further change in at least one property (E1), (E2) of the levitation magnetic field M, the magnetic field strengths of which lie in a second value range, wherein in the scanning or alignment step the coupling component B is approximated to the application component A up to a coupling position or location, and wherein the values ​​of the second value range are at least a factor greater than the largest value of the first value range.

[0054] The factor can have a value of at least 1.5. This results in a comparatively low system stiffness during the probing step, so that unintentional contact between coupling component B and application component A or other parts of the positioning system has no negative consequences, such as damage to coupling component B or application component A. On the other hand, a comparatively high system stiffness results during the scan / alignment process, so that the positioning body can very well follow the trajectories specified by the control device. List of reference symbols 1 adjustment system 10 base bodies 20 Magnetic field generating device 40 actuators 41 frame part 43 Permanent magnet 45 Holding device 60 Levitation control device 70 Control device 80 guidance system 81 Guide device 83, 84 Leadership component 85, 86 guideway A application component A1 wafers B coupling component B1 optical fiber C Operating range of the control system 1 F1 first functional connection F2 second functional connection F3 third functional connection L Longitudinal extension of the base body 10 M Levitation magnetic field P Place of the application component A, with or at which a coupling of an end B1 of the coupling component B, which is fixed to the actuating body 40, takes place

Claims

[1] Method for aligning a coupling component (B), in particular an optical fiber, with respect to an application component (A), the method comprising the following steps, of which individual or all steps can be carried out simultaneously or one after the other: (S1) generating a levitation magnetic field (M) by a magnetic field generating device (20), (S2) Arranging at least one adjusting body (40) with a permanent magnet (43) in the levitation magnetic field (M), wherein the coupling component (B) is arranged on the adjusting body (40), (S3) Changing the levitation magnetic field (M) by a corresponding electrical control of the magnetic field generating device (20), wherein one or more of the following properties (E1), (E2) of the magnetic field are changed: (E1) the magnetic field strength distribution, (E2) the magnetic field strength direction, (S4) due to the changing properties of the levitation magnetic field (M), execution of actuating movements of the at least one actuating body (40), wherein the actuating body hovers relative to the application component (A), and coupling one end (B1) of the coupling component (B) to a predetermined position (P) of the application component (A), wherein the actuating body (40) is moved in at least three and preferably in six degrees of freedom, (S5) in a probing step, changing at least one property (E1), (E2) of the levitation magnetic field (M), whose magnetic field strengths lie in a first value range, wherein in the probing step the coupling component (B) is brought closer to the application component (A) up to a predetermined distance before reaching a defined scanning or alignment position or location, (S6) in a scanning or alignment step, generating a further change in at least one property (E1), (E2) of the levitation magnetic field (M), the magnetic field strengths of which lie in a second value range, wherein the values of the second value range are at least one factor greater than the largest value of the first value range. [2] Method according to claim 1, wherein the factor has a value of at least 1.

5. [3] Method according to claim 1 or 2, wherein the actuating body (40) is guided by the levitation magnetic field (M) on a first guide component (83) of a guide device (80). [4] Method according to one of the preceding claims, wherein, before the actuating movements of the actuating body (40) are carried out, the coupling component (B) is gripped by a gripping device of the actuating body (40), wherein the gripping device fixes the coupling component (B) in a predetermined orientation and position relative to a frame part (41) of the actuating body (40) to which the permanent magnet (43) is fastened. [5] Method according to one of the preceding claims, wherein the arrangement of the coupling component (B) on the actuating body (40) is realized by holding the coupling component (B) with a gripping device. [6] Method according to claim 5, wherein the gripping device is adjusted between an open state and a gripping state due to thermal energy, preferably due to thermal radiation, in order to hold the coupling component (B) by means of the gripping device. [7] Method according to claim 6, wherein the transition from the open state to the gripping state is effected by means of a laser device which is designed to direct heat radiation onto the gripping device for actuating the same.

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