MEMS mirror array with prediction of MEMS mirror movement

Abstract

The present invention relates to a MEMS mirror arrangement, an optical projector, virtual reality or augmented reality glasses and a computer-implemented method for predicting an oscillation movement of a MEMS mirror with respect to a first oscillation axis.

Claims

[1] MEMS mirror array (12), wherein the MEMS mirror arrangement (12) comprises a MEMS mirror (22) mounted so as to be capable of oscillation with respect to at least one first oscillation axis, wherein the MEMS mirror arrangement (12) has a first phase position determination device (2), wherein the first phase position determination device (2) is designed and / or configured such that it provides a first electrical phase signal (3) which describes a temporally changing phase position of an oscillation movement of the MEMS mirror (22) with respect to the first oscillation axis, wherein the MEMS mirror arrangement (12) comprises a first calculation device (1), wherein the first calculation device (1) is designed and / or configured such that the first calculation device (1) calculates a first prediction signal (4), which describes a future oscillation movement of the MEMS mirror (22) with respect to the first oscillation axis, in direct or indirect dependence on the first phase signal (3), wherein the MEMS mirror arrangement (12) comprises a data processing device (15) for processing and providing pixel data (14), wherein the first calculation device (1) and the data processing device (15) are designed and / or arranged such that the data processing device (15) reads out or receives the first prediction signal (4), wherein the first calculation device (1) and the data processing device (15) are designed and / or configured such that the provision of the pixel data (14) by the data processing device (15) takes place as a function of the received or read-out first prediction signal (4), in particular that the provision of the pixel data (14) by the data processing device takes place in an order of the pixel data that is dependent on the first prediction signal (4) and / or with a selection of the times at which pixel data (14) are respectively provided that is dependent on the first prediction signal (4). [2] MEMS mirror arrangement (12) according to claim 1, wherein the MEMS mirror (22) has a mirror plane, wherein the first oscillation axis is aligned parallel to the mirror plane. [3] MEMS mirror arrangement (12) according to one of the preceding claims, wherein the first phase position determination device (2) comprises a first oscillator unit (5), in particular a numerically controlled oscillator, wherein the first oscillator unit (5) is designed and / or arranged such that the first oscillator unit (5) provides a first oscillating electrical signal with a time-dependent phase position (6), wherein the first phase position determination device (2) is designed and / or configured such that the first phase position determination device (2) determines the first phase signal (3) as a function of the phase position (6) of the first oscillating signal of the first oscillator unit (5). [4] MEMS mirror arrangement (12) according to the preceding claim, wherein the MEMS mirror arrangement (12) comprises a first MEMS drive (25), wherein the first MEMS drive (25) and the MEMS mirror (22) are designed, arranged and configured such that the first MEMS drive (25) drives a resonant oscillation of the MEMS mirror (22) with respect to the first oscillation axis using a first electrical drive signal, wherein the MEMS mirror arrangement is preferably designed such that the first drive signal is the first oscillating signal of the first oscillator unit (5) or is derived from the first oscillating signal of the first oscillator unit (5). [5] MEMS mirror arrangement (12) according to one of the preceding claims, wherein the MEMS mirror arrangement (12) comprises a first MEMS sensor (24), wherein the MEMS mirror (22) and the first MEMS sensor (24) are designed and configured such that the first MEMS sensor (24) detects oscillatory movements of the MEMS mirror (22) with respect to the first oscillation axis as a first electrical feedback signal with a time-dependent phase position, wherein the first phase position determination device (2) is designed and / or configured such that the first phase position determination device (2) determines the first phase signal as a function of the phase position of the first feedback signal. [6] MEMS mirror arrangement (12) according to the preceding claim, wherein the first phase position determination device (2) comprises a first feedback unit (7), wherein the first feedback unit (7) is designed and / or configured and connected to the first MEMS sensor (24) such that the first feedback unit (7) determines a phase difference (8) of the first feedback signal to a reference signal, in particular the phase difference of the first feedback signal to a drive signal of a first MEMS drive, wherein the first phase position determination device (2) is designed and / or configured such that the first phase position determination device (2) determines the first phase signal (3) as a function of the determined phase difference (8) of the first feedback signal to a reference signal. [7] MEMS mirror arrangement (12) according to one of the preceding claims, wherein the first phase position determination device (2) comprises a first adaptation unit (9) dependent on a physical parameter, wherein the MEMS mirror arrangement (12) is designed and / or configured such that the first adaptation unit (9) dependent on a physical parameter continuously receives a frequency value as an input variable or determines this frequency value and the first adaptation unit (9) dependent on a physical parameter determines a consequently time-dependent phase value (10) depending on the received or determined frequency value, in particular by means of a look-up table, wherein the first phase position determination device (2) is designed and / or configured such that the first phase position determination device (2) determines the first phase signal (3) as a function of the time-dependent phase value (10) which has been determined by the first adaptation unit (9) which is dependent on a physical parameter. [8] MEMS mirror arrangement (12) according to one of the preceding claims, wherein the first phase position determination device (2) has a first summing unit (11), wherein the first phase position determination device (2) is designed and / or configured such that two or more, in particular three, time-varying phase values are supplied to the first summing unit (11) as input variables and the sum of the supplied phase values is provided as an output variable by the first summing unit (11). [9] MEMS mirror arrangement (12) according to one of the preceding claims, wherein the first phase position determination device (2) comprises a first adding unit (34), wherein the first phase position determination device (2) is designed and / or configured such that a time-varying phase value is supplied to the first adding unit (34) as an input variable, preferably a single time-varying phase value is supplied as an input variable, and the sum of the supplied phase value with a first phase value (35) is provided as an output variable by the first adding unit (34), wherein the supplied phase value is preferably - the phase position (6) of the first oscillating signal of the first oscillator unit (5) determined according to claim 3 or - the phase difference (8) of the first feedback signal to a reference signal determined according to claim 6 or - the phase value (10) determined according to claim 7 by means of the first adaptation unit (9) dependent on a physical parameter is or - a sum of the phase position (6) of the first oscillating signal of the first oscillator unit (5) determined according to claim 3 and the phase difference (8) of the first feedback signal to a reference signal determined according to claim 6 or - a sum of the phase position (6) of the first oscillating signal of the first oscillator unit (5) determined according to claim 3 and the phase value (10) determined according to claim 7 by means of the first adaptation unit (9) dependent on a physical parameter, or - a sum of the phase position (6) of the first oscillating signal of the first oscillator unit (5) determined according to claim 3 and the phase difference (8) of the first feedback signal to a reference signal determined according to claim 6 and the phase value (10) determined according to claim 7 by means of the first adaptation unit (9) dependent on a physical parameter. [10] MEMS mirror arrangement (12) according to one of the preceding claims, wherein the first calculation device (1) is designed and / or arranged such that the first prediction signal (4) cannot be described with a single sine function. [11] MEMS mirror arrangement (12) according to one of the preceding claims, wherein the first calculation device (1) is designed and / or arranged such that a first sine function (36) is used to determine the first prediction signal (4), wherein the first calculation device (1) and the first phase position determination device (2) are designed and / or configured such that the phase values of the first phase signal (3) are each supplied to the first sine function (36) as an input variable and the respective function value formed with the first sine function (36) is provided as an output variable and used to determine the first prediction signal (4). [12] MEMS mirror arrangement (12) according to the preceding claim, wherein the first calculation device (1) is designed and / or configured such that, in addition to the first sine function (36), a first time-dependent correction function (37) is used to determine the first prediction signal (4), so that the first prediction signal (4) cannot be described with a single sine function, wherein the first calculation device (1) is preferably designed and / or arranged such that the first time-dependent correction function (37) is determined as a function of the first phase signal (3), wherein particularly preferably the first calculation device (1) is designed and / or configured such that the first prediction signal (4) is formed by the sum of a first summand, which comprises the first sine function (36), and the first correction function (37). [13] MEMS mirror arrangement (12) according to the preceding claim, wherein the first calculation device (1) is designed and / or configured such that the first correction function (37) comprises a second sine function, in particular is the product of the second sine function with at least one further factor, wherein the first calculation device (1) is preferably designed and / or configured such that phase values are each supplied to the second sine function as an input variable and the respective function value formed with the second sine function is provided as an output variable and used to determine the first prediction signal (4). [14] MEMS mirror arrangement (12) according to claim 12 or 13, wherein the first calculation device (1) is designed and / or configured such that the first correction function (37) comprises an adjustable, in particular user-adjustable, first coefficient K1, wherein the first calculation device (1) is preferably designed and / or configured such that the adjustable first coefficient K1 is a multiplier of a trigonometric function, in particular a sine function, also included in the first correction function (37). [15] MEMS mirror arrangement (12) according to one of the preceding claims, wherein the MEMS mirror (22) is additionally mounted so as to be capable of oscillating with respect to a second oscillation axis, wherein the second oscillation axis is not aligned parallel to the first oscillation axis, wherein the MEMS mirror arrangement (12) has a second phase position determination device (2'), wherein the second phase position determination device (2') is designed and / or configured such that it provides a second electrical phase signal (3') which describes a time-varying phase position of an oscillation movement of the MEMS mirror (22) with respect to the second oscillation axis, wherein the MEMS mirror arrangement (12) comprises a second calculation device (1'), wherein the second calculation device (1') is designed and / or configured such that the second calculation device (1') calculates a second prediction signal (4'), which describes a future oscillation movement of the MEMS mirror (22) with respect to the second oscillation axis, in direct or indirect dependence on the second phase signal (3'), wherein the second calculation device (1') and the data processing device (15) are designed and / or arranged such that the data processing device (15) reads out or receives the second prediction signal (4'), wherein the second calculation device (1') and the data processing device (15) are designed and / or configured such that the provision of the pixel data (14) by the data processing device (15) takes place as a function of the received or read-out second prediction signal (4'), in particular that the provision of the pixel data (14) by the data processing device (15) takes place in an order of the pixel data (14) that is dependent on the second prediction signal (4') and / or with a selection of the times at which pixel data (14) are respectively provided that is dependent on the second prediction signal (4'). [16] MEMS mirror arrangement (12) according to claim 15, wherein, according to a first possibility, the first calculation device (1) is designed and / or configured such that the first calculation device (1) calculates the first prediction signal (4) as a function of the first phase signal (3) and additionally as a function of the second phase signal (3'), and / or wherein, according to a second possibility, the second calculation device (1') is designed and / or configured such that the second calculation device (1') calculates the second prediction signal (4') as a function of the second phase signal (3') and additionally as a function of the first phase signal (3). [17] MEMS mirror arrangement (12) according to the first possibility of claim 16 and as far as it relates back to claim 13, wherein the first calculation device (1) is designed and / or arranged such that the phase values supplied to the second sine function are each formed or partially formed from the sum of the following two products: - the product of a phase value of the first phase signal (3) with an integer, in particular the product of a phase value of the first phase signal (3) with the number 1, and - the product of a phase value of the second phase signal (3') with an integer, in particular the product of a phase value of the second phase signal (3') with the number 2. [18] MEMS mirror arrangement (12) according to the first possibility of claim 16 and as far as it relates back to claim 13, wherein the first calculation device (1) is designed and / or arranged such that the phase values supplied to the second sine function or a further sine function are each formed or partially formed from the difference between the following two products: - the product of a phase value of the first phase signal (3) with an integer, in particular the product of a phase value of the first phase signal (3) with the number 1, as subtrahend and - the product of a phase value of the second phase signal (3') with an integer, in particular the product of a phase value of the second phase signal (3') with the number 2, as the minuend. [19] MEMS mirror arrangement (12) according to one of claims 15 to 18, wherein the MEMS mirror (22) is mounted so as to be movable, in particular oscillatable, with respect to the first oscillation axis, with respect to the second oscillation axis and additionally with respect to a third oscillation axis, wherein the MEMS mirror has a mirror plane, wherein the first oscillation axis is aligned parallel to the mirror plane, wherein the second oscillation axis is aligned parallel to the mirror plane, wherein the third oscillation axis is not aligned parallel to the mirror plane and preferably perpendicular to the first and second oscillation axes, wherein the MEMS mirror arrangement (12) has a third phase position determination device, wherein the third phase position determination device is designed and / or configured such that it provides a third electrical phase signal which describes a temporally changing phase position of a movement, in particular an oscillation movement, of the MEMS mirror (22) with respect to the third oscillation axis, - wherein, according to a first possibility, the first calculation device is designed and / or configured such that the first calculation device calculates the first prediction signal in direct or indirect dependence on the third phase signal and / or - wherein, according to a second possibility, the second calculation device is designed and / or configured such that the second calculation device calculates the second prediction signal in direct or indirect dependence on the third phase signal. [20] MEMS mirror arrangement (12) according to one of the preceding claims, wherein the first calculation device (1) is a component of an IC, ie an integrated electronic circuit, and in particular a component of an ASIC, ie an application-specific integrated electronic circuit, so that the first calculation device is designed such that the first calculation device (1) calculates the first electrical prediction signal (4) as a function of the first phase signal (3), wherein the first phase position determination device (2) is preferably a component of an IC, in particular ASIC, and particularly preferably a component of the IC or ASIC which also comprises the first calculation device. [21] MEMS mirror arrangement (12) according to one of claims 1 to 19, wherein the first calculation device (1) is a component of a microchip equipped with a CPU, a universally programmable integrated electronic circuit, so that the first calculation device (1) is set up such that the first calculation device (1) calculates the first electrical prediction signal (4) as a function of the first phase signal (3), wherein the first phase position determination device (2) is preferably a component of a microchip equipped with a CPU and particularly preferably a component of the microchip equipped with a CPU which also comprises the first calculation device (1). [22] MEMS mirror arrangement (12) according to one of the preceding claims, wherein the MEMS mirror arrangement (12) comprises a light source (21), wherein the light source (21) and the MEMS mirror (12) are designed and arranged such that the MEMS mirror (22) projects a light beam (23) emitted by the light source (21) onto an at least imaginary projection surface, wherein the data processing device (15) and the light source (21) are designed, arranged and configured such that the data processing device (15) provides the pixel data (14) to the light source (21) and the light source (21) projects light beams (23) or their properties, such as color and brightness, onto the MEMS mirror (22) depending on the received pixel data (14). [23] MEMS mirror array (12), wherein the MEMS mirror arrangement (12) comprises a MEMS mirror (22) for projecting a light beam (21) onto a projection surface of virtual reality glasses or augmented reality glasses, wherein the MEMS mirror (22) is mounted so as to be capable of oscillation with respect to a first oscillation axis, wherein the MEMS mirror (22) is mounted so as to be capable of oscillation with respect to a second oscillation axis, wherein the MEMS mirror (22) is mounted such that the first oscillation axis and the second oscillation axis are not aligned parallel to each other, wherein the MEMS mirror arrangement (12) comprises a first and a second MEMS drive (25), wherein the first MEMS drive (25), the second MEMS drive and the MEMS mirror (22) are designed, arranged and configured such that the first MEMS drive (25) and the second MEMS drive drive a bi-resonant oscillation of the MEMS mirror (22) with respect to the first and second oscillation axes, wherein the MEMS mirror arrangement is designed such that the bi-resonant oscillation in the frequency spectrum with respect to the first oscillation axis or with respect to the second oscillation axis has a first peak at the driven resonance frequency and at least one second peak at a secondary frequency, wherein the second peak has an amplitude of at least 0.5 per thousand, preferably at least 0.75 and particularly preferably at least 1 per thousand, of the amplitude of the first peak. [24] Computer-implemented or integrated circuit-implemented method for predicting an oscillation movement of a MEMS mirror, in particular a bi-resonantly driven MEMS mirror, with respect to a first oscillation axis, wherein the predicted oscillation movement cannot be described with a single sine function. [25] Method for configuring a MEMS mirror arrangement comprising the steps A) providing a MEMS mirror arrangement according to any one of claims 1 to 23 for determining the prediction of the oscillatory motion; B) Initial setting (27) of an adjustable parameter of the system, such as an adjustable coefficient or a phase value which is added to a supplied phase value in an adding unit; C) checking (29) whether the predicted oscillatory motion is substantially identical to the actual oscillatory motion of the MEMS mirror; D) If the test in step C) shows that a discrepancy between predicted vibration movement and actual vibration movement exceeds a predefined threshold: Adjust the adjustable parameter and repeat step C).

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