Storage system and vacuum arrangement

Abstract

According to various embodiments, a bearing system can comprise: a bearing system comprising: a stator (102) which has a mounting device (102m) and is penetrated along an axis of rotation (111) by a first through-hole; a first shaft (104) which is arranged in the first through-hole and is penetrated along the axis of rotation (111) by a second through-hole; a second shaft (106) which is arranged in the second through-hole; several coupling devices, one of which a coupling device (104k) of the first type is provided by means of a section of the first shaft (104) projecting from the first through-hole; a coupling device (106k) of the second type is provided by means of a section of the second shaft (106) projecting from the section of the first shaft (104);an additional coupling device (204k) of the first type is provided by means of a coupling adapter, which is set up on one side opposite the additional coupling device (204k), to be coupled to the coupling device (106k) of the second type.;

Description

[0001] Several embodiments relate to a bearing system and a vacuum arrangement.

[0002] In general, a flexible substrate in the form of a strip (e.g., metal strip, foil strip, or glass strip) can be processed in a coating system, for example, coated (and / or otherwise treated) in a strip coating system. The strip substrate can be transported through a processing area by means of a transport system. This transport system (also referred to as a winding system) can be configured, for example, to process the strip substrate from roll to roll (also referred to as R2R), whereby the strip substrate is unwound from a first substrate winding (also referred to as a substrate winding roll), transported through the coating area, and, after coating, rewound onto a second substrate winding (also referred to as rewinding). The coating system can include a vacuum chamber, allowing the strip substrate to be processed under vacuum.For example, the tape substrate can be coated using gas phase deposition, e.g. chemical vapor deposition (CVD) or physical vapor deposition (PVD).

[0003] According to various embodiments, it has been recognized that conventional transport systems have a complex structure, require a lot of installation space, make maintenance difficult and / or assembly difficult.

[0004] Against this background, a storage system is provided that addresses these aspects. Specifically, the storage system can help to reduce installation space, rewind multiple belt substrates simultaneously, and / or facilitate maintenance and / or assembly.

[0005] The following are various examples that refer to what has been described previously and depicted in the figures.

[0006] Example 1 (also referred to as the basic configuration) is a bearing system comprising: a stator having a mounting device and being penetrated along an axis of rotation by a first through-hole (also referred to as the stator opening); a first shaft (also referred to as the hollow shaft) being arranged in the first through-hole and being penetrated along the axis of rotation by a second through-hole (also referred to as the shaft opening); a second shaft (also referred to as the inner shaft) being arranged in the second through-hole and which is preferably provided as a solid shaft.

[0007] Example 2 is set up according to Example 1, wherein the first shaft and / or the second shaft are rotatably mounted about the axis of rotation (preferably by means of a rotary bearing) and displaceably along the axis of rotation relative to the stator (preferably by means of a rotary bearing set up as a floating bearing).

[0008] Example 3 is configured according to Example 1 or 2, further comprising several coupling devices, of which: a coupling device of the first type (also referred to as the first coupling device) is provided by means of a first side (e.g., end section) of the first shaft projecting from the first through-opening; a coupling device of the second type (also referred to as the second coupling device) is provided by means of a second side (e.g., end section) of the second shaft projecting from the first side of the first shaft; an (optional) additional coupling device (e.g., of the first type or configured to be complementary to the first type) is provided by means of a (e.g., single) coupling adapter, which is configured on a side opposite the additional coupling device to be coupled to the coupling device of the second type.

[0009] Example 4 is a bearing system (preferably according to one of Examples 1 to 3) comprising: a stator having a mounting device and being penetrated along an axis of rotation by a first through-hole; a first shaft being arranged in the first through-hole and being penetrated along the axis of rotation by a second through-hole; a second shaft being arranged in the second through-hole; wherein the first shaft and / or the second shaft are rotatably mounted about the axis of rotation and displaceably along the axis of rotation relative to the stator.

[0010] Example 5 is a bearing system (preferably according to one of Examples 1 to 4) comprising: a stator having a mounting device and being penetrated along an axis of rotation by a first through-hole; a first shaft being arranged in the first through-hole and being penetrated along the axis of rotation by a second through-hole; a second shaft being arranged in the second through-hole; several coupling devices, one of which a coupling device of the first type is provided by means of a first side of the first shaft projecting from the first through-hole; a coupling device of the second type is provided by means of a second side of the second shaft projecting from the first side of the first shaft;an additional coupling device of the first type is provided by means of a coupling adapter, which is set up on one side opposite the additional coupling device, to be coupled with the coupling device of the second type.

[0011] Example 6 is set up according to one of Examples 1 to 5, further comprising: a first bearing device which is arranged in the first through-opening and / or by means of which the first shaft is rotatably supported, for example rotatably about the axis of rotation and / or displaceably supported along the axis of rotation; wherein the first bearing device is preferably set up as a floating bearing.

[0012] Example 7 is set up according to one of Examples 1 to 6, further comprising: a second bearing device which is arranged in the second through-opening and / or by means of which the second shaft is supported, for example rotatably about the axis of rotation and / or slidably along the axis of rotation; wherein the second bearing device is preferably set up as a floating bearing.

[0013] Example 8 is configured according to one of Examples 1 to 7, further comprising a drive system which is configured to: drive a rotation of the first shaft and / or the second shaft (e.g. supply a torque), preferably independently of each other; and / or drive a translation of the first shaft and / or the second shaft along the axis of rotation, preferably independently of each other.

[0014] Example 9 is set up according to Example 8, wherein the drive system is set up to drive the rotation and translation of the first shaft independently; and / or to drive the rotation and translation of the second shaft independently.

[0015] Example 10 is configured according to Example 8 or 9, wherein the drive system is configured to be controlled in response to a control signal: to drive the rotation of the first shaft according to a first rotation specification, if the control signal represents the first rotation specification (e.g., as a manipulated variable); and / or to drive the rotation of the second shaft according to a second rotation specification, if the control signal represents the second rotation specification (e.g., as a manipulated variable); and / or to drive the translation of the first shaft according to a first translation specification, if the control signal represents the first translation specification (e.g., as a manipulated variable); and / or to drive the translation of the second shaft according to a second translation specification, if the control signal represents the second translation specification (e.g., as a manipulated variable).

[0016] Example 11 is set up according to one of Examples 8 to 10, wherein the translation of the first shaft is effected by means of a force mediated between the stator and the first shaft; and / or wherein the translation of the second shaft is effected by means of a force mediated between the second shaft and the stator or the first shaft.

[0017] Example 12 is set up according to one of Examples 8 to 11, wherein the drive system and the stator are supported relative to each other by means of a fixed bearing and / or a frame.

[0018] Example 13 is set up according to one of Examples 1 to 12, wherein the stator has a circuit board (also referred to as a mounting board), e.g. a flange (as a circuit board), e.g. a vacuum flange, and / or a vacuum seal.

[0019] Example 14 is configured according to one of Examples 1 to 13, further comprising: one or more than one rotary feedthrough (preferably), wherein: one or more than one first rotary feedthrough is coupled to the first shaft and / or is configured to prevent the passage of gas through the first rotary feedthrough; one or more than one second rotary feedthrough is coupled to the second shaft and / or is configured to prevent the passage of gas through the second rotary feedthrough.

[0020] Example 15 is configured according to one of Examples 1 to 14, further comprising: one or more than one coupling device, of which preferably: a coupling device of the first type is provided by means of a side of the first shaft projecting from the stator and / or is configured to transmit a torque to a first machine element coupled to (e.g., mounted on) the first shaft; and / or a coupling device of the second type is provided by means of a side of the second shaft projecting from the first through-hole (and / or the side of the first shaft) and / or is configured to transmit a torque to a second machine element coupled to (e.g., mounted on) the second shaft.

[0021] Example 16 is configured according to Example 15, wherein of the one or more coupling devices, each coupling device: has a toothed section (e.g., having one or more machine teeth), preferably a Hirth toothed section; is arranged on a side of the stator facing away from the drive system; is arranged on a vacuum side of the bearing system. A Hirth toothed section facilitates assembly.

[0022] Example 17 is configured according to one of Examples 15 to 16, further comprising: one or more than one machine element, preferably a winding sleeve, each of which (e.g., one or more than one side of the machine element) is configured: to be coupled to the coupling device of the first type; to be coupled to the coupling device of the second type; and / or to be coupled to the coupling adapter. In the case of a winding sleeve, a coupling device is also referred to as winding sleeve couplings.

[0023] Example 18 is configured according to one of Examples 15 to 17, further comprising: a coupling adapter which has a first side configured to be coupled to the coupling device of the second type, and a second side opposite the first side which has an additional coupling device of the first type.

[0024] Example 19 is a vacuum arrangement comprising: a vacuum chamber housing, which for example has a third through-opening; a bearing system according to one of Examples 1 to 18, the stator of which is mounted in or on the vacuum chamber housing (e.g. rigidly to it), wherein the axis of rotation preferably extends through the third through-opening and / or wherein preferably the first and / or the second shaft is arranged (at least partially) inside the vacuum chamber housing.

[0025] Example 20 is set up according to Example 19, further comprising: a winding system for wrapping a strip-shaped substrate, wherein the winding system is provided by means of the storage system and / or is provided by means of one or more than one storage system, each of which is set up according to one of Examples 1 to 19.

[0026] Example 21 is set up according to Example 19 or 20, further comprising: a processing device which is arranged in the vacuum chamber housing and / or is set up to emit a coating material into the vacuum chamber housing, e.g. to which a transport path is exposed which is provided by means of the winding system.

[0027] Example 22 is configured according to one of Examples 1 to 21, comprising: a vacuum chamber housing having one or more rotary unions (e.g., one rotary union per shaft); wherein the stator is mounted in or on the vacuum chamber housing, and wherein the first shaft and / or the second shaft are coupled to a rotary union. A rotary union is intuitively easier to seal than a rotary-slide union.

[0028] Example 23 is set up according to one of Examples 1 to 22, wherein one or more than one (e.g. each) of the coupling devices (also referred to as coiling sleeve couplings) is set up to couple a coiling sleeve.

[0029] Example 24 is configured according to one of Examples 1 to 23, wherein the winding system (also referred to as the rewinding system) comprises two bearing systems for coupling winding sleeves (e.g., between which a strip substrate is to be wound), each bearing system being configured according to one of Examples 1 to 23, wherein preferably the two bearing systems provide a first pair of rotatably mounted coupling devices (e.g., winding sleeve couplings), e.g., of the first type, for coupling two winding sleeves between which a first strip substrate is to be wound, wherein preferably the two bearing systems provide a second pair of rotatably mounted coupling devices (e.g., winding sleeve couplings), e.g., of the second type, for coupling two winding sleeves between which a second strip substrate is to be wound.

[0030] Example 25 is set up according to any one of Examples 1 to 24, wherein the winding system has at least one (i.e., one or more than one) rotatably mounted guide roller which provides a curved transport path along which the winding takes place (also referred to as web running); wherein the winding sleeve couplings of each pair are set up substantially identically, so that the winding sleeves are interchangeable.

[0031] Example 26 is set up according to Example 25, wherein the at least one guide roller comprises at least one of the following guide roller types: a deflection roller; a spreading roller; a measuring roller; and / or a tension roller. At least the tension roller can be a driven (i.e., active) guide roller. Alternatively or additionally, the deflection roller, the spreading roller, and / or the measuring roller can be undriven (i.e., passive) guide rollers.

[0032] Example 27 is set up according to one of Examples 1 to 26, wherein the drive system, e.g., for each tape path and / or for each pair of coupling devices, has a pair of drive devices which are set up in a substantially identical manner so that, under identical control, they rotate two reel couplings synchronously (e.g., bidirectionally). Synchronous (e.g., tape path synchronous) can be understood, for example, as the fact that the multiple reel couplings perform a similar movement, e.g., with the same direction of rotation, in sync, with simultaneous changes in motion, and / or at the same rotational speed.

[0033] Example 28 is configured according to one of Examples 1 to 27, further comprising a control device for controlling the drive system (e.g., each drive device thereof) according to a winding scheme comprising: a winding configuration for driving the winding sleeve coupling by means of which the substrate is wound; and / or an unwinding configuration for driving the winding sleeve coupling by means of which the substrate is unwound; wherein the control is configured to selectively drive each of the multiple drive devices either according to the winding configuration and / or according to the unwinding configuration.

[0034] Example 29 is set up according to one of Examples 1 to 28, which is used to transport (e.g., wrap) a tape substrate, e.g., in a vacuum, wherein the tape substrate is coated, for example, during transport.

[0035] Example 30 is configured according to one of Examples 1 to 29, further comprising several winding sleeves, each of which has a coupling device configured to complement the first type.

[0036] Example 31 is set up according to one of Examples 1 to 30 and / or according to one of the attached claims.

[0037] They show Fig. 1A and B each represent a bearing system according to different embodiments in a schematic side view or cross-sectional view; Fig. 2A and B each represent a bearing system according to different embodiments in a schematic side view or cross-sectional view; Fig. 3 a vacuum arrangement according to various embodiments in a schematic side view or cross-sectional view; Fig. 4 and Fig. 5 each a winding system according to different embodiments in different schematic views; Fig. 6A and B each show a winding system according to different embodiments in a schematic side view or cross-sectional view; and Fig. 7A and B each show a vacuum arrangement according to different embodiments in a schematic side view or cross-sectional view.

[0038] The following detailed description refers to the accompanying drawings, which form part thereof and illustrate specific embodiments in which the invention can be implemented. In this context, directional terminology such as "top," "bottom," "front," "back," "anterior," "rear," etc., is used with reference to the orientation of the described figure(s). Since components of embodiments can be positioned in a number of different orientations, the directional terminology serves only for illustration and is in no way limiting. It is understood that other embodiments may be used and structural or logical modifications may be made without deviating from the scope of protection of the present invention.It is understood that the features of the various exemplary embodiments described herein can be combined with one another, unless specifically stated otherwise. The following detailed description is therefore not to be interpreted in a limiting sense, and the scope of protection of the present invention is defined by the appended claims.

[0039] Within the scope of this description, the terms "connected," "connected," and "coupled" are used to describe both direct and indirect connections (e.g., resistive and / or electrically conductive, such as an electrically conductive connection), direct or indirect connections, and direct or indirect couplings. In the figures, identical or similar elements are designated with identical reference numerals where appropriate.

[0040] According to various embodiments, the term "coupled" or "coupling" can be understood in the sense of a connection and / or interaction (e.g., mechanical, hydrostatic, thermal, and / or electrical), e.g., direct or indirect. Several elements can, for example, be coupled to one another along an interaction chain along which the interaction can be exchanged, e.g., a fluid (then also referred to as fluid-conducting coupled). For example, two coupled elements can exchange an interaction with each other, e.g., a mechanical, hydrostatic, thermal, and / or electrical interaction. A coupling of several vacuum components (e.g., valves, pumps, chambers, etc.) can feature that they are fluid-conducting coupled to one another. According to various embodiments, "coupled" can be understood in the sense of a mechanical (e.g., physical) coupling, e.g.,by means of direct physical contact. A coupling can be designed to transmit a mechanical interaction (e.g. force, torque, etc.).

[0041] The term "control device" can be understood as any type of logic-implementing entity that may, for example, have circuitry and / or a processor capable of executing software stored in a memory medium, firmware, or a combination thereof, and issuing instructions based on that software. The control device may be configured, for example, using code segments (e.g., software) to control the operation of a system (e.g., its operating point), such as a machine or plant, or at least its kinematic chain. The control device may, for example, be a programmable logic controller (PLC) or be derived from one.

[0042] According to various embodiments, a storage device can be configured to hold (e.g., guide and / or position) one or more components. For example, the storage device can have one or more bearings per component for holding (e.g., guide and / or position) the component. Each bearing of the storage device can be configured to provide the component with one or more degrees of freedom (e.g., translational or rotational) according to which the component can be moved. Examples of bearings include: radial bearings, thrust bearings, radial-axial bearings, and linear bearings (also called linear guides). Each linear bearing can, for example, provide the component with exactly one translational degree of freedom.

[0043] A bearing system is understood to be a system consisting of several components, examples of which include: one or more bearing devices (e.g., comprising one or more rotary bearings), one or more coupling devices, one or more rotors (e.g., shafts), and one or more stators. The bearing system may, for example, include one or more mounting devices.

[0044] According to various embodiments, a substrate can be transported as a strip (also called a strip substrate) from roll to roll (i.e., wound between the winding rollers). The strip substrate can, for example, have a width (extent perpendicular to the transport direction) ranging from approximately 1 cm (e.g., 30 cm) to approximately 500 cm, or a width (also called substrate width) greater than approximately 500 cm. Furthermore, the strip substrate can be flexible. In essence, a strip substrate can be any substrate that can be wound onto a roll and / or processed, for example, from roll to roll. Depending on the elasticity of the material used, the strip substrate can have a thickness (also called substrate thickness) ranging from approximately a few micrometers (e.g., approximately 1 µm) to approximately a few millimeters (e.g., up to approximately 10 mm), for example, from approximately 0.01 mm to approximately 3 mm.The transport rollers of the transport arrangement can be axially longer than the width of the belt substrate.

[0045] One exemplary implementation of the tape substrate features a 100 mm wide metal tape.

[0046] Depending on its application and configuration, a transport roller can be designed in various ways. For example, a transport roller can serve as a guide and / or deflector (e.g., active or passive) for the transport path, for temperature control (e.g., cooling), or for driving the substrate transport. Such a transport roller for temperature control (also called a temperature control roller), e.g., a cooling roller, can be driven, and its rotation can drive the substrate transport. The temperature control roller can, for example, have a ceramic surface (e.g., a steel roller), which may be sprayed on.

[0047] A winding core can be understood here as a transport roller onto which the tape substrate can be wound. The winding core has a base body (e.g., tubular) onto whose outer surface the substrate is wound, and which can optionally be mounted on a shaft. Optionally, the winding core has two limiting discs (then also referred to as a winding spool) between which a cavity is formed, adjacent to the base body. The limiting discs ensure straight tape travel.

[0048] A ribbon substrate (also called a tape substrate) can be a film, nonwoven, tape, and / or woven fabric. For example, a ribbon substrate can be a metal tape, metal foil, plastic tape (polymer tape), and / or plastic film (polymer film). According to various embodiments, the ribbon substrate can be any material, such as a metal, a semimetal, a polymer, a glass, or any other material that can be processed with a sufficiently small thickness and / or as fibers using rollers or cylinders. In essence, a ribbon substrate can be any substrate that can be wound onto and / or unwound from a roll and / or processed from roll to roll. Depending on the material, a ribbon substrate can have a thickness in the range of approximately a few micrometers (e.g.,from approximately 1 µm) to approximately a few millimeters (e.g. up to approximately 10 mm).

[0049] According to various embodiments, the vacuum chamber can be provided by means of a chamber housing in which one or more chambers are provided. The chamber housing can, for example, be coupled to a pump arrangement, e.g., a vacuum pump arrangement (e.g., gas-conducting), to provide a negative pressure or a vacuum (vacuum chamber housing) and be designed to be stable enough to withstand the effects of atmospheric pressure in the evacuated state. The pump arrangement (comprising at least one vacuum pump, e.g., a high-vacuum pump, e.g., a turbomolecular pump) can enable the removal of some of the gas from the interior of the processing chamber, e.g., from the processing space. Accordingly, one or more vacuum chambers can be provided in a chamber housing. In other words, the chamber housing can be configured as a vacuum chamber housing.A coating chamber can be set up as a vacuum chamber.

[0050] According to various embodiments, reference is made to physical vapor deposition (PVD) as an exemplary coating process, e.g., a sputtering process, which is to be distinguished from chemical vapor deposition (CVD). In contrast to CVD, in PVD a solid material is first converted into the gas phase (also referred to as gaseous phase or vapor), and a layer is formed using this gas phase. In PVD, the gas phase of the target material can optionally react chemically with a reactive gas to form a chemical compound, which is incorporated into the layer or forms it. Thus, in the chemical reaction of PVD, two or more materials are combined to form the chemical compound.In chemical vapor deposition (CVD), a gaseous starting compound (also called precursor or reactant) is split into at least two reaction products, of which at least one is incorporated into the layer and optionally one reaction product is removed from the coating process as an excess (e.g., by means of a pump). Optionally, CVD can be carried out using a plasma in which the splitting of the precursor takes place.

[0051] A plasma can be generated using a so-called working gas (also known as a plasma-forming gas). Depending on the specific design, the working gas can be a gaseous material that is unreactive, meaning it participates in few or no chemical reactions. A working gas can be defined by, or adapted to, the target material used. For example, a working gas can be a gas or a gas mixture that does not react with the target material to form a solid or is even inert to it. The working gas can be, for example, a noble gas (e.g., helium, neon, argon, krypton, xenon, radon) or several noble gases. The plasma can be generated from the working gas, which essentially causes the target material to atomize.If a reactive gas is used, it may exhibit higher chemical reactivity than the working gas, for example, with respect to the target material. In other words, the atomized target material may react faster with the reactive gas (if present), forming more reaction product per unit of time, than with the working gas (if it reacts chemically with the working gas at all). The reactive gas and the working gas can be supplied together or separately as a process gas (e.g., as a gas mixture), for example, via the gas supply device.

[0052] It can be understood that what is described here for sputtering can apply analogously to any other coating process, e.g., physical vapor deposition. In general, physical vapor deposition (e.g., sputtering) involves the transfer of the chemical composition of the target or coating material into the layer being formed.

[0053] In this context, an assembly device is understood to be a device (of the machine element type) designed for assembly, for example, for mounting on a complementary assembly device (also referred to as a counter-assembly device). During assembly, several components are connected to one another (e.g., rigidly) using their assembly devices. Assembly can be (e.g., exclusively) positive-locking and / or detachable. The assembly device preferably has a (e.g., planar) mounting surface which, during assembly, rests against a complementary mounting surface of the counter-assembly device. The assembly device can, for example, have one or more (e.g., integral) mounting profiles (e.g., positive-locking profiles), which are provided, for example, by means of a feature (e.g., a projection or recess) on the assembly device. Examples of mounting profiles include: a thread, a groove (e.g.,for keyway mounting and / or dovetail groove), a locking lug, a bayonet fitting, a pin, etc. Examples of unevenness include: an opening (e.g., through hole and / or threaded hole), a bolt (e.g., a threaded bolt).

[0054] An exemplary implementation of the mounting device is configured as a circuit board, e.g., as a flange, such as a vacuum flange. The flange can be configured for rigid and / or detachable connection to another flange. Two connected flanges form a so-called flange connection. The flange can have a mounting surface (e.g., planar). Optionally, the flange can be penetrated by an opening (also referred to as a flange opening) which is surrounded by the mounting surface, e.g., along a closed path. The flange connection can be configured so that two flanges are arranged with their mounting surfaces facing each other, e.g., in contact. The flange opening of a vacuum chamber housing can open into the interior of the vacuum chamber housing, e.g., adjacent to it. Optionally, the flange can have a groove that surrounds the flange opening, e.g.,The flange runs along the closed path surrounding the flange opening and / or adjoins the mounting surface. A gasket, such as a metal or plastic gasket, can optionally be accommodated in the groove. Optionally, the flange can have a projection that extends to the mounting surface. For example, the mounting surface may protrude.

[0055] An exemplary implementation of the assembly device is configured as a coupling device. A coupling device is designed to connect two components (e.g., shafts), one or more of which are rotatably mounted, for example, by means of a rigid, elastic, movable, and / or detachable connection between the two components. The coupling device is specifically designed to transmit torque and / or rotational motion between the two components, for example, by setting them into rotational motion. An exemplary implementation of the coupling device may, for example, include a clamping device, teeth, or similar features for connecting the two components.

[0056] A drive device can be understood here as a converter designed to transform electrical energy into mechanical energy. A drive device can, for example, comprise an electric motor (e.g., with electrical coils). A drive device can, for example, comprise a compressor and a piston coupled to it. A drive device can, for example, comprise one or more piezoelectric elements. For example, the drive device can be configured to output the mechanical energy by means of a torque or a rotary motion.

[0057] According to various embodiments, for example, a reduction in installation space (footprint and chamber size) is facilitated. According to various embodiments, for example, the accessibility of the chamber interior is improved, since the drive devices can be arranged on the same side. This accessibility makes it easier to load the belt substrate with one or more winding cores into the bearing system, for example, without having to disassemble the drive system. Alternatively or additionally, belt threading is made easier from the front, e.g., at the belt tension decoupling roller.

[0058] According to various embodiments, a chamber housing can be configured to provide one or more than one vacuum chamber (then also referred to as a vacuum chamber housing) and / or be configured in such a way that a pressure in a range of approximately 10 mbar to approximately 1 mbar (in other words, rough vacuum) can be provided therein, and / or a pressure in a range of approximately 1 mbar to approximately 10 -3 mbar (in other words, fine vacuum), and / or a pressure in the range of approximately 10 -3 mbar to approximately 10 -7 mbar (in other words, high vacuum) and / or a pressure lower than high vacuum, e.g., lower than approximately 10 -7 mbar.

[0059] Optionally, the transport arrangement can include a substrate position sensor, which can be configured to acquire measurement data representing the substrate's position perpendicular to the transport direction. For example, the substrate position sensor can include a web edge sensor, which is configured to detect an edge of the substrate. Using the substrate position sensor, deviations of the substrate's position in the axial direction can be detected, and / or it can detect when the substrate breaks (also known as web breakage).

[0060] Fig. Figure 1A illustrates a bearing system according to various embodiments 100a in a schematic side view or cross-sectional view, preferably configured according to Example 1 (also referred to as the basic configuration), which has two shafts (also referred to as the inner shaft 106 and the hollow shaft 104).

[0061] An exemplary implementation of the axis of rotation 111 extends along a first direction 101 (also called axis direction) and / or perpendicular to a second direction 105 (also called radial direction).

[0062] An exemplary implementation of the bearing system has a first side 151 (also referred to as the outside for clarity) and a second side 153 opposite it (also referred to as the inside for clarity). The axis of rotation 111 can extend from the outside 151 to the inside 153.

[0063] An exemplary implementation of the mounting device 102m is arranged on one side of the stator 102 facing the inner surface 153. Alternatively or additionally, the mounting device 102m is penetrated by and / or surrounds the first through-opening 104o (also referred to as the stator opening) along a closed path.

[0064] An exemplary implementation of the first shaft 104 (also referred to as the hollow shaft) is tubular. An exemplary implementation of the second shaft 106 (also referred to as the inner shaft) is rod-shaped. An exemplary implementation of the shaft opening 104o is cylindrical.

[0065] As shown, the two shafts 104, 106 can be mounted in, for example, a cantilever configuration, i.e., freely cantilevered.

[0066] Fig. Figure 1B illustrates a storage system according to various embodiments 100b in a schematic side view or cross-sectional view, preferably set up according to embodiments 100a and / or the basic configuration.

[0067] An exemplary implementation of the bearing system has one or more bearing devices, of which a first bearing device 104l may be configured, for example, according to Example 6 and / or a second bearing device 106l may be configured, for example, according to Example 7. By means of the one or more bearing devices, the two shafts can be mounted so as to be rotatable relative to each other (i.e., that they are provided with a rotational degree of freedom).

[0068] An exemplary implementation of the first bearing device 104l can, for example, provide a rotary sliding joint and / or a floating bearing, particularly if the first bearing device 104l provides the hollow shaft 104 with one translational degree of freedom along the axis of rotation 111 and one rotational degree of freedom around the axis of rotation 111, e.g., relative to the stator 102. This ensures that the hollow shaft 104 is slidably mounted along the axis of rotation, so that it can be displaced relative to the stator 102.

[0069] An exemplary implementation of the second bearing device 106l can, for example, provide a rotary sliding joint and / or a floating bearing, particularly if the second bearing device 106l provides the inner shaft 106 with one translational degree of freedom along the axis of rotation 111 and one rotational degree of freedom around the axis of rotation 111, e.g., relative to the stator 102 and / or relative to the hollow shaft 104. This ensures that the inner shaft 106 is slidably mounted along the axis of rotation, so that it can be displaced relative to the stator 102 and / or the hollow shaft 104.

[0070] For example, the two shafts 104, 106 can be mounted so as to be displaceable relative to each other and / or relative to the stator 102. For example, a floating bearing can be implemented using a ball bearing that has a cylindrical inner running surface (e.g., without a groove).

[0071] An exemplary implementation of the mounting device 102m has a flange which protrudes in the radial direction 105.

[0072] Fig. Figure 2A illustrates a vacuum chamber arrangement according to various embodiments 200a in a schematic side view or cross-sectional view, preferably configured according to embodiments 100a to 100b and / or according to Example 3. Generally, coupling devices that differ from one another in type differ from one another in one or more properties (also referred to as coupling properties). Alternatively or additionally, coupling devices that are identical in type may agree in one or more coupling properties. Examples of coupling properties include: an extension (e.g., diameter) along the radial direction 105, a number of uneven positive-locking profiles (e.g., teeth), an inner diameter, and an outer diameter.

[0073] An exemplary implementation of the multiple coupling devices 106k, 104k, including a coupling device of the first type and / or a coupling device of the second type, differ from each other (which are also referred to herein as different types).

[0074] An exemplary implementation of the multiple coupling devices 106k, 104k comprises a first coupling device 104k (e.g., of the first type), which is provided by means of a section of the hollow shaft 104 facing the inside 153 and / or the end face. Alternatively or additionally, the multiple coupling devices 106k, 104k comprise a second coupling device 106l (e.g., of the second type), which is provided by means of a section of the inner shaft 106 facing the inside 153 and / or the end face.

[0075] An exemplary implementation (preferably according to Example 16) of the first coupling device 104k (e.g., of the first type) and / or the second coupling device 106k (e.g., of the second type) has a plurality of uneven positive-locking profiles, e.g., tooth-shaped positive-locking profiles (then also referred to as gearing), and / or is ring-shaped. The plurality of uneven positive-locking profiles can, for example, be arranged one after the other along a closed path that revolves around the axis of rotation 111. Alternatively or additionally, the plurality of uneven positive-locking profiles can be configured according to a Hirth gear.

[0076] Fig. Figure 2B illustrates a vacuum chamber arrangement according to various embodiments 200b in a schematic side view or cross-sectional view, preferably configured according to embodiments 100a to 200a and / or according to Example 18.

[0077] An exemplary implementation (preferably according to Example 18 and / or Example 3) of the coupling adapter 202 can have a first side 202a which is configured complementary to the second coupling device 106k (of the second type) (e.g., implemented by means of a coupling device complementary to it), such that it is configured to couple with the second coupling device 106k. The coupling adapter 202 can further have a coupling device 204k of the first type (also referred to as adapter coupling device 204k) opposite the first side 202a.

[0078] An exemplary implementation of the adapter coupling device 204k is configured in the same way as the first coupling device 104k (also referred to as the external coupling device). Alternatively or additionally, the adapter coupling device 204k and the first coupling device 104k can be configured of the first type.

[0079] The coupling adapter 202 facilitates assembly and simplifies the design. For example, the adapter coupling device 204k and the external coupling device 104k are designed so that they can be coupled to the same winding roller. This allows the same winding roller to be coupled to the hollow shaft and, using the coupling adapter 202, to the inner shaft 106. This eliminates the need to keep different winding rollers on hand.

[0080] Fig. Figure 3 illustrates a vacuum arrangement according to various embodiments 300 in a schematic side view or cross-sectional view, preferably having the bearing system according to one of the embodiments 100a to 200b and / or according to Example 7.

[0081] An exemplary implementation of the vacuum arrangement (preferably according to Example 19) comprises a vacuum chamber housing 802 in which a frame 802w is arranged, by means of which the stator is fixedly mounted in the vacuum chamber housing 802, which is penetrated by a through-opening 802o (also referred to as the chamber opening). The stator 102, e.g., its mounting device, can be mounted on the vacuum chamber housing 802 such that the axis of rotation 111 is arranged in the chamber opening 802o and / or seals it vacuum-tight. Alternatively or additionally, the vacuum arrangement comprises one or more rotary feedthroughs 802d (preferably according to Example 14), which are configured to have one or more shafts extending from outside the vacuum chamber housing 802.

[0082] An exemplary implementation of the drive system has, for each of the two shafts, a pair of drive devices (e.g., electric motors), of which a first drive device 302 is configured to transmit a rotary motion (also referred to as rotation) to the shaft, and a second drive device 312 is configured to transmit a translation to the shaft. For this purpose, the drive system can, for example, include a gearbox 240, which is configured to convert the rotary motion generated by the second drive device 312 into the translation.

[0083] The gearbox 240 can, for example, be supported by means of a fixed bearing 240l. Alternatively or additionally, the second drive device 312 can be mounted in a fixed position relative to the stator.

[0084] An exemplary implementation of the winding system (preferably according to Example 17) has a first winding sleeve 304, which is coupled to the external coupling device 104k, and a second winding sleeve 314, which is coupled to the adapter coupling device 204k. For example, the first winding sleeve and the second winding sleeve can be configured identically.

[0085] Adapter coupling device 204k and external coupling device 106k are configured so that they can be selectively coupled to the same winding roller. Thus, the same winding roller can be coupled either to the hollow shaft or, by means of the coupling adapter 202, to the inner shaft 106. This eliminates the need to keep different winding rollers on hand.

[0086] Fig. Figure 4 illustrates a winding system according to various embodiments 400 in a schematic side view or cross-sectional view, which includes the bearing system, preferably set up according to one of the embodiments 100a to 300 and / or according to Example 7.

[0087] Fig. Figure 5 illustrates a winding system comprising a double shaft drive and the bearing system according to various embodiments 500, in a schematic perspective view, preferably set up according to one of the embodiments 100a to 400 and / or according to Example 7.

[0088] The double-shaft drive comprises four pairs of drive device 504a and rotary feedthrough 802d, of which a first pair is configured to drive a rotary motion of the hollow shaft, a second pair is configured to drive a displacement of the hollow shaft along the axis of rotation, a third pair is configured to drive a rotary motion of the inner shaft, and a fourth pair is configured to drive a displacement of the inner shaft along the axis of rotation. For example, each drive device can be configured to be controlled according to a predefined setting, thus enabling individual control of the rotary speeds and the displacement.

[0089] The rotational movement of the inner shaft 106 is driven directly, for example, while the hollow shaft 104 is driven eccentrically, e.g. by means of a belt 502. This improves space utilization.

[0090] Fig. Figure 6A illustrates a winding system 600a, which comprises the bearing system according to various embodiments, in a schematic side view or cross-sectional view, preferably configured according to embodiments 100a to 500 and / or according to Example 3. The winding system 600a comprises, for example, one set of winding sleeves 602 (also referred to as sleeve set) per bearing system, and one coupling adapter 202 per winding sleeve 602, which is integrated into the winding sleeve (e.g. its base body) (also referred to as adapter-type winding sleeve).

[0091] An exemplary implementation of the adapter-type winding sleeve (e.g., its base body) can be configured on one side complementary to the second coupling device 106k (of the second type) (e.g., by means of a coupling device 606k complementary to the second type), so that the first side is configured for coupling with the second coupling device 106k. The adapter-type winding sleeve (e.g., its base body) can be configured on one side opposite the first side complementary to the first coupling device 104k (of the first type) (e.g., by means of a coupling device 604k complementary to the first type), so that the second side is configured for coupling with the first coupling device 104k. A winding sleeve configured in this way can be coupled to either the first shaft or the second shaft, which reduces the number of winding sleeves required.

[0092] An exemplary implementation of the component of a winding coil, which has two limiting discs between which a cavity (e.g. adjacent to the coupling adapter 202) for receiving the tape substrate is arranged.

[0093] Fig. Figure 6B illustrates a winding system 600b, which has the bearing system according to various embodiments, in a schematic side view or cross-sectional view, preferably set up according to embodiments 100a to 500 and / or according to Example 3.

[0094] The winding system 600b has, for example, one sleeve set per bearing system, and per sleeve set, a separate coupling adapter 202, which is designed to couple the inner shaft with each of the winding sleeves 602 (e.g. of the co-sided type) of the sleeve set.

[0095] An exemplary implementation of the co-sided winding sleeve (e.g., its base body) can be configured on both sides to be complementary to the first coupling device 104k (of the first type) (e.g., by means of a coupling device 606k complementary to the first type), so that it is configured on both sides for coupling with the second coupling device 106k. The co-sided winding sleeve (e.g., its base body) can thus have two sides, each of which is configured to be coupled either to the hollow shaft 104 or the coupling adapter 202. This makes it possible to couple the winding sleeve with any shaft of the bearing system in the same orientation and, moreover, to select the orientation. This further reduces the number of winding sleeves required and simplifies assembly, since the orientation depends on the winding direction of any tape substrate wound onto it.

[0096] Fig. Figure 7A illustrates a vacuum arrangement 700a, which includes the winding system according to various embodiments, in a schematic side view or cross-sectional view. The winding system has two bearing systems, each preferably configured according to embodiments 100a to 500 and / or according to Example 1, each bearing system holding two winding sleeves, thus providing two transport paths 111 between which a strip substrate is wound.

[0097] Furthermore, the vacuum arrangement 700a includes a processing device 752, e.g., a coating device, which is configured to emit a gaseous coating material to each of the transport paths 111. According to various embodiments, processing (also referred to as treatment) of a strip substrate by means of the processing device 752 can include at least one of the following: cleaning the strip substrate, coating the strip substrate, irradiating (e.g., with light, coherent light, UV light, particles, electrons, ions, etc.) the strip substrate, modifying the surface of the strip substrate, heating the strip substrate, etching the strip substrate, and glowing the strip substrate.

[0098] An exemplary implementation of the vacuum chamber housing 802 has a chamber opening that extends from the direction of rotation 101 into the chamber interior, in which the processing device 752 and / or the coupling devices are arranged. Furthermore, the vacuum chamber housing has a chamber cover designed to seal the chamber opening in a vacuum-tight manner. For example, each bearing system can be exposed along the direction of rotation 101 from the chamber opening.

[0099] Fig.Figure 7B illustrates a vacuum arrangement 700b, which includes the winding system according to various embodiments, in a schematic side view or cross-sectional view. The winding system has four bearing systems, each preferably configured according to embodiments 100a to 500 and / or according to Example 1, each bearing system holding two winding sleeves, thus providing four transport paths 111 between which a strip substrate is wound.

[0100] The following describes various work examples that relate to what has been described previously and depicted in the figures.

[0101] In Example 1, the storage system facilitates the (e.g., driven) transport of multiple substrates, for example, independently of one another, in a confined space. The components of the drive system (e.g., its drive devices) can be arranged together on one side, making it easier to access the other side, for example, by means of a vacuum chamber cover. This accessibility makes it easier to load the storage system with one or more winding sleeves 304, 314, for example, without having to disassemble the drive system.

[0102] In working example 2, the drive system is arranged on the outside 151 (then also referred to as drive side 151), so that the two shafts 104, 106, which are mounted in, for example, a cantilever configuration, can be driven from the same side.

[0103] In working example 3, a shaft is moved along its axis of rotation based on measurement data about the state of a strip substrate (also referred to as strip state), which is wound onto a winding sleeve supported by the shaft. This improves the transport of the strip substrate, for example, when the position of the strip edge of the strip substrate is used as the strip state (then also referred to as strip edge control).

[0104] In working example 4, the inner shaft 106 is driven directly, while the hollow shaft 104 is driven eccentrically, e.g. by means of a belt (not shown). This improves space utilization.

[0105] In working example 5, two deep groove ball bearings are provided per shaft, e.g., one fixed bearing and one floating bearing. Alternatively, the two deep groove ball bearings can provide two floating bearings, e.g., implemented as ball bearings with a cylindrical inner raceway and no groove.

[0106] In working example 6, a fixed bearing is arranged on the drive side of the shaft, which is coupled to a drive device (e.g. electric motor) by means of a ball screw guide, which allows the entire shaft (e.g. drive shaft) to be moved.

[0107] In working example 7, a double shaft drive is provided using the bearing system, which is set up, for example, to support two winding sleeves.

[0108] In working example 8, the drive system (e.g., of the twin-shaft drive) has four drive devices, of which a first drive device is configured to drive a rotary motion of the first shaft, a second drive device is configured to drive a displacement of the first shaft (along the axis of rotation), a third drive device is configured to drive a rotary motion of the second shaft, and a fourth drive device is configured to drive a displacement of the second shaft (along the axis of rotation). This facilitates individual control of the rotational speeds and the strip edge control.

[0109] In work example 9, several (e.g., four) strip substrates, each with a width of 100 mm or more and / or made of metal, are transported parallel to each other in a vacuum chamber and processed, e.g., coated. The storage system facilitates the close arrangement of the strip substrates and allows quick and easy access to the winding cores from the front, for example, when the drive system is located on the drive side.

[0110] In working example 10, the multiple winding sleeves are essentially identical, so that they are interchangeable (e.g., with respect to a coupling device of the bearing system). Essentially identical can be understood as identical or at least so similar that the differences between the multiple winding sleeves are so small or few that their interchangeability is maintained. In other words, minor differences between the multiple winding sleeves are optional, but these do not impair their functionality with respect to the bearing system. Alternatively or additionally, the coupling devices of the first type can be essentially identical. Alternatively or additionally, the coupling devices of the second type can be essentially identical.

[0111] In working example 11, the distance between immediately adjacent bearing systems of the winding system is less than approximately 1 m, e.g. less than 0.5 m.

[0112] In working example 12, the distance between immediately adjacent coupling devices of the bearing system is less than approximately 1 m, e.g. less than 0.5 m, e.g. less than 0.25 m.

[0113] In working example 13, the length of the transport path along which the belt substrate is wrapped is greater than approximately 5 m, e.g., approximately 10 m.

Claims

[1] Storage system comprising: • a stator (102) which has a mounting device (102m) and is penetrated along a rotational axis (111) by a first through-hole; • a first shaft (104) which is arranged in the first through-hole and is penetrated along the axis of rotation (111) by a second through-hole; • a second wave (106) which is arranged at the second through-hole; • several coupling devices, of which • a coupling device (104k) of the first type is provided by means of a section of the first shaft (104) projecting from the first through-hole; • a coupling device (106k) of the second type is provided by means of a section of the second shaft (106) projecting from the section of the first shaft (104); • an additional coupling device (204k) of the first type is provided by means of a coupling adapter which is set up on one side opposite the additional coupling device (204k) to be coupled to the coupling device (106k) of the second type. [2] Storage system according to claim 1, further comprising: • a first bearing device, which is arranged in the first through-opening and by means of which the first shaft (104) is rotatably supported about the axis of rotation (111) and displaceably along the axis of rotation (111); and / or • a second bearing device, which is arranged in the second through-opening and by means of which the second shaft (106) is rotatably supported about the axis of rotation (111) and displaceably along the axis of rotation (111). [3] Bearing system according to one of claims 1 to 2, further comprising a drive system which is configured as follows: • to drive a rotation of the first shaft (104) and / or the second shaft (106), preferably independently of each other; • and / or to drive a translation of the first shaft (104) and / or the second shaft (106) along the axis of rotation (111), preferably independently of each other. [4] Bearing system according to claim 3, wherein the drive system is configured to drive the rotation and translation of the first shaft (104) independently of each other. [5] Bearing system according to claim 3 or 4, wherein the drive system is configured to be controlled in response by means of a control signal: • to drive the rotation of the first shaft (104) according to a first rotation command when the control signal represents the first rotation command; and / or • to drive the rotation of the second shaft (106) according to a second rotation command when the control signal represents the second rotation command; and / or • to drive the translation of the first wave (104) according to a first translation specification, if the control signal represents the first translation specification; and / or • to drive the translation of the second wave (106) according to a second translation specification when the control signal represents the second translation specification. [6] Bearing system according to any one of claims 1 to 5, wherein the stator (102) has a flange. [7] Bearing system according to any one of claims 1 to 6, wherein of the multiple coupling devices each coupling device has a toothing, preferably a Hirth toothing. [8] Bearing system according to any one of claims 1 to 7, further comprising a machine element, preferably a winding sleeve, which has two opposite sides, each side of which is provided to be coupled with the additional coupling device of the coupling adapter. [9] Vacuum arrangement comprising: • a vacuum chamber housing that has a rotary feedthrough; • Bearing system according to one of claims 1 to 8, wherein the stator (102) is mounted in or on the vacuum chamber housing, wherein the first shaft (104) or the second shaft (106t) is coupled to the rotary feedthrough. [10] Vacuum arrangement according to claim 9, further comprising: a winding system for wrapping a ribbon-shaped substrate, wherein the winding system is provided by means of the storage system.

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