Device for deflecting a light and / or microwave beam

Abstract

The invention relates to a device (10) for deflecting a light and / or microwave beam (1). The device (10) has a first fastening leg (12a) and a second fastening leg (12b) which are connected to one another in an articulated manner. The device (10) further comprises a reflector device (14) and a coupling device (16). The coupling device (16) connects the reflector device (14), the first fastening leg (12a), and the second fastening leg (12b) in a movement-coupled manner such that when the first and second fastening legs (12a, 12b) are pivoted relative to one another by a pivot angle (α), the reflector device (14) is also pivoted by half the pivot angle (α) relative to the first and second fastening legs (12, 12b).The coupling device (16) has a coupling arm (16a) which is guided displaceably in a guide section (15) of the reflector device (14) along a guide direction (F), wherein the coupling arm (16a) has a main extension direction (L) which is oriented along the guide direction (F).

Description

[0001] The invention relates to a device for deflecting a light and / or microwave beam, as well as a system comprising such a device. Possible applications of the invention include, for example, guiding a light and / or microwave beam from one point to another point that is movable relative to it, for example, guiding a light and / or microwave beam from a window flange of a vacuum chamber to a detector that is movable relative to it.

[0002] Devices for deflecting light and / or microwave beams are generally known in the prior art. Furthermore, systems exist that enable movable beam guidance, for example, using movable reflectors.

[0003] In this context, reference is made, for example, to US 3 528 424 A, which discloses a surgical laser knife in which a laser beam is guided in a movable guide structure. The guide structure comprises an articulated connection between two line sections, wherein the articulated connection is designed to automatically guide the laser beam when the two line sections are pivoted relative to one another. For this purpose, the articulated connection has a reflective surface whose movement is coupled to the movement of the line sections via a slotted guide. Apart from the cantilevered construction, there is only linear contact between the movable parts in the slotted guide, which makes the construction susceptible to wear and tends to jam due to wear. Furthermore, there is no support of the parts perpendicular to the direction of movement, so that the resulting moments further increase wear.

[0004] DE 693 11 781 T2 discloses a compound machine tool that can alternately perform machining and laser beam processing. The compound machine tool has laser beam reflecting means comprising a movable reflecting plate. The plate is mounted by a shaft element between a first passage and a second passage of a holder that treats the laser beam. Furthermore, guide grooves are provided, which are arranged on each side of the movable reflecting plate and extend symmetrically with respect to the shaft element and parallel to a reflecting surface of the movable reflecting plate.Connecting pieces are slidably arranged in each of the first guide grooves, wherein the connecting pieces also engage in second guide grooves which are arranged on the walls of the first passage and the second passage of the laser beam processing holder and each extend in the axial direction of each passage.

[0005] US 3 936 942 A discloses an optical pantograph for directing light rays and the like from a source to a receiver according to the movement of a pointer.

[0006] DE 690 10 270 T2 discloses a universal joint for connecting two light-transmitting universal joint shafts through which a light beam passes along two propagation axes. A first fork is attached to a first shaft, and a hinge in the first fork is pivotable along a first axis of rotation of the universal joint. A second fork is pivotable on the second shaft along the second axis of rotation of the universal joint, with the hinge also pivotable in the second fork. The universal joint further comprises a first mirror, which is attached to the hinge and is arranged along the outer bisector of a first angle formed by the second axis of rotation of the universal joint and the propagation axis of the beam in the first shaft.The universal joint further comprises a transmission mechanism for rotating the hinge through angles equal to half the angles of rotation of the first fork and the first shaft about the first axis of rotation of the universal joint, and thus maintaining the normal to the reflecting surface of the first mirror along the inner bisector of the first angle. The universal joint further comprises a second mirror attached to the second shaft and positioned along the outer bisector of a second angle formed by the second axis of rotation of the universal joint and the propagation axis of the beam in the second shaft, the normal to the reflecting surface of the second mirror being aligned along the inner bisector of the second angle.

[0007] The object of the invention is to provide an improved technology for the (movable) deflection of a light and / or microwave beam, which preferably avoids the disadvantages of previous solutions. A preferred object of the invention is to provide a corresponding technology by means of which a light and / or microwave beam can be deflected as reliably and with minimal wear as possible, so that reliable beam guidance can be ensured even when the relative position between source and target changes.

[0008] These objects are achieved by a device and a system having the features of the independent claims. Advantageous embodiments and applications of the invention are subject to the dependent claims and are explained in more detail in the following description, with partial reference to the figures.

[0009] According to a first independent aspect of the present disclosure, an apparatus for deflecting a light beam (e.g., a laser beam) and / or a microwave beam (e.g., a maser beam) is provided.

[0010] The device has a (e.g. elongated) first fastening leg for fastening to a first beam guide part (e.g. to a first beam guide tube).

[0011] Furthermore, the device has a (e.g. elongated) second fastening leg for fastening to a second beam guide part (e.g. to a second beam guide tube).

[0012] The first fastening leg and the second fastening leg are connected to one another in an articulated manner (e.g. by means of a main pivot joint), preferably in such a way that the first and second fastening legs can be pivoted relative to one another.

[0013] The device further comprises a reflector device, preferably pivotably mounted, for deflecting the light and / or microwave beam. For example, the reflector device can be hinged to the main pivot joint. Preferably, the reflector device comprises a (e.g., flat or curved) reflection surface (e.g., a reflection surface of a metallic and / or dielectric mirror).

[0014] The device further comprises a coupling device. The reflector device, the first fastening leg, and the second fastening leg are connected to one another in a movement-coupled manner by means of the coupling device. For example, a movement of one of the aforementioned components can also cause a movement of the other two components due to the coupling via the coupling device.

[0015] Preferably, the reflector device, the first fastening leg, and the second fastening leg are connected to one another in a movement-coupled manner such that when the first fastening leg and the second fastening leg are pivoted relative to one another by a (e.g., specific) pivot angle (e.g., about a main pivot axis), the reflector device is pivoted (e.g., along with) half the pivot angle relative to the first fastening leg and / or relative to the second fastening leg. If, for example, the two fastening legs are pivoted relative to one another (e.g., about the main pivot axis) by a pivot angle of 30°, the reflector device—mediated by the coupling device—can be pivoted (e.g., along with) the first and / or second fastening leg, for example, by 15°.Preferably, a main axis of the reflection surface and / or a perpendicular to a plane of extension of the reflection surface is always arranged bisecting an angle between the first and second fastening legs and / or oriented parallel to an angle bisector of a vertex angle of the first and second fastening legs.

[0016] The device is further characterized in that the coupling device has a coupling arm (e.g., elongated and / or hinged on one side) for pivoting the reflector device, wherein the coupling arm is guided (e.g., at least in sections) in a (e.g., straight) guide section (e.g., in a guide hole and / or in a guide channel) of the reflector device such that it can be displaced along a guide direction. Furthermore, it is provided that the coupling arm has a main extension direction (e.g., main longitudinal axis) oriented along the guide direction. For example, the main extension direction of the coupling arm can be oriented parallel to the guide direction. The main extension direction can be understood, for example, as the direction of the longest extension of the coupling arm.

[0017] In contrast to guides using linear contacts, the present solution offers the advantage of enabling a larger contact surface and better support of the guided components, thus achieving more stable and reliable guidance. In contrast to known slotted guides with linear contacts, the present design enables flat guidance and / or the use of rolling bearings, which enables low-wear operation and counteracts wear-related jamming or wear-related inaccurate positioning. Furthermore, the aforementioned coupling arm guide, as described in more detail below, enables an overall very compact and thus space-saving design of the device.

[0018] According to a first aspect, surface contact can exist between the coupling arm and the guide section (e.g., at least in sections). For example, a flat and / or two-dimensional contact surface can be present between the coupling arm and the guide section, preferably at multiple locations. This advantageously enables particularly reliable guidance of the coupling arm.

[0019] Additionally or alternatively, a rolling bearing (e.g., a linear ball bearing and / or a recirculating ball sleeve) can be arranged between the coupling arm and the guide section. Preferably, the rolling bearing has, at least in sections, a recirculating ball bearing oriented axially and / or along the guide direction. This advantageously allows for the lowest possible friction guidance of the translational movement of the coupling arm.

[0020] According to a further aspect, the coupling device can further comprise a (e.g., curved and / or angled) first coupling leg. The first coupling leg can be connected to the first fastening leg in an articulated (e.g., pivotable) manner (e.g., by means of a first rolling bearing, in particular a roller bearing). For example, the first coupling leg and the first fastening leg can be connected to one another in an articulated manner via a first pivot joint (e.g., comprising the first rolling bearing), preferably spaced apart from the main pivot joint.

[0021] Furthermore, the coupling device can have a (e.g., curved and / or angled) second coupling leg. The second coupling leg can be connected to the second fastening leg in an articulated (e.g., pivotable) manner (e.g., by means of a second rolling bearing, in particular a roller bearing). For example, the second coupling leg and the second fastening leg can be connected to one another in an articulated manner via a second pivot joint (e.g., comprising the second rolling bearing), preferably spaced apart from the main pivot joint.

[0022] Furthermore, the coupling device can have a hinge pin (e.g., one with a sliding bearing), by means of which the first coupling leg and the second coupling leg are hingedly connected to one another. For example, the first and second coupling legs can each have a through-hole that is arranged in alignment with one another and in which the hinge pin is received (e.g., by means of a sliding bearing). Furthermore, the coupling arm of the coupling device can be hinged to the hinge pin (e.g., via a coupling arm pivot bearing). For example, the coupling arm can also have a through-hole, preferably arranged in alignment with the through-holes of the first and second coupling legs, in which the hinge pin is received (e.g., by means of a sliding bearing).Preferably, the coupling arm, the first coupling leg, and the second coupling leg overlap with each other at least in sections, preferably in a viewing direction along a main extension direction of the hinge pin. This advantageously allows for the coupling arm to be guided along, which, in cooperation with the guide section of the reflector device pivotably mounted, creates a constraint for the relative movements of the components to each other, whereby the reflector device is guided along the corresponding angle bisector when the two fastening legs pivot relative to each other.

[0023] According to a further aspect, the (e.g., elongated) coupling arm can have a first coupling arm end (e.g., hinged to the hinge pin) and a second coupling arm end (e.g., free), preferably opposite the first coupling arm end. Preferably, the hinge pin extends through the first coupling arm end and / or the hinge pin is preferably guided through the first coupling arm end. For example, the first coupling arm end can have a through-hole for this purpose. Additionally or alternatively, the second coupling arm end can be displaceably guided (e.g., at least in sections) in the guide section (e.g., along the guide direction). For example, the second coupling arm end and / or the coupling arm can thus be movable (e.g., displaceable) relative to the reflector device. This advantageously ensures reliable movement coupling of the components.

[0024] Additionally or alternatively, the coupling arm can (e.g., always) be arranged and / or guided between the first coupling leg and the second coupling leg in a manner bisecting the angle (e.g., relative to the apex angle between the first and second fastening legs). For example, a longitudinal axis of the coupling arm can (e.g., always) extend along the angle bisector of the apex angle of the first and second fastening legs. This advantageously allows for reliable tracking of the reflector device.

[0025] Additionally or alternatively, the coupling arm can be arranged (e.g., at least in sections) between the hinge pin and the reflector device. For example, the first end of the coupling arm can be arranged on the hinge pin and / or the second end of the coupling arm can be arranged on the reflector device. This advantageously allows for the most compact tracking of the reflector device possible.

[0026] According to a further aspect, the coupling arm can be supported by a sliding bearing in the guide section. For example, the guide section can have a sliding bearing bushing for this purpose. This advantageously enables particularly low-wear operation.

[0027] Additionally or alternatively, the guide section can be closed in a plane perpendicular to the main extension direction (e.g., circumferentially). For example, the guide section can have a round or multi-sided inner contour. This advantageously allows for particularly reliable guidance.

[0028] Additionally or alternatively, the guide section can surround (e.g., enclose) the coupling arm in a (or the) plane perpendicular to the main extension direction. For example, the coupling arm can be surrounded by the guide section on all sides in the corresponding plane. This, in turn, advantageously enables particularly reliable guidance.

[0029] According to a further aspect, a section of the coupling arm that is displaceably guided in the guide section (e.g., the second coupling arm end) can be configured, at least in sections, as a rod (e.g., cuboid, block, and / or cylindrical). Preferably, the corresponding section is made of solid material. However, it is also possible for the section to be configured as a (e.g., closed) hollow profile. This advantageously ensures the most secure and stable guidance of the reflector device.

[0030] Additionally or alternatively, a (or the) section of the coupling arm that is displaceably guided in the guide section can have an outer contour in a plane perpendicular to the main extension direction, which outer contour is configured to correspond in shape to an inner contour of the guide section in the plane perpendicular to the main extension direction. For example, if the guide section has a round inner contour, the coupling arm can also have a round outer contour, the diameter of which is preferably adapted to the diameter of the inner contour.

[0031] Additionally or alternatively, the guide section can support the coupling arm at at least three (e.g., different and / or spatially separated) locations. For example, the coupling arm can be supported via multiple point contacts by balls of a rolling bearing arranged between the guide section and the coupling arm.

[0032] Additionally or alternatively, the (or a) section of the coupling arm that is displaceably guided in the guide section (e.g., the second coupling arm end) can have a substantially constant cross-section (e.g., in the form of a rectangle with two straight longitudinal edges and two outwardly curved transverse edges) at least in sections along the main extension direction (e.g., longitudinal direction). This advantageously allows for the largest possible surface contact between the coupling arm and the guide section.

[0033] Additionally or alternatively, the coupling arm can be guided in the guide section along at least three sides, preferably at least four sides, along the guide direction. For example, the (e.g. cuboid-shaped) coupling arm and / or the (e.g. cuboid-shaped) section of the coupling arm that is slidably guided in the guide section can have two lateral contact surfaces and / or a (e.g. upper) base contact surface and / or a (e.g. lower) cover contact surface. Preferably, all of the aforementioned contact surfaces are in contact with the guide section at least in sections and / or are guided on the guide section. In this way, the coupling arm can be guided as all-round or as flatly as possible in an advantageous manner.

[0034] Additionally or alternatively, the coupling arm and / or the guide section can have a plurality of guide surfaces (e.g. oriented parallel to the guide direction). For example, a respective surface normal of the respective guide surfaces can be oriented perpendicular to the guide direction. Preferably, the plurality of guide surfaces have two lateral guide surfaces (e.g. oriented parallel to one another) and / or one base guide surface (e.g. oriented perpendicular to the two lateral guide surfaces) and / or one cover guide surface (e.g. oriented perpendicular to the two lateral guide surfaces and parallel to the base guide surface). The plurality of guide surfaces can thus, for example, form a guide channel (e.g. closed on the circumference) for the coupling arm.Preferably, one of the two lateral contact surfaces of the coupling arm is guided along one of the two lateral guide surfaces of the guide section, the other of the two lateral contact surfaces of the coupling arm is guided along the other of the two lateral guide surfaces of the guide section, the base contact surface of the coupling arm is guided along the base guide surface of the guide section, and / or the cover contact surface of the coupling arm is guided along the cover guide surface of the guide section. This also advantageously allows for the coupling arm to be guided as far and wide as possible.

[0035] According to a further aspect, the reflector device can have a temperature control device (e.g., a heating and / or cooling device). The temperature control device preferably serves to control the temperature of the reflection surface and / or the mirror of the reflector device. In principle, the temperature control device can, for example, be a thermoelectric temperature control device (e.g., comprising at least one Peltier element). However, the temperature control device preferably has an inlet connection for an inlet line, an outlet connection for a (e.g., meander-shaped) outlet line, and a cooling channel (e.g., arranged in a temperature control block connected to the reflection surface) through which a temperature control fluid can flow, which fluidically connects the inlet connection and the outlet connection. This advantageously counteracts temperature-induced deformations and / or damage to the reflector device.

[0036] According to a further aspect, the reflector device can have a reflective surface (e.g., a reflective layer) for deflecting the light and / or microwave beam. For example, the reflector device can have a (e.g., metallic and / or dielectric) mirror with the reflective surface. Additionally or alternatively, the mirror can be made of (e.g., quartz) glass. Preferably, the reflective surface is flat and / or the mirror is a plane mirror. However, it is also possible for the reflective surface to be curved and / or the mirror to be a concave mirror (e.g., a spherical concave mirror or a parabolic mirror). Preferably, the reflective surface (e.g., in the case of a flat reflective surface) is oriented perpendicular to an angle bisector between the first and second coupling legs and / or perpendicular to an angle bisector between the first and second fastening legs. Additionally or alternatively,In the case of a curved reflection surface, a main axis of the reflection surface can also be oriented along or parallel to the (or an) angle bisector between the first and second coupling limbs and / or along or parallel to the (or an) angle bisector between the first and second fastening limbs. This advantageously ensures reliable deflection of the light and / or microwave beam.

[0037] According to a further aspect, the reflector device can have a reflection surface support (e.g., made of plastic or metal). The reflection surface support can support the reflection surface, the mirror, and / or the temperature control device. Additionally or alternatively, the reflection surface, the mirror, and / or the temperature control device can be attached to the reflection surface support (e.g., adjustably). For example, the mirror with the reflection surface and the temperature control device can be firmly connected to one another (e.g., clamped), wherein the temperature control device including the mirror can be connected to the reflection surface support via adjustable tension and / or compression screws. This advantageously ensures secure mounting of the reflection surface, which preferably also enables fine adjustment of the reflection surface.

[0038] According to a further aspect, the reflector device can have an adjustment device (e.g., a fine adjustment device) via which the reflection surface can be connected to the reflection surface support and / or by means of which a position and / or orientation of the reflection surface relative to the reflection surface support can be adjusted. The adjustment device preferably has a plurality of tension and / or compression screws (e.g., fine adjustment screws and / or clamping screws with associated lock nuts) and / or a removable (e.g., dome-shaped) cover. This advantageously enables reliable and precise readjustment of the reflection surface relative to the reflection surface support.

[0039] According to a further aspect, the reflective surface support can (e.g., exclusively) comprise the guide section. For example, the guide section can be formed by a correspondingly shaped section of the reflective surface support. A recirculating ball sleeve and / or a linear ball bearing can additionally be inserted into this section, for example.

[0040] Additionally or alternatively, the guide section can be formed as a groove (e.g., a rectangular groove), as a through hole (e.g., with a rectangular cross-section with two straight longitudinal edges and two outwardly curved transverse edges), or as a blind hole (e.g., with a rectangular cross-section with two straight longitudinal edges and two outwardly curved transverse edges) in the reflective surface support. This advantageously provides a multi-sided guide for the coupling arm that is as easy to manufacture as possible.

[0041] Additionally or alternatively, the reflective surface support can be articulated to the first fastening leg and / or to the second fastening leg (e.g., by means of the or a main pivot joint). For example, the reflective surface support, the first fastening leg, and the second fastening leg can be articulated to one another (e.g., by means of the or a main pivot joint), preferably such that the aforementioned components can be pivoted relative to one another. Preferably, the reflective surface support is connected to the first and / or second fastening leg (e.g., articulated) by means of a rolling bearing (e.g., ball and / or roller bearing). This advantageously enables the most compact mounting possible for the reflective surface support.

[0042] According to a further aspect, the first fastening leg can have a plurality of (e.g., arranged in a grid pattern) first through-holes (e.g., through-bores, in particular, fitting bores) for receiving first fastening elements (e.g., screw elements, in particular, fitting bolts). For example, the first fastening leg and / or the device can be fastened or attachable to the first beam guide part by means of the first fastening elements. This advantageously enables secure attachment of the device to the first beam guide part.

[0043] Additionally or alternatively, the second fastening leg can also have a plurality of second through-holes (e.g., arranged in a grid pattern) for receiving second fastening elements (e.g., screw elements). For example, the second fastening leg and / or the device can be fastened or attachable to the second beam guide part by means of the second fastening elements. This advantageously enables secure attachment of the device to the second beam guide part.

[0044] According to a further aspect, a vertex angle between the first fastening leg and the second fastening leg can be, for example, between 50° and 130°. The vertex angle can be understood here, for example, as the angle spanned by the first fastening leg (e.g., its longitudinal axis) and the second fastening leg (e.g., its longitudinal axis) at the main pivot joint (as the vertex). The device thus preferably has a minimum vertex angle of 50°, below which the two fastening legs can preferably not be brought any closer together. Additionally or alternatively, the device can have a maximum vertex angle of 130°, above which the two fastening legs can preferably not be moved any further apart. This advantageously ensures sufficient mobility of the device for the majority of applications.

[0045] Additionally or alternatively, the first fastening leg and the second fastening leg can be pivotable (e.g., continuously) relative to one another (e.g., by the pivot angle or a pivot angle) within a (e.g., predetermined) vertex angle interval, e.g., between 50° and 130°. For example only, the first and second fastening legs can be pivotable relative to one another by a maximum pivot angle of 80°, starting from the minimum vertex angle of 50°, so that the first and second fastening legs then assume the maximum vertex angle of 130°. This advantageously enables the vertex angle to be adjusted as needed.

[0046] According to a further aspect, the device can have a (e.g., elongated) further first fastening leg for fastening to the first beam guide part (e.g., the first beam guide tube). For example, the device can thus be fastened to the first beam guide part both by means of the first fastening leg and by means of the further first fastening leg.

[0047] Furthermore, the device can also have a (e.g., elongated) additional second fastening leg for attachment to the second beam guide part (e.g., the second beam guide tube). For example, the device can thus be attached to the second beam guide part both by means of the second fastening leg and by means of the additional second fastening leg.

[0048] The further first fastening leg and the further second fastening leg can be connected to one another in an articulated manner (e.g., by means of a further main pivot joint), preferably such that the further first fastening leg and the further second fastening leg can be pivoted relative to one another. Preferably, a (e.g., pivot) axis of the main pivot joint and a (e.g., pivot) axis of the further main pivot joint are arranged collinearly and / or coaxially to one another. For example, the further main pivot joint can be arranged directly above the main pivot joint (e.g., offset in a plane-parallel manner). This advantageously ensures the most stable possible connection between the device and the first and second beam guide parts.

[0049] According to a further aspect, the further first fastening leg and the first fastening leg can be arranged opposite one another. For example, a bottom side of the further first fastening leg and a top side of the first fastening leg can face one another.

[0050] Additionally or alternatively, the further first fastening leg and the first fastening leg (e.g., via the reflector device and / or the coupling device) can be constantly spaced apart from one another. For example, the (or one) underside of the further first fastening leg and the (or one) upper side of the first fastening leg can be oriented parallel to one another.

[0051] In addition or alternatively, the further first fastening leg and the first fastening leg can be coupled to one another in terms of movement (e.g. via the coupling device), preferably in such a way that when the first fastening leg is pivoted relative to the second fastening leg (e.g. by the pivot angle), the further first fastening leg is pivoted (e.g. by the same pivot angle) relative to the second fastening leg (e.g. at the same time).

[0052] According to a further aspect, the further second fastening leg and the second fastening leg (e.g., via the reflector device and / or the coupling device) can be arranged opposite one another. For example, a bottom side of the further second fastening leg and a top side of the second fastening leg can face one another.

[0053] Additionally or alternatively, the further second fastening leg and the second fastening leg can be constantly spaced apart from one another. For example, the (or one) underside of the further second fastening leg and the (or one) upper side of the second fastening leg can be oriented parallel to one another.

[0054] In addition or alternatively, the further second fastening leg and the second fastening leg can be coupled to one another in terms of movement (e.g. via the coupling device), preferably in such a way that when the second fastening leg is pivoted relative to the first fastening leg (e.g. by the pivot angle), the further second fastening leg is pivoted (e.g. by the same pivot angle) relative to the first fastening leg (e.g. at the same time).

[0055] According to a further aspect, the coupling device can have a further first coupling leg (e.g., curved and / or angled). The further first coupling leg can be articulated (e.g., pivotably) to the further first fastening leg (e.g., by means of a further first rolling bearing, in particular a roller bearing). For example, the further first coupling leg and the further first fastening leg can be articulated to one another via a further first rotary joint (e.g., comprising the further first rolling bearing), preferably spaced from the further main rotary joint. Preferably, a (e.g., pivot) axis of the further first rotary joint and a (e.g., pivot) axis of the first rotary joint are arranged collinearly and / or coaxially with one another. For example, the further first rotary joint can be arranged (e.g., offset in a plane-parallel manner) directly above the first rotary joint.

[0056] Furthermore, the coupling device can have a further second coupling leg (e.g., curved and / or angled). The further second coupling leg can be articulated (e.g., pivotably) to the further second fastening leg (e.g., by means of a further second rolling bearing, in particular a roller bearing). For example, the further second coupling leg and the further second fastening leg can be articulated to one another via a further second rotary joint (e.g., comprising the further second rolling bearing), preferably spaced from the further main rotary joint. Preferably, a (e.g., pivot) axis of the further second rotary joint and a (e.g., pivot) axis of the second rotary joint are arranged collinearly and / or coaxially with one another. For example, the further second rotary joint can be arranged (e.g., offset in a plane-parallel manner) directly above the second rotary joint.

[0057] The further first coupling leg and the further second coupling leg can be connected in an articulated manner by means of the hinge pin. The hinge pin thus preferably connects both the first and second coupling legs to one another in an articulated manner, as well as the further first coupling leg and the further second coupling leg to one another in an articulated manner. For example, the further first coupling leg and the further second coupling leg can each have a through-hole, which are arranged in alignment with one another and in which the hinge pin is received (e.g., by means of a sliding bearing). The multiple coupling advantageously ensures the most stable and reliable tracking of the reflector device.

[0058] According to a further aspect, the further first coupling leg and the first coupling leg can be arranged opposite one another. For example, a bottom side of the further first coupling leg and a top side of the first coupling leg can face one another.

[0059] Additionally or alternatively, the further first coupling leg and the first coupling leg can be spaced apart from each other at a constant distance (e.g., via the hinge pin). For example, the (or one) underside of the further first coupling leg and the (or one) upper side of the first coupling leg can be oriented parallel to each other.

[0060] In addition or alternatively, the further first coupling leg and the first coupling leg can be coupled to one another in terms of movement (e.g. by their joint attachment to the hinge pin).

[0061] According to a further aspect, the further second coupling leg and the second coupling leg can be arranged opposite one another. For example, a bottom side of the further second coupling leg and a top side of the second coupling leg can face one another.

[0062] Additionally or alternatively, the further second coupling leg and the second coupling leg (e.g., via the hinge pin) can be constantly spaced apart from each other. For example, the (or one) underside of the further second coupling leg and the (or one) upper side of the second coupling leg can be oriented parallel to each other.

[0063] In addition or alternatively, the further second coupling leg and the second coupling leg can be coupled to one another in terms of movement (e.g. by their joint attachment to the hinge pin).

[0064] According to a further aspect, the coupling device can further comprise a further coupling arm (e.g., elongated and / or hinged on one side). Preferably, the further coupling arm (e.g., likewise) serves to pivot the reflector device. For this purpose, the further coupling arm can be displaceably guided in a further guide section (e.g., in a guide hole) of the reflector device (e.g., in its reflective surface support) along the or a guide direction. Preferably, the further coupling arm also has a (further) main extension direction (e.g., main longitudinal axis) oriented along the guide direction. Furthermore, surface contact can exist between the further coupling arm and the further guide section, for example (e.g., at least in sections), and / or a rolling bearing can be arranged. In principle, the further coupling arm can be designed differently than the coupling arm.Preferably, however, the additional coupling arm and the coupling arm are identical parts. Like the coupling arm, the additional coupling arm can also be hinged to the hinge pin (e.g., via a coupling arm pivot bearing), for example, directly above the coupling arm. For example only, the additional coupling arm can have a through-hole, preferably arranged in alignment with the through-holes of the first and second additional coupling legs, in which the hinge pin is received (e.g., by means of a sliding bearing). This advantageously further increases the stability of the device and the reliability of the guidance of the reflector device.

[0065] Another independent aspect of the present disclosure relates to a system for beam guiding a light beam (e.g., a laser beam) and / or a microwave beam (e.g., a maser beam).

[0066] The system comprises a (e.g., elongated and / or tubular) first beam guiding part (e.g., a first beam guiding tube). The first beam guiding part preferably serves to guide the light and / or microwave beam (e.g., as a free beam) and / or to shield a (e.g., internal) beam guiding region. The first beam guiding part may further comprise at least one slot for inserting a lens, a filter, and / or a polarizer, wherein the at least one slot of the first beam guiding part can preferably be blindly covered when not in use.

[0067] The system further comprises a (e.g., elongated and / or tubular) second beam guide part (e.g., a second beam guide tube). Preferably, the second beam guide part also serves to guide the light and / or microwave beam (e.g., as a free beam) and / or to shield a (e.g., internal) beam guide region. The second beam guide part can also further comprise at least one slot for inserting a lens, a filter, and / or a polarizer, wherein the at least one slot of the second beam guide part can preferably also be blindly covered when not in use.

[0068] Furthermore, the system comprises (e.g. exclusively) a device as described herein. Consequently, the features described above in connection with the device should also be disclosed and claimable in connection with the system. The same should also apply vice versa. Here, it is provided that a first fastening leg of the device is fastened (e.g. screwed) to the first beam guide part and a second fastening leg of the device is fastened (e.g. screwed) to the second beam guide part, preferably in such a way that the first and second beam guide parts are connected to one another in an articulated manner by means of the device. The device thus preferably functions as a joint between the first and second beam guide parts.Furthermore, the reflector device is preferably arranged and / or guided in such a way that when the first and second beam-guiding parts are pivoted relative to each other by a pivot angle, the light and / or microwave beam (e.g., regardless of the pivot angle) is always guided and / or deflected from the first to the second beam-guiding part or vice versa. This advantageously ensures reliable beam guidance even when the relative position between source and target changes.

[0069] According to one aspect, the first and / or second beam guide part (e.g., each) can have at least one (e.g., circumferentially closed) tube section. For example, the first and / or second beam guide part can be configured, at least in sections, as a beam guide tube.

[0070] In addition or alternatively, the first and / or second beam guiding part (e.g. each) can be telescopically adjustable in length.

[0071] Additionally or alternatively, the first and / or second beam guide part can (e.g. each) have an outer tube section, an inner tube section, and at least one (e.g. annular) rolling bearing (e.g. with a plurality of rolling elements). Preferably, the inner tube section is inserted in the outer tube section for longitudinal displacement and / or the at least one rolling bearing is arranged between the inner tube section and the outer tube section. For example, the inner tube section can be connected to the outer tube section via the at least one rolling bearing, preferably in such a way that upon longitudinal displacement of the inner tube section relative to the outer tube section, the rolling elements roll on a running surface of the outer tube section, the inner tube section, and / or the at least one rolling bearing.

[0072] In one (e.g., first) embodiment, the first beam guiding part can have a (e.g., first) flange, preferably rotatable (e.g., by means of a needle bearing), for attachment to a window flange of a vacuum system, and / or the second beam guiding part can have a (e.g., second) flange, preferably rotatable (e.g., by means of a needle bearing), for attachment to a window flange of a vacuum system. Preferably, the system has no further joints than the device for deflecting the light and / or microwave beam. Overall, this provides a simple and cost-effective solution for movable beam guidance, which is particularly suitable for angled guidance of the light and / or microwave beam within a plane.

[0073] According to a further aspect, the system may further comprise (e.g., exclusively) a further device as described herein. In principle, the device and the further device may be configured differently. Preferably, however, the device and the further device are identical parts.

[0074] Furthermore, the system can have a (e.g., elongated and / or tubular) third beam guiding part (e.g., a third beam guiding tube). The third beam guiding part preferably serves to guide the light and / or microwave beam (e.g., as a free beam) and / or to shield an (e.g., internal) beam guiding region. A first fastening leg of the further device can be fastened (e.g., screwed) to the second beam guiding part, and a second fastening leg of the further device can be fastened (e.g., screwed) to the third beam guiding part, preferably such that the second and third beam guiding parts are hingedly connected to one another by means of the further device. The further device preferably functions as a hinge between the second and third beam guiding parts.Furthermore, the reflector device of the further device is preferably arranged and / or guided such that when the second and third beam-guiding parts are pivoted relative to each other by a pivot angle, the light and / or microwave beam (e.g., regardless of the pivot angle) is always guided and / or deflected from the second to the third beam-guiding part or vice versa. This advantageously allows for greater flexibility in beam guidance.

[0075] In one (e.g., second) embodiment, the first beam guide part can have a (e.g., first) flange, preferably rotatable (e.g., by means of a needle bearing), for attachment to a window flange of a vacuum system, and / or the third beam guide part can have a (e.g., third) flange, preferably rotatable (e.g., by means of a needle bearing), for attachment to a window flange of a vacuum system. Preferably (e.g., exclusively) the second beam guide part is telescopically adjustable in length. For example, the second beam guide part can have an outer tube section, an inner tube section, and at least one rolling bearing (e.g., a ball cage). The inner and outer tube sections can be connected to one another via the at least one rolling bearing, such that the inner tube section is accommodated in the outer tube section for longitudinal displacement and / or rotation.The first and third beam guide parts, however, can preferably not be telescopically adjustable in length. Furthermore, the system preferably has no further joints other than the device for deflecting the light and / or microwave beam and the further device for deflecting the light and / or microwave beam.

[0076] According to a further aspect, the system may further comprise (e.g., exclusively) yet another device, as described herein. In principle, the yet another device, the further device, and the device may be configured differently. Preferably, however, the yet another device, the further device, and the device are identical parts.

[0077] Furthermore, the system can have a (e.g., elongated and / or tubular) fourth beam guide part (e.g., a fourth beam guide tube). The fourth beam guide part preferably serves to guide the light and / or microwave beam (e.g., as a free beam) and / or to shield an (e.g., inner) beam guide region. A first fastening leg of the yet further device can be fastened (e.g., screwed) to the third beam guide part, and a second fastening leg of the yet further device can be fastened (e.g., screwed) to the fourth beam guide part, preferably such that the third and fourth beam guide parts are hingedly connected to one another by means of the yet further device. The yet further device preferably functions as a hinge between the third and fourth beam guide parts.Furthermore, the reflector device of the yet further device is preferably arranged and / or guided such that when the third and fourth beam-guiding parts are pivoted relative to each other by a pivot angle, the light and / or microwave beam (e.g., regardless of the pivot angle) is always guided and / or deflected from the third to the fourth beam-guiding part or vice versa. This advantageously allows for even greater flexibility in beam guidance.

[0078] In one (e.g. third) embodiment, the first beam guide part can have a (e.g. first) flange, preferably rotatable (e.g. by means of a needle ring), for attachment to a window flange of a vacuum system and / or the fourth beam guide part can have a (e.g. fourth) flange, preferably rotatable (e.g. by means of a needle ring), for attachment to a window flange of a vacuum system. Preferably, in this embodiment, none of the beam guide parts, i.e. neither the first, second, third, nor fourth beam guide parts, is telescopically adjustable in length. However, the second and / or third beam guide part can preferably (e.g. each) be rotatable. For example, the second and / or third beam guide part can (e.g. each) have an outer tube section, an inner tube section, and at least one rolling bearing (e.g. a ball cage). The (e.g. respective) inner and outer tube sections can be connected via the (e.g.At least one respective rolling bearing can be connected to one another in such a way that the inner tube section is rotatably received in the outer tube section. Furthermore, the system preferably has no further joints other than the device for deflecting the light and / or microwave beam, the further device for deflecting the light and / or microwave beam, and the yet further device for deflecting the light and / or microwave beam.

[0079] The previously described embodiments and features can be combined with each other in any desired manner. Further details and advantages are described below with reference to the accompanying drawings. They show: Fig. 1 to 9 show various views or sectional views of a device for deflecting a light and / or microwave beam according to one embodiment; Fig. 10 and Fig. 11 a system for guiding a light and / or microwave beam according to an embodiment; and Fig. 12 a system for beam guidance of a light and / or microwave beam according to another embodiment.

[0080] Identical or functionally equivalent elements are described in all figures with the same reference numerals and are partly not described separately, so that for their explanation reference is also made to the description of the other embodiments or figures in order to avoid repetition.

[0081] The Fig. 1 to 9 show at least partial views or sectional views of a device 10 for deflecting a light and / or microwave beam 1 according to an embodiment. The device 10 can, for example, be part of the Fig. 10 to 12. Preferably, the device 10 functions as a joint of the respective system 20, so that the beam guidance in the respective system 20 can be changed as needed, for example, in the event that the relative position between the source and target of the light and / or microwave beam 1 changes.

[0082] The device 10 shown in the figures has a (e.g. lower) first fastening leg 12a, a (e.g. lower) second fastening leg 12b, a reflector device 14 and a coupling device 16, see e.g. in particular Fig. 1.

[0083] The first fastening leg 12a is preferably made of a dimensionally stable (e.g., solid) material, for example, metal. The first fastening leg 12a can have an elongated and / or flat shape. For example, its longitudinal extent can be a multiple of its transverse and / or thickness extent. The first fastening leg 12a can have a flat upper side and / or a curved lower side, with the upper and lower sides preferably being oriented opposite one another.

[0084] Preferably, the first fastening leg 12a serves for fastening to a first beam guiding part 22a (e.g. to a first beam guiding tube), cf. Fig. 10-12. For this purpose, the first fastening leg 12a can have several, in this case, for example, six, first through-holes 12a.1 for receiving first fastening elements 11a (e.g., cylinder head screws). By means of the first fastening elements 11a, the first fastening leg 12a can, for example, be screwed or bolted to a first beam guide part 22a, cf. Fig. 10 to 12.

[0085] The first through-holes 12a.1 can each be formed, for example, as through-bores. The first through-holes 12a.1 can be arranged in a grid pattern, e.g., in a 2x3 grid. The first through-holes 12a.1 can each have a countersink, preferably for at least partially accommodating a respective head of the first fastening elements 11a.

[0086] The second fastening leg 12b can be designed essentially like the first fastening leg 12a. For example, the first and second fastening legs 12a and 12b can be the same length, the same width, and / or the same thickness. Accordingly, the second fastening leg 12b can have the features described above in connection with the first fastening leg 12a, wherein the term "first" is to be replaced by "second." Preferably, the second fastening leg 12b serves for fastening to a second beam guide part 22b (e.g., to a second beam guide tube) that is different from the first beam guide part 22a, cf. Fig. 10 to 12.

[0087] As furthermore, for example, in the Fig. 1 and Fig. As can be seen in Figure 5, the first fastening leg 12a and the second fastening leg 12b are connected to one another in an articulated manner. For example, the first and second fastening legs 12a and 12b can be connected to one another in an articulated manner by means of a pivot joint, which can also be referred to as the main pivot joint 13 for easier differentiation.

[0088] The main pivot joint 13 can, for example, have a main joint shaft that can extend through a through-hole in the first fastening leg 12a and through a through-hole in the second fastening leg 12b. Accordingly, the first and second fastening legs 12a, 12b can be pivoted about the main joint shaft (e.g., by a pivot angle α relative to one another). The main joint shaft can thus form a main pivot axis for the first and second fastening legs 12a, 12b, about which the first and second fastening legs 12a, 12b can preferably be pivoted by a pivot angle α relative to one another.

[0089] The main joint shaft can be part of the reflector device 14 (cf. e.g. Fig. 2 and Fig. 6). For example, the main joint shaft can be integrally connected to a reflective surface support 14b of the reflector device 14, e.g., molded onto the reflective surface support 14b. The main joint shaft can protrude and / or protrude from the reflective surface support 14b, e.g., downwards.

[0090] In order to reduce frictional resistance, a first ball bearing can be arranged between the main joint shaft and an inner surface of the through hole of the first fastening leg 12a and / or a second ball bearing can be arranged between the main joint shaft and an inner surface of the through hole of the second fastening leg 12b, cf. e.g. Fig. 2 and Fig. 4.

[0091] Furthermore, the main pivot joint 13 can have a main pivot joint cover 13a, by means of which the first and second fastening legs 12a, 12b are attached and / or held to the reflector device 14 and the main pivot shaft, respectively. For example, the main pivot joint cover 13a can have a larger lateral extent than the through hole of the first and second fastening legs 12a, 12b and / or can be fastened by means of a screw element to an end face of the main pivot shaft facing away from the reflector device 14 (see, for example, Fig. 1, Fig. 2 and Fig. 6). To reduce frictional resistance when pivoting the first and second mounting legs 12a, 12b, an axial roller bearing can be arranged between the main pivot joint cover 13a and the second mounting leg 12b, between the first and second mounting legs 12a, 12b, and / or between the first mounting leg 12a and the reflector device 14 (in each case). Accordingly, the main pivot joint cover 13a can also be referred to as a roller bearing cover in this context, see, for example, Fig. 2 and 4 to 6.

[0092] The reflector device 14 can have, in addition to the reflection surface carrier 14b already mentioned above, a reflection surface 14a, a temperature control device 17 and / or an adjustment device 18, see e.g. Fig. 2 and Fig. 7.

[0093] The reflection surface 14a preferably serves to deflect or redirect the light and / or microwave beam 1 from its original direction of incidence. The reflection surface 14a can, for example, be part of a mirror (e.g., a metallic and / or dielectric) of the reflector device 14. In other words, the reflector device 14 can comprise a mirror with the reflection surface. The reflection surface 14a can be configured to reflect or redirect the incident light and / or microwave beam 1. The reflection surface 14a can be flat or curved or arched.

[0094] The reflection surface 14a and / or the mirror can be attached, for example, via two clamping plates, to a (e.g., metallic) temperature control block 17d of the temperature control device 17. For example, the temperature control device 17 and / or the temperature control block 17d can have a (e.g., meander-shaped) cooling channel 17c through which a temperature control fluid can flow. The cooling channel 17c can, for example, be formed within the temperature control block 17d and fluidically connect an inlet connection 17a and an outlet connection 17b of the temperature control device 17, see. Fig. 2 and 4. The temperature control block 17d and the reflection surface 14a, or the temperature control block 17d and the mirror, can be coupled for heat transfer. Accordingly, by flowing a constant-temperature temperature control fluid through the temperature control device 17, a temperature of the reflection surface 14a and / or the mirror that is as constant as possible can be ensured.

[0095] The reflection surface 14a, the mirror, and / or the temperature control device 17 can be supported by the reflection surface support 14b and / or attached to the reflection surface support 14b. Preferably, the reflection surface 14a, the mirror, and / or the temperature control device 17 are connected to the reflection surface support 14b via the adjustment device 18, see, for example, Fig. 7. Accordingly, a position and / or orientation of the reflection surface 14a, the mirror, and / or the temperature control device 17 relative to the reflection surface support 14b can be adjusted by means of the adjustment device 18. For this purpose, the adjustment device 18 can, for example, comprise a plurality of tension and / or compression screws, which can, for example, each be received at least partially in the reflection surface support 14b at one end and can be connected to the temperature control block 17d at the opposite end. The adjustment device 18 or the plurality of tension and / or compression screws can be arranged (e.g., protected) behind a dome-shaped and / or spherical cover of the reflector device 14, which can also ensure light tightness.

[0096] To increase the light tightness and / or personal safety, movable sectional-spherical switching parts 114a, 114b (e.g. externally) can also be arranged on the reflector device 14, the first beam guiding part 22a and / or the second beam guiding part 22b (cf. Fig. 8 and Fig. 9). For example, a first shell part 114a of the shell parts 114a, 114b can be screwed to the first beam guide part 22a and / or a second shell part 114b of the switch parts 114a, 114b can be screwed to the second beam guide part 22b. Preferably, both the first shell part 114a and the second shell part 114b each have recesses for the inlet and outlet connections 17a, 17b. Additionally or alternatively, casing parts 114c, 114d can also be arranged in the area of ​​the coupling device 16 to increase light tightness and / or personnel safety. For example, the formwork parts 114c, 114d may comprise a first formwork part 114c, which may be deflected on the hinge pin 16d and guided in a groove of the first beam guide part 22a for longitudinal displacement.Furthermore, the formwork parts 114c, 114d can comprise a second formwork part 114d, which can be deflected on the hinge pin 16d and guided in a groove of the second beam guide part 22b for longitudinal displacement.

[0097] The reflective surface support 14b can surround the reflective surface 14a on multiple sides. For example, the reflective surface support 14b can be arranged at least partially below, above, and / or behind the reflective surface 14a. The reflective surface support 14b can be formed as a single piece.

[0098] The reflector device 14, for example its reflection surface support 14b, further comprises a guide section 15 (e.g., a linear guide section) for guiding a coupling arm 16a of the coupling device 16, which will be described in more detail below. Preferably, the coupling arm 16a is guided along a guide direction F, see, for example, Fig. 3A-3C. For this purpose, the guide section 15 can have several guide surfaces 15a, 15b, 15c, 15d oriented parallel to the guide direction F, see e.g. Fig. 6. For example, the plurality of guide surfaces 15a, 15b, 15c, 15d may comprise two lateral guide surfaces 15a, 15b, a base guide surface 15c and a cover guide surface 15d.

[0099] For example, in Fig. 6, the base guide surface 15c and the cover guide surface 15d are preferably flat, oriented parallel to one another and / or arranged opposite one another. The lateral guide surfaces 15a, 15b, on the other hand, are preferably curved and / or arranged opposite one another. The plurality of guide surfaces 15a, 15b, 15c, 15d can together form a guide channel. The guide channel (e.g. in the form of a through hole or blind hole) can be closed on the circumference and / or have a substantially constant cross-section along the guide direction F, preferably in the form of a rectangle with two straight longitudinal edges and two outwardly curved transverse edges. In principle, however, the guide channel can also have a square or round cross-section along the guide direction F. Alternatively, the guide section 15 can also be designed as a groove and, for example,only the two lateral guide surfaces 15a, 15b and the basic guide surface 15c.

[0100] The reflector device 14 can be moved, in particular pivoted, via the coupling arm 16a guided in the guide section 15 or in the guide channel, which will be described in more detail below in connection with the coupling device 16.

[0101] Preferably, the reflector device 14, the first fastening leg 12a and the second fastening leg 12b are connected to one another in a movement-coupled manner via the coupling device 16. For this purpose, the coupling device 16 can comprise, in addition to the coupling arm 16a, a first coupling leg 16b, a second coupling leg 16c and / or a hinge pin 16d (cf., for example, Fig. 1).

[0102] The first coupling leg 16b can be connected to the first fastening leg 12a in an articulated manner. For example, the first coupling leg 16b and the first fastening leg 12a can be connected to one another in an articulated manner by means of a pivot joint, which can also be referred to as the first pivot joint 19a for easier differentiation, see, for example, Fig. 3A-3C. The first pivot joint 19a can be arranged at one end of the first coupling leg 16b, which can also be referred to below, for example, as the first coupling leg end of the first coupling leg 16b.

[0103] The first pivot joint 19a can, for example, have a first screw bolt that extends through a further through-hole in the first fastening leg 12a and is screwed into a blind hole with an internal thread in the first coupling leg 16b. Accordingly, the first fastening leg 12a can be pivoted about the first pivot joint relative to the first coupling leg 16b. A first pivot joint cover can be arranged between a head of the first screw bolt and the first fastening leg 12a. For example, the first pivot joint cover can have a larger lateral extent than the further through-hole in the first fastening leg 12a. To reduce frictional resistance, a ball bearing can be arranged between the first screw bolt and an inner surface of the further through-hole in the first fastening leg 12a.In addition or alternatively, an axial roller bearing can be arranged between the first fastening leg 12a and the first coupling leg 16b and / or between the first fastening leg 12a and the first pivot cover (in each case), cf. Fig. 4 and Fig. 5.

[0104] The second coupling leg 16c can be connected to the second fastening leg 12b in an articulated manner. For example, the second coupling leg 16c and the second fastening leg 12b can be connected to one another in an articulated manner by means of a pivot joint, which can also be referred to as the second pivot joint 19b for easier differentiation, see, for example, Fig. 3A-3C. The second pivot joint 19b can be arranged at one end of the second coupling leg 16c, which can also be referred to below, for example, as the first coupling leg end of the second coupling leg 16c.

[0105] The second pivot joint 19b can also, for example, have a second screw bolt that extends through a further through-hole in the second fastening leg 12b and is screwed into a blind hole with an internal thread in the second coupling leg 16c. Accordingly, the second fastening leg 12b can be pivoted about the second pivot joint relative to the second coupling leg 16c. A second pivot joint cover can be arranged between a head of the second screw bolt and the second fastening leg 12b. For example, the second pivot joint cover can have a larger lateral extent than the further through-hole in the second fastening leg 12b. To reduce frictional resistance, a ball bearing can again be arranged between the second screw bolt and an inner surface of the further through-hole in the second fastening leg 12b.In addition or alternatively, an axial roller bearing can be arranged between the second fastening leg 12b and the second coupling leg 16c and / or between the second fastening leg 12b and the second pivot cover (in each case), cf. Fig. 4 and Fig. 5.

[0106] Furthermore, the coupling device 16 can have a (e.g. pin-shaped) hinge pin 16d, by means of which the first coupling leg 16b and the second coupling leg 16c are connected to one another in an articulated manner.

[0107] For example, the first coupling leg 16b can have a first hinge pin through-hole at an end opposite the first coupling leg end of the first coupling leg 16b, which can also be referred to, for example, as the second coupling leg end of the first coupling leg 16b. Likewise, the second coupling leg 16c can have a second hinge pin through-hole at an end opposite the first coupling leg end of the second coupling leg 16c, which can also be referred to, for example, as the second coupling leg end of the second coupling leg 16c. Preferably, the hinge pin 16d (e.g., a first end of the hinge pin 16d) extends through the first and second hinge pin through-holes. Accordingly, the first and second hinge pin through-holes can be arranged in alignment with one another. Additionally or alternatively, the hinge pin 16d (e.g.,The first end of the hinge pin (16d) is received at least partially in the first and second hinge pin through-holes (e.g., pivotably). Preferably, the hinge pin (16d) or its first end is received in the first and second hinge pin through-holes by means of a sliding bearing.

[0108] As for example from the Fig. 1, 2, 3A-3C and 5, the coupling arm 16a can also be articulated to the hinge pin 16d. For example, the coupling arm 16a and / or one end of the coupling arm 16a, which can also be referred to as the first coupling arm end, can have a through-hole through which the hinge pin 16d extends (e.g., its first end) and / or in which the hinge pin 16d is received at least in sections (e.g., pivotably). The through-hole of the coupling arm 16a or its first end is preferably arranged in alignment with the first hinge pin through-hole of the first coupling leg 16b and the second hinge pin through-hole of the second coupling leg 16c. Furthermore, the coupling arm 16a or its first end (e.g. with respect to an axial direction of the hinge pin 16d) is preferably arranged between the first and second coupling legs 16b, 16c.

[0109] The coupling arm 16a can further have a second coupling arm end opposite the first coupling arm end. The first and second coupling arm ends can be distal ends of the coupling arm with respect to a main extension direction L of the coupling arm 16a. The main extension direction L can, for example, correspond to the (main) longitudinal axis of the coupling arm 16a. The second coupling arm end is preferably guided displaceably in the aforementioned guide section 15 along the guide direction F, see, for example, Fig. 3A-3C. Accordingly, the second coupling arm end can be free and / or not attached. As further shown in the Fig. 3A-3C, the main extension direction L of the coupling arm 16a extends along the guide direction F.

[0110] Preferably, the coupling arm 16a and / or its second coupling arm end has an outer contour perpendicular to the guide direction F corresponding to and / or adapted to an inner contour of the guide section 15, cf. e.g. Fig. 6. For example, the coupling arm 16a and / or its second coupling arm end can be designed to match the shape of the guide section 15. In the present embodiment, the coupling arm 16a and / or its second coupling arm end can be block-shaped and / or rod-shaped at least in sections and / or have a substantially constant cross-section along its main direction of extension (e.g., longitudinal direction) (e.g., in the form of a rectangle with two straight longitudinal edges and two outwardly curved transverse edges). In principle, however, the coupling arm 16a and / or its second coupling arm end can also be cylindrical and / or cuboid-shaped, depending on the design of the guide section 15. The main direction of extension of the coupling arm 16a is preferably oriented parallel to and / or along the guide direction F.

[0111] There is preferably surface contact between the guide section 15 and the coupling arm 16a and / or between the guide section 15 and the second coupling arm end. In addition or alternatively (e.g., if there is sufficient installation space), a recirculating ball sleeve and / or a linear ball bearing can be arranged between the coupling arm 16a and the guide section 15. Accordingly, the coupling arm 16a and / or its second coupling arm end can be surrounded by the guide section 15 on multiple sides (e.g., at least three or four sides) and / or guided along the guide direction F by the guide section 15 on multiple sides (e.g., at least three or four sides). Fig. As can be seen from Figure 6, the coupling arm 16a can have two lateral contact surfaces, each in contact with one of the lateral guide surfaces 15a, 15b, a base contact surface in contact with the base guide surface 15c, and a ceiling contact surface in contact with the ceiling guide surface 15d. The coupling arm 16a can thus be guided and / or supported both laterally and from above and below.

[0112] Preferably, the coupling arm 16a is further arranged at least partially at an angle bisecting the first and second coupling legs 16b, 16c and / or guided at an angle bisecting the first and second coupling legs 16b, 16c. For example, the coupling arm 16a can be arranged in a plane perpendicular to a main extension direction of the hinge pin (cf. Fig. 3A-3C) can be arranged at least in sections (e.g., bisecting the angle) between the first and second coupling legs 16b, 16c. Through the interaction with the above-described connection of the coupling device 16 to both the first and second fastening legs 12a, 12b and to the reflector device 14, a constraint for the positioning of the reflector device 14 or its reflection surface 14a relative to the first and second fastening legs 12a, 12b can be realized, which enables reliable "carrying" of the reflector device 14 when the first and second fastening legs 12a, 12b are pivoted.

[0113] In detail, the first and second fastening legs 12a, 12b and the reflector device 14 are connected to one another in a movement-coupled manner via the coupling device 16 such that when the first and second fastening legs 12a, 12b pivot relative to one another by a pivot angle α, the reflector device 14 or its reflection surface 14a is pivoted by half the pivot angle α relative to the first and / or second fastening legs 12, 12b. Accordingly, the device 10 can be configured such that the reflector device 14 is guided along the angle bisector between the first and second fastening legs 12a, 12b when the first and second fastening legs 12a, 12b pivot relative to one another.Thus, in each (possible) pivoting position, a main axis of the reflection surface 14a and / or a perpendicular to a plane of extension of the reflection surface 14a is preferably arranged bisecting the angle between the first and second fastening legs 12a, 12b and / or oriented parallel to an angle bisector of a vertex angle σ of the first and second fastening legs 12a, 12b.

[0114] The apex angle σ between the first and second fastening legs 12a, 12b can be between 50° and 130° (cf. e.g. Fig. 3A-3C). Preferably, the device 10 thus has a minimum apex angle σ min of 50°, below which the first and second fastening legs 12a, 12b can preferably not be brought closer together. In addition or alternatively, the device can have a maximum apex angle σ maxof 130°, above which the first and second fastening legs 12a, 12b can preferably not be moved any further apart. Accordingly, the first fastening leg 12a and the second fastening leg 12b can be continuously pivotable relative to one another (e.g., by the pivot angle or a pivot angle), for example, in a vertex angle interval between 50° and 130°.

[0115] For example, from Fig. As can be seen from Figure 1, the device 10 can have a further first fastening leg 12a' and a further second fastening leg 12b' for improved connection to the first and second beam guide parts 22a, 22b. The further first fastening leg 12a' can generally have the features of the first fastening leg 12a and, for example, can also be screwed or bolted to the first beam guide part 22a, see Figure 1. Fig. 10 to 12. Furthermore, the further second fastening leg 12b' can in principle also have the features of the second fastening leg 12b and, for example, can also be screwed or screwed onto the second beam guide part 22b, cf. Fig. 10 to 12.

[0116] Preferably, the assembly comprising the further first fastening leg 12a' and the further second fastening leg 12b' is a copy of the assembly comprising the first fastening leg 12a and the second fastening leg 12b. Preferably, however, the two assemblies are oriented rotated by 180° relative to one another. Accordingly, the further first fastening leg 12a' and the second fastening leg 12b can be structurally identical. For example, the further first fastening leg 12a' and the second fastening leg 12b can be identical parts, which, however, can be arranged, for example, with different orientations in the device 10. Additionally or alternatively, the further second fastening leg 12b' and the first fastening leg 12a can be structurally identical.For example, the further second fastening leg 12b' and the first fastening leg 12a may be identical parts, but may be arranged differently oriented in the device 10, for example. Furthermore, the assembly comprising the further first fastening leg 12a' and the further second fastening leg 12b', and the assembly comprising the first fastening leg 12a and the second fastening leg 12b may be constantly spaced apart from one another, arranged directly above one another, and / or arranged opposite one another.

[0117] The further first fastening leg 12a' and the further second fastening leg 12b' can be connected to each other in an articulated manner, for example via a further main pivot joint 13', see e.g. Fig. 1. The additional main pivot joint 13' can be configured like the main pivot joint 13. Preferably, the respective pivot axes of the main pivot joint 13 and the additional main pivot joint 13' are oriented identically and / or collinearly with each other. For example, the main pivot joint 13 and the additional main pivot joint 13' can be arranged flush with each other and / or directly above each other, e.g., on a top and bottom side of the reflector device 14.

[0118] The further first fastening leg 12a' and the further second fastening leg 12b' can further be connected to the coupling device 16. For this purpose, the coupling device 16 can additionally have a further first coupling leg 16b' and a further second coupling leg 16c'.

[0119] The further first coupling leg 16b' can be articulated to the further first fastening leg 12a'. For example, the further first coupling leg 16b' and the further first fastening leg 12a' can be articulated to one another by means of a further first pivot joint 19a', wherein the further first pivot joint 19a' can basically be designed like the first pivot joint 19a described above, or the connection of the further first coupling leg 16b' to the further first fastening leg 12a' can be designed like the connection of the first coupling leg 16b' to the first fastening leg 12a.

[0120] Likewise, the further second coupling leg 16c' can be articulated to the further second fastening leg 12b'. For example, the further second coupling leg 16c' and the further second fastening leg 12b' can be articulated to one another by means of a further second pivot joint 19b', wherein the further second pivot joint 19b' can basically be designed like the second pivot joint 19b described above, or the connection of the further second coupling leg 16c' to the further second fastening leg 12b' can be designed like the connection of the second coupling leg 16c' to the second fastening leg 12b.

[0121] Preferably, the assembly comprising the further first coupling leg 16b' and the further second coupling leg 16c' represents a copy of the assembly comprising the first coupling leg 16b and the second coupling leg 16c. Preferably, however, these two assemblies are oriented rotated by 180° to one another. Accordingly, the further first coupling leg 16b' and the second coupling leg 16c can be structurally identical. For example, the further first coupling leg 16b' and the second coupling leg 16c can be identical parts, which, however, can be arranged with different orientations in the device 10, for example. Additionally or alternatively, the further second coupling leg 16c' and the first coupling leg 16b can be structurally identical. For example, the further second coupling leg 16c' and the first coupling leg 16b can be identical parts, which, however, can, for example,can be arranged differently oriented in the device 10. Furthermore, the assembly comprising the further first coupling leg 16b' and the further second coupling leg 16c', and the assembly comprising the first coupling leg 16b and the second coupling leg 16c can be constantly spaced from one another, arranged directly above one another and / or arranged opposite one another.

[0122] The further first coupling leg 16b' and the further second coupling leg 16c' can be connected to one another in an articulated manner by means of the hinge pin 16d. For example, both the further first coupling leg 16b' and the further second coupling leg 16c' can each have a corresponding hinge pin through-hole, which can be arranged in alignment with one another and / or through which the hinge pin 16d can be passed. Thus, the hinge pin 16d is preferably connected at its first end to the first and second coupling legs 16b, 16c and at its second end to the further first and further second coupling legs 16b', 16c'.

[0123] As for example from the Fig. 1, Fig. 2, Fig. 4, Fig. 6 and Fig. As can be seen in Figure 7, a further coupling arm 16a' can also be articulated to the hinge pin 16d. This can basically be designed like the coupling arm 16a and can be accommodated (e.g., displaceably) in a further guide section 15' of the reflector device 14. Analogous to the guide section 15, the further guide section 15' can also comprise several further guide surfaces 15a', 15b', 15c', 15d', for example, two further lateral guide surfaces 15a', 15b', a further base guide surface 15c', and a further cover guide surface 15d', cf. Fig. 6. Preferably, the further guide section 15' is configured identically to the guide section 15. However, the further guide section 15' and the guide section 15 or the further coupling arm 16a' and the coupling arm 16a can, in principle, also be configured differently.

[0124] Through the multiple design of the coupling device 16 together with the associated fastening legs 12a, 12b, 12a', 12b', a stable and secure coupling of the first and second beam guiding parts 22a, 22b to the reflector device 14 can be achieved, which ensures that the reflector device 14 is guided along the corresponding angle bisector when the fastening legs 12a, 12b, 12a', 12b' are pivoted relative to one another, so that, as will be apparent in connection with the systems 20 described in more detail below, a deflection of the light and / or microwave beam 1 from the first to the second beam guiding part 22a, 22b, or vice versa, is ensured, regardless of the pivoting position of the fastening legs 12a, 12b, 12a', 12b'.

[0125] The Fig. 10 to 12 show various embodiments of a system 20 for guiding a light and / or microwave beam 1. The system 20 comprises a first beam guiding part 22a, a second beam guiding part 22b and a device 10 as described herein.

[0126] The first beam guide part 22a can, for example, be designed as a (first) beam guide tube and / or have at least one tube section. For example, the first beam guide part 22a can have an elongated, circumferentially closed and / or tubular shape. For example only, the first beam guide part 22a can be designed as a hollow profile and / or have at least one hollow profile section. Preferably, the first beam guide part 22a serves to guide the light and / or microwave beam 1 (e.g., as a free beam) and / or to shield a (e.g., inner) beam guide region. For this purpose, the first beam guide part 22a can be made of a light-tight material, e.g., metal.

[0127] The first beam guiding part 22a can comprise (e.g., in the beam path) at least one element for manipulating and / or focusing the light and / or microwave beam 1 (not shown). The at least one element can comprise, for example, a lens, a filter, and / or a polarizer. For example only, the first beam guiding part 22a can comprise at least one slot for inserting the lens, the filter, and / or the polarizer. The at least one slot can be blindly covered when not in use.

[0128] The first beam guide part 22a can have a first end and a second end, preferably opposite the first end. The first beam guide part 22a can also be telescopically adjustable in length. For example, the first beam guide part 22a can have an outer tube section, an inner tube section, and at least one (e.g., annular) rolling bearing (e.g., with multiple rolling elements). Preferably, the inner tube section is inserted in the outer tube section for longitudinal displacement and / or the at least one rolling bearing is arranged between the inner tube section and the outer tube section. For example, the inner tube section can be connected to the outer tube section via the at least one rolling bearing, preferably in such a way that, upon longitudinal displacement of the inner tube section relative to the outer tube section, the rolling elements roll on a running surface of the outer tube section, the inner tube section, and / or the at least one rolling bearing.Particularly preferably, the at least one rolling bearing comprises at least two rolling bearings, which can preferably be arranged at a distance from one another (e.g. along a longitudinal axis of the first beam guiding part 22a).

[0129] The second beam guide part 22b can fundamentally be designed like the first beam guide part 22a. Accordingly, the second beam guide part 22b can have the features described above in connection with the first beam guide part 22a, wherein the term "first" is to be replaced by "second." In particular, the second beam guide part 22b can thus also have an outer tube section 22b.1, an inner tube section 22b.2, and at least one (e.g., annular) rolling bearing 21b (e.g., with multiple rolling elements). For example only, the first and second beam guide parts 22a and 22b can be designed as identical parts and / or have the same length, the same width, and / or the same thickness. As can be seen in the embodiments shown, the first and second beam guide parts 22a, 22b can, however, also be designed with different lengths and / or not both be telescopically adjustable in length.

[0130] The first beam guide part 22a and the second beam guide part 22b can be articulated by means of the device 10. For example, the first fastening leg 12a of the device 10 can be fastened (e.g., screwed) to the first beam guide part 22a (e.g., at its first end) and / or the second fastening leg 12b of the device 10 can be fastened (e.g., screwed) to the second beam guide part 22b (e.g., at its first end). In addition, the further first fastening leg 12a' of the device 10 can also be fastened (e.g., screwed) to the first beam guide part 22a (e.g., at its first end) and / or the further second fastening leg 12b' of the device 10 can be fastened (e.g., screwed) to the second beam guide part 22b (e.g., at its first end).Preferably, the device 10 thus functions as a joint between the first and second beam guiding parts 22a, 22b, so that preferably a pivoting of the first and second beam guiding parts 22a relative to each other is enabled, wherein the above-described carrying of the reflector device 14 ensures that the light and / or microwave beam 1 is guided and / or deflected from the first to the second beam guiding part 22a, 22b or vice versa.

[0131] In one embodiment (not shown), the system 20 has no further beam guidance parts besides the first and second beam guidance parts 22a, 22b. Accordingly, the system 20 should preferably have only an articulated connection. To connect the system 20 to further components, e.g., two vacuum systems, the first beam guidance part 22a (e.g., its second end) can have a first flange, and the first beam guidance part 22a (e.g., its second end) can have a second flange. The first and / or second flange can be rotatable and / or have multiple through-openings for receiving fastening elements.

[0132] In the Fig. 10 and Fig. In the further embodiment shown in Figure 11, the system 20 comprises, in addition to the first and second beam guide parts 22a, 22b, a third beam guide part 22c. This can in principle again have the features of the first or second beam guide part 22a, 22b, for example, be tubular and / or telescopically adjustable in length. Furthermore, in this embodiment, the system 20 comprises, in addition to the device 10, a further device 10'. This can be designed like the device 10 and / or have the features described herein in connection with the device 10. The device 10 and the further device 10 are preferably designed and / or constructed as identical parts.

[0133] As in the Fig. 10 and Fig. 11, the second beam guide part 22b and the third beam guide part 22c are articulated by means of the further device 10'. For example, a first fastening leg 12a of the further device 10' can be fastened to the second beam guide part 22b (e.g., at its second end) and a second fastening leg 12b of the further device 10' can be fastened to the third beam guide part 22c (e.g., at its first end). In addition, a further first fastening leg 12a' of the further device 10' can be fastened (e.g., screwed) to the second beam guide part 22b (e.g., at its second end) and / or a further second fastening leg 12b' of the further device 10' can be fastened (e.g., screwed) to the third beam guide part 22c (e.g., at its first end).Preferably, the further device 10' thus functions as a joint between the second and third beam guide parts 22b, 22c, preferably enabling pivoting of the second and third beam guide parts 22b, 22c relative to one another. Overall, in this (two-jointed) embodiment, the system 20 can be pivoted at least partially about two different pivot axes.

[0134] To achieve the greatest possible flexibility in the arrangement of the system 20, the second beam guide part 22b is telescopically adjustable in length and / or the first and second ends of the second beam guide part 22b are rotatable relative to one another. For example, the inner tube section 22b.2 of the second beam guide part 22b, which has the first end, can be rotatable relative to the outer tube section 22b.1 of the second beam guide part 22b, which has the second end. Furthermore, the first and third beam guide parts 22a, 22c can preferably each have a (e.g., rotatable) flange for attachment to a window flange of a vacuum system, wherein the flange of the first beam guide part 22a can also be referred to, for example, as the first flange 23a, and the flange of the third beam guide part 22c can also be referred to, for example, as the third flange 23c. In addition or alternatively, the first and third beam guide parts 22a, 22c may not be telescopically adjustable in length.

[0135] In a variant (not shown), a (e.g. flexible) part of a vacuum vessel can be arranged between the device 10 and the further device 10', in which, for example, measurements or manipulations of the light and / or microwave beam 1 can be carried out.

[0136] The Fig. The embodiment shown in Figure 12 is based on the embodiment just described. In addition to the first, second, and third beam guide parts 22a, 22b, 22c, the system 20 here also has a fourth beam guide part 22d. This can in principle again have the features of the first, second, or third beam guide parts 22a, 22b, 22c, for example, be tubular and / or telescopically adjustable in length. Furthermore, in this embodiment, the system 20 has, in addition to the device 10 and the further device 10', a yet further device 10". The yet further device 10" can be designed like the device 10 or further device 10' and / or have the features described herein in connection with the device 10 or further device 10'. Preferably, the device 10, the further device 10, and the yet further device 10" are designed and / or constructed as identical parts.

[0137] As in Fig.12, the third beam guide part 22c and the fourth beam guide part 22d are articulated by means of the yet further device 10". For example, a first fastening leg 12a of the yet further device 10" can be fastened to the third beam guide part 22c (e.g., at its second end) and a second fastening leg 12b of the yet further device 10" can be fastened to the fourth beam guide part 22d (e.g., at its first end). In addition, a further first fastening leg 12a' of the yet further device 10" can be fastened (e.g., screwed) to the third beam guide part 22c (e.g., at its second end) and / or a further second fastening leg 12b' of the yet further device 10" can be fastened (e.g., screwed) to the fourth beam guide part 22d (e.g., at its first end).Preferably, the further device 10" thus functions as a joint between the third and fourth beam guide parts 22c and 22d, so that pivoting of the third and fourth beam guide parts 22c, 22d relative to one another is preferably enabled. Overall, in this (three-jointed) embodiment, the system 20 is pivotable at least in sections about three different pivot axes.

[0138] To achieve the greatest possible flexibility in the arrangement of the system 20, the second and third beam guide parts 22b, 22c are telescopically adjustable in length. Furthermore, the first and second ends of the second beam guide part 22b can be rotated relative to one another. For example, the inner tube section 22b.2 of the second beam guide part 22b, which has the first end, can be rotated relative to the outer tube section 22b.1 of the second beam guide part 22b, which has the second end. In addition, the first and second ends of the third beam guide part 22c can be rotated relative to one another. For example, the inner tube section 22c.2 of the third beam guide part 22c, which has the first end, can be rotated relative to the outer tube section 22c.1 of the third beam guide part 22c, which has the second end. Furthermore, the first and fourth beam guiding parts 22a, 22d can preferably each have a (e.g.Rotatable flange for attachment to a window flange of a vacuum system, wherein the flange of the first beam guide part 22a can be referred to, for example, as the first flange 23a and the flange of the fourth beam guide part 22c can be referred to, for example, as the fourth flange 23d. Additionally or alternatively, the first and fourth beam guide parts 22a, 22d can be non-telescopically adjustable in length.

[0139] Although the invention has been described with reference to specific embodiments, it will be apparent to a person skilled in the art that various changes may be made and equivalents may be substituted without departing from the scope of the invention. Consequently, the invention is not intended to be limited to the disclosed embodiments, but is intended to include all embodiments falling within the scope of the appended claims. In particular, the invention also claims protection for the subject matter and features of the subclaims, independent of the claims referred to. All ranges herein are to be understood as disclosed in such a way that, as it were, all values ​​falling within the respective range are individually disclosed, e.g., also as preferred, narrower outer limits of the respective range.

Claims

[1] Device (10) which is arranged to deflect a light and / or microwave beam (1), comprising: a first fastening leg (12a) which is adapted for fastening to a first beam guiding part (22a); a second fastening leg (12b) which is adapted for fastening to a second beam guide part (22b), wherein the first fastening leg (12a) and the second fastening leg (12b) are hingedly connected to one another; a pivotally mounted reflector device (14) which is designed to deflect the light and / or microwave beam (1); and a coupling device (16) by means of which the reflector device (14), the first fastening leg (12a) and the second fastening leg (12b) are connected to one another in a movement-coupled manner, such that when the first and second fastening legs (12a, 12b) are pivoted relative to one another by a pivot angle (α), the reflector device (14) is pivoted by half the pivot angle (α) relative to the first and second fastening legs (12, 12b); characterized by , that: the coupling device (16) has a coupling arm (16a) which is designed to pivot the reflector device (14) and which is displaceably guided in a guide section (15), preferably a guide channel, of the reflector device (14) along a guide direction (F); and the coupling arm (16a) has a main extension direction (L) which is oriented along the guide direction (F). [2] Device (10) according to claim 1, wherein: there is surface contact between the coupling arm (16a) and the guide section (15); and / or a rolling bearing, preferably a linear ball bearing, is arranged between the coupling arm (16a) and the guide section (15). [3] Device (10) according to claim 1 or 2, wherein the coupling device (16) further comprises: a first coupling leg (16b) which is articulated to the first fastening leg (12a), preferably by means of a first rolling bearing; a second coupling leg (16c) which is pivotally connected to the second fastening leg (12b), preferably by means of a second rolling bearing; and a preferably slide-mounted hinge pin (16d), by means of which the first and second coupling legs (16b, 16c) are hingedly connected to one another and to which the coupling arm (16a) is also hinged. [4] Device (10) according to claim 3, wherein: the coupling arm (16a) has: a first coupling arm end through which the hinge pin (16d) extends, and a second coupling arm end, preferably opposite the first coupling arm end, which is guided displaceably in the guide section (15) along the guide direction (F); and / or the coupling arm (16a) is arranged and / or guided between the first and second coupling legs (16a, 16b) bisecting the angle; and / or the coupling arm (16a) is arranged between the hinge pin (16d) and the reflector device (14). [5] Device (10) according to one of the preceding claims, wherein: the guide section (15) is circumferentially closed in a plane perpendicular to the main extension direction (L); and / or the guide section (15) surrounds the coupling arm (16a) in a plane perpendicular to the main extension direction (L). [6] Device (10) according to one of the preceding claims, wherein: a section of the coupling arm (16a), which is displaceably guided in the guide section (15), is at least partially rod-shaped, preferably cuboid-shaped or cylindrical, and / or has a substantially constant cross-section along its main direction of extension, preferably in the form of a rectangle with two straight longitudinal edges and two outwardly curved transverse edges; and / or a section of the coupling arm (16a), which is displaceably guided in the guide section (15), has an outer contour in a plane perpendicular to the main extension direction (L) which is designed to correspond in shape to an inner contour of the guide section (15) in the plane perpendicular to the main extension direction (L); and / or the coupling arm (16a) is guided along the guide direction (F) at least three-sidedly, preferably at least four-sidedly, in the guide section (15); and / or the guide section (15) has a plurality of guide surfaces (15a-15d) oriented parallel to the guide direction (F), wherein the plurality of guide surfaces (15a-15d) have: two lateral guide surfaces (15a, 15b), which are preferably oriented parallel to each other; and / or a base guide surface (15c) which is preferably oriented perpendicular to the two lateral guide surfaces (15a, 15b); and / or a cover guide surface (15d) which is preferably oriented perpendicular to the two lateral guide surfaces (15a, 15b) and parallel to the base guide surface (15c). [7] Device (10) according to one of the preceding claims, wherein the reflector device (14) has a tempering device (17), which preferably: an inlet connection (17a) for an inlet line, an outlet connection (17b) for an outlet line and a cooling channel (17c) through which a temperature control fluid can flow and which fluidically connects the inlet connection (17a) and the outlet connection (17b) to one another. [8] Device (10) according to one of the preceding claims, wherein the reflector device (14) comprises: a reflection surface (14a) which is designed to deflect the light and / or microwave beam (1), wherein the reflection surface (14a) is preferably oriented perpendicular to an angle bisector between the first and second coupling legs (16a, 16b); and a reflection surface support (14b) which supports the reflection surface (14a) and / or to which the reflection surface (14a) is attached, preferably in an adjustable manner. [9] Device (10) according to claim 8, wherein: the reflector device (14) has an adjusting device (18) via which the reflection surface (14a) is connected to the reflection surface carrier (14b) and by means of which a position and / or orientation of the reflection surface (14a) relative to the reflection surface carrier (14b) can be adjusted, wherein the adjusting device (18) preferably has: several fine adjustment screws and / or clamping screws with lock nuts; and / or a removable, preferably dome-shaped, cover. [10] Device (10) according to claim 8 or 9, wherein: the reflection surface carrier (14b) has the guide section (15); and / or the guide section (15) is designed as a groove, through hole or blind hole in the reflection surface carrier (14b); and / or the reflection surface support (14b) is articulated to the first and second fastening legs (12a, 12b), preferably by means of a main pivot joint. [11] Device (10) according to one of the preceding claims, wherein: the first fastening leg (12a) has a plurality of first through-holes (12a.1), preferably arranged in a grid pattern, which are designed to receive first fastening elements (11a); and / or the second fastening leg (12b) has a plurality of second through-holes (12b.1), preferably arranged in a grid pattern, which are designed to receive second fastening elements (11b); and / or a vertex angle (σ) between the first and second fastening legs (12a, 12b) is between 50° and 130°; and / or the first and second fastening legs (12a, 12b) can be pivoted relative to one another in an apex angle interval between 50° and 130°, preferably continuously. [12] Device (10) according to one of the preceding claims, if dependent on claim 2, wherein: the device (10) further comprises: a further first fastening leg (12a') which is adapted for fastening to the first beam guiding part (22a); a further second fastening leg (12b') which is adapted for fastening to the second beam guide part (22b), wherein the further first fastening leg (12a') and the further second fastening leg (12b') are connected to one another in an articulated manner; and the coupling device (16) further comprises: a further first coupling leg (16b') which is articulated to the further first fastening leg (12a'); a further second coupling leg (16c') which is articulated to the further second fastening leg (12b'); wherein the further first coupling leg (16b') and the further second coupling leg (16c') are articulatedly connected by means of the hinge pin (16d). [13] Device (10) according to claim 12, wherein: the further first fastening leg (12a') and the first fastening leg (12a) are arranged opposite one another, constantly spaced from one another and / or are coupled to one another in terms of movement; and / or the further second fastening leg (12b') and the second fastening leg (12b) are arranged opposite one another, constantly spaced from one another and / or are coupled to one another in terms of movement; and / or the further first coupling leg (16b') and the first coupling leg (16b) are arranged opposite one another, constantly spaced from one another and / or are motion-coupled to one another; and / or the further second coupling leg (16c') and the second coupling leg (16c) are arranged opposite one another, constantly spaced from one another and / or are movement-coupled to one another. [14] System (20) arranged to guide a light and / or microwave beam (1), comprising: a first beam guiding part (22a), preferably tubular; a second, preferably tubular, beam guide part (22b); and a device (10) according to one of the preceding claims, wherein a first fastening leg (12a) of the device (10) is fastened to the first beam guiding part (22a) and a second fastening leg (12b) of the device (10) is fastened to the second beam guiding part (22b), so that the first and second beam guiding parts (22a, 22b) are connected to one another in an articulated manner by means of the device (10). [15] System (20) according to claim 14, wherein the first and / or second beam guiding part (22a, 22b): has at least one pipe section; and / or is telescopically adjustable in length; and / or an outer tube section (22b.1), an inner tube section (22b.2) and at least one, preferably annular, rolling bearing (21b), wherein the inner tube section (22b.2) is inserted in the outer tube section (22b.1) in a longitudinally displaceable manner and the at least one rolling bearing (21b) is arranged between the inner tube section (22b.2) and the outer tube section (22b.1). [16] System (20) according to claim 14 or 15, further comprising: a further device (10') according to one of claims 1 to 13 and a third beam guide part (22c), preferably tubular; wherein a first fastening leg (12a) of the further device (10') is fastened to the second beam guide part (22b) and a second fastening leg (12b) of the further device (10') is fastened to the third beam guide part (22c), so that the second and third beam guide parts (22b, 22c) are articulated to one another by means of the further device (10'); where preferably: the first and third beam guide parts (22a, 22c) each have a preferably rotatable flange (23a, 23c) which is designed for attachment to a window flange of a vacuum system and is not telescopically adjustable in length; and the second beam guide part (22b) is telescopically adjustable in length. [17] System (20) according to claim 16, further comprising: a further device (10") according to one of claims 1 to 13 a fourth beam guide part (22d), preferably tubular; wherein a first fastening leg (12a) of the yet further device (10'') is fastened to the third beam guide part (22c) and a second fastening leg (12b) of the yet further device (10'') is fastened to the fourth beam guide part (22d), so that the third and fourth beam guide parts (22b, 22c) are articulated to one another by means of the yet further device (10''); wherein preferably the first and fourth beam guide parts (22a, 22d) each have a preferably rotatable flange (23a, 23d) which is designed for attachment to a window flange of a vacuum system and are not telescopically adjustable in length.

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