Assembly device for flexible components

Abstract

The invention relates to an assembly device (1; 101; 201) for flexible components, comprising a component holder (2; 111; 211) which has a working chamber (21) which can be subjected to fluid pressure and is partially delimited by an elastically deformable wall section (22), wherein an opening (37) of a vacuum channel (17) is arranged on an outer surface (38) of the working chamber (21) adjacent to the elastically deformable wall section (22), and wherein the elastically deformable wall section (22) has an adjustable curvature depending on a fluid pressure level in the working chamber (21). According to the invention, a sensor (48; 108; 208) is assigned to the component holder (2; 111; 211), which sensor is designed to provide a sensor signal that is dependent on a curvature of an inner surface (51) of the elastically deformable wall section (22) facing the working space (21).

Description

[0001] The invention relates to an assembly device for flexible components, comprising a component holder which has a working space which can be subjected to fluid pressure and is partially delimited by an elastically deformable wall section, wherein an opening of a vacuum channel is arranged on an outer surface of the working space adjacent to the elastically deformable wall section and wherein the elastically deformable wall section has an adjustable curvature depending on a fluid pressure level in the working space.

[0002] US 2022 / 0 102 185 A1, which was used to draft the preamble of claim 1, discloses a semiconductor manufacturing apparatus which is designed to connect a substrate to a semiconductor chip and which comprises a bondhead which is configured such that the semiconductor chip can be stacked on a substrate, wherein the bondhead includes a mounting pad whose bottom surface has a vacuum channel, wherein the bondhead further comprises a cavity which is configured such that a shape of the bottom surface of the mounting pad can be adjusted by providing an air pressure in the cavity.

[0003] The object of the invention is to provide an assembly device that enables improved chip assembly.

[0004] This object is achieved for an assembly device of the type mentioned at the outset in that the assembly device has a component holder which has a working space which can be subjected to fluid pressure and is partially delimited by an elastically deformable wall section, wherein an opening of a vacuum channel is arranged on an outer surface of the working space adjacent to the elastically deformable wall section and wherein the elastically deformable wall section has an adjustable curvature depending on a fluid pressure level in the working space, and wherein a sensor is assigned to the component holder which is designed to provide a sensor signal which is dependent on a curvature of an inner surface of the elastically deformable wall section facing the working space.

[0005] The component holder is the component of the assembly device with which the component to be assembled is picked up using a vacuum and placed onto another component during the assembly process. For this purpose, the component holder has a working space that is partially delimited by an elastically deformable wall section. The working space is preferably formed as a cavity in the component holder and, apart from the elastically deformable wall section, is delimited by walls that do not undergo any significant elastic or plastic deformation during proper use of the assembly device.

[0006] The intended use of the assembly device provides that the working chamber is temporarily pressurized with a working fluid, in particular compressed air, to carry out the assembly process, thereby causing a change in the curvature of the elastically deformable wall section. For example, the working chamber is pressurized to a maximum pressure of 6 bar. This pressurization of the working chamber causes the elastically deformable wall section to bulge, transforming an outer surface of the elastically deformable wall section facing the component to be assembled from a preferably flat configuration into a convex configuration.Due to this change in the curvature of the elastically deformable wall region, the component, which is similarly elastically deformable and which, due to the application of negative pressure, rests at least largely flat against the outer surface of the elastically deformable wall region, is also transformed into a curved configuration. Accordingly, when the component, which may in particular be a semiconductor chip, is mounted on another component, which may also be a semiconductor chip, a point contact initially occurs between the two components.

[0007] As the assembly process continues, the pressure in the work area is reduced, resulting in a further change in the curvature of the elastically deformable wall area and a corresponding change in the curvature of the flexible component, which weakens the curvature. This allows the component to be assembled to be placed on top of the other component without unwanted air pockets occurring. This is particularly important when the components to be assembled have opposing electrical contact surfaces that must be reliably connected to each other.Such an assembly method aims to place the extremely smooth underside of the component to be assembled, preferably without a contact and / or adhesive layer, directly onto an extremely smooth surface of the other component, whereby strong adhesive forces are created between the two components due to the almost full-surface contact, since with correct assembly of the components no air can enter between the components, which would allow the components to detach from each other.

[0008] The elastically deformable wall area is dimensioned in such a way that it is only elastically deformed when the assembly device is used as intended, so that after pressure equalization between the working space and the environment of the assembly device, the outer surface of the elastically deformable wall area returns to its original shape and is in particular at least largely flat.

[0009] The sensor, which is assigned to the component holder, serves to provide a sensor signal that depends on the curvature of the elastically deformable wall region. The sensor signal represents the actual curvature of the elastically deformable wall region, with the curvature being detected on an inner surface of the elastically deformable wall region facing the working space. In contrast to an indirect detection of the curvature of the elastically deformable wall region, as can be achieved, for example, by detecting the working pressure in the working space and subsequently converting the detected working pressure, the invention provides for direct detection of the curvature.This avoids a number of measurement errors that can occur when the curvature is measured indirectly, for example when the temperature of the elastically deformable wall area is not known, which is nevertheless of considerable importance for the deformation properties of the wall area.

[0010] Depending on the selected sensor principle, the sensor can be constructed from multiple components, whereby these components do not necessarily have to be fully integrated into the workspace or attached directly to the component holder. Rather, the sensor can be fully integrated into the workspace or the individual sensor components can be distributed both within the workspace and away from the component holder. In either case, the sensor is designed to provide an electrical sensor signal from which the curvature of the elastically deformable wall region can be determined. The electrical sensor signal can be an analog signal or a digital signal, which is provided to an evaluation device for determining the curvature.Typical transmission methods for the sensor signal are: analog current signal 4 mA to 20 mA; HART; IO-Link; SPI or other digital bus protocols.

[0011] Preferably, the electrical sensor signal of the sensor is used to enable the curvature of the elastically deformable wall area to be detected as precisely as possible in order to thereby control the fluid pressure in the working space, with which a precisely defined assembly process for the component to be mounted on another component can be carried out.

[0012] Advantageous further developments of the invention are the subject of the subclaims.

[0013] It is expedient if the sensor from the group consisting of resistive strain gauges, capacitive strain gauges, and optical strain gauges is designed for contact-based detection of the curvature of the inner surface. Such a sensor is applied directly to the inner surface and secured there, preferably by a material bond, such that a change in the curvature of the inner surface leads to a mechanical distortion of the strain gauge. Due to this mechanical distortion, at least one other physical property of the strain gauge also changes, for example, an electrical resistance, an electrical capacitance, or an optical refraction. This changed physical property of the strain gauge can be converted by an evaluation device coupled to the sensor into a curvature value that represents the curvature of the inner surface.This curvature value can, for example, be made available as an actual value to a pressure regulator which is used to regulate the fluid pressure in the working chamber and which has the task of adapting the actual value to a specified setpoint or a specified setpoint curve.

[0014] It is advantageous if the sensor, selected from the group consisting of inductive sensors, capacitive sensors, magnetostrictive sensors, optical sensors, magnetic field sensors, and dynamic pressure sensors, is designed for contactless detection of the curvature of the inner surface. In a contactless method, it is advantageous that the influence of the sensor on the deformation properties of the elastically deformable wall section disappears, in particular, is zero, or at least very small.

[0015] In an inductive measuring sensor, the elastic deformation of the elastically deformable wall section changes the inductance of an electrical coil, which is preferably supplied with an alternating current, whereby the change in inductance is used as a measure of the curvature of the elastically deformable wall section.

[0016] A capacitive measuring sensor takes advantage of the fact that a change in distance between two oppositely arranged capacitor plates also results in a change in an electrical voltage between the capacitor plates or in a capacitance of the capacitor formed by the two capacitor plates, whereby this change in voltage or capacitance can be used as a measure of the curvature of the elastically deformable wall section.

[0017] In a magnetostrictive sensor, an electrical pulse is coupled into a thin-walled metal tube. The metal tube is made of a magnetostrictive material, and either the metal tube or a permanent magnet is mechanically coupled to the elastically deformable wall section. When the curvature of the elastically deformable wall section changes, a relative movement occurs between the metal tube and the permanent magnet. This relative movement also changes the signal path for the electrical pulse, which is at least partially reflected in the metal tube at the point in the immediate vicinity of the permanent magnet.Accordingly, the signal propagation time for the electrical pulse can be used to infer the curvature of the elastically deformable wall section, and this signal propagation time can be used as a measure of the curvature of the elastically deformable wall section.

[0018] In an optical sensor, for example, the inner surface of the elastically deformable wall section can be used as a reflection surface for an optical beam emitted by an optical transmitter, in particular a laser diode. A light-sensitive sensor can be used to evaluate the reflected optical beam. This sensor, for example, uses laser triangulation to determine the distance to the elastically deformable wall section and thus to draw conclusions about the curvature of the elastically deformable wall section.In a magnetic field sensor, a permanent magnet is fixed to the inner surface of the elastically deformable wall section and a magnetic field sensitive sensor, for example a Hall sensor, is arranged opposite this permanent magnet, which is able to determine a distance between the permanent magnet and the magnetic field sensor depending on a magnetic flux strength and / or one or more magnetic field directions and thereby provide a measure of the curvature of the inner surface.

[0019] A dynamic pressure sensor is designed to allow a defined air flow exiting a nozzle to impinge on a surface that is mechanically connected to the elastically deformable wall section. This creates a variable pressure in the nozzle depending on the curvature of the elastically deformable wall section and the associated distance between the nozzle's orifice and the surface impacted by the air flow. This pressure is determined using a pressure sensor associated with the nozzle and serves as a measure of the curvature of the inner surface of the elastically deformable wall section.

[0020] It is preferably provided that a sensor counterpart from the group: ferromagnetic plunger, capacitor plate, permanent magnet, optical reflector surface, pneumatic impact surface, is arranged adjacent to or opposite the sensor and is coupled to the inner surface of the elastically deformable wall section.

[0021] In a further development of the invention, it is provided that the sensor and the sensor counterpart are arranged in a spatial region of the working space which is opposite the elastically deformable wall section and that the sensor counterpart is arranged on a second end region of a coupling rod which bears with a first end region against the inner surface of the elastically deformable wall section and which is mounted in a rod guide in the working space in a linearly movable manner.

[0022] The coupling rod's task is to transmit the movement of the elastically deformable wall section through the workspace to the sensor, thereby enabling a spatial separation between the elastically deformable wall section and the sensor. This spatial separation allows for the use of different sensor technologies to determine the curvature of the elastically deformable wall section, which, due to geometric constraints, cannot be integrated or can only be integrated with difficulty in the immediate vicinity of the elastically deformable wall section. This applies in particular to the case where the elastically deformable wall section is designed as a replaceable part and, depending on the geometry of the component to be assembled, replacement of the elastically deformable wall section is planned.For example, a mechanical interface is designed on the component holder, which enables a quick replacement of the elastically deformable wall section and, together with the coupling rod, is optimized so that after replacement of the elastically deformable wall section, a curvature measurement can be carried out without complex calibration measures.

[0023] The coupling rod is mounted for linear movement in a rod guide in the working space, with a movement axis for the coupling rod oriented transversely to the greatest extent of the elastically deformable wall section. In particular, the movement axis forms a surface normal for the elastically deformable wall section, which is flat in a neutral position. Preferably, the coupling rod and the rod guide form a sliding bearing with minimal play and low friction, ensuring the most precise possible movement transmission between the elastically deformable wall section and the coupling rod.

[0024] In a further embodiment of the invention, it is provided that the coupling rod passes through a sealing ring arranged in the working chamber, which is designed for a fluidic separation of the working chamber into a first working chamber section and a second working chamber section, wherein an opening of a dynamic pressure channel is arranged opposite the second end region of the coupling rod designed as a pneumatic impact surface, wherein the second working chamber section is fluidically connected to an outlet channel, wherein a pressure sensor is arranged in the dynamic pressure channel and wherein a flow regulator is connected upstream of the dynamic pressure channel.

[0025] The sealing ring is preferably formed as a component of the rod guide and received in a radial groove of the component holder. Particularly preferably, the sealing ring is formed as a shaft seal or lip seal and is made of a rubber-elastic material to ensure an advantageous sealing effect against an outer surface of the coupling rod. The sealing ring ensures fluidic separation between the first working chamber section, which can be subjected to fluid pressure to influence the curvature of the elastically deformable wall section, and the second working chamber section, in which the sensor is formed, which operates at a lower working pressure compared to the fluid pressure in the first working chamber section.Preferably, the coupling rod provides a particularly circular impact surface oriented transversely to the movement axis, onto which the air flow exits the outlet opening of the dynamic pressure channel arranged opposite the impact surface impinges. Depending on the distance between the outlet opening and the impact surface, which is influenced by the curvature of the inner surface of the elastically deformable wall section, a variable dynamic pressure occurs at the outlet opening, which can be determined using a pressure sensor arranged in the dynamic pressure channel. The pressure in the dynamic pressure channel is a measure of the curvature of the inner surface of the elastically deformable wall section.

[0026] It is expedient if a magnetostrictive measuring sensor or a magnetic field measuring sensor, in particular a Hall sensor, is arranged opposite the second end region of the coupling rod, which is provided with a permanent magnet. Preferably, the magnetostrictive measuring sensor and the magnetic field measuring sensor are integrated circuits that only require an electrical supply voltage to perform the desired distance measurement relative to the permanent magnet. The entire signal conditioning and processing is preferably performed in the respective integrated circuit, so that, for example, a sensor signal proportional to the distance between the integrated circuit and the permanent magnet can be output at an output interface of the integrated circuit.

[0027] In an advantageous development of the invention, a first capacitor plate is arranged opposite the second end region of the coupling rod, which is provided with an electrically conductive second capacitor plate. The two capacitor plates can be designed, for example, as sheet metal plates or as metallized plastic plates and enable a compact design of the assembly device in a spatial direction along the movement axis of the coupling rod. An electrical evaluation of this sensor can be carried out either by determining a voltage change of an electrical voltage applied to the capacitor plates before the change in curvature or by providing an alternating electric field to the capacitor plates, in which case an oscillation frequency of a resonant circuit serves as a measure of the distance.The evaluation of the voltage change or the oscillation frequency takes place in an evaluation device that is electrically connected to the capacitor plates and is a component of the sensor.

[0028] Preferably, the second end region of the coupling rod made of a magnetizable material is inserted into a coil space of an electrical coil, or the second end region of the coupling rod carries an iron plate, and a planar coil is arranged on the upper part opposite the iron plate. Accordingly, if the curvature of the elastically deformable wall section changes, the position of the second end region of the coupling rod and thus the inductance of the electrical coil also changes. This applies both when the coupling rod, with its second end region, inserts into a coil space of an electrical coil, in particular one with a circular cylindrical design, and when an iron plate is located opposite a planar coil. The change in inductance can accordingly be used as a measure of the change in curvature of the elastically deformable wall section.

[0029] It is advantageous if the sensor is electrically connected to an evaluation device in order to determine a curvature value for the inner surface of the elastically deformable wall section from an electrical sensor signal.

[0030] Advantageous embodiments of the invention are illustrated in the drawing. Fig. 1 a strictly schematic sectional view of a first embodiment of an assembly device with a dynamic pressure sensor, Fig. 2 is a strictly schematic sectional view of a second embodiment of a mounting device with a planar coil arrangement, and Fig. 3 a strictly schematic representation of a third embodiment of an assembly device with a magnetic field sensor arrangement.

[0031] One in the Fig. 1 schematically illustrated mounting device 1 is used to mount a semiconductor chip (not shown) onto a substrate (not shown), which may also be a semiconductor chip. For correct mounting of the semiconductor chip, it is necessary that the semiconductor chip is initially applied to the substrate in a curved configuration in order to reduce the curvature during the further course of the mounting process and thus carry out a controlled, centrically from the inside outward displacement of air between the underside of the semiconductor chip and the top side of the substrate, thereby avoiding air pockets between the semiconductor chip and the substrate.

[0032] For this purpose, the assembly device 1 has a component holder 2, a working air supply 3, a vacuum supply 4, a measuring air supply 5, and a control device 6. The control device 6 comprises an electronic circuit (not shown in detail) with a microcontroller or microprocessor in which a computer program runs that is programmed to control all processes required for the direct operation of the assembly device 1. The control device 6 can be connected via an interface (not shown) to a higher-level machine control of an automatic assembly machine. This automatic assembly machine has, for example, a robot arm (not shown) or another handling device for spatial movement of the assembly device 1 in order to pick up the semiconductor chip (not shown) from a storage location and mount it on the substrate (not shown).In this case, it can be provided that the higher-level machine control is designed to provide control commands to the control device 6 and that the control device 6 converts these control commands into actions of the components of the assembly device 1 described in more detail below.

[0033] Again Fig. 1, the component holder 2 has a working air connection 7, a vacuum connection 8 and a measuring air connection 9, each of these connections 7 to 9 being equipped with a hose coupling 10, 11, 12, shown only stylized, to which one of the fluid hoses 13, 14, 15, shown only schematically, is connected.

[0034] Starting from the working air connection 7, a working air duct 16 extends through the component holder 2 to a working chamber 21, which is designed purely as an example as a circular cylindrical bore and has an elastically deformable wall section 22 designed in the manner of a membrane. As can be seen from the schematic representation of the Fig. 1, the working space 21 is delimited by dimensionally stable wall sections 23, 24, with the exception of the elastically deformable wall section 22. Purely by way of example, it is provided that the circular wall section 23, together with the elastically deformable wall section 22, is designed as a component of an exchangeable insert part 25. This insert part 25 is received in a recess 26 in a lower part 27 of the component holder 2 and is held on the lower part 27 by a locking plate 28, which is fixed to an underside 29 of the lower part 27 in a manner not shown in detail.

[0035] On an end face 30 of the recess 26, an opening 31 of the working air duct 16 and a circumferential vacuum duct 32 formed as an annular groove are provided. Coaxial to the vacuum duct 32, an outer sealing groove 33 with an outer sealing ring 34 and an inner sealing groove 35 with an inner sealing ring 36 are formed on the end face 30, which are provided for sealing the vacuum duct 32 from the working chamber 21 and the environment. As can be seen from the illustration of the Fig. 1, the outlet opening 31 is arranged in the working chamber 21, so that ventilation and venting of the working chamber 21 can be carried out via the working air duct 16. For this ventilation and venting of the working chamber 21, the working air duct 16 is connected via the hose coupling 10 and the associated fluid hose 13 to a control valve 41, which is purely exemplary an electro-fluidically pilot-controlled 3 / 3-way valve. The control valve 41 is connected to a compressed air source 42 and to a compressed air outlet 43 symbolically designed as a silencer and can, depending on a switching position, optionally vent the working chamber 21 (as in Fig. 1) or a complete blocking of the working space 21 or a ventilation of the working space 21. The control valve 41 is controlled via an electrical control line 44, which is connected to the control device 6

[0036] Starting from the vacuum channel 32, vacuum bores 37 extend to an end face 38 of the insert part 25 and open there into the environment. The end face 38 can, for example, be circular or rectangular, in particular square, and borders the purely exemplary circular, elastically deformable wall section 22. When a vacuum is applied to the vacuum bores 37, a component (not shown), in particular a semiconductor chip, can be sucked onto the end face 38. The vacuum application to the vacuum bores 37 is selected such that even in the event of a bulge of the elastically deformable wall section 22, as in the Fig. 1 is shown in dashed lines, the adhesion of the component to the end face 38 is maintained, and the component has a similar or identical curvature to the elastically deformable wall section. For this vacuum application to the vacuum bores 37, the vacuum channel 32 is in fluid communication with the hose coupling 11 via a vacuum bore 17.

[0037] The fluid hose 14 is connected to the hose coupling 11. The fluid hose 14 is connected to a switching valve 45, which is designed purely as an electrofluidically pilot-controlled 3 / 2-way valve and is connected to a vacuum source 46. The switching valve 45 is connected to the control device 6 via a control line 47 and enables either the application of vacuum or the ventilation of the vacuum bores 37.

[0038] A first end region 56 of a coupling rod 52 rests against an inner surface 51 of the elastically deformable wall section 22. The coupling rod 52 extends along a movement axis 53, which is oriented transversely to the inner surface 51, purely exemplarily with a circular cross-section, to a second end region 57, which faces away from the inner surface 51. By way of example, the coupling rod 52 is spherically tapered at the first end region 56 toward the inner surface 51 and has a rounded tip 58.

[0039] At the second end region 57, a flat surface 59 is formed, oriented transversely to the movement axis 53, which serves as a pneumatic impact surface. The coupling rod 52 passes through a guide bore 39 formed in the lower part 27, the inner surface of which serves as a rod guide 54. Furthermore, the coupling rod 52 passes through a sealing ring 55, which is received in a stepped bore 66, oriented coaxially to the movement axis 53, in an upper part 65 of the component holder 2, which is placed on the lower part 27. The sealing ring 55 has the task of pneumatically dividing the working chamber 21 into a first working chamber section 67 and a second working chamber section 68, so that pressurizing the first working chamber section 67 does not lead to a change in the pressure conditions in the second working chamber section 68.

[0040] The second working chamber section 68 contains, in addition to the stepped bore 66, a measuring air channel 18 extending from the hose coupling 12, which is fluidically connected to the stepped bore 66 and is also referred to as a dynamic pressure channel, as well as an outlet channel 19 which is also fluidically connected to the stepped bore 66. The stepped bore 66 has a first bore section 69, which is preferably circularly cylindrical and faces the lower part 27 and is designed to receive the sealing ring 55. Adjoining the first bore section 69 along the movement axis 53 is a second bore section 70, which serves as a flow chamber for the dynamic pressure sensor 48 described in more detail below and which, purely by way of example, is circularly cylindrical with a smaller diameter than the first bore section 69.The second bore section 70 is followed along the movement axis by a third bore section 71 which is fluidically connected to the measuring air channel 18 and which, purely by way of example, is circularly cylindrical with a smaller diameter than the second bore section 70.

[0041] An inner diameter of the third bore section 71 is selected to be smaller than a diameter of the flat surface 59, so that compressed air provided at the measuring air connection 9 can be guided through the third bore section 71 with a jet cross-section that ensures that the compressed air volume flow impinges at least almost entirely on the flat surface 59. An outlet opening of the third bore section 71, at which it merges into the second bore section 70, is also referred to as an outlet opening 72.

[0042] Depending on a curvature of the elastically deformable wall section 22, the coupling rod 52 can move from the closed position as shown in the Fig. 1, into an opening position (not shown), in which an annular gap is released between the third bore section 71, which serves as a nozzle, and the coupling rod 52, through which an annular gap the compressed air provided at the measuring air connection 9 can flow into the outlet channel 19. In order to be able to gain knowledge about the relative position of the coupling rod 52 with respect to the third bore section 71 and thus about the curvature of the elastically deformable wall section 22, a targeted supply of compressed air takes place at the measuring air connection 9, which is provided by a flow regulator 82 and a compressed air source 83 connected to the flow regulator 82. For example, a pressure regulator (not shown) can also be used instead of the flow regulator 82.

[0043] Furthermore, a pressure sensor 84 is assigned to the measuring air connection 9, with which pressure can be measured in the measuring air duct 18. The flow regulator 82 is electrically connected to the control device 6 via a control line 85 and receives a set flow value from the control device 6. The pressure sensor 84 is connected to the control device 6 via a sensor line 86 and, via this, provides a sensor signal to the control device 6 that represents the pressure at the measuring air connection 9. The task of the flow regulator 82 is to always provide a flow through the measuring air duct 18 that corresponds to the set flow value, regardless of the flow resistance dependent on the position of the coupling rod 52 relative to the third bore section 71.An increase in flow resistance, which occurs when the flat surface 59 approaches the third bore section 71, leads to a pressure increase in the measuring air duct 18, while a pressure drop occurs in the measuring air duct when the flat surface 59 moves away from the third bore section 71. The pressure in the measuring air duct 18 determined by the pressure sensor 84 is thus a measure of the distance between the coupling rod 52 and the third bore section 71 and of the curvature of the elastically deformable wall section 22.

[0044] Accordingly, in the assembly device 1, the control device 6, the coupling rod 52, the third bore section 71, the flow regulator 82 form a back pressure sensor 48.

[0045] In the following description of the second embodiment of a mounting device 101 as shown in the Fig. 2, the same reference numerals are used for functionally identical components as for the assembly device 1 according to the Fig. 1 is used, and a further description of these components will be omitted. The assembly device 101 differs from the assembly device 1 in that, instead of the dynamic pressure sensor 48, an inductive sensor 108 is provided for determining the curvature of the elastically deformable wall section 22. For this purpose, an iron plate 105 is arranged at the end of the second end region 107 of the coupling rod 102, which is oriented with a greatest extent transverse to the movement axis 103. Opposite the iron plate 105, a printed circuit with a planar coil 104 is arranged on an upper part 112 of the component holder 111, which is oriented parallel to the iron plate 105 and has essentially the same greatest extent transverse to the movement axis 103 as the iron plate 105.The planar coil 104 is connected via associated measuring lines 109 and 110 to the control device 6, which is designed to provide electrical signals to the planar coil 104, in particular an alternating electric field, in order to be able to determine a distance between the planar coil 104 and the iron plate 105.

[0046] In the following description of the third embodiment of a mounting device 201 as shown in the Fig. 3, the same reference numerals are used for functionally identical components as for the assembly device 1 according to the Fig.1 is used, and a further description of these components will be omitted. The assembly device 201 differs from the assembly device 1 in that, instead of the dynamic pressure sensor 48, a magnetic field measuring sensor 208 is used to determine the curvature of the elastically deformable wall section 22. In this case, a permanent magnet 204 is attached to the second end region 207 of the coupling rod 202. Furthermore, a magnetic field sensor 205, which can be designed in particular as a Hall sensor, is arranged opposite the second end region 207. The magnetic field sensor 205 is electrically connected via a measuring line 209 to the control device 6, in which the sensor signal, which depends on the distance between the permanent magnet 204 and the magnetic field sensor 205, is converted into a value that represents the curvature of the elastically deformable wall section 22.In order to ensure reliable contact of the coupling rod 202 with the inner surface 51, a compression spring 210 extends between the second end region 207 of the coupling rod 202 and the upper part 212 of the component holder 211.

Claims

[1] Assembly device (1; 101; 201) for flexible components, comprising a component holder (2; 111; 211) which has a working space (21) which can be subjected to fluid pressure and is partially delimited by an elastically deformable wall section (22), wherein an opening (37) of a vacuum channel (17) is arranged on an outer surface (38) of the working space (21) adjacent to the elastically deformable wall section (22), and wherein the elastically deformable wall section (22) has an adjustable curvature depending on a fluid pressure level in the working space (21), characterized by that the component holder (2; 111; 211) is assigned a sensor (48; 108; 208) which is designed to provide a sensor signal which is dependent on a curvature of an inner surface (51) of the elastically deformable wall section (22) facing the working space (21). [2] Assembly device (1; 101; 201) according to claim 1, characterized bythat the sensor (48; 108; 208) from the group: resistive strain gauge, capacitive strain gauge, optical strain gauge, designed for contact-based detection of the curvature of the inner surface. [3] Assembly device (1; 101; 201) according to claim 1, characterized by that the sensor (48; 108; 208) from the group: inductive sensor, capacitive sensor, magnetostrictive sensor, optical sensor, magnetic field sensor, dynamic pressure sensor, designed for contactless detection of the curvature of the inner surface. [4] Mounting device (1; 101; 201) according to claim 3, characterized bythat adjacent to or opposite the sensor (4; 108; 208) there is arranged a sensor counterpart coupled to the inner surface (51) of the elastically deformable wall section (22) from the group: ferromagnetic plunger, capacitor plate (105), permanent magnet (204), optical reflector surface, pneumatic impact surface (59). [5] Mounting device (1; 101; 201) according to claim 4, characterized by in that the sensor (48; 108; 208) and the sensor counterpart are arranged in a spatial region of the working space (21) which lies opposite the elastically deformable wall section (22), and in that the sensor counterpart is arranged on a second end region (57) of a coupling rod (52; 102; 202) which bears with a first end region (56; 106; 206) against the inner surface (51) of the elastically deformable wall section (22) and which is mounted in a rod guide (54) in the working space (21) for linear movement. [6] Assembly device (1; 101; 201) according to claim 5, characterized byin that the coupling rod (52; 102; 202) passes through a sealing ring (55) arranged in the working chamber (21), which sealing ring is designed for a fluidic separation of the working chamber (21) into a first working chamber section (67) and a second working chamber section (68), wherein an opening (72) of a dynamic pressure channel (18) is arranged opposite the second end region (57) of the coupling rod (52), which is designed as a pneumatic impact surface (59), wherein the second working chamber section (68) is connected in a fluidic communication with an outlet channel (19), wherein a pressure sensor (84) is assigned to the dynamic pressure channel (18) and wherein a flow regulator (82) is connected upstream of the dynamic pressure channel (18). [7] Mounting device (1; 101; 201) according to claim 5, characterized bythat a magnetostrictive measuring sensor or a magnetic field measuring sensor (205), in particular a Hall sensor, is arranged opposite the second end region (207) of the coupling rod (202) provided with a permanent magnet (204). [8] Mounting device (1; 101; 201) according to claim 5, characterized by that a first capacitor plate is arranged opposite the second end region of the coupling rod provided with an electrically conductive second capacitor plate. [9] Mounting device (1; 101; 201) according to claim 5, characterized by that the second end region of the coupling rod made of a magnetizable material is immersed in a coil space of an electrical coil or that the second end region (107) of the coupling rod (103) carries an iron plate (105) and a planar coil (104) is arranged on the upper part (112) opposite the iron plate (105). [10] Mounting device (1; 101; 201) according to one of the preceding claims, characterized by that the sensor (48; 108; 208) is electrically connected to an evaluation device (6) in order to determine a curvature value for the inner surface (51) of the elastically deformable wall section (22) from an electrical sensor signal.

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