Optical displacement meter

Abstract

In a case where displacement is measured by pivoting a light projection and reception system, a height image and a received light image can be output. An optical displacement meter includes a light projection and reception module, a motor that pivots the light projection and reception module, a motor control unit that controls the motor and pivots the light projection and reception module to probe slit light, a rotation angle detection unit that obtains a rotation angle from the motor, a signal processing unit that calculates UV coordinates based on a light reception quantity distribution output by an image sensor and converts the UV coordinates and rotation angle to XYZ coordinates based on a predefined conversion condition, and a height image output unit that outputs a height image indicating the height of a workpiece on an XY plane based on the XYZ coordinates.

Description

Background of the invention 1. Technical field

[0001] The disclosure relates to an optical displacement meter that measures the displacement of a workpiece using light. Description of the state of the art

[0002] For example, an optical displacement meter is known that is configured to acquire an XZ sectional profile by irradiating a workpiece with a slit light traveling in the X direction and receiving reflected light reflected from a surface of the workpiece. It is possible to generate data of a three-dimensional shape of the workpiece by acquiring a plurality of XZ sectional profiles at different positions in the Y direction of the workpiece. However, in this case, equipment such as a conveyor belt for conveying the workpiece in the Y direction and a linear motion mechanism for moving a displacement meter body in the Y direction relative to the workpiece are required, and implementation can be difficult.

[0003] On the other hand, for example, as in EP3232152A and CN210664364Y, a structure is known in which a light projection system that projects slit light and a light reception system that receives reflected light (collectively referred to as a light projection and reception system) are rotatably configured, and the light projection and reception system is pivoted such that the slit light scans in the Y direction with respect to the workpiece.

[0004] In EP3232152A and CN210664364Y, it is possible to acquire a three-dimensional image by performing measurement while rotating a light projection and reception system. However, since a three-dimensional measurement area has an arc shape centered on a rotating shaft of the light projection and reception system, and changes in a height direction for each rotation angle of the light projection and reception system, for example, in a case where three-dimensional measurement is realized by rotating the light projection and reception system, it is difficult to designate a workpiece portion for determining a recording area as a target for recording a measurement result.

[0005] In the three-dimensional image obtained with the displacement meter of EP3232152A and CN210664364Y, it is not suitable for observing a point itself because a polygon is formed with each pixel as a vertex, and it is difficult to confirm the point in the three-dimensional image, for example, even if trying to confirm a point (invalid pixel) that cannot be measured. Summary of the invention

[0006] The disclosure has been made with this point in mind, and an object of the disclosure is to enable the output of a height image and a received light image when the displacement is measured by panning a light projection and reception system.

[0007] To achieve the above object, an optical displacement meter according to one embodiment includes a light projection and reception module having a light projection unit that applies slit light traveling in an X direction, an image sensor that receives light reflected from a workpiece by a plurality of pixels arranged two-dimensionally in a U direction corresponding to the X direction and a V direction orthogonal to the U direction, and outputs a received light image indicating a light reception amount distribution, and a support member that jointly supports the light projection unit and the image sensor, a motor that jointly pivots the light projection and reception module to reciprocate in two directions, clockwise or counterclockwise, around a rotary shaft of the support member, a motor control unit that controls the motor and pivots the light projection and reception module,to scan the slit light in a direction orthogonal to the X direction, a rotation angle reference unit that obtains a rotation angle through the motor, a signal processing unit that calculates UV coordinates based on the light reception amount distribution output from the image sensor and converts the UV coordinates and the rotation angle into XYZ coordinates based on a predetermined conversion condition, and a height image output unit that outputs a height image indicating a height of the workpiece on an XY plane based on the XYZ coordinates.

[0008] The image sensor can acquire a plurality of received light images while the light projection and reception module is panning in one of the two directions through the motor control unit. The signal processing unit can convert UV coordinates and rotation angles corresponding to the received light image of the plurality of received light images obtained while the light projection and reception module is panning in one direction into a plurality of XYZ coordinates based on the predetermined conversion condition. The height image output unit can output the height image based on the plurality of XYZ coordinates.

[0009] Furthermore, the optical displacement meter may include a rotation angle designation unit that receives a designation of a rotation angle, and a display processing unit that displays a received light image corresponding to the designated rotation angle on a display unit. When a change in the rotation angle is received, the motor control unit moves the light projection and reception module to the changed rotation angle, and the optical displacement meter may display the received light image obtained from the image sensor at the moved position on the display unit.

[0010] According to this configuration, for example, it is easy to output the height image and display the received light image to designate a workpiece portion for determining a shooting area as a target for shooting a measurement result, and it is easy to confirm the point (invalid pixel) that cannot be measured.

[0011] As described above, according to the disclosure, it is possible to output the height image and the received light image while using the optical displacement meter that swings the light projecting and receiving module at the time of measurement. Short description of the drawings Fig. 1 is a diagram for explaining an optical displacement meter according to a first embodiment of the invention at the time of operation; Fig. 2 is a perspective view of the optical displacement meter according to the first embodiment of the invention as seen from above; Fig. 3 is a perspective view of the optical displacement meter according to the first embodiment of the invention as seen from below; Fig. 4 is a plan view illustrating the interior of an upper space of the optical displacement meter according to the first embodiment of the invention; Fig. 5 is a plan view of a light projecting and receiving module of the optical displacement meter according to the first embodiment of the invention; Fig. 6 is a block diagram illustrating a configuration of the optical displacement meter according to the first embodiment of the invention; Fig. Figure 7 is a sectional view along the line VII-VII of the Fig. 2; Fig. Figure 8 is a sectional view along the line VIII-VIII of the Fig. 2; Fig. 9 is a diagram for explaining a method of displacement measurement; Fig. 10 is a diagram corresponding to the Fig. 5 according to a first modification of the first embodiment; Fig. 11 is a diagram corresponding to the Fig. 4 according to a second modification of the first embodiment; Fig. 12 is a diagram of an internal structure of an optical displacement meter according to the second modification of the first embodiment, viewed from below; Fig. 13 is a diagram corresponding to the Fig. 2 according to a second embodiment; Fig. 14 is a diagram of an internal structure of an optical displacement meter according to the second embodiment, viewed from above; Fig. 15 is a diagram corresponding to the Fig. 7 according to the second embodiment; Fig. 16 is a diagram corresponding to the Fig. 14 according to a modification of the second embodiment; Fig. 17 is a schematic diagram showing a recording range of a measurement result at the time of three-dimensional measurement; Fig. 18 is a diagram corresponding to the Fig. 6 according to a third embodiment; Fig. 19 is a diagram corresponding to the Fig. 17 for explaining a case where a recording area of ​​the image sensor is dynamically changed; Fig. 20 is a diagram showing an example of a setting screen; Fig. 21 is a diagram showing an example of a rectangular recording area; Fig. 22 is a diagram illustrating a case where YZ coordinates of the shooting area are converted into a V coordinate and a rotation angle; Fig. 23 is a diagram illustrating a state in which a rotation angle range is determined; Fig. 24 is a schematic diagram of an optical system; Fig. 25 is a diagram schematically showing a range in a case where the number of pixels in a V direction is continuously recorded; Fig. Fig. 26 is a diagram for explaining a case where the number of pixels in the V direction is changed; Fig. Fig. 27 is a diagram for explaining a difference in output time which changes in a case where parallel shifting of the recording area is performed; Fig. 28 is a diagram illustrating a case where a Z-direction height of the pickup area is changed after the parallel movement to reduce the difference in output time; Fig. 29 is a diagram showing an example of a setting screen showing a setting YZ section profile; Fig. 30 is a flowchart showing an example of a flow of the recording area setting processing; Fig. 31 is a diagram showing an example of a screen displaying a received light image and a height image; Fig. 32 is a flowchart showing an example of a flow of display processing of the received light image; Fig. 33 is a diagram illustrating a case where a housing has a simple rectangular parallelepiped shape; Fig. 34 is a diagram according to a first example in which a thickness of the housing is partially reduced; and Fig. 35 is a diagram according to a second example in which a thickness of the case is partially reduced. Detailed description

[0012] Embodiments are described in detail below with reference to the drawings. It should be noted that the following description of preferred embodiments is merely exemplary in nature and is not intended to limit the invention, its application, or its intended uses. (First embodiment)

[0013] The Fig. 1 is a diagram illustrating an optical displacement meter 1 according to a first embodiment of the invention at the time of operation. The optical displacement meter 1 is an example of an optical displacement meter of a section light method that measures a sectional profile of a workpiece W (measurement object) having a height in the Z direction using slit light S1 based on the principle of triangulation. Although an example in which an inspection system S includes the optical displacement meter 1, a controller 2, and a personal computer PC is described in the present embodiment, the invention is not limited to this configuration example, and, for example, a programmable logic controller (PLC) or the like may be incorporated into the inspection system S.

[0014] At the time of setting before operation of the inspection system S, for example, various inspection settings can be performed by the controller 2 and the personal computer PC. At the time of operation after the setting, the optical displacement meter 1 measures the displacement of the workpiece W at a predetermined time. Data indicative of a measurement result is transmitted from the optical displacement meter 1 to the controller 2 or the personal computer PC, and the inspection is performed based on the inspection setting. The data indicative of the measurement result of the optical displacement meter 1, an inspection result, and the like can be stored in the controller 2 or the personal computer PC.

[0015] At the time of operation, it is also possible to operate only the optical displacement meter 1 without using the controller 2 and the personal computer PC, and an operation mode is not limited to the Fig. 1. 1. Note that although the following description describes the inspection system S including the optical displacement meter 1, the invention is also applicable to a case where the inspection system S is operated only by the optical displacement meter 1, or to a case where the inspection system S is operated by a system in which the optical displacement meter 1 and the PLC are combined.

[0016] The inspection system S is a system that performs an inline inspection of the appearance of the workpiece W. In the inline appearance inspection, for example, the appearance inspection of the workpiece W is carried out sequentially at a location where a plurality of workpieces W are conveyed sequentially. As shown in the Fig. 1, an X direction, a Y direction, and a Z direction of the workpiece W are defined. The X direction and the Y direction are mutually orthogonal directions in the plan view of the workpiece W. The Z direction is a height direction of the workpiece W and is a direction orthogonal to the X direction and the Y direction. Although the X direction of the workpiece W can be referred to as the depth direction of the workpiece W and the Y direction of the workpiece W can be referred to as the width direction of the workpiece W, this definition is an example, and the X direction, Y direction, and Z direction of the workpiece W can be defined arbitrarily.

[0017] Since height data of the workpiece W can be acquired by the optical displacement meter 1, the appearance inspection includes dimensional inspection, shape inspection, defect inspection, and the like based on the height data. The workpiece W is not particularly limited, and examples include various components, elements, devices, instruments, and parts thereof. The workpiece W may also be referred to as a measurement object. After the workpiece W is conveyed into a measurable range of the optical displacement meter 1 by a conveying device (not shown), the displacement is measured by the optical displacement meter 1.

[0018] The optical displacement meter 1 is used, for example, in a state where it is fixed to a fixing member 5. The fixing member 5 is a part of a device installed in a factory or the like and is fixed so that it does not move relative to the workpiece W. Thus, the optical displacement meter 1 also does not move relative to the workpiece W. Although details will be described later, an internal projection and reception module 10 (in the Fig. 4) rotate about an axis parallel to the X direction even though the optical displacement meter 1 is attached to the fixing member 5, and thus the slit light S1 traveling in the X direction of the workpiece W is scanned by a light projection and reception module 10 in a direction orthogonal to the X direction of the workpiece W. As a result, reflected light S2 reflected at a plurality of locations in the Y direction on a surface W1 of the workpiece W can be received by the light projection and reception module 10. As described above, the surface W1 of the workpiece W can be scanned with the slit light S1 even when the light projection and reception module 10 is rotated about the axis parallel to the X direction, as in the case where the workpiece W or the optical displacement meter 1 is moved linearly.Since the optical displacement meter 1 scans the slit light S1 by rotating the light projection and reception module 10, it should be noted that a scanning direction of the slit light S1 is a direction orthogonal to the X direction on a YZ plane, which includes the Y direction. Note that in this specification, "rotation" refers to a reciprocating motion around a rotating shaft.

[0019] Signal processing is performed based on the light reception amount of the reflected light S2, making it possible to obtain a variety of cross-sectional profiles of the workpiece W at different rotation angles. Data (height data) of a three-dimensional shape of the workpiece W can be generated based on the obtained cross-sectional profile. Note that the cross-sectional profile is not necessarily parallel to an XZ plane because the slit light S1 rotates.

[0020] As described above, the light projection and reception module 10 provided inside the optical displacement meter 1 is rotatably adjusted, and therefore, it is possible to obtain the plurality of sectional profiles of the workpiece W at the different rotation angles without conveying the workpiece W in the Y direction and without moving the optical displacement meter 1 in the Y direction with respect to the workpiece W. Accordingly, devices such as a conveyor belt for conveying the workpiece W and a linear motion mechanism for moving the optical displacement meter 1 in the Y direction with respect to the workpiece W become unnecessary, and the introduction of an inspection process using the optical displacement meter 1 becomes easy.

[0021] Note that although the workpiece W may be set to be relatively movable with respect to the optical displacement meter 1, the plurality of sectional profiles may be obtained in a state where the workpiece W is stopped at the time of measurement. Furthermore, although the optical displacement meter 1 may be movable relative to the workpiece W, the plurality of sectional profiles may be obtained in a state where the optical displacement meter 1 is stopped at the time of measurement. The invention is not limited to a case where the optical displacement meter 1 is completely fixed, and may be movably supported with respect to the fixing member 5g, or may be attached to a robot arm or the like and moved to an arbitrary measurement location.

[0022] The Fig. Fig. 2 is a perspective view of the optical displacement meter 1 according to the first embodiment of the invention seen from above, and the Fig. Fig. 3 is a perspective view of the optical displacement meter 1 according to the first embodiment of the invention, viewed from below. As shown in each drawing, a left-right direction, a depth direction, and an up-down direction of the optical displacement meter 1 are designated, but are used to simplify the description and do not limit the posture of the optical displacement meter 1 at the time of operation. Since the optical displacement meter 1 is in the Fig. 1, the slit light S1 is emitted downward, and the reflected light S2 moves upward. In this operation mode, the left-right direction of the optical displacement meter 1 corresponds to the Y direction of the workpiece W, the up-down direction of the optical displacement meter 1 corresponds to the X direction of the workpiece W, and the depth direction of the optical displacement meter 1 corresponds to the Z direction of the workpiece W. Note that the optical displacement meter 1 can be installed so that the workpiece W is irradiated with the slit light S1 from the horizontal direction from the optical displacement meter 1, or the optical displacement meter 1 can be installed so that the workpiece W is irradiated with the slit light S1 downward from the optical displacement meter 1.There are no particular restrictions on the posture of the optical displacement meter 1 at the time of installation.

[0023] The Fig. Fig. 4 is a diagram showing an internal structure of the optical displacement meter 1. The optical displacement meter 1 includes a light projection and reception module 10 (also shown in the Fig. 5), a motor 20 (in the Fig. 7) for rotating the light projection and reception module 10, a motor control unit 30 (in the Fig. 8) and a housing 40. The light projection and reception module 10, the motor 20 and the motor control unit 30 are accommodated in the housing 40. As shown in the Fig. 6, in the first embodiment, a control unit 3 includes the motor control unit 30, a power supply unit 34 (described later), and a signal processing unit 32 (described later). It should be noted that the motor control unit 30 and the signal processing unit 32 in the Fig. 6 are shown separately for the sake of simplicity, but the engine control unit 30 and the signal processing unit 32 can be integral.

[0024] The light projection and reception module 10 includes a light projection unit 11 that emits the slit light S1 traveling in the X direction, a light collection unit 12 having a light receiving lens that collects the light S2 reflected from the workpiece W, a receiving unit 13 that receives the light collected by the light collection unit 12, and a support member 14 that jointly holds the light projection unit 11, the light collection unit 12, and the receiving unit 13.

[0025] As in the Fig. As shown in Fig. 6, the light projection unit 11 includes a laser light emitter (light source) 11a, an optical system 11b, a light source housing that houses the laser light emitter 11a and the optical system 11b, and a light projection control unit 11c that controls the laser light emitter 11a. The laser light emitter 11a is controlled by the light projection control unit 11c to emit a predetermined amount of laser light at a predetermined timing for a predetermined time. The light emitted from the laser light emitter 11a is incident on the optical system 11b. Although not shown, the optical system 11b includes a plurality of lenses, including, for example, a cylindrical lens, and irradiates the workpiece W with the slit light S1 by dispersing the incident laser light into a band. The light projection unit 11 has a shape elongated in an irradiation direction of the slit light S1.

[0026] To improve the light reception amount, the light collection unit 12 is configured as a lens unit including a plurality of large-diameter light-receiving lenses, and includes a light-receiving lens and a lens housing that houses the light-receiving lenses. Since such a plurality of large-diameter lenses are included and the size of the light collection unit is relatively large, the weight of the light collection unit 12 is greater than that of the light projection unit 11.

[0027] The recording unit 13 includes, for example, an image sensor 13a, such as a complementary MOS (CMOS), and a recording control unit 13b. The image sensor 13a is controlled by the recording control unit 13b and performs the recording at a predetermined time. An exposure time at the time of recording by the image sensor 13a can be controlled by the recording control unit 13b.

[0028] As in the Fig. 7 and Fig. 8, the support element 14 consists of a flat, plate-shaped element with high rigidity, for example a metal plate material. As shown in the Fig. As shown in Fig. 7, the support member 14 is fixed to a rotary shaft 50 forming part of the optical displacement meter 1, and is supported by the housing 40 so as to be rotatable about a rotational center line A, which is an axis of the rotary shaft 50. An extending direction of the support member 14 is a direction orthogonal to the rotational center line A.

[0029] The light projection unit 11, the light collection unit 12 and the recording unit 13 are fixed to an upper surface of the support member 14. In particular, in the plan view of the Fig. In the light projection and reception module 5 shown in FIG. 10, the light projection unit 11 is fixed to a left side portion of the support member 14 with respect to the rotation center line A, and the light collection unit 12 and the reception unit 13 are fixed to opposite sides thereof. Consequently, the light projection unit 11 and the light collection unit 12 are provided at intervals in a radial direction (Y direction or Z direction) of the rotation shaft 50.

[0030] The light projection unit 11 is arranged so that the irradiation direction of the slit light S1 is directed in the Z direction. The light collection unit 12 is arranged so that an optical axis extends along an incident direction of the reflected light S2 at a portion on a front side (workpiece W side) of the support member 14. Accordingly, although both the light projection unit 11 and the light collection unit 12 are directed in the Z direction, an optical axis of the optical system 11b of the light projection unit 11 and an optical axis of the light collection unit 12 (an optical axis of the light receiving lens) are in a relationship where they intersect at a position distant in the Z direction from the light projection and reception module 10.Since a distance in the left-right direction between the light projection unit 11 and the light collection unit 12 and the relationship between the optical axis of the optical system 11b of the light projection unit 11 and the optical axis of the light collection unit 12 can be changed according to an installation distance of the optical displacement meter 1 with respect to the workpiece W, the measurement accuracy, and the like, the illustrated example is merely an example.

[0031] The greater the distance between the light-collecting unit 12 and the rotating shaft, the greater the moment of inertia of the light-collecting unit 12 due to rotation. When switching the rotation direction of the light-projecting and receiving module 10, the light-projecting and receiving module 10 must be temporarily stopped. At this time, the greater the moment of inertia, the more energy is required to decelerate the rotation of the light-projecting and receiving module 10. Thus, the distance and time required to stop the rotation increase.Therefore, the light projecting and receiving module 10 further includes a light receiving side reflective member 15 fixed to the support member 14. This not only makes it possible to make the size of the light projecting and receiving module 10 compact, but also reduces the moment of inertia due to rotation. Thus, a measurement interval is shortened. The light receiving side reflective member 15 is made of, for example, a mirror, and the reflected light S2 emitted from the light collecting unit 12 is folded back to the light projecting unit 11. Thus, a distance between the receiving unit 13 or the light collecting unit 12 and the rotary shaft 50 of the light projecting and receiving module 10 on the YZ plane is shortened.A folding direction may, for example, be a direction toward a center position of the housing 40 in the Y direction. The YZ plane is a plane including both a straight line extending in the Y direction and a straight line extending in the Z direction, and is a plane orthogonal to the X direction.

[0032] Specifically, the light-receiving-side reflective member 15 is positioned at a right end portion of the support member 14 on a back side of the light-collecting unit 12, is arranged on an optical path between the pickup unit 13 and the light-collecting unit 12 on the YZ plane, and reflects the light collected by the light-collecting unit 12 toward the pickup unit 13. Furthermore, the rotating shaft 50 of the light-projecting and receiving module 10 is arranged between the light-receiving-side reflective member 15 and the light-projecting unit 11 on the YZ plane.

[0033] The light-receiving-side reflective element 15 is arranged on the optical path between the recording unit 13 and the light-collecting unit 12, and thus the light can be reflected after being collected by the light-collecting unit 12. As a result, an area of ​​the light-receiving-side reflective element 15 can be reduced. Note that a position of the light-receiving-side reflective element 15 may not be on the optical path between the recording unit 13 and the light-collecting unit 12, and the light-collecting unit 12 may be arranged on an optical path between the light-receiving-side reflective element 15 and the recording unit 13, as in a first modification (shown in FIG. Fig. 10), which will be described later.

[0034] The light-receiving-side reflective element 15 protrudes upward from the upper surface of the support member 14. Furthermore, an extension direction of the light-receiving-side reflective element 15 is the depth direction. An emission direction of the reflected light S2 incident on the light-receiving-side reflective element 15 can be adjusted by an installation angle of the light-receiving-side reflective element 15, and the emission direction of the reflected light S2 is directed toward a light-receiving surface of the image sensor 13a.

[0035] A positional relationship between the image sensor 13a of the pickup unit 13 and the optical axis of the light collection unit 12 is set to have a Scheimpflug relationship in which the light-receiving surface of the image sensor 13a is inclined with respect to the optical axis of the light collection unit 12. The optical system that satisfies the Scheimpflug relationship may be referred to as a Scheimpflug optical system. In this embodiment, the light projection unit 11, the light collection unit 12, and the pickup unit 13 are collectively supported by the support member 14 to have the Scheimpflug relationship, thus constituting the light projection and reception module 10. With the Scheimpflug relationship, a profile image focused on the light reflected from the workpiece W can be acquired because the slit light is focused along a light projection axis of the light projection unit 11.Thus, the measurement accuracy of the three-dimensional shape data of the workpiece W is improved, and as a result, a high-accuracy profile can be obtained.

[0036] Even in a case where the light projection and reception module 10 is rotated around the rotation center line A, the relative positional relationship between the light projection unit 11, the light collection unit 12, the recording unit 13, and the light-receiving-side reflective element 15 does not change. Thus, the Scheimpflug relationship is maintained regardless of the rotation angle of the light projection and reception module 10.

[0037] The recording unit 13 includes a cover glass 13c. The cover glass 13c is shaped to cover the light-receiving surface of the image sensor 13a and is fixed to the image sensor 13a. The cover glass 13c is composed of a light-transmitting member capable of transmitting the reflected light S2 emitted from the light-receiving-side reflective element 15. The reflected light S2 transmitted through the cover glass 13c forms an image on the light-receiving surface of the image sensor 13a.

[0038] The rotation shaft 50 of the light projection and reception module 10 is arranged to substantially coincide with a center of gravity position of the light projection and reception module 10 on the YZ plane. That is, the light projection and reception module 10 includes, in addition to the support member 14, the light projection unit 11, the light collection unit 12, the pickup unit 13, and the light reception-side reflective member 15, and when the center of gravity position of the light projection and reception module 10 is measured or calculated in a state where the light projection unit 11, the light collection unit 12, the pickup unit 13, and the light reception-side reflective member 15 are fixed to the support member 14, the center of gravity position substantially coincides with the rotation center line A.In other words, positions of the rotary shaft 50 in the Y direction and the Z direction with respect to the support member 14 are set so that the center of gravity position of the light projecting and receiving module 10 becomes a rotation center. The support member 14 is fixed to the rotary shaft 50 by a plurality of fastening members (not shown) or the like, and the support member 14 and the rotary shaft 50 do not rotate relative to each other. The center of gravity position of the light projecting and receiving module 10 substantially coincides with the rotation center line A, and thus the moment of inertia due to the rotation of the light projecting and receiving module 10 is reduced. In addition, a load on the motor 20 caused by, for example, vibration is suppressed, and a reduction in the rotation speed of the light projecting and receiving module 10 is also suppressed.The position of the center of gravity of the light projection and reception module 10 and the rotation centerline A may not exactly coincide with each other, and, for example, a deviation within a permissible range in terms of manufacturing tolerance will not cause any problems. Furthermore, even if the center of gravity position of the light projection and reception module 10 and the rotation centerline A deviate slightly from each other, it can be considered that the center of gravity position and the rotation centerline are substantially consistent.For example, since the moment of inertia of the light projection and reception module 10 can be sufficiently reduced, the load on the motor 20 caused by vibration or the like can be sufficiently suppressed, and the reduction in the rotation speed of the light projection and reception module 10 can also be suppressed. If such an effect can be achieved, a slight deviation between the center of gravity position of the light projection and reception module and the rotation center line A is allowable, and it can be said that the center of gravity position of the light projection and reception module 10 and the rotation center line A are substantially consistent.

[0039] As described above, a weight is increased as a diameter of the light collecting unit 12 increases. Therefore, in some cases, it is conceivable that the center of gravity position of the light projecting and receiving module 10 is too close to the light collecting unit 12, and it becomes difficult to make the center of gravity position and the rotation center line A close to each other. In such a case, as shown in the Fig. 5, a weight unit 16 may be provided on the light projection unit 11 side in the light projection and reception module 10. As a result, the center of gravity of the light projection and reception module 10 may be positioned at an intermediate portion between the light projection unit 11 and the light collection unit 12. The weight unit 16 is arranged on a side opposite the light collection unit 12 across the rotation center line A. The weight unit 16 may be fixed to the support member 14 or to the light projection unit 11. The number of weight units 16 is not limited to one and may be multiple.

[0040] The closer the rotation shaft of the light projection and reception module 10 and the center of gravity position are to each other, the more stable the rotation is, and the load on the rotation shaft 50 can be reduced. However, it is assumed that the weight of the light projection unit 11 is different from the weight of the light collection unit 12. With this configuration, it is possible to stabilize the rotation and suppress the load on the rotation shaft 50 because the weight unit is provided at a position closer to the light projection unit 11 than to the light collection unit 12 in the light projection and reception module 10, thereby suppressing the deviation between the center of gravity position of the light projection and reception module 10 and the rotation shaft 50 due to the weight difference.

[0041] Without the weight unit 16, a material of the light source housing of the light projection unit 11 may be a material with a higher density than a material of the lens housing of the light collection unit 12. For example, the support member 14 or the large-volume lens housing may be made of a relatively low-density material, such as aluminum, and the light source housing may be made of a relatively high-density material, such as zinc or stainless steel (SUS). As a result, since the light projection unit 11 can be set to be heavy, the center of gravity position of the light projection and reception module 10 can be positioned in the intermediate portion between the light projection unit 11 and the light collection unit 12.Note that a material of a housing of the light projection unit 11 may be a material having a higher density than a material of a housing of the light collection unit 12, and the weight unit 16 may be provided on the light projection unit 11 side in the light projection and reception module 10. Furthermore, a volume of the light source housing is configured to be smaller than a volume of the lens housing.

[0042] As in the Fig. As shown in Figure 7, the housing 40 is a member for accommodating the light projection and reception module 10, the motor 20, and the motor control unit 30, and has a two-tiered structure. That is, the housing 40 includes an upper housing component unit 41 constituting an upper portion and a lower housing component unit 42 constituting a lower portion. Furthermore, the two-tiered structure may also be referred to as a two-layered structure, and in this case, the upper housing component unit 41 is a first layer, and the lower housing component unit 42 is a second layer.

[0043] The upper housing component unit 41 and the lower housing component unit 42 may be formed integrally or as separate elements. In the present embodiment, a case where the upper housing component unit 41 and the lower housing component unit 42 are formed as separate elements will be described. In this case, the housing 40 may be formed by coupling the upper housing component unit 41 and the lower housing component unit 42, for example, by using a fastener (not shown) or the like.

[0044] As in the Fig. As shown in FIG. 7, the upper housing constituent unit 41 includes an upper peripheral wall 43 and an upper wall 44. The upper wall 44 extends along the YZ plane. The upper peripheral wall 43 extends from a peripheral edge portion of the upper wall 44 toward the lower housing constituent unit 42. A space formed within the upper housing constituent unit 41 is an upper space R1. The upper space R1 is closed by the lower housing constituent unit 42, and the upper space R1 is sealed.

[0045] As in the Fig. 2 and Fig. 4, a light projection window 43a and a light reception window 43b are provided in a front portion of the upper peripheral wall 43. The light projection window 43a and the light reception window 43b are formed of an optically transparent member. As shown in Fig. As shown in Figure 4, the light projection window 43a is arranged to face a surface of the light projection unit 11 irradiated with the slit light S1. Even when the light projection and reception module 10 rotates, the size and position of the light projection window 43a are adjusted so that the slit light S1 can be emitted from the light projection window 43a as long as the rotation angle of the light projection and reception module 10 is within a predetermined angle range to be described later.

[0046] Furthermore, the light receiving window 43b is arranged to face a light incident surface of the light collecting unit 12. Even when the light projecting and receiving module 10 rotates, the size and position of the light receiving window 43b are adjusted so that the reflected light S2 from the light receiving window 43b can be incident on the light collecting unit 12, as long as the rotation angle of the light projecting and receiving module 10 is within a predetermined angle range to be described later.

[0047] As in the Fig. As shown in Fig. 7, the lower housing constituent unit 42 includes a plate portion 45, a lower peripheral wall 46 extending downward from the plate portion 45, and a lid member 47. The plate portion 45 is a portion extending along the YZ plane and closing a lower open portion of the upper housing constituent unit 41. The lid member 47 is attached to a lower end portion of the lower peripheral wall 46. A space formed inside the lower housing constituent unit 42 is a lower space R2. The lower space R2 is sealed by the lid member 47. In short, the housing 40 has a structure for sealing the interior. The sealing structure is a structure that prevents dust and dirt from the outside from entering the interior of the housing 40 and may be referred to, for example, as a dustproof structure.It should be noted that the housing 40 may not be completely sealed and, for example, there may be a gap through which some air may enter and exit.

[0048] As in the Fig. 3 and Fig. As shown in Fig. 7, recesses 46a are formed on the left and right sides of the lower peripheral wall 46 of the lower housing constituent unit 42. When viewed along the rotating shaft of the light projection and reception module 10, a width of the upper space R1 for accommodating the light projection and reception module is formed larger than a width of the lower space R2 for accommodating the motor 20, and the recesses 46a are formed in an outer wall of the housing 40 by a step between the upper space R1 and the lower space R2. The recesses 46a can be used, for example, as portions that an operator can grip with his fingers when installing the optical displacement meter 1. Note that the recesses 46a can be provided as needed. With this configuration, it is possible to provide a handle that contributes to improving usability without creating a dead space within the housing 40.

[0049] As in the Fig. As shown in Figure 7, the motor 20 for co-rotating the light projection and reception module 10 is housed in the lower space R2 (second space). A central axis of the motor 20 housed in the lower space R2 coincides with the axis of the rotary shaft 50 and extends in the up-down direction. On the other hand, the light projection and reception module 10 is housed in the upper space R1 (first space). Since the upper space R1 and the lower space R2 are aligned with the rotary shaft of the light projection and reception module 10 (the central axis of the motor 20), the light projection and reception module 10 housed in the upper space R1 is arranged in the central axis rotation of the motor 20 with respect to the motor 20 housed in the lower space R2. In other words, the optical displacement meter 1 has a multi-stage structure in which the light projection and reception module 10 is arranged in an upper stage and the motor 20 is arranged in a lower stage.

[0050] Since the light projection and reception module 10 is arranged to be aligned with the motor 20 in the central axis direction, it is less likely to be influenced by the motor 20 when adjusting a positional relationship between the light projection unit 11 and the light collection unit 12 of the light projection and reception module 10. Accordingly, for example, in a case where the installation distance is relatively short, it is also possible to design in consideration of the fact that a distance between the light projection unit 11 and the light collection unit 12 cannot be adjusted to be large.

[0051] The optical displacement meter 1 further includes a bearing 51 for rotatably supporting the rotating shaft 50 of the light projection and reception module 10. As the weight of the light projection and reception module 10 increases as described above, for example, when the optical displacement meter 1 is used in the posture shown in the figure, a moment load is generated on the rotating shaft 50 due to the weight of the light projection and reception module 10. Specifically, the moment load acts on the rotating shaft 50 in a direction in which the axis is inclined with respect to a horizontal plane due to a difference between a portion of the rotating shaft 50 supported by the bearing 51 and the center of gravity position of the light projection and reception module 10.Particularly in the case of the two-stage structure described above, since the upper housing constituent unit 41 and the lower housing constituent unit 42 are aligned toward the center axis of the motor 20 (the rotating shaft of the light projection and reception module 10), the difference between the portion of the rotating shaft 50 supported by the bearing 51 and the center of gravity position of the light projection and reception module 10 tends to be relatively large. On the other hand, the bearing 51 of the present embodiment is configured to be able to withstand the moment load generated by the difference between the portion of the rotating shaft 50 supported by the bearing 51 and the center of gravity position of the light projection and reception module 10.

[0052] For example, as the bearing 51 capable of withstanding the moment load, a crossed roller bearing may be used in which a plurality of rollers 51c are arranged between an annular outer ring member 51a and an annular inner ring member 51b, and the axes of the circumferentially adjacent rollers 51c are orthogonal to each other. That is, a step portion 45a, to which the outer ring member 51a is mounted, is annularly formed on the plate portion 45 of the lower housing constituent unit 42. The outer ring member 51a is fixed to the plate portion 45 in a state mounted to the step portion 45a. On the other hand, a mounting portion 50a, to which the inner ring member 51b is mounted, is formed in an upper portion of the rotary shaft 50. The inner ring member 51b is fixed in a state mounted to the mounting portion 50a.It should be noted that the inner ring element 51b may be fixed to the support element 14 of the light projection and reception module 10.

[0053] The crossed roller bearing is used as the bearing 51, and thus the roller 51c comes into line contact with the outer ring member 51a and the inner ring member 51b. This significantly improves rigidity compared to a ball bearing. Thus, not only a load in the radial direction (radial load) of the rotating shaft 50 but also a load in the axial direction (thrust load) can be accommodated, while a bearing structure in the axial direction is thin and compact, and rigidity against moment load can be improved. Thus, smooth rotation can be realized regardless of the position of the optical displacement meter 1 at the time of operation.

[0054] The bearing 51 may be integrated into the motor 20. Furthermore, the bearing 51 may be a bearing other than the crossed roller bearing. For example, in a case where a bearing other than the crossed roller bearing is used, two or more ball bearings are arranged at intervals in the axial direction of the rotating shaft 50. This provides a bearing structure capable of supporting the moment load. In a case where two or more ball bearings are used, one ball bearing may be supported on the plate portion 45 of the lower housing constituent unit 42, and the other ball bearing may be integrated into the motor 20.

[0055] The optical displacement meter 1 further includes an encoder 52 for detecting a rotation angle of the rotary shaft 50, that is, the rotation angle of the light projection and reception module 10. The encoder 52 is an optical encoder. Although not shown, an optical encoder is known in the related art and includes, for example, a rotary plate fixed to a lower end portion of the rotary shaft 50 and rotating together with the rotary shaft 50, and a fixing plate fixed to the housing 40. The optical encoder is configured to receive light emitted from a light transmitter through a light receiver through slits formed at equal intervals in the rotary plate and the fixing plate, and convert the received light amount into an electrical signal to generate and output a pulse.

[0056] The encoder 52 is an optical encoder, and therefore, the detection accuracy of the rotation angle is improved compared to a magnetic encoder, but the encoder is susceptible to dust or the like. On the other hand, the encoder 52 is housed in the housing 40 in the sealed lower space R2 as described above, and therefore, dust or the like is prevented from adhering to the encoder 52. For example, even if dust or dirt enters the housing 40 when a position and posture of the receiving unit 13 are adjusted in the upper space R1 in which the light projection and reception module 10 is housed, the space in which the encoder 52 is housed is sealed to prevent dust or dirt from entering the upper space R1, in which the light projection and reception module 10 is housed and rotated, into the lower space R2 in which the encoder 52 is housed.Therefore, it is easy to use an optical encoder which has high accuracy but is easily affected by dirt and dust, and high-accuracy measurements can be made.

[0057] The motor 20 is a direct drive motor that directly drives the light projection and reception module 10. Direct drive is a drive mode in which no speed reduction mechanism is arranged between the motor 20 and a driven body. Note that, although described later, the invention is not limited to the direct drive motor.

[0058] The motor 20 includes a stator 21 with a coil and a rotor 22 with a permanent magnet. The rotor 22 is fixed with respect to an outer peripheral portion of the rotating shaft 50 between the bearing 51 and the encoder 52. The stator 21 is fixed to the lower housing component unit 42 and arranged to surround the rotor 22.

[0059] The motor control unit 30 includes, for example, a microcomputer, a ROM, a RAM, and the like, and operates according to a predetermined program. Specifically, the motor control unit 30 can set the speed of the motor 20 to a desired speed and set the rotation angle of the motor 20 to a desired angle by controlling a current flowing through the stator 21. The encoder 52 is connected to the motor control unit 30. The motor control unit 30 can calculate a current rotation angle of the light projection and reception module 10 based on a pulse signal output from the encoder 52.

[0060] When a scanning start position, a scanning end position, a scanning range, and the like of the slit light S1 with respect to the workpiece W are set by the inspection setting, a rotation start position, a rotation end position, a rotation angle, and the like of the light projection and reception module 10 can be calculated according to the set scanning start position, scanning end position, and scanning range. The motor control unit 30 controls the motor 20 based on the calculation result and rotates the light projection and reception module 10 in a state where the Scheimpflug relationship is maintained in the housing 40 to scan the slit light S1 in the direction orthogonal to the X direction.

[0061] Since the light projection and reception module 10 is housed in the upper space R1 of the casing 40, a portion of the light projection and reception module 10 may come into contact with an inner wall of the casing 40 depending on the rotation angle of the light projection and reception module 10. On the other hand, in the present embodiment, a rotation angle range of the light projection and reception module 10 rotating at the time of operation of the optical displacement meter 1, that is, at the time of measurement, is set to a predetermined angle range, which prevents the light projection and reception module 10 from coming into contact with the inner wall of the casing 40.That is, in a case where the light projection and reception module 10 is assumed to rotate to a first rotation angle, the light projection and reception module 10 has a dimension that comes into contact with the inner wall of the housing 40 on the YZ plane orthogonal to the X direction, but the rotation angle range of the light projection and reception module 10 rotating at the time of operation of the optical displacement meter 1 is set to a predetermined angle range smaller than the first rotation angle to prevent the light projection and reception module 10 from contacting the inner wall of the housing 40. With this configuration, the housing 40 can be easily downsized because the housing 40 can be designed based on an angle range in which the light projection and reception module 10 needs to be rotated.

[0062] Examples of a method for setting the rotation angle range of the light projection and reception module 10 to a predetermined angle range include a method for mechanically realizing the rotation angle range and a method for realizing the rotation angle range by software. In the present embodiment, as the method for mechanically realizing the rotation angle range, Fig. 4, a first stopper 61 and a second stopper 62, which are examples of mechanical parts, are provided inside the housing 40. In this example, the first stopper 61 and the second stopper 62 are provided to protrude upward from the plate portion 45. When the light projection and reception module 10 rotates in the direction of an arrow B about the rotation center line A, the light projection and reception module 10 abuts the first stopper 61 before a part of the light projection and reception module 10 abuts the inner wall of the housing 40, and the light projection and reception module 10 is prevented from rotating further in the direction of the arrow B.In addition, when the light projection and reception module 10 rotates in the direction of an arrow C around the rotation center line A, the light projection and reception module 10 abuts the second stopper 62 before a part of the light projection and reception module 10 abuts the inner wall of the housing 40, and the light projection and reception module 10 is prevented from further rotating in the direction of the arrow C. That is, the first stopper 61 and the second stopper 62, which prevent the light projection and reception module 10 from rotating outside the predetermined angular range at the time of measurement, are provided inside the housing 40.

[0063] The first stopper 61 and the second stopper 62 may be made of an elastic member such as rubber or thermoplastic elastomer. Furthermore, the first stopper 61 and the second stopper 62 may be made of metal, and an elastic member may be provided at a portion of the support member 14 where the first stopper 61 and the second stopper 62 abut. This makes it possible to reduce the noise generated when the light projection and reception module 10 abuts the first stopper 61 and the second stopper 62.

[0064] Furthermore, the support member 14 preferably abuts the first stopper 61 and the second stopper 62. This is because the optical axis may deviate due to an impact at the time of contact when the light projection unit 11, the light collection unit 12, and the like abut the first stopper 61 and the second stopper 62. Furthermore, the first stopper 61 and the second stopper 62 may be provided on the upper peripheral wall 43. Furthermore, only one of the first stopper 61 and the second stopper 62 may be provided.

[0065] Next, a method by software will be described. That is, the motor control unit 30 executes contact avoidance control, and thus it is also possible to prevent the light projection and reception module 10 from coming into contact with the inner wall of the housing 40. The motor control unit 30 controls the motor 20 based on the rotation angle obtained by calculating the pulse signal output from the encoder 52, so as to rotate the light projection and reception module 10 within a predetermined angle range at the time of measurement. This control is contact avoidance control. The contact avoidance control is executed, and thus the light projection and reception module 10 can be prevented from coming into contact with the inner wall of the housing 40 without providing the stoppers 61 and 62.Note that the stoppers 61 and 62 may also be provided in a case where the contact avoidance control is executed.

[0066] The light projection and reception module 10 must not come into contact with the inner wall of the housing 40 at the time of measurement. Since the light projection and reception module 10 may come into contact with the inner wall of the housing 40 during non-measurement times, such as during maintenance or various adjustments, the motor control unit 30 may be configured to execute the contact avoidance control only at the time of measurement.

[0067] As in the Fig. 8, a disk receiving space (third space) R3 is provided in the lower housing component unit 42. In the Fig. 4, the plate receiving space R3 is shifted from a center of the housing 40 to a rear side and accordingly on a rear side of the motor 20 (in the Fig. 7). In addition, since the disk accommodating space R3 is positioned below the upper space R1 in which the light projecting and receiving module 10 is housed, the disk accommodating space R3 is a different space from the upper space R1 and is also a different space from the lower space R2. The disk accommodating space R3 is located at a different position than the upper space R1 with respect to a rotation shaft direction of the light projecting and receiving module 10 and is located at the same position as the lower space R2 in which the motor 20 is housed. Viewed along the rotation shaft of the light projecting and receiving module 10, the upper space R1 and the lower space R2 are located at positions overlapping with the rotation shaft, while the disk accommodating space R3 is located at positions not overlapping with the rotation shaft.For example, in a case where the size of the light projection and reception module 10 is larger than the size of the motor 20, an outer shape of the housing 40 can be set to be more compact by adopting the two-stage structure in which the upper space R1 for accommodating the light projection and reception module 10 is a first stage, and the lower space R2 for accommodating the motor 20 and the plate accommodating space R3 for accommodating the control unit 30 are second stages.

[0068] As in the Fig. As shown in Figure 8, the disk storage space R3 accommodates a motor control board 31 on which the motor control unit 30 is implemented, a signal processing board 33 on which the signal processing unit 32 is implemented, and a power supply board 35 on which the power supply unit 34 is implemented. Mounted on the motor control board 31 and the signal processing board 33 are a processor such as a central processing unit (CPU), a digital signal processor (DSP), or a field-programmable gate array (FPGA) that functions as the motor control unit 30 and the signal processing unit 32, and a storage element (not shown) such as a random access memory (RAM) or a read-only memory (ROM) for storing a program executed by the processor. Each of the boards 31, 33, and 35 is fixed to the lower case constituent unit 42.Since the motor control unit 30 and the signal processing unit 32 are housed in the plate housing space R3, which is different from the upper space R1, it is possible to thermally separate the light projection unit 11, which is particularly prone to heat generation, from the motor control unit 30 and the signal processing unit 32, and it is possible to stabilize the operation of the motor control unit 30 and the signal processing unit 32. Note that the arrangement of the control unit 3 is not limited to the above example, and for example, the signal processing unit 32 may be housed inside the casing 40, while the motor control unit 30 may be arranged outside the casing 40.

[0069] Since the reflected light S2 is incident from the front of the housing 40, the motor control unit 30, the signal processing unit 32, and the power supply unit 34, which are housed on the rear side of the housing 40, are arranged on the opposite side to the light projection and reception module 10 from the side where the reflected light S2 is incident. This can prevent the motor control unit 30, the signal processing unit 32, and the power supply unit 34 from interfering with the displacement measurement. Furthermore, the motor control unit 30, the signal processing unit 32, and the power supply unit 34 are arranged adjacent to the light projection and reception module 10 in the Z direction with the Z direction as a reference. Furthermore, since the plate accommodation space R3 is sealed by the lid member 47, it is possible to prevent dust and the like from adhering to each of the plates 31, 33, and 35.

[0070] The signal processing plate 33 is positioned on top, the motor control plate 31 is positioned below the signal processing plate 33, and the power supply plate 35 is positioned below the motor control plate 31. The signal processing plate 33 positioned on top is closest to the light projection and reception module 10, and the signal processing plate 33 is positioned below the support member 14 of the light projection and reception module 10. As a result, the light projection and reception module 10 does not come into contact with the signal processing plate 33 when rotating within the predetermined angular range. That is, the motor control unit 30, the signal processing unit 32, and the power supply unit 34 are all arranged to avoid contact with the light projection and reception module 10 rotating at the time of measurement.

[0071] The power supply unit 34 is a unit that supplies power to the light projection unit 11, the recording unit 13, the motor control unit 30, the signal processing unit 32, and the like. Although the power supply unit 34, the motor control unit 30, and the signal processing unit 32 are implemented on different boards in the present embodiment, the invention is not limited to this, and two or more of them may be implemented integrally and on one board.

[0072] The signal processing unit 32 includes, for example, a microcomputer, a ROM, a RAM, and the like, and is a unit that operates according to a predetermined program and generates cutting profile data of the workpiece W based on the light reception amount of the pickup unit 13. The plates 31, 33, and 35, the light projection unit 11, and the pickup unit 13 are connected by wiring shown in the Fig. 4 is indicated by the reference numeral 70. The wiring 70 is flexible and configured such that it does not affect the rotation of the light projection and reception module 10.

[0073] As in the Fig. As shown in Figure 9, the image sensor 13a of the pickup unit 13 includes a plurality of pixels arranged two-dimensionally in a U direction corresponding to the X direction and a V direction orthogonal to the U direction. The signal processing unit 32 acquires a luminance value (amount of light reception) of each pixel included in the image sensor 13a and obtains an approximate curve of a luminance value change. The signal processing unit 32 calculates a peak position in the V direction of each pixel column in the obtained approximate curve and obtains the calculated peak position as the displacement of the workpiece W.

[0074] The signal processing unit 32 performs the above-described calculation of the peak position several times during the rotation of the light projection and reception module 10. The signal processing unit 32 associates the obtained peak position with the rotation angle of the light projection and reception module 10 when the peak position is obtained, and stores the peak position and its rotation angle as measurement data. Since the rotation angle and the UV coordinates of the light projection and reception module 10 correspond to the XYZ coordinates of the workpiece, the sectional profile data of the workpiece W at a desired rotation angle can be generated based on the measurement data. Furthermore, multiple sectional profiles of the workpiece W at different rotation angles are obtained, and thus the signal processing unit 32 can generate the data of the three-dimensional shape of the workpiece W. (First modification of the first embodiment)

[0075] The Fig. 10 illustrates a light projection and reception module 10 according to a first modification of the first embodiment. The light projection and reception module 10 of the first modification differs from the light projection and reception module of the above embodiment in the positions of the light projection unit 11, the light collection unit 12, the pickup unit 13, and the light-receiving-side reflective element 15. In particular, the rotation shaft 50 of the light projection and reception module 10 is arranged at a position overlapping with the light collection unit 12 on the YZ plane. That is, as described above, although it is desirable to reduce the moment of inertia due to the rotation of the light projection and reception module 10 as much as possible, the weight of the light projection and reception module 10 may increase if the rotational speed indicated by a virtual line in the Fig. 5 is provided, and this may be undesirable. Therefore, as a method for reducing the moment of inertia due to the rotation of the light projecting and receiving module 10 without providing the weight unit 16, it is possible to adopt a method in which the light collecting unit 12 having a large weight and the rotary shaft 50 of the light projecting and receiving module 10 overlap each other in the YZ plane. As a result, at least a portion of the light collecting unit 12 is arranged on an extension line of the rotary shaft 50 of the light projecting and receiving module 10. Note that the rotary shaft 50 may not completely overlap the light collecting unit 12, and at least a portion of the rotary shaft 50 and at least a portion of the light collecting unit 12 may overlap each other when viewed from the direction of the rotation center line A.As a result, the weight unit 16 can be set to be unnecessary, or the weight unit 16 can be set to be light.

[0076] Furthermore, in the first modification, the pickup unit 13 and the light-receiving-side reflective element 15 are arranged to sandwich the light-collecting unit 12. Therefore, the light-collecting unit 12 of the first modification is arranged on the optical path between the light-receiving-side reflective element 15 and the pickup unit 13 on the YZ plane, and collects the light reflected by the light-receiving-side reflective element 15 to be incident on the pickup unit 13.

[0077] Furthermore, the light projection and reception module 10 of the first modification includes a light projection-side reflecting member 17. That is, the light projection unit 11 of the first modification is arranged so that the slit light S1 emitted from the optical system 11b is directed toward a left rear side. As a result, the light projection unit 11 can be located near the rotation center line A, and the moment of inertia due to the rotation of the light projection and reception module 10 can be further reduced. However, the workpiece W is positioned on the opposite side to the slit light S1 emitted from the optical system 11b. To cope with this, the light projection-side reflecting member 17 is arranged to reflect the slit light S1 emitted from the optical system 11b of the light projection unit 11 toward the workpiece W.The light projection side reflecting member 17 is fixed to the support member 14 or the light projection unit 11, and the relative positional relationship with respect to the light projection unit 11 does not change even if the light projection and reception module 10 rotates. (Second modification of the first embodiment)

[0078] The Fig. 11 and Fig. 12 illustrate an optical displacement meter 1 according to a second modification of the first embodiment. Fig. 11 is a diagram of an internal structure of the optical displacement meter 1 viewed from above, and the Fig. 12 is a diagram of the internal structure of the optical displacement meter 1 viewed from below.

[0079] In the optical displacement meter 1 of the second modification, the motor 20 is configured to rotate the light projection and reception module 10 via the speed reduction mechanism 25 instead of the direct drive motor. As shown in the Fig. 11, the motor 20 is housed together with the light projection and reception module 10 in the upper space R1. As shown in the Fig. As shown in Figure 12, an output shaft 20a of the motor 20 penetrates downward through the plate portion 45 and reaches the lower space R2. Furthermore, a driven shaft 10a fixed to the light projection and reception module 10 also penetrates downward through the plate portion 45 and reaches the lower space R2.

[0080] The speed reduction mechanism 25 is housed in the lower space R2 and includes a drive pulley 25a fixed to the output shaft 20a of the motor 20, a driven pulley 25b fixed to the driven shaft 10a, and a drive belt 25c wound around the drive pulley 25a and the driven pulley 25b. The drive pulley 25a has a smaller diameter than the driven pulley 25b. The drive belt 25c is a toothed belt.

[0081] In the second modification, the drive pulley 25a rotates when the output shaft 20a of the motor 20 housed in the upper space R1 rotates, and the rotational force of the drive pulley 25a is transmitted to the driven pulley 25b via the drive belt 25c. Since the driving force transmitted to the driven pulley 25b is transmitted to the driven shaft 10a, the light projection and reception module 10 can be rotated by the motor 20. In the case of the second modification, the driven shaft 10a is the rotating shaft of the light projection and reception module 10.

[0082] Note that the speed reduction mechanism 25 is not limited to the combination of pulleys 25a and 25b and drive belt 25c, and may include, for example, a combination of a drive gear, a driven gear, and a timing chain, or a combination of a plurality of gears. For example, a DC motor, a stepper motor, a servo motor, or the like may be used as a type of motor 20. (Second embodiment)

[0083] The Fig. 13 to 15 illustrate an optical displacement meter 1 according to a second embodiment of the invention. The second embodiment differs from the first embodiment in the structure of a housing 400, a positional relationship between the motor 20 and a light projection and reception module 100, and the like. Hereinafter, the same portions as those in the first embodiment are denoted by the same reference numerals, their descriptions are omitted, and different portions are described in detail.

[0084] As in the Fig. 13 and Fig. As shown in Fig. 15, the housing 400 has a single-stage structure, and the plates 31, 33, and 35 are also housed inside the housing 400. An interior of the housing 400 is partitioned, and thus, a space in which the plates 31, 33, and 35 are housed and a space in which the light projection and reception module 100 is housed can be set to be different from each other.

[0085] The housing 400 includes a bottom wall 401, a peripheral wall 402 extending upward from a peripheral edge portion of the bottom wall 401, and a lower lid member 403 for closing an upper open portion. A light projection window 402a through which the slit light S1 emitted from the light projection unit 11 is transmitted, and a light receiving window 402b through which the light S2 reflected from the workpiece W is transmitted are provided in a front portion of the peripheral wall 402.

[0086] As in the Fig. As shown in Figure 15, an annular wall 404, which projects into the interior of the housing 400 and extends around the rotation center line A, is formed at a central portion of the bottom wall 401. An end wall 405, which extends in the radial direction of the rotation center line A, is formed at a distal end portion of the annular wall 404. An opening 405a, into which the rotary shaft 50 is inserted, is formed in a central portion of the end wall 405.

[0087] A motor accommodation space R4 is formed within the annular wall 404. The stator 21 and the rotor 22 of the motor 20 are accommodated in the motor accommodation space R4. The stator 21 of the motor 20 is fixed to an inner surface of the annular wall 404. That is, in the present embodiment, the annular wall 404 and the end wall 405 form a stator holding portion. On the other hand, the rotor 22 of the motor 20 is fixed to the rotating shaft 50.

[0088] The outer ring member 51a of the bearing 51 is fixed to the end wall 405 in a state where it is mounted in a step portion 405b formed in the end wall 405. As a result, the bearing 51 is held by the stator holding portion formed by the annular wall 404 and the end wall 405. On the other hand, the inner ring member 51b is mounted to the mounting portion 50a formed in the rotary shaft 50.

[0089] The encoder 52 is also housed in the motor housing space R4. A lower cover member 406 is provided at a lower end portion of the housing 400. Since the motor housing space R4 is sealed by the lower cover member 406, dust or the like is prevented from adhering to the encoder 52.

[0090] As in the first embodiment, a support member 110 that jointly holds the light projecting unit 11, the light collecting unit 12, and the receiving unit 13 is very different from the support member 14 of the first embodiment, although the light projecting and receiving module 100 includes the light projecting unit 11, the light collecting unit 12, the receiving unit 13, the weight unit 16, and the like.

[0091] That is, in the first embodiment, the light projection and reception module 10 and the motor 20 (the bearing 51 and the encoder 52) are aligned in the direction of the rotating shaft 50 (height direction), whereas in the second embodiment, at least one of the motor 20, the bearing 51 supporting the rotating shaft 50, or the encoder 52 connected to the motor 20 is included in a part within the height range in the direction of the rotating shaft 50 of the light projection and reception module 100. Therefore, by determining a positional relationship between the light projection unit 11 and the light collection unit 12 of the light projection and reception module 100, it is possible to design the structure taking into account an increase in the distance between the light projection unit 11 and the light collection unit 12, for example, in a case where the installation distance is relatively long.

[0092] More specifically, the support member 110 includes a fixing portion 111 fixed to the rotating shaft 50, a vertical plate portion 112 on one side and a vertical plate portion 113 on the other side, a light collecting unit holding portion 114, and a light projection unit holding portion 115. The fixing portion 111, the vertical plate portion 112 on one side, the vertical plate portion 113 on the other side, the light collecting unit holding portion 114, and the light projection unit holding portion 115 may be formed integrally or by combining various elements.

[0093] The fixing portion 111 has a plate shape extending in the radial direction of the rotary shaft 50. In this embodiment, the fixing portion has a circular shape as shown in the Fig. 14, and is arranged to cover the end wall 405 from above, as shown in the Fig. 15. The vertical plate portion 112 of one side extends from a right side in the Fig. 15 downwards along the direction of the rotary shaft 50, that is, from one side in the radial direction of the rotary shaft 50 in the fixing section 111. The vertical plate section 113 of the other side extends from a left side in the Fig. 15 downward along the direction of the rotary shaft 50, that is, from the other side in the radial direction of the rotary shaft 50 in the fixing portion 111. The vertical plate portion 112 of one side and the vertical plate portion 113 of the other side are arranged to face the annular wall 404. Moreover, the vertical plate portion 112 of one side and the vertical plate portion 113 of the other side are arcuately curved similarly to the annular wall 404 and rotate in a state where a constant gap to the annular wall 404 is maintained at the time of rotation of the light projecting and receiving module 100.

[0094] Note that the one-side vertical plate portion 112 and the other-side vertical plate portion 113 may be integrally formed. For example, it is also possible to form an annular peripheral wall (not shown) extending downward from the peripheral edge portion of the fixing portion 111, and it is also possible to form the one-side vertical plate portion 112 and the other-side vertical plate portion 113 in a part of the peripheral wall in the circumferential direction.

[0095] The light-collecting unit holding portion 114 has a plate shape extending in the radial direction of the rotating shaft 50 from the lower end portion of the one-side vertical plate portion 112. The light-collecting unit 12, the receiving unit 13, the cover glass 13c, and the like are held on an upper surface of the light-collecting unit holding portion 114. Thus, the rotating shaft 50 of the light projection and reception module 100 is arranged at a position that does not overlap with the light-collecting unit 12 and the receiving unit 13 on the YZ plane.

[0096] The light projection unit support portion 115 has a plate shape extending in the radial direction of the rotary shaft 50 from a lower end portion of the other-side vertical plate portion 113. The light projection unit 11, the weight unit 16, and the like are supported on an upper surface of the light projection unit support portion 115. Thus, the rotary shaft 50 of the light projection and reception module 100 is arranged at a position that does not overlap with the light projection unit 11 on the YZ plane.

[0097] As described above, the light-collecting unit holding portion 114 and the light-projecting unit holding portion 115 are arranged to sandwich the rotating shaft 50 and protrude in opposite directions with respect to the radial direction of the rotating shaft 50. The weight unit 16 may be fixed to the light-projecting unit holding portion 115. Moreover, the weight unit 16 may be fixed to the side of the fixing portion 111 opposite to the side where the one-side vertical plate portion 112 is formed.

[0098] The support member 110, including the fixing portion 111, the one-side vertical plate portion 112, the other-side vertical plate portion 113, the light-collecting unit holding portion 114, and the light-projecting unit holding portion 115, has a plurality of bent portions 110A in a portion in the X direction. Since the support member 110 has a structure including the plurality of bent portions 110A as described above, rigidity can be improved compared to a case where the support member 110 is a flat plate.

[0099] The motor 20 and the bearing 51 are arranged between the vertical plate portion 112 on one side and the vertical plate portion 113 on the other side of the support member 110. The bearing 51 is arranged at a position closer to the fixing portion 111 than the motor 20 is between the vertical plate portion 112 on one side and the other vertical plate portion 113 on the other side. As a result, the motor 20 and the bearing 51 are contained in a part within the height range of the light projection and reception module 100. Note that, although not shown, only the motor 20 may be contained within the height range of the light projection and reception module 100, or only the bearing 51 may be contained within the height range of the light projection and reception module 100.

[0100] At least the motor 20, the bearing 51, and the encoder 52 constitute a rotary drive unit. Furthermore, the motor 20 is fixed to a wall surface (the bottom wall 401 and the annular wall 404) adjacent to a light projection and reception surface, on which the light projection window 402a through which the slit light passes and the light reception window 402b through which the reflected light passes (collectively referred to as the light projection and reception window) are located.

[0101] The light projection and reception window of the present embodiment includes the light projection window 402a and the separate light reception window 402b, but the light projection window and the light reception window may be integrally formed. Furthermore, the light projection and reception surface is a surface on which the light projection and reception window is located, among the surfaces constituting an outer shape of the housing 400, and is a surface including a plurality of planes formed by the windows, as shown in FIGS. Fig. 4 and Fig. 14. In a case where the light projection and reception window is integrally formed, the light projection and reception surface may be a surface including a plane formed by the light projection and reception window.

[0102] The support member 110 supports the light projection and reception module 100 such that the light projection and reception module 100 is positioned on a plane orthogonal to the X direction, in which the rotary drive unit is located. The support member 110 includes a first portion (e.g., the fixing portion 111) and second portions (e.g., the light collection unit holding portion 114 and the light projection unit holding portion 115) that have different heights in the rotary shaft direction formed by the plurality of bent portions 110A. The rotary drive unit and the light projection and reception module 100 are located between the plane formed by the first portion and the plane formed by the second portion in at least a part of the portion including the rotary shaft.With this configuration, the rigidity of the support member 110 can be improved and the thickness of the housing 400 in the X direction can be reduced.

[0103] Although not shown, the encoder 52 may be included in the height range of the light projection and reception module 100. For example, the encoder 52 is provided at the intermediate portion or the upper end portion of the rotary shaft 50, and thus the encoder 52 is included in the height range of the light projection and reception module 100. Only the encoder 52 may be included within the height range of the light projection and reception module 100, only the motor 20 and the encoder 52 may be included within the height range of the light projection and reception module 100, or only the bearing 51 and the encoder 52 may be included within the height range of the light projection and reception module 100.

[0104] The light-receiving-side reflective element 15 is arranged on an optical path between the light-collecting unit 12 and the light-receiving window 402b of the housing 400 on the YZ plane, and reflects the reflected light S2 transmitted through the light-receiving window 402b toward the light-collecting unit 12. That is, the light-collecting unit 12 is arranged on the optical path between the light-receiving-side reflective element 15 and the recording unit 13 on the YZ plane, and collects the light S2 reflected by the light-receiving-side reflective element 15 to be incident on the recording unit 13. As a result, the reflected light S2 can be folded back toward the light-projecting unit 11, so that a distance between the recording unit 13 or the light-collecting unit 12 and the rotary shaft 50 of the light-projecting and receiving module 100 is shortened on the YZ plane. (Modification of the second embodiment)

[0105] The Fig. 16 shows an optical displacement meter 1 according to a modification of the second embodiment. In this modification, the light-receiving-side reflective element 15 is omitted. The light-collecting unit 12 is arranged so that the optical axis of the light-collecting unit 12 faces the light-receiving window 402b of the housing 400, thus eliminating the need for the light-receiving-side reflective element 15.

[0106] Furthermore, this modification is an example of an arrangement in a case where a large distance is ensured between the light projection unit 11 and the light collection unit 12. For example, the present modification can be applied to a case where the installation distance is relatively long.

[0107] The above-described embodiments are merely examples in all respects and should not be construed as limiting. Furthermore, all modifications and changes that fall within the scope of the claims are within the scope of the invention. For example, in the second embodiment, the light-projection-side reflective element may be provided. Furthermore, in the second embodiment, the speed reduction mechanism may be provided. Furthermore, in the first and second embodiments, the motor 20 may be provided outside the housings 40 and 400. (Third embodiment)

[0108] The Fig. Figure 17 is a schematic diagram showing a scene in which a three-dimensional shape of a workpiece W is measured. The Fig. Fig. 18 is a block diagram illustrating an optical displacement meter 1 according to a third embodiment of the invention. Reference symbol W1 in the Fig. 17 indicates a surface of the workpiece W. The optical displacement meter 1 is installed to irradiate the surface W1 with slit light S1 from above the workpiece W. A motor 20 pivots a light projection and reception module 10 together around a rotary shaft 50 of a support member 14 to reciprocate it in two directions, clockwise or counterclockwise. The clockwise rotation is a right-hand rotation when viewed along a direction of the rotary shaft 50 (X direction), and the counterclockwise rotation is a left-hand rotation when viewed along a direction of the rotary shaft 50. A motor control unit 30 controls the motor 20 and pivots the light projection and reception module 10 to reciprocate in the two directions and scan the slit light S1 in a direction orthogonal to the X direction.As a result, a pickup unit 13 can acquire a plurality of received light images while the light projection and reception module 10 is pivoted in either direction by the motor control unit 30.

[0109] As described above, since the slit light S1 is scanned by rotating the light projection and reception module 10 with respect to the workpiece W in the direction orthogonal to the X direction, a pickup control unit 13b can generate a sectional profile representing a height of the workpiece W in a Z direction based on a pixel signal read from an image sensor 13a at each of the different rotation angles of the light projection and reception module 10.

[0110] As in the Fig. 17, in a case where the displacement of the workpiece W in which the surface W1 is at the same height (the surface W1 and the Y direction are parallel) is measured, since the surface W1 is at the same height when the optical displacement meter 1 is moved linearly in a direction (indicated by an arrow E) parallel to the surface W1 of the workpiece W, it is possible to narrow down an area of ​​the image sensor 13a from which pixel signals are to be read out to a partial area to speed up processing.

[0111] On the other hand, in a case where the slit light S1 is scanned in the direction orthogonal to the X direction by rotating the light projecting and receiving module 10 as in the present embodiment, the surface W1 of the workpiece W may not be measured in the entire Y direction, as will be described below. That is, in the Fig. 17, a maximum area that can be read out by the image sensor 13a is a substantially arc-shaped maximum area (measurable area) F1 having a predetermined depth at the center of the rotary shaft of the pickup unit 13. When an area of ​​the image sensor 13a from which the pixel signal is to be read out at the time of displacement measurement is currently set to the maximum area F1, it is conceivable that the area of ​​the image sensor 13a from which the pixel signal is to be read out is set to an area below a line L1, that is, a partial area (pickup area) F2, because a processing amount of a signal processing unit 32 increases and it becomes difficult to speed up the measurement.

[0112] However, in a case where the light projection and reception module 10 is rotated, the partial area F2 is an arc-shaped long area with the rotation center line A of the light projection and reception module 10 as the center. Therefore, even though the surface W1 of the workpiece W has the same height, the measurement cannot be performed in the partial area F2 because a portion on the right side of a straight line L2 is positioned outside the partial area F2.

[0113] On the other hand, as in the Fig. 19, the pickup control unit 13b of the third embodiment is configured to dynamically change a partial area F3 (a portion indicated by hatching, which corresponds to the pickup area) of the image sensor 13a from which the pixel signal is to be read out, according to the rotation angle of the light projecting and receiving module 10. Since the pickup control unit 13b is configured to acquire a rotation angle of the motor 20 based on a rotation angle acquisition unit 36 ​​to be described later, a position of the partial area F3 in the image sensor 13a in a V direction of the image sensor 13a can be changed according to the rotation angle of the motor 20.

[0114] An example in which the recording control unit 13b changes the position of the partial area F3 is described with reference to the Fig. 19. When the rotation angle of the light projection and reception module 10 is θ1, the shooting control unit 13b adjusts the position of the partial area F3 in the image sensor F3 so that the partial area 13a is a lower area of ​​the image sensor 13a. When the rotation angle of the light projection and reception module 10 is θ2, the shooting control unit 13b adjusts the position of the partial area F3 in the image sensor F3 so that the partial area 13a is an intermediate area in the up-down direction of the image sensor 13a. When the rotation angle of the light projection and reception module 10 is θ3, the shooting control unit 13b adjusts the position of the partial area F3 in the image sensor F3 so that the partial area 13a is an upper area of ​​the image sensor 13a.That is, when the rotation angle of the light projection and reception module 10 changes from θ1 to θ3, the partial area F3 changes with the angle change from a lower area to the upper area of ​​the image sensor 13a. Conversely, when the rotation angle of the light projection and reception module 10 changes from θ3 to θ1, the partial area F3 changes with the angle change from the upper area to the lower area of ​​the image sensor 13a. Note that, since the rotation angle of the motor 20 corresponds to the rotation angle of the light projection and reception module 10, any of the rotation angles of the motor 20 and the rotation angle of the light projection and reception module 10 can be used in performing the present control. Since the motor 20 is assumed to be a direct drive motor to be described later, the rotation angle of the motor 20 is equal to the rotation angle of the light projection and reception module 10.It should be noted that in a case where the motor 20, a speed reduction mechanism 25 and the like are used, the rotation angle of the motor 20 and the rotation angle of the light projecting and receiving module 10 may be different depending on the rotation ratio.

[0115] The acquisition control unit 13b sets a width H1 of the partial area F3 in the V direction when the rotation angle of the light projection and reception module 10 is θ1, a width H2 of the partial area F3 in the V direction when the rotation angle of the light projection and reception module 10 is θ2, and a width H3 of the partial area F3 in the V direction when the rotation angle of the light projection and reception module 10 is θ3 to be equal. In short, the acquisition control unit 13b sets the number of readout pixels of the partial area F3 in the V direction to be the same at different rotation angles of the light projection and reception module 10, and changes the partial area F3 for each rotation angle so that a common height in the Z direction is included in the area from which the light reception amount is read out in the substantially arcuate measurement area F1.When the surface of the workpiece W is flat, the imaging control unit 13b can also change the partial area F3 for each rotation angle so that a range of the substantially arcuate measurement area F1 from which the light reception amount is read out substantially coincides with the Z direction from one end to the other end of the substantially arcuate shape. As a result, the imaging control unit 13b can shift the partial area F3 in which the pixel signal is read out by the image sensor 13a in the V direction so that at least a part of a measurement area in the Z direction remains the same regardless of the rotation angle of the light projection and reception module 10. It should be noted that the width H1 of the partial area F3 in the V direction when the rotation angle of the light projection and reception module is 10 θ1 may be different from the width H2 of the partial area F3 in the V direction when the rotation angle of the light projection and reception module is 10 θ2.Likewise, the width H1 of the partial area F3 in the V direction when the rotation angle of the light projection and reception module is 10 θ1 may differ from the width H3 of the partial area F3 in the V direction when the rotation angle of the light projection and reception module is 10 θ3.

[0116] Furthermore, at least one of the light projection and reception module 10 and the signal processing unit 32 can change a parameter related to a light quantity according to the rotation angle. The parameter related to the light quantity includes, for example, at least one of the light quantity of the slit light S1 emitted by the light projection unit 11, the exposure time of the image sensor 13a, the gain of the image sensor 13a, and the detection sensitivity for detecting a peak position by the signal processing unit 32 (the threshold value of the light reception quantity detected as a peak).

[0117] When a light emission amount is constant regardless of the rotation angle, a light reflection amount at a different rotation angle tends to decrease compared to a light reception amount (light reflection amount) of reflected light S2 at a rotation angle (hereinafter also referred to as a reference angle) at which a light projection axis of the light projection unit 11 and a light reception axis of the pickup unit 13 have a specular reflection relationship with respect to an XY plane (relationship where an incident angle and a reflection angle are equal). For example, in the Fig. 19, the amount of light reflection tends to decrease as θ3 changes to θ1. Accordingly, a light projection control unit 11c can increase the amount of light emission as the amount of change in the rotation angle from the reference angle increases. Furthermore, the acquisition control unit 13b can increase the exposure time of the image sensor 13a or increase the gain of the image sensor 13a as the amount of change in the rotation angle from the reference angle increases. This makes it possible to suppress a decrease in the amount of light reception of each received light image due to a decrease in the amount of light reflection and to increase the calculation accuracy of the peak position.

[0118] Furthermore, when calculating UV coordinates of the peak position from the received light image, the signal processing unit 32 can reduce the detection sensitivity as the amount of change in the rotation angle from the reference angle at which the received light image is obtained increases. This makes it possible to suppress a decrease in the calculation accuracy of the peak position due to a decrease in the light reception amount of each received light image due to a decrease in the amount of light reflection.

[0119] It should be noted that the reference angle is not limited to the rotation angle with the specular reflection relationship and can be set according to a shape, material, surface condition or external environment of the workpiece. (Creating a height image)

[0120] As in the Fig. As shown in Fig. 18, the optical displacement meter 1 of the third embodiment includes the rotation angle acquisition unit 36 ​​that acquires the rotation angle by the motor 20. The rotation angle acquisition unit 36 ​​may be composed of an encoder 52 that detects the rotation angle of the above-described light projecting and receiving module 10, or may be composed of a calculation unit that detects a rotation start timing by the motor 20 and calculates the rotation angle of the light projecting and receiving module 10 under the assumption that the light projecting and receiving module 10 moves at a constant speed.

[0121] The signal processing unit 32 acquires a light reception amount distribution output from the image sensor 13a and the rotation angle of the motor 20 acquired by the rotation angle acquisition unit 36. The signal processing unit 32 is a unit that performs conversion processing in which UV coordinates are calculated based on the light reception amount distribution output from the image sensor 13a and the UV coordinates and the rotation angle of the motor 20 are converted into XYZ coordinates based on a predetermined conversion condition.

[0122] As the light projection and reception module 10 is pivoted, the signal processing unit 32 obtains from the acquisition unit 13 a plurality of received light images obtained while the light projection and reception module 10 is pivoted either clockwise or counterclockwise. Furthermore, the signal processing unit 32 obtains from the rotation angle acquisition unit 36 ​​rotation angles corresponding to a plurality of received light images obtained while the light projection and reception module 10 is pivoted in one direction. The signal processing unit 32 converts the plurality of received light images and the rotation angles corresponding to the received light images obtained while the light projection and reception module 10 is pivoted in one direction into a plurality of XYZ coordinates based on a predetermined conversion condition.

[0123] The optical displacement meter 1 includes a height image output unit 37. The height image output unit 37 includes, for example, a microcomputer, a ROM, a RAM, and the like, operates according to a predetermined program stored in the ROM or the like, and acquires XYZ coordinates obtained through conversion processing by the signal processing unit 32. The height image output unit 37 outputs a height image representing a height of the workpiece W on the XY plane based on the acquired XYZ coordinates. The height image is not a three-dimensional image in which a polygon is formed with each pixel as a vertex, nor an image in which a three-dimensional point group is merely viewed from an angle directly above, but an image containing height data instead of a luminance value, and may also be called a distance image. (Setting the recording area)

[0124] In the optical displacement meter 1 according to the present embodiment, a user can set a shooting area as a target for shooting a measurement result while viewing the height image, and can receive the user's setting of the shooting area. That is, as shown in the Fig. As shown in Figure 18, the optical displacement meter 1 of the third embodiment includes a screen generation unit 38 that generates various screens. The screen generation unit 38 includes, for example, a microcomputer, a ROM, a RAM, and the like, operates according to a predetermined program stored in the ROM or the like, and outputs generated screen data to a display unit 3A. The display unit 3A is a unit that displays various screens based on the screen data acquired from the screen generation unit 38 and includes, for example, a liquid crystal display device, an organic EL display device, or the like.

[0125] In the optical displacement meter 1, a control unit 3 can obtain an operating state of an operation unit 3B from the user. The operation unit 3B includes, for example, a keyboard and a mouse. The display unit 3A and the operation unit 3B may be elements constituting a part of the optical displacement meter 1, or may be elements constituting a part of a setting device including a personal computer or the like, which is different from the optical displacement meter 1, and are in each case connected to the screen generation unit 38.

[0126] As in the Fig. 20, the screen generation unit 38 generates a setting screen 530 for simultaneously or alternately displaying a first screen 510 representing the height image and a second screen 520 representing a YZ section profile of the workpiece W corresponding to an X coordinate in the height image, and displays the setting screen on the display unit 3A. In this example, a case where the workpiece W is a screw and a case where the setting screen 530 simultaneously displays the first screen 510 and the second screen 520 are illustrated. The screen generation unit 38 acquires data of the height image output from the height image output unit 37 and displays the height image on the first screen 510. On the first screen 510, a first coordinate system display section 511 representing the X direction and the Y direction is provided.In this example, a horizontal direction of the first screen 510 is the X direction, a vertical direction of the first screen 510 is the Y direction, and an axial direction of the screw, which is the workpiece W, substantially coincides with the Y direction. Although in the . Fig. 20, the height image is represented by a continuous color change from a low portion to a high portion of the workpiece W, for example, a change such as blue, green, yellow, orange, and red from a low side to a high side. Furthermore, an invalid pixel is represented by, for example, black or the like.

[0127] On the first screen 510, an X-coordinate indication line 512 indicating the X coordinate, and a first Y-coordinate indication line 513 and a second Y-coordinate indication line 514 indicating a Y coordinate are displayed. Since the horizontal direction of the first screen 510 is the X direction, the X-coordinate indication line 512 is formed as a straight line extending in the vertical direction. The user can move the X-coordinate indication line 512 to any position in the X direction by operating the operation unit 3B.

[0128] Furthermore, since the vertical direction of the first screen 510 is the Y direction, the first Y coordinate indication line 513 and the second Y coordinate indication line 514 are formed as straight lines extending in the horizontal direction. The first Y coordinate indication line 513 and the second Y coordinate indication line 514 are parallel to each other. Furthermore, the first Y coordinate indication line 513 and the second Y coordinate indication line 514 are orthogonal to the X coordinate indication line 512.

[0129] The screen generation unit 38 can obtain the X coordinate in the height image displayed on the first screen 510. When the user operates the operation unit 3B to move the X coordinate indication line 512 displayed on the first screen 510 in the X direction, the screen generation unit 38 can determine the X coordinate in the height image based on a position of the moved X coordinate indication line 512 in the X direction. The X coordinate in the height image is determined, and thus the screen generation unit 38 obtains the YZ section profile of the workpiece W corresponding to the X coordinate in the height image and displays the YZ section profile on the second screen 520. A determination method of the X coordinate in the height image is not limited to the method using the X coordinate indication line 512 and may be, for example, a determination method using a point, an arrow, or the like.The setting screen 530 may first display the first screen 510, and when the X coordinate is designated on the first screen 510, the setting screen may switch from the first screen 510 to the second screen 520 and display the second screen.

[0130] On the second screen 520 of the setting screen 530, a second coordinate system display section 521 is provided, which represents the Y direction and the Z direction. The second screen 520 represents a range that can be measured by the acquisition unit 13. Specifically, a white portion on the second screen 520 represents a range that can be measured by the acquisition unit 13, and a black portion on the second screen 520 represents a range in which measurement cannot be performed by the acquisition unit 13 (outside the measurable range). As described above, the white portion on the second screen 520 also has a substantially arcuate shape because the range that can be measured by the acquisition unit 13 is substantially arcuate. The coloring of white and black in the Fig. 20 is an example, and any color can be used for display as long as it is possible to distinguish between an inside and an outside of the measurable area. Note that, as the display form of the measurable area, in addition to a form in which the color is changed between the inside and outside of the measurable area, a form in which the inside and outside of the measurable area are represented by changing a hue, or a form in which the inside and outside of the measurable area are represented by characters, symbols, boundary lines, or the like can be used. The measurable area is displayed on the second screen 520, and thus the user can easily determine to what extent the shooting range can be adjusted by only viewing the second screen 520.

[0131] A Y-direction reference line 522 representing a reference distance in the Y direction and a Z-direction reference line 523 representing a reference distance in the Z direction are displayed on the second screen 520. The Y-direction reference line 522 is formed as a straight line running in the horizontal direction of the second screen 520, and the Z-direction reference line 523 is formed as a straight line running in the vertical direction of the second screen 520. Thus, the Y-direction reference line 522 and the Z-direction reference line 523 are orthogonal to each other, and an intersection point of the Y-direction reference line 522 and the Z-direction reference line 523 indicates a center of a field of view of the optical displacement meter 1.

[0132] On the second screen 520, an accuracy guarantee range can also be displayed as a range in which the measurement accuracy of a certain degree or more is guaranteed. A line 524 in the Fig. 20 is a line indicating a boundary between the accuracy guarantee range and another range. An area to the right of line 524 is the accuracy guarantee range, and an area to the left of line 524 is outside the accuracy guarantee range. The accuracy guarantee range is thus displayed on the second screen 520, and thus, the user can easily determine whether the workpiece W is within a measurement range where sufficiently high measurement accuracy can be achieved by viewing only the second screen 520.

[0133] The setting screen 530 can receive, via the second screen 520, the setting of the recording area that is to be the target for recording the measurement result. As shown in the Fig. 21, the recording area can be, for example, a rectangle. In the case of a rectangle, the YZ coordinates (Y0, Z0), (Y1, Z1), (Y2, Z2), and (Y3, Z3) of four points (point P0, point P1, point P2, and point P3) are specified to define the recording area. Point P0, point P1, point P2, and point P3 are points for determining the vertices of the rectangle, and an area formed by connecting point P0, point P1, point P3, and point P4 with four straight lines 541, 542, 543, and 544 is the recording area. The user operates the Fig. 18, and thus, the point P0, the point P1, the point P2, and the point P3 can be moved to arbitrary positions on the second screen 520. The shape and size of the capture area and the position on the second screen 520 can be arbitrarily set. The point P0, the point P1, the point P2, and the point P3 can be moved by the operation unit 3B, or the straight lines 541, 542, 543, and 544 can be moved by the operation unit 3B. Note that, in addition to the rectangle, the capture area can be, for example, an area surrounded by a circle, an ellipse, or a free curve, and can have any shape on the YZ plane. The setting of the capture area can be received via the second screen 520 regardless of the shape.

[0134] The signal processing unit 32 converts the YZ coordinates for setting the shooting area into a V coordinate and a rotation angle based on a predetermined conversion condition, and determines the rotation angle range of the light projection and reception module 10 based on the rotation angle. Once the rotation angle range of the light projection and reception module 10 is determined, the signal processing unit 32 first obtains the setting of the shooting area received via the second screen 520. Since the shooting area in this example is the rectangle, the signal processing unit 32 obtains the YZ coordinates of each of the four points P0, P1, P2, and P3 to set the shooting area. After obtaining the YZ coordinates of each of the points P0, P1, P2, and P3 constituting the shooting area, the signal processing unit 32 converts the YZ coordinates based on a predetermined conversion condition (in the Fig. 22) into the V-coordinate and the rotation angle. The signal processing unit 32 determines the rotation angle range based on the rotation angles corresponding to the four points (in the Fig. 23). In this example, a range from θ0 to θ1 is the rotation angle range. The YZ coordinates of each point can be converted into the V coordinate and the rotation angle, for example, by inversely converting a linear correction when calculating a measured value.

[0135] The recording control unit 13b sets an output range of the light reception amount distribution in the image sensor 13a based on the rotation angle. As shown in the Fig. As shown in Figure 24, in the optical displacement meter 1 that measures the sectional profile based on the principle of triangulation as in the present embodiment, a distance in a real space for one pixel on the image sensor 13a differs between a near side and a far side, and the distance indicated by one pixel is longer on the far side. Furthermore, the number of pixels in the V direction required to measure a certain Z range (mm) also varies depending on the rotation angle of the light projection and reception module 10.

[0136] If the number of pixels in the V direction is continuously recorded, an area is obtained which is in the Fig. 25 is indicated by the reference numeral 528. As described above, when a certain number of pixels are continuously captured in the V direction of the image sensor 13a within the rotation angle range of the light projection and reception module 10, it is difficult for the user to handle because the measurement range in the Z direction has a complicated shape when viewed on the YZ plane. In particular, since a measurable height in the Z direction varies depending on the position in the Y direction, in a case where the workpiece W moves at the same height in the field of view, there are a case where the height can be measured and a case where the height cannot be measured. For example, since the workpiece W can be measured at the time of installation adjustment before the operation of the optical displacement system 1, the operation is started as it is.However, if the position of the workpiece W at the time of operation is at a different position from the position at the time of installation adjustment, the workpiece W cannot be measured and manual rework may occur.

[0137] On the other hand, the capture control unit 13b adjusts a capture start position and a capture end position in the Z direction so that they are flat as viewed on the YZ plane by calculating a required number of pixels at each rotation angle and dynamically switching the capture area of ​​the image sensor 13a. That is, the image sensor 13a outputs only the light reception amount distribution of the pixel group included in the capture area among the plurality of pixels for each rotation angle corresponding to each capture time point within the rotation angle range of the light projection and reception module 10.At this time, the image sensor 13a changes the pixel area of ​​the pixel group corresponding to the light reception amount distribution in the V direction for each rotation angle of each shooting time point based on a predetermined conversion condition to suppress variations in the Z-direction height of the shooting area within the rotation angle range of the light projecting and receiving module 10.

[0138] As in the Fig. As shown in Fig. 26, the number of captured pixels in the V direction is reduced in a lower portion of the area 528, and the number of captured pixels in the V direction is not reduced in an upper portion of the area 528. Thus, the capture start position and the capture end position in the Z direction can be adjusted to be flat as viewed on the YZ plane. An adjusted area is indicated by reference numeral 529. Not only the number of captured pixels of the image sensor 13a in the V direction, but also the capture start position and the capture end position in the Z direction can be adjusted in a similar manner.

[0139] As described above, the number of pixels captured by the image sensor 13a can be directly varied. However, as a modification, the number of pixels captured by the image sensor 13a can be kept constant without directly varying the number of pixels captured by the image sensor 13a, and an area to be masked can be adjusted in subsequent processing. In this case, in the image sensor 13a, the pixel range of the pixel group that outputs the light reception amount distribution in the V direction is set within the rotation angle range of the light projection and reception module 10.The signal processing unit 32 determines a line to be masked in the light reception amount distribution output by the pixel group of the image sensor 13a for each rotation angle corresponding to each acquisition time point based on a predetermined conversion condition to suppress the variation in the height of the acquisition area in the Z direction within the rotation angle range of the light projection and reception module 10. According to this modification, the user can set a handling measurement range.

[0140] As described above, in an XYZ space, the number of recorded pixels of the image sensor 13a in the V direction varies even in a recording area of ​​the same size. A change in the number of recorded pixels affects the time required to process the output of the light reception amount distribution from the image sensor 13a and may be a speed-limiting phase of the entire processing. In this case, as shown in the Fig. 27, one cycle of the entire processing by moving a recording area 550 while maintaining the same size in XYZ space. In particular, a white area in the Fig. 27 shows the measurable range of the optical displacement meter 1. In a left diagram of the Fig. 27, the recording area 550 is positioned on a lower side of the measurable area, but in a case where the recording area is shifted to an upper side of the measurable area as shown in a right diagram of the Fig. 27, a time (output time) required for output processing of the light reception amount distribution from the image sensor 13a becomes longer by, for example, 0.2 seconds.

[0141] As described above, there is a correspondence between the position of the pickup area 550 and the output timing, but this correspondence may be inconvenient in a case where adjustment is performed in a state where a timing of the device is determined. On the other hand, in the present embodiment, when the pickup area 550 is moved, the height of the pickup area in the Z direction is automatically changed so that a difference in the output timing before and after the movement is reduced or eliminated.

[0142] That is, although the Fig. 28 illustrates the second screen 520 of a setting screen 530, the setting screen 500 receives an instruction for parallel movement of the recording area via the second screen 520. For example, if the recording area is a rectangle, the user operates the operation unit 3B to move four points for setting the recording area in the up-down direction and in the left-right direction of the second screen 520, and thus the instruction for parallel movement of the recording area can be received. In a left diagram of the Fig. 28, the pickup area 550 is positioned on a lower side of the measurable area, but the parallel movement of the pickup area can be performed toward an upper side of the measurable area, as shown in a right diagram of the Fig. 28 shown.

[0143] The signal processing unit 32 changes the height of the recording area 550 in the Z direction before and after the parallel movement based on a predetermined conversion condition in order to suppress a difference between the output time of the light reception amount distribution from the pixel group included in the recording area 550 before the parallel movement of the recording area 550 and the output time of the light reception amount distribution from the pixel group included in the recording area 550 after the parallel movement of the recording area 550. As shown in the Fig. 28, when the output time of the light reception quantity distribution from the pixel group included in the recording area 550 before the parallel movement of the recording area 550 is 1.0 seconds, which is shown on the right side of the Fig. 28 is reduced in the Z direction of the pickup area 550 so that the output time of the light reception amount distribution from the pixel group included in the pickup area 550 after the parallel movement can be set to 1.0 second. Therefore, if the adjustment is performed in a state where the tact of the device is determined, the adjustment can be easily performed even if the pickup area 550 is moved, because the output time of the light reception amount distribution from the image sensor 13a does not change. Note that the output time before the parallel movement of the pickup area 550 and the output time after the parallel movement may not be exactly the same, and the Z-direction height of the pickup area 550 can be changed to reduce the difference in the output time between before and after the parallel movement.Furthermore, after the Z-direction height of the recording area 550 has been automatically changed, the adjustment of the Z-direction height of the recording area 550 may be allowed to be received by the user.

[0144] In a case where it is unknown in which portion of the measurement range the workpiece W is located, it may be difficult to adjust the acquisition range. In such a case, in the present embodiment, three-dimensional measurement is performed within an entire maximum pivoting range of the light projecting and receiving module 10, regardless of the setting of a acquisition range at a current time. Specifically, the motor control unit 30 pivots the light projecting and receiving module 10 within an adjustment angle range that is wider than the rotation angle range corresponding to the acquisition range. As a result, the light projecting and receiving module 10 obtains an adjustment YZ section profile corresponding to the adjustment angle range. As shown in the Fig. As shown in Figure 29, the screen generation unit 38 generates a screen displaying the adjustment YZ section profile on the second screen 520. The adjustment YZ section profile includes the YZ section profile of the acquisition area and a YZ section profile of an area wider than the acquisition area. The user can easily adjust the acquisition area by viewing the YZ section profile in the wider area. (Procedure for setting the recording area)

[0145] The Fig. 30 is a flowchart illustrating a flow of the acquisition area setting processing. In step SA1, the motor control unit 30 drives the motor 20 to move the light projection and reception module 10 to a measurement start position. While the motor control unit 30 drives the motor 20 to pivot the light projection and reception module 10, in step SA2, the light projection unit 11 emits the slit light S1, and the acquisition unit 13 acquires the plurality of received light images. Acquisition can be performed at equal time intervals, at equal encoder intervals, at equal distance intervals in the Y direction with respect to a specified distance in the Z direction, or the like. In step SA3, the acquisition unit 13 generates the received light images at equal time intervals or at equal encoder intervals.

[0146] In step SA4, the signal processing unit 32 calculates a peak position in the V direction at each U position of each received light image. In step SA5, a set of UVθ is generated by linking the UV coordinates of the peak position acquired in the processing of step SA4 with θ corresponding to the received light image. In step SA6, UVθ is converted to XYZ coordinates. The conversion to XYZ coordinates may be performed based on previous calibration information. Here, the peak position acquired in the processing of step SA4 may include a true peak position and a false peak position derived from noise such as multiple reflection.The processing for removing the incorrect peak position from the UV coordinates may be performed in step SA4, or the processing for removing the incorrect peak position from the XYZ coordinates may be performed after the conversion to the XYZ coordinates including the incorrect peak position is performed in step SA6. Furthermore, XY equal interval correction may be performed in step SA6. That is, the signal processing unit 32 may calculate a corrected Z coordinate corresponding to corrected XY coordinates by performing equal interval correction on the XY coordinates. For example, the signal processing unit 32 creates a Z column with equal X coordinates from an (X, Z) column after profile fitting.When obtaining interpolation points in a case where a Z column is created, effective points before and after an XZ profile are first specified, and the interpolation points can be obtained by linear interpolation from the effective points. The same interval correction is similarly performed in the Y direction, and thus the corrected Z coordinate obtained by performing equal interval correction in both the X direction and the Y direction can be calculated. The height image output unit 37 outputs the height image based on the corrected XYZ coordinates obtained by the equal interval correction. The XY equal interval correction is performed, and thus subsequent image processing is facilitated. Furthermore, visualization is also facilitated.

[0147] In step SA7, the screen generation unit 38 generates the setting screen 530 including the first screen 510 displaying the height image and the second screen 520 displaying the YZ section profile at each X position in the height image, and causes the display unit 3A to display the setting screen.

[0148] In step SA8, the designation of the X position in the height image is received via the first screen 510 displayed in step SA7. In step SA9, the screen generation unit 38 displays the YZ section profile corresponding to the X position designated in step SA8 on the second screen 520. In step SA10, the signal processing unit 32 receives the designation of the shooting area (a plurality of YZ coordinate sets) from the YZ section profile. In step SA11, the signal processing unit 32 converts each of the plurality of YZ coordinate sets into θV by performing an inverse conversion of the XYZ conversion of UVθ.

[0149] In step SA12, the signal processing unit 32 determines the rotation angle range of the light projection and reception module 10 from the θV acquired in step SA11. In step SA13, the number of pixels in the V direction captured by the image sensor 13a is determined for each rotation angle of the light projection and reception module 10. For example, when determining the number of pixels in the V direction for each rotation angle of the light projection and reception module 10, the number of pixels in the V direction can be calculated from information of a conversion table for converting UVθ to XYZ coordinates. Note that the number of pixels is not limited, and a pixel range in the V direction acquired by the image sensor 13a can be determined.

[0150] In step SA14, the signal processing unit 32 determines whether the parallel movement of the recording area is performed or not (in the Fig. 28). In a case where the parallel movement of the capture area is performed, the processing proceeds to step SA15, and the height of the capture area in the Z direction is adjusted so that the output time (the number of pixels of the capture area in the V direction) before and after the parallel movement remains constant, and the capture area after the adjustment is displayed to the user. (Display of the received photo)

[0151] In the present embodiment, the received light image can be displayed on the display unit 3A. For example, for the accuracy of the three-dimensional measurement by the optical displacement meter 1 and the setting adjustment of the optical displacement meter 1, it may be desirable to observe the received light image of the image sensor 13a when acquiring any portion. In such a case, each portion can be easily acquired by moving the light projection and reception module 10 to a desired position.

[0152] The following describes in detail a configuration in which the received light image is displayed on the display unit 3A. The screen generation unit 38 obtains the light reception quantity distribution output from the image sensor 13a and thus generates a screen 600 that displays the image in the Fig. 31. The screen 600 is in this respect identical to the first screen 510 in the Fig. 20 is identical in that the elevation image is displayed. The screen 600 receives the designation of a point in the elevation image. For example, the user operates the operating unit 3B, and thus a point 600a can be located at any position on the elevation image displayed on the screen 600. The point 600a is located, and thus the designation of a point in the elevation image is received.

[0153] The signal processing unit 32 obtains the rotation angle of the light projection and reception module 10 corresponding to the XYZ coordinates of a point (point 600a) based on the predetermined conversion condition described above. The motor control unit 30 controls the motor 20 to move the light projection and reception module 10 to a position corresponding to the rotation angle obtained by the signal processing unit 32. The light projection and reception module 10 obtains the received light image at the position corresponding to the rotation angle. The screen generation unit 38 generates a screen 601 representing the received light image and displays the screen on the display unit 3A.

[0154] The signal processing unit 32 can further acquire the pixel area in the V direction corresponding to the rotation angle of the light projection and reception module 10 based on the predetermined conversion condition. In this case, the screen generation unit 38 can display the received light image indicating the light reception amount distribution corresponding to the pixel area in the V direction. The motor control unit 30 can move the light projection and reception module 10 to the rotation angle at which the received light image is acquired in a process for generating the height image.

[0155] The angle of rotation of the light projection and reception module 10 can also be specified by the user. As shown in the Fig. 18 and Fig. 31, the optical displacement meter 1 includes a rotation angle designation unit 3C that receives the rotation angle designation of the light projection and reception module 10. The rotation angle designation unit 3C can receive the rotation angle designation of the light projection and reception module 10 by the user designating a profile number in the measurement range by the light projection and reception module 10. As an example, Fig. 31 designates a 613th profile number among a total of 800 profiles. Profile numbers can be assigned in the order in which profiles are acquired. Since the height image is not required to designate the rotation angle in this case, and the height image may not need to be originally generated, the screen generation unit 38 may omit the screen 600 and generate only the screen 601. The screen generation unit 38 displays the received light image corresponding to the rotation angle designated by the rotation angle designation unit 3C on the display unit 3A. Specifically, when a change in the rotation angle of the light projection and reception module 10 is received, the motor control unit 30 controls the motor 20 to move the light projection and reception module to have the changed rotation angle, and displays the received light image captured by the image sensor 13a at the moved position on the display unit 3A.In addition, the coordinates (X, Y, Z) of any point on the elevation image are designated. Any section containing the coordinates can be calculated using the same logic as the inverse conversion of the linear correction described above. This allows, for example, a section where noise is generated to be observed point by point. (Display flow of the received light image)

[0156] The Fig. Fig. 32 is a flowchart showing an example of a flow of display processing of the received light image. Steps SB1 to SB6 are the same as steps SA1 to SA6 in the Fig. 30. In step SB7, the screen generation unit 38 displays the height image on the display unit 3A. In step SB8, the signal processing unit 32 receives the designation of a point in the height image displayed in step SB7. In step SB9, the XYZ coordinates of a point received by the signal processing unit 32 are converted to UVθ. In step SB10, the motor control unit 30 drives the motor 20 to move the light projection and reception module 10 to θ acquired in step SB9.

[0157] In step SB11, the motor control unit 30 stops the light projecting and receiving module 10 at the moved position, and the acquisition unit 13 acquires the received light image in the stopped state. In step SB12, the screen generation unit 38 displays the received light image acquired in step SB11 on the display unit 3A. For example, it is conceivable that the received light image is stored in association with θ in step SB2, and the received light image corresponding to the acquired θ is read out in a subsequent step. However, if all pieces of the received light image information are stored, the acquisition in step SB11 is performed again because the amount of information is too large and a huge amount of memory is required. (housing structure)

[0158] As in the Fig. 33, a size required as an outer shape of a housing 40 is determined by a field of view of an optical system 11b. In addition, since there is a viewing angle in the optical system 11b, there is a spread of a field of view with a constant inclination with respect to an optical axis, and as shown in the Fig. 33, a volumetrically useless area (shaded portion) is created to satisfy the field of view area with a simple rectangular parallelepiped shape as the outer shape of the housing 40.

[0159] As in the Fig. 34 as a first example, on the other hand, in the present embodiment, one side of the casing 40 is formed in a partially shaved shape in a thickness direction, and thus the volumetrically useless region is removed to form the casing 40. That is, when the thickness direction of the casing 40 is the X direction, a difference in thickness may be provided between an end portion on an irradiation direction side of the slit light in the casing 40 and an end portion on a side opposite to the irradiation direction in the casing 40. Specifically, the casing 40 may have a first thickness in the X direction at the end portion on the irradiation direction side of the slit light, and a second thickness, smaller than the first thickness, in the X direction at the end portion on the side opposite to the irradiation direction.As described above, the end portion of the housing 40 on the side opposite to the irradiation direction is formed relatively thin, and thus it is possible to eliminate or reduce the volumetrically unusable area.

[0160] In addition, as described in the Fig. 35 as a second example, both sides of the housing 40 may be partially scraped in the thickness direction. This makes it possible to further reduce the volume of the unusable area.

[0161] As described above, the optical displacement meter according to the disclosure can be used, for example, in a case where three-dimensional shape data of a workpiece is acquired. QUOTES CONTAINED IN THE DESCRIPTION

[0000] This list of documents submitted by the applicant was generated automatically and is included solely for the convenience of the reader. This list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions. Cited patent literature

[0000] EP 3232152A [0003, 0004, 0005]

Claims

[1] An optical displacement meter comprising: a light projection and reception module comprising a light projection unit that applies slit light traveling in an X direction, an image sensor that receives light reflected from a workpiece by a plurality of pixels arranged two-dimensionally in a U direction corresponding to the X direction and a V direction orthogonal to the U direction, and outputs a received light image indicating a light reception amount distribution, and a support member that jointly supports the light projection unit and the image sensor; a motor that pivots the light projection and reception module together to move back and forth in two directions, clockwise or counterclockwise, around a rotating shaft of the support element, a motor control unit that controls the motor and pivots the light projection and reception module to scan the slit light in a direction orthogonal to the X-direction, a rotation angle reference unit that obtains a rotation angle through the motor, a signal processing unit that calculates UV coordinates based on the light reception amount distribution output from the image sensor and converts the UV coordinates and the rotation angle into XYZ coordinates based on a predetermined conversion condition; and a height image output unit that outputs a height image indicating a height of the workpiece on an XY plane based on the XYZ coordinates, wherein the image sensor obtains a plurality of received light images while the light projection and reception module is pivoted in one of the two directions by the motor control unit, the signal processing unit converts UV coordinates and rotation angles corresponding to the received light image of the plurality of received light images obtained while the light projecting and receiving module pans in the one direction into a plurality of XYZ coordinates based on the predetermined conversion condition, and the height image output unit outputs the height image based on the plurality of XYZ coordinates. [2] The optical displacement meter according to claim 1, further comprising a screen generating unit that generates a setting screen for simultaneously or alternately displaying a first screen displaying the height image and a second screen displaying a YZ sectional profile of the workpiece corresponding to an X coordinate in the height image. [3] The optical displacement meter according to claim 2, wherein the second screen of the setting screen further displays a range measurable by the image sensor. [4] The optical displacement meter according to claim 2, wherein the setting screen receives the setting of a recording area as a target for recording a measurement result via the second screen, and the signal processing unit converts the YZ coordinates for setting the recording range into a V coordinate and a rotation angle based on a predetermined conversion condition, and determines the rotation angle range of the light projection and reception module based on the rotation angle. [5] The optical displacement meter according to claim 4, wherein the pickup range is a rectangle, and the signal processing unit converts YZ coordinates of four points for setting the pickup range into V coordinates and rotation angles based on a predetermined conversion condition, and determines the rotation angle range based on the rotation angles corresponding to the four points. [6] The optical displacement meter according to claim 4, wherein the image sensor outputs only a light reception amount distribution of a pixel group included in the pickup range among the plurality of pixels for each rotation angle corresponding to each pickup time point within the rotation angle range. [7] The optical displacement meter according to claim 6, wherein the image sensor changes a pixel area of a pixel group outputting the light reception amount distribution in the V direction for each rotation angle corresponding to each pickup time point based on the predetermined conversion condition to suppress a variation in a Z-direction height of the pickup area within the rotation angle range. [8] The optical displacement meter according to claim 6, wherein in the image sensor, a pixel area of a pixel group outputting the light reception quantity distribution in the V direction is set within the rotation angle range, and the signal processing unit determines a line to be masked in the light reception amount distribution output from the pixel group for each rotation angle corresponding to each shooting time point based on the predetermined conversion condition to suppress the variation in the Z-direction height of the shooting area within the rotation angle range. [9] The optical displacement meter according to claim 7, wherein the setting screen receives an instruction to move the recording area parallel via the second screen, and the signal processing unit changes the height of the recording area in the Z direction before and after the parallel movement based on a predetermined conversion condition to suppress a difference between the output time of the light reception amount distribution from the pixel group included in the recording area before the parallel movement and the output time of the light reception amount distribution from the pixel group included in the recording area after the parallel movement. [10] The optical displacement meter according to claim 7, wherein the motor control unit pivots the light projection and reception module in an adjustment angle range that is wider than the rotation angle range corresponding to the recording area, the light projection and reception module obtains a setting YZ section profile corresponding to the setting angle range, and the screen generation unit generates a screen displaying the setting YZ section profile on the second screen. [11] The optical displacement meter according to claim 1, further comprising a screen generating unit that generates a screen displaying the height image, wherein the first screen receives the designation of a point in the elevation image, the signal processing unit obtains a rotation angle corresponding to the XYZ coordinates of the one point based on the predetermined conversion condition, the motor control unit moves the light projection and reception module to a position corresponding to the angle of rotation, the light projection and reception module obtains a received light image at the position, and the screen generating unit generates a screen representing the received light image and displays the screen on the display unit. [12] The optical displacement meter according to claim 11, wherein the signal processing unit further obtains a pixel area corresponding to the rotation angle in the V direction based on the predetermined conversion condition, and the screen generation unit generates the received light image in which the light reception amount distribution corresponding to the pixel area in the V direction is indicated, and displays the received light image on the display unit. [13] The optical displacement meter according to claim 11, wherein the motor control unit moves the light projecting and receiving module to a rotation angle at which the received light image is obtained in a process for generating the height image. [14] The optical displacement meter according to claim 1, wherein the light projection and reception module further includes a light receiving lens that collects the light reflected from the workpiece, the support member collectively holds the light projection unit, the light receiving lens, and the image sensor to have a Scheimpflug relationship in which a light receiving surface of the image sensor is inclined with respect to an optical axis of the light receiving lens, and the motor control unit controls the motor and pivots the light projection and reception module in a state in which the Scheimpflug relationship is maintained to scan the slit light in the direction orthogonal to the X direction. [15] The optical displacement meter according to claim 1, wherein the signal processing unit calculates a corrected Z coordinate corresponding to corrected XY coordinates by performing equal interval correction on the XY coordinates, and the height image output unit outputs the height image based on the corrected XYZ coordinates obtained by the equal interval correction. [16] The optical displacement meter according to claim 1, wherein at least one of the light projecting and receiving module and the signal processing unit changes a parameter related to a light quantity according to the rotation angle. [17] The optical displacement meter according to claim 16, wherein the parameter related to the amount of light includes at least one of a light amount of the slit light emitted from the light projecting unit, an exposure time of the image sensor, a gain of the image sensor, and a detection sensitivity for detecting a peak position by the signal processing unit. [18] An optical displacement meter comprising: a light projection and reception module comprising a light projection unit that applies slit light traveling in an X direction, an image sensor that receives light reflected from a workpiece by a plurality of pixels arranged two-dimensionally in a U direction corresponding to the X direction and a V direction orthogonal to the U direction, and outputs a received light image indicating a light reception amount distribution, and a support member that jointly supports the light projection unit and the image sensor; a motor that pivots the light projection and reception module together to move back and forth in two directions, clockwise or counterclockwise, around a rotating shaft of the support element, a motor control unit that controls the motor and pivots the light projection and reception module to scan the slit light in a direction orthogonal to the X-direction, a rotation angle designation unit that receives the designation of a rotation angle; and a screen generating unit that displays a received light image corresponding to the designated angle of rotation on a display unit, wherein, when a change in the rotation angle is received, the motor control unit moves the light projecting and receiving module to the changed rotation angle, and the optical displacement meter displays the received light image obtained from the image sensor at the moved position on the display unit. [19] The optical displacement meter according to claim 18, wherein the rotation angle designation unit receives the designation of the rotation angle by designating a profile number in a measurement range by the light projecting and receiving module.

Images