MEMS device and method for characterizing a MEMS device

The MEMS device employs phase-shifted electrical potentials to generate a non-zero torque, addressing long start-up times and frequency limitations, enhancing production efficiency and reliability.

DE102024203958B4Active Publication Date: 2026-02-12INFINEON TECHNOLOGIES AG
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Patent Information

Application Number
DE102024203958
Authority / Receiving Office
DE · DE
Patent Type
Patents
Current Assignee / Owner
Filing Date
2024-04-26
Publication Date
2026-02-12
Estimated Expiration
2044-04-26

AI Technical Summary

Technical Problem

Conventional MEMS mirrors using parametric excitation suffer from long and uncertain start-up times, unreliable frequency response, and limited frequency range due to variations in rest position and external factors, leading to inefficient production testing and potential false failure detections.

Method used

A MEMS device with a stator and rotor configuration that applies phase-shifted electrical potentials to generate a non-zero torque, enabling immediate and consistent oscillation initiation and expanded frequency range, utilizing a drive circuit to apply electrical potentials to first and second stator electrodes that are 180° out of phase.

Benefits of technology

Significantly improves start-up time and frequency range, reducing production testing time and avoiding false failure detections, while maintaining energy efficiency through antiphase excitation.

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Abstract

MEMS device (100), comprising: a stator (110) comprising a recess (115); a rotor (120) arranged in the recess (115) and configured to oscillate about an oscillation axis (105), the rotor (120) comprising first rotor electrodes (121) toothed with first stator electrodes (111) and second rotor electrodes (122) toothed with second stator electrodes (112), the first stator electrodes (111) and the second stator electrodes (112) being arranged on opposite sides of the recess (115); and a drive circuit (130) configured to apply electrical potentials to the first and second stator electrodes (111, 112), wherein, During a start-up, when the rotor (120) is in a rest position, the drive circuit (130) is configured to simultaneously apply a first oscillating electrical potential to the first stator electrodes (111) and a second oscillating electrical potential to the second stator electrodes (112), which are phase-shifted relative to each other, in order to apply a non-zero torque to the rotor (120) in order to initiate an oscillation of the rotor (120) about the oscillation axis (105); and After the start, when a predefined criterion is met, the drive circuit (130) is configured to switch over to simultaneously apply oscillating electrical potentials that are in phase to the first and second stator electrodes (111, 112).
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Citation Information

Patent Citations

  • Method for detecting and attenuating mode coupling and use for electrostatic MEMS mirrors

    DE102021128669A1

  • Micromechanical actuator with multiple-plane comb electrodes and methods of making

    US20050194650A1

  • Resonance MEMS mirror control system

    US20190155018A1

  • MEMS scanning mirror with tunable natural frequency

    WO2004049034A1